阅读说明：本技术 加热器故障检测装置及方法、加热系统、半导体加工设备 (Heater fault detection device and method, heating system and semiconductor processing equipment ) 是由 程旭文 于 2018-06-27 设计创作，主要内容包括：本发明提供一种加热器故障检测装置、加热系统、加热器故障检测方法和半导体加工设备。该加热腔故障检测装置包括电流互感模块和控制模块；所述电流互感模块,用于感应加热器所在加热回路上的电流信号并发送至所述控制模块；所述控制模块,用于根据所述电流互感模块感应到的电流信号计算提供至所述加热器的实际输入功率,并通过所述实际输入功率、预设输入功率以及偏差功率来判断所述加热器是否故障,其中,所述偏差功率是指在所述电流互感模块的一次侧电流为零的情况下所述控制模块施加电源后检测出的自身功率。实现加热回路故障的实时准确判定。(The invention provides a heater fault detection device, a heating system, a heater fault detection method and semiconductor processing equipment. The heating cavity fault detection device comprises a current mutual inductance module and a control module; the current mutual inductance module is used for inducing a current signal on a heating loop where the heater is located and sending the current signal to the control module; the control module is configured to calculate an actual input power provided to the heater according to a current signal sensed by the current transformer module, and determine whether the heater fails according to the actual input power, a preset input power, and a deviation power, where the deviation power is a power of the control module detected after the control module applies a power supply when a primary-side current of the current transformer module is zero. And the real-time accurate judgment of the heating circuit fault is realized.)

1. The heater fault detection device is characterized by comprising a current mutual inductance module and a control module;

the current mutual inductance module is used for inducing a current signal on a heating loop where the heater is located and sending the current signal to the control module;

the control module is configured to calculate an actual input power provided to the heater according to a current signal sensed by the current transformer module, and determine whether the heater fails according to the actual input power, a preset input power, and a deviation power, where the deviation power is a power of the control module detected after the control module applies a power supply when a primary-side current of the current transformer module is zero.

2. The heater fault detection device of claim 1, wherein the control module determines that the heater is normal if the actual input power minus the preset input power equals the offset power;

if the actual input power is equal to the offset power and the preset input power is not zero, the control module determines that the heater is in fault.

3. The heater fault detection device of claim 1, wherein the control module comprises: the circuit processing submodule and the calculation judging submodule;

the circuit processing submodule is used for carrying out rectification processing and voltage sampling on the current signal and sending sampled voltage to the calculation judgment submodule;

and the calculation judgment submodule is used for calculating the actual input power of the heater according to the sampling voltage.

4. The heater fault detection device of claim 3, wherein the control module further comprises: a photoelectric isolation submodule;

the photoelectric isolation submodule is respectively connected with the circuit processing submodule and the calculation judgment submodule and is used for enabling the circuit processing submodule and the calculation judgment submodule to be in photoelectric isolation, amplifying the sampling voltage output by the circuit processing submodule in an equal amplitude mode and sending the sampling voltage to the calculation judgment submodule.

5. The heater fault detection device according to claim 3, wherein the sampling resistance R in the circuit processing submodule is calculated according to the following formula:

wherein, U₁Is the sampling voltage value; i is the current value of the current mutual inductance module on the secondary side, and is calculated according to the following formula:

wherein P is the power of the heater; n is the coil turn ratio of the secondary side and the primary side of the current mutual inductance module; u is the supply voltage value at both ends of the heater.

6. A heating system comprising a temperature control device and a heater failure detection device as claimed in any one of claims 1 to 5.

7. The heating system of claim 6, wherein the temperature control device comprises: the temperature measurement module comprises a power supply module, a temperature measurement module, a temperature control module and an over-temperature protection module;

the temperature measurement module is used for measuring the actual temperature of the reaction chamber and sending the actual temperature to the temperature control module;

the temperature control module is used for comparing the actual temperature with the preset temperature and controlling the power provided for the heater according to the comparison result;

the over-temperature protection module is used for cutting off the connection relation between the power supply module and the heater when the actual temperature of the reaction chamber is higher than the preset temperature.

8. A heater fault detection method of a heating system according to claim 6 or 7, comprising:

the control module calculates actual input power provided to the heater according to the current signal sensed by the current mutual inductance module;

determining deviation power and preset input power, wherein the deviation power refers to self power detected after a control module applies a power supply under the condition that primary side current of a current mutual inductance module is zero;

the control module judges whether the heater fails or not according to the actual input power, the preset input power and the deviation power.

9. The heater fault detection method according to claim 8, wherein the control module determines that the heater is normal if the actual input power minus the preset input power is equal to the offset power;

if the actual input power is equal to the offset power and the preset input power is not zero, the control module determines that the heater is in fault.

10. A semiconductor processing apparatus comprising a reaction chamber, further comprising the heating system of claim 6 or 7, wherein a heater is provided at a bottom of the reaction chamber.

Technical Field

The invention relates to the technical field of fault detection, in particular to a heater fault detection device, a heating system, a heater fault detection method and semiconductor processing equipment.

Background

The LED etching machine is equipment required in the production process of an LED light source, is mainly used for etching a GaN-based epitaxial layer or a sapphire substrate, and the etching effect is directly related to the high quality and the low quality of a light source chip. The process temperature of the LED etcher during etching is one of important factors influencing the etching process result. In order to realize accurate temperature control and ensure the uniformity of temperature, the prior art is provided with a heater, a temperature detector, a switch and other parts for controlling the temperature in different areas of a cavity respectively.

Because the heater has a certain service life and is easy to malfunction, and the prior art does not have a device or system for detecting whether the heater malfunctions, in practical application, if one or more heaters malfunction but are not found artificially, the continuous heating will cause the temperature of the reaction chamber to be uneven, thereby affecting the process quality.

Disclosure of Invention

The invention provides a method for determining heating circuit faults by utilizing a mutual inductor and a heating circuit fault detection device, which are used for solving at least one technical problem in the prior art.

According to a first aspect of the present invention, there is provided a heater fault detection apparatus comprising a current transformer module and a control module;

the current mutual inductance module is used for inducing a current signal on a heating loop where the heater is located and sending the current signal to the control module;

the control module is configured to calculate an actual input power provided to the heater according to a current signal sensed by the current transformer module, and determine whether the heater fails according to the actual input power, a preset input power, and a deviation power, where the deviation power is a power of the control module detected after the control module applies a power supply when a primary-side current of the current transformer module is zero.

Optionally, if the actual input power minus the preset input power is equal to the offset power, the control module determines that the heater is normal;

if the actual input power is equal to the offset power and the preset input power is not zero, the control module determines that the heater is in fault.

Optionally, the control module comprises: the circuit processing submodule and the calculation judging submodule;

the circuit processing submodule is used for carrying out rectification processing and voltage sampling on the current signal and sending sampled voltage to the calculation judgment submodule;

and the calculation judgment submodule is used for calculating the actual input power of the heater according to the sampling voltage.

Optionally, the control module further comprises: a photoelectric isolation submodule;

the photoelectric isolation submodule is respectively connected with the circuit processing submodule and the calculation judgment submodule and is used for enabling the circuit processing submodule and the calculation judgment submodule to be in photoelectric isolation, amplifying the sampling voltage output by the circuit processing submodule in an equal amplitude mode and sending the sampling voltage to the calculation judgment submodule.

Optionally, the sampling resistance R in the circuit processing submodule is calculated according to the following formula:

wherein, U₁Is the sampling voltage value; i is the current value of the current mutual inductance module on the secondary side, and is calculated according to the following formula:

wherein P is the power of the heater; n is the coil turn ratio of the secondary side and the primary side of the current mutual inductance module; u is the supply voltage value at both ends of the heater.

According to a second aspect of the present invention, there is provided a heating system comprising a temperature control device and the heater failure detection device provided by the first aspect of the present invention.

Optionally, the temperature control device comprises: the temperature measurement module comprises a power supply module, a temperature measurement module, a temperature control module and an over-temperature protection module;

the temperature measurement module is used for measuring the actual temperature of the reaction chamber and sending the actual temperature to the temperature control module;

the temperature control module is used for comparing the actual temperature with the preset temperature and controlling the power provided for the heater according to the comparison result;

the over-temperature protection module is used for cutting off the connection relation between the power supply module and the heater when the actual temperature of the reaction chamber is higher than the preset temperature.

According to a third aspect of the present invention, there is provided a heater failure detection method for a heating system provided in the second aspect of the present invention, including:

the control module calculates actual input power provided to the heater according to the current signal sensed by the current mutual inductance module;

determining deviation power and preset input power, wherein the deviation power refers to self power detected after a control module applies a power supply under the condition that primary side current of a current mutual inductance module is zero;

the control module judges whether the heater fails or not according to the actual input power, the preset input power and the deviation power.

Optionally, if the actual input power minus a preset input power is equal to the offset power, the control module determines that the heater is normal; if the actual input power is equal to the offset power and the preset input power is not zero, the control module determines that the heater is in fault.

According to a fourth aspect of the present invention, there is provided a semiconductor processing apparatus comprising a reaction chamber and further comprising the heating system of the second aspect of the present invention, wherein a heater is disposed at the bottom of the reaction chamber.

According to the method provided by the embodiment of the invention, when the heater fault is judged, three parameters of the actual input power, the preset input power and the deviation power are considered at the same time, the influence of the deviation power on the judgment is eliminated, and the judgment result is more accurate.

Drawings

The accompanying drawings, which are included to provide a further understanding of the invention and are incorporated in and constitute a part of this specification, illustrate embodiments of the invention and together with the description serve to explain the principles of the invention and not to limit the invention. In the drawings:

fig. 1 is a block diagram of a heater failure detection apparatus of embodiment 1 of the present invention;

fig. 2 is a block diagram of a heater failure detection apparatus of embodiment 2 of the present invention;

FIG. 3 is a circuit diagram of a specific example of a heating circuit in the present invention;

fig. 4 is a circuit diagram of a heater failure detection apparatus of embodiment 3 of the invention;

fig. 5 is a schematic circuit diagram of a heating system of embodiment 4 of the present invention;

fig. 6 is a flowchart of a heater fault detection method of embodiment 5 of the present invention.

Detailed Description

The following detailed description of embodiments of the invention refers to the accompanying drawings. It should be understood that the detailed description and specific examples, while indicating the present invention, are given by way of illustration and explanation only, not limitation.