阅读说明：本技术 用于电容式驱动mems设备的电容式位置感测 (Capacitive position sensing for capacitively driven MEMS devices ) 是由 S·弗吕格尔 A·J·萨顿 B·T·布拉德福德 Y·格尔森 于 2019-05-09 设计创作，主要内容包括：本发明题为“用于电容式驱动MEMS设备的电容式位置感测”。一种用于在梳状驱动致动器中进行驱动和位置感测的装置包括发生器、驱动器电路、感测电路和信号处理电路。发生器被配置为将感测电压施加到梳状驱动致动器的第一电极。驱动器电路被配置为向梳状驱动致动器相对于第一电极具有相反极性的第二电极施加驱动电压。感测电路被配置为在第二电极处测量由施加到第一电极的感测电压引起的所感测波形。信号处理电路被配置为基于所感测波形估计第一电极相对于第二电极的位置。(the invention provides capacitive position sensing for a capacitively driven MEMS device. An apparatus for driving and position sensing in a comb drive actuator includes a generator, a driver circuit, a sensing circuit, and a signal processing circuit. The generator is configured to apply a sensing voltage to a first electrode of the comb drive actuator. The driver circuit is configured to apply a drive voltage to a second electrode of the comb drive actuator having an opposite polarity relative to the first electrode. The sensing circuit is configured to measure a sensed waveform at the second electrode resulting from a sensing voltage applied to the first electrode. The signal processing circuit is configured to estimate a position of the first electrode relative to the second electrode based on the sensed waveform.)

1. An apparatus for driving and position sensing in a comb drive actuator, the apparatus comprising:

A generator configured to apply a sensing voltage to a first electrode of the comb drive actuator;

A driver circuit configured to apply a drive voltage to second electrodes of the comb drive actuator having an opposite polarity relative to the first electrodes;

A sensing circuit configured to measure a sensed waveform at the second electrode resulting from the sensing voltage applied to the first electrode; and

A signal processing circuit configured to estimate a position of the first electrode relative to the second electrode based on the sensed waveform.

2. The device of claim 1, wherein the sensed waveform falls on a resistor connected in series to the second electrode.

3. The device of claim 1, wherein the sensed waveform is measured by a circuit with an adaptive reference ground.

4. The device of claim 1, wherein the sensing voltage comprises a sinusoidal waveform.

5. The apparatus of claim 1, wherein:

The generator is configured to apply the sensing voltage to a common first electrode of two or more comb drive actuators;

the driver circuit comprises two or more driver circuits configured to apply respective drive voltages to two or more respective second electrodes of the two or more comb drive actuators;

The sensing circuitry is configured to measure at the second electrode a respective sensed waveform resulting from the sensing voltage applied to the common first electrode; and

the signal processing circuit is configured to estimate a position of the first electrode relative to the respective second electrode based on the respective sensed waveform.

6. A method for driving and position sensing in a comb drive actuator, the method comprising:

Applying a sensing voltage to a first electrode of the comb drive actuator;

Applying a drive voltage to a second electrode of the comb drive actuator having an opposite polarity relative to the first electrode;

Measuring a sensed waveform at the second electrode resulting from the sensing voltage applied to the first electrode; and

Estimating a position of the first electrode relative to the second electrode based on the sensed waveform.

7. The method of claim 6, wherein measuring the sensed waveform comprises measuring the sensed waveform falling on a resistor connected in series to the second electrode.

8. The method of claim 6, wherein measuring the sensed waveform comprises measuring the sensed waveform using a circuit with an adaptive reference ground.

9. The method of claim 6, wherein applying the sensing voltage comprises applying a sinusoidal waveform.

10. The method of claim 6, wherein:

Applying the sense voltage comprises applying the sense voltage to a common first electrode of two or more comb drive actuators;

Applying the drive voltages comprises applying respective drive voltages to two or more second electrodes of two or more respective comb drive actuators;

Measuring, at the two or more second electrodes, respective sensed waveforms resulting from the sensing voltage applied to the common first electrode; and

estimating a position of the first electrode relative to the respective second electrode based on the sensed waveforms.

Technical Field

The present invention relates generally to micro-electromechanical systems (MEMS), and in particular to position measurement of MEMS elements.

background

various designs for sensing deflection and/or position of MEMS devices have been proposed. For example, U.S. patent 6,744,173 describes a multi-level vertical comb drive actuator including a first comb structure having a plurality of first teeth and a second comb structure having a plurality of second teeth, wherein the first and second teeth are substantially interdigitated. The first comb tooth and the second comb tooth may comprise two or more stacked conductive layers electrically separated by an air gap. Application of a voltage between the first and second teeth causes the second comb structure to move relative to the first comb structure. The invention includes a 2D gimbal configuration to rotate a movable element along two axes. In one embodiment, the position sensing element may be coupled to a feedback element coupled to a voltage source. The position sensing element may apply high frequency dithering to the first comb finger or the second comb finger. The position sensor sensing element may then sense the return signal at the undriven comb teeth. The phase difference between the jitter signal and the return signal determines the capacitance. Such capacitance may be correlated to the relative position of the second comb drive and the first comb drive to obtain very accurate position measurements.

As another example, U.S. patent 6,536,280 describes a method for electronically reducing the sensitivity of a MEMS device layer to vibration, acceleration, or rotation. Electronic hardening is achieved by using position sensing and force feedback at one or more points on the movable micromachined structure. Fine servo control of the Z-axis height makes it possible to significantly reduce the separation between the one or more movable MEMS layers and the fixed electrode, which separation may result in a significant increase in sensitivity and/or actuation force. The capacitance between the finger electrodes on the MEMS structure and the nearby stationary finger electrodes can be measured by observing the current, voltage or charge induced on those conductors by the high frequency signal applied to the MEMS structure. This is typically done by using a charge sense amplifier. In this way, the position of the MEMS structure can be measured, since the capacitance changes with the movement of the MEMS structure.

us patent 9,784,558 describes a mechanism comprising a base and a moving element mounted for rotation relative to the base about an axis. The capacitive rotation sensor includes at least one first electrode disposed on the mobile element adjacent to the base and at least one second electrode disposed on the base proximate to the at least one first electrode. The sensing circuit is coupled to sense a variable capacitance between the first electrode and the second electrode.

Us patent 8,553,308 describes a method for monitoring the movement of at least one moving mirror in a MEMS device comprising one or more moving mirrors, and wherein the monitoring is based on the change in capacitance in the MEMS device over time. The method comprises the following steps: if the at least one moving mirror is a coplanar mirror: a. providing a DC voltage to the MEMS device in addition to a drive voltage required for movement of the at least one moving mirror; b. measuring a current proportional to a change in capacitance associated with movement of the at least one moving mirror; monitoring the movement of the at least one moving mirror based on the measured current. If the at least one moving mirror is an interleaving mirror: d. measuring a current associated with movement of the at least one moving mirror; e. identifying a plurality of ripples in the measured current associated with changes in capacitance in the MEMS device over time; monitoring movement of the at least one moving mirror based on the identified plurality of ripples.

Disclosure of Invention

embodiments of the invention described herein provide an apparatus for driving and position sensing in a comb drive actuator. The apparatus includes a generator, a driver circuit, a sensing circuit, and a signal processing circuit. The generator is configured to apply a sensing voltage to a first electrode of the comb drive actuator. The driver circuit is configured to apply a drive voltage to a second electrode of the comb drive actuator having an opposite polarity relative to the first electrode. The sensing circuit is configured to measure a sensed waveform at the second electrode resulting from a sensing voltage applied to the first electrode. The signal processing circuit is configured to estimate a position of the first electrode relative to the second electrode based on the sensed waveform.

In some implementations, the sensed waveform falls on a resistor connected in series to the second electrode.

In some implementations, the sensed waveform is measured by a circuit with an adaptive reference ground.

in one embodiment, the sensing voltage comprises a sinusoidal waveform.

In some embodiments, the generator is configured to apply the sensing voltage to a common first electrode of the two or more comb drive actuators. The driver circuit includes two or more driver circuits configured to apply respective drive voltages to two or more respective second electrodes of the two or more comb drive actuators. The sensing circuit is configured to measure at the second electrode a respective sensed waveform resulting from a sensing voltage applied to the common first electrode. The signal processing circuit is configured to estimate a position of the first electrode relative to the respective second electrode based on the respective sensed waveform.

There is additionally provided, in accordance with an embodiment of the present invention, a method for driving and position sensing in a comb drive actuator, the method including applying a sensing voltage to a first electrode of the comb drive actuator. A drive voltage is applied to a second electrode of the comb drive actuator having an opposite polarity with respect to the first electrode. A sensed waveform resulting from a sensing voltage applied to the first electrode is measured at the second electrode. A position of the first electrode relative to the second electrode is estimated based on the sensed waveform.

the present invention will be more fully understood from the detailed description of embodiments of the invention given below, taken together with the drawings, in which:

drawings

FIG. 1 is a schematic top view of a gimbaled micro-mirror array according to one embodiment of the present invention;

FIG. 2 is a schematic block diagram of a circuit for measuring variable capacitance, according to an embodiment of the present invention;

FIG. 3 is a schematic block diagram of a circuit that simultaneously drives a comb drive actuator and senses a corresponding capacitance of the comb drive actuator, in accordance with an embodiment of the present invention;

FIG. 4 is a schematic block diagram of a circuit to independently drive two comb drive actuators and sense their respective capacitances, according to one embodiment of the present invention; and

FIG. 5 is a flow chart that schematically illustrates a method for simultaneously driving a MEMS device and indicating the position of comb drive actuators by sensing the capacitance of the comb drive actuators, in accordance with an embodiment of the present invention.

Detailed Description

SUMMARY

embodiments of the invention described below provide apparatus and methods for sensing the position of an element of a MEMS device, such as the position of a MEMS mirror. In some embodiments, a MEMS device includes an actuator including a stator and a rotor. The stator and rotor have interleaved combs that form a capacitive link referred to herein as a "comb drive actuator" or "variable capacitor". Applying a high voltage between the stator and the rotor generates an electrostatic force that moves the rotor of the comb drive actuator. The applied high voltage is referred to herein as the "drive voltage".

variations in the degree of overlap between the stator and rotor combs result in variations in the capacitance of the capacitive link (i.e., of the comb drive actuator), with the maximum capacitance occurring at the maximum overlap. This effect can be used to accurately measure the position of the comb drive actuator. The capacitance value of the capacitive link can be measured by applying a high frequency low voltage waveform on one electrode of the variable capacitor and measuring the resulting high frequency waveform on the other electrode (i.e., with opposite polarity). The applied high frequency low voltage waveform is referred to herein as the "sense voltage". The resulting high frequency waveform on the opposite polarity electrodes is referred to herein as the "sensing waveform". In one embodiment, a sinusoidal waveform is applied and measured.

In some embodiments, the position controller controls a driver circuit (such as a high voltage source) that generates drive voltages in the low KHz range to apply the drive voltages to the electrodes of the comb drive actuator. The electrode receiving the driving voltage is referred to herein as a "second electrode". In one embodiment, the second electrode of the comb drive actuator is electrically connected to the rotor of the comb drive actuator. At the same time, a sensing voltage source, such as a function generator that generates a voltage waveform in the low MHz frequency range, applies a sensing voltage to the other electrode (i.e., to an electrode having an opposite polarity to the second electrode). The electrode receiving the sensing voltage is referred to herein as the "first electrode". In one embodiment, the first electrode of the comb drive actuator is electrically connected to the stator of the comb drive actuator. Alternatively, the first electrode may be connected to the stator of the comb drive actuator, while the second electrode will be connected to the rotor.

In one embodiment, the resulting sensed waveform resulting from the sensing voltage falls on a resistor connected in series between the high voltage driver and the second electrode of the comb drive actuator. Such resistors are referred to herein as "sense resistors". The sensed waveform comprises a high frequency, low amplitude waveform whose amplitude is slowly modulated by the drive voltage. As shown below, the amplitude of the sensed waveform is proportional to the instantaneous (e.g., instantaneous) capacitance of the comb drive actuator, thus providing a direct method for position measurement of the comb drive actuator.

In one embodiment, to measure the sensed waveform across the sense resistor, an enhanced isolation amplifier switches the differential sensed waveform voltage from a high voltage domain to a low voltage domain. In the low voltage domain, the differential sensed waveform is measured by a sensing circuit, such as a voltmeter, and digitized by an analog-to-digital converter (ADC). Alternatively, the differential sensed waveform is initially digitized and then the digitized voltage value is evaluated by a digital read circuit.

In some embodiments, the MEMS device incorporates multiple independent comb drive actuators, for example, to move multiple mirrors or rotate a single gimbaled mirror about two orthogonal axes. The disclosed sensing method is used to independently measure different capacitances of multiple comb drive actuators in order to indicate different positions of each comb drive actuator.

In one embodiment, a plurality of independent high voltage sources apply independent drive voltages to a plurality of respective comb drive actuators via a plurality of respective second electrodes, wherein each of the second electrodes is electrically isolated from the other. The first electrodes (i.e., electrodes of opposite polarity) of the plurality of comb-drive actuators are all electrically connected to a common first electrode. A sensing voltage is applied to the common (i.e., first) electrode. The one or more measurement circuits independently measure a plurality of resulting respective sensed waveforms across respective different sense resistors included in the one or more measurement circuits.

The disclosed sensing circuit and method are superior to possible solutions that rely on the separation of the comb of the actuator into a drive portion and a sense portion, the latter resulting in reduced drive strength and providing less accurate sensing due to reduced capacitance. The disclosed method applies drive and low voltages independently to opposite poles of the comb drive actuator, which is advantageous when compared to applying both high and low voltages from the same pole, the latter resulting in distortion of the sensed waveform and in less accurate position measurements.

Description of the System

FIG. 1 is a schematic top view of a gimbaled micro-mirror array 20 according to one embodiment of the present invention. The array 20 is typically produced by etching a semiconductor wafer, such as an epitaxial silicon wafer, to define a frame 30 having a central opening containing a mirror plate 32 that includes the mirror 22. A pair of hinges 28, such as etched torsion hinges, are connected between the frame 30 and the plate 32 at locations on the central axis on opposite sides of the frame to enable the plate 32 to rotate slowly about the x-axis relative to the frame 30. Typically, a reflective coating is deposited on the wafer surface in the region of the mirror 22. The reflective coating is typically omitted on other surfaces, a portion of which may even be coated with a light absorbing layer to reduce unwanted specular reflection.

in the illustrated embodiment, the mirror 22 is rotationally coupled to the plate 32 by a hinge 34 to enable rapid rotation of the mirror 22 about the y-axis relative to the plate 32. Thus, the plate 32 acts as a universal joint that rotates slowly relative to the frame 30 about a frame axis that is perpendicular to the axis of the mirror 22, while the mirror 22 has a fast rotation relative to the plate 32. An example of a micromirror array sharing similarities with array 20 is described in U.S. patent 9,703,096, the disclosure of which is incorporated herein by reference.

generally, the plate 32 is configured to rotate about the hinge 28 and the hinge 34 by applying a drive voltage at a resonant frequency characteristic of the plate 32. Similarly, the mirror 22 is configured to rotate about the plate 32 by reapplying a drive voltage at the resonant frequency characteristic of the mirror 22. As is well known in the art, efforts are being made to design the micro mirror array 20 such that the plate 32 and the mirror 22 have the same characteristic resonant frequency, referred to herein as the "resonant frequency" of the micro mirror array 20. Alternatively, the plates 32 may be driven in a non-resonant manner.

To drive rotation of the plate 32, the semiconductor wafer is etched to define interleaved comb drive actuators 36b, including one set of combs extending outwardly from the plate 32 and a second set of combs extending inwardly from the frame 30 (i.e., together forming the interleaved comb drive actuators 36 b). Similarly, to drive the rotation of the mirror 22, the semiconductor wafer is etched to define interleaved comb drive actuators 36a, comprising one set of combs extending outwardly from the mirror 22 and a second set of combs extending inwardly from the plate 32.

The moving parts, such as the plate 32 and the mirror 22, are referred to as "rotors" in the specification. The static portion, such as the frame 30, is referred to as the "stator" in this description. Combs 36a and 36b comprise a conductive material (typically deposited on a semiconductor surface) that is coupled to an electrical drive circuit (not shown) by drive traces. Thus, as is known in the art, rotation of the rotor (e.g., of plate 32 and mirror 22) (where plate 32 also acts as a stator for mirror 22) is driven by varying the electrostatic force between the stator and rotor combs 36a and 36 b.

The comb 36a is supplied with drive power for rapidly rotating the mirror 22 via the electrode 51 a. The comb 36b is supplied with drive power for slowly rotating the plate 32 via the electrode 51 b. The electrodes 51a and 51b are electrically isolated from each other. The varying electrostatic forces between the stator and rotor combs 36a and 36b are the result of variable charging of the respective stators and rotors with charges of opposite polarity. Thus, combs 36a and 36b can be electrically modeled as variable capacitors. Electrodes 41 are used in electrical position sensing circuitry connected to array 20 to measure the changing capacitance of combs 36a and 36b in order to indicate their different positions, as described below.

Capacitive position sensing for capacitively driven MEMS devices

FIG. 2 is a schematic block diagram of a circuit for measuring variable capacitance, according to an embodiment of the present invention. The description of fig. 2 serves as an introduction to the concepts and principles for sensing the variable capacitance of a comb drive actuator, and the disclosed embodiments are based in part on this description.

As shown in FIG. 2, function generator 39 applies a sense voltage comprising a magnitude V to an electrode 41 of a capacitive link 40, i.e., a variable capacitor 40_iHigh frequency f of_iLow voltage V_i(t) sine wave V_i(t)＝V_i·sin(2πf_it). The high frequency in this context has a typical value of a few MHz. A sensing circuit, such as a voltmeter 44, reads the resulting high frequency sensed waveform V falling on the sense resistor 42_s(t)。

Assume that the capacitance C of the variable capacitor 40 and the resistance R of the sense resistor 42_sAre small enough to obtain (1/R)_sC)＜＜f_ithen the sensing voltage V inducing the current i (t) flowing in the sensing resistor 42 is provided by_s：

For a sine wave, equation 1 can be solved to obtain:

The measured peak-to-peak (i.e., double the amplitude) of the sensed waveform on sense resistor 42 is given by the following equation:

Formula 1V_s，PP＝I_PP·R_s＝4π·C·f_i·V_i·R_s

The sensing waveform frequency (f) can be selected according to the system requirement_i) Input voltage (V)_i) And a sense resistor 42 (R)_s). Observed double amplitude (V) of sensed waveform_s，PP) Proportional to a given capacitance C, thereby providing a direct method of measuring variable capacitance. In one embodiment, based on the above inputs, and based on equation 1, the processor calculates the capacitance C of the comb drive actuator.

the block diagram shown in fig. 2 was chosen purely for the sake of conceptual clarity. Fig. 2 only shows parts relevant to the concept of utilizing some embodiments of the present invention. Other system elements, such as a driving voltage applied to the other electrode of the variable capacitor 40, are omitted and described below.

Fig. 3 is a schematic block diagram of a circuit that simultaneously drives a comb drive actuator and senses the corresponding capacitance of the comb drive actuator, in accordance with an embodiment of the present invention.

As shown in fig. 3, the function generator 39 applies a sensing voltage to a first electrode 41 of the variable capacitor 40 (the electrode 41 is functionally the same as the electrode 41 in fig. 2). In response to a command sent by the rotor position controller 55, the high voltage source 50 applies a driving voltage to the second electrodes 51 of the variable capacitors 40 in parallel. Referring to fig. 1, electrodes 41 may represent electrical connections to the stator combs of plates 32 opposite the rotation of mirror 22. In the same component, the electrode 51 denotes an electrode (i.e., electrode 51a) connected to a rotor portion of the comb drive actuator of the mirror 22.

Typical driving voltages will have amplitudes up to tens of volts and resonant frequencies up to tens of kHz. The variable capacitor 40 models the variable capacitance of the interleaved comb, such as the comb drive actuators 36a and 36b, which varies with the overlap between the stator and rotor combs.

In principle, the sensing voltage and the driving voltage may be applied from the same electrode (e.g., electrode 51). However, this connection scheme requires coupling the drive voltage and a low voltage (e.g., by using an AC coupler circuit), which increases distortion and attenuation impedance. An example of a possible resulting distortion is the field-time distortion of the output waveform, known in the art as "field tilt".

Nevertheless, some measure of voltage amplitude modulation occurs in the disclosed opposite polarity connection scheme, where, for example, the resulting sensed waveform is slowly modulated by the drive voltage. However, by applying the sensing voltage from the opposite end of the device, the disclosed method eliminates the need for additional coupling circuitry, thereby achieving minimal distortion of the sensed waveform.

in one implementation, the sensing circuit reads the resulting sensed waveform that falls on the sense resistor 42. One implementation that enables measurement of the high frequency sensed waveform (provided on top of the drive voltage reference), as shown in fig. 3, is to convert the differential sensed waveform from the high voltage domain into the low voltage domain using an enhanced isolation amplifier 56. The adaptive reference ground of the amplifier will thus follow the drive voltage. In the low voltage domain, the differential sensed waveform signal is connected to a voltmeter 44 circuit and then to an analog-to-digital converter (ADC) 57. Thus, in the present embodiment, the sensing circuit includes the amplifier 56 and the ADC 57. Based on the digitally converted sensed waveform, signal processing circuitry (such as processor 60 and/or discrete demodulation circuitry) estimates the position of the first electrode relative to the second electrode.

The block diagram shown in fig. 3 was chosen purely for the sake of conceptual clarity. Fig. 3 shows only one possible implementation of the concepts presented by some embodiments of the invention. For example, in an alternative embodiment, the amplifier 56 outputs the sensed waveform voltage directly to the ADC57, and the sensed waveform voltage is read only after it is initially digitized.

Fig. 4 is a schematic block diagram of a circuit to independently drive two comb drive actuators and sense their respective capacitances, according to one embodiment of the present invention. In particular, the block diagram shown in FIG. 4 describes the circuitry for both driving and position sensing of the mirror 22 and plate 32 of the gimbaled micro-mirror array 20 of FIG. 1.

The high voltage sources 50a and 50b independently apply driving voltages to the electrodes 51a and 51b of the variable capacitors 40a and 40b in response to commands set by the rotor position controllers 55a and 55 b. In one embodiment, drive voltage source 50a drives mirror 22 in rapid motion, while drive voltage source 50b drives plate 32 in slow motion. In fig. 4, electrode 51a connects the drive voltage to the rotor of comb drive actuator 36a of mirror 22, while electrode 51b connects the drive voltage to the stator of comb drive actuator 36 b.

The function generator 39 applies a sensing voltage to the common electrode 41 of the variable capacitors 40a and 40 b. In fig. 4, electrode 41 electrically connects the stator of comb drive actuator 36a and the rotor of comb drive actuator 36b in parallel. As shown, in both actuators 36a and 36b, the sense voltage and the drive voltage are both applied simultaneously from opposite poles.

in one embodiment, the resulting sense waveforms falling on sense resistors 42a and 42b are used as independent inputs to amplifiers 56a and 56b, respectively. As shown in fig. 4, one specific implementation of the sensing voltage measurement provided on top of the amplifiers 56a and 56b is to convert the corresponding differential sensing waveform from the high voltage domain to the low voltage domain and then output the corresponding signal in the low voltage domain to the ADC57a and ADC57 b, respectively. Based on the digitally converted sensed waveforms, processor 60 estimates the position of the first electrode relative to the second electrode of each of comb drive actuators 36a and 36 b.

The block diagram shown in fig. 4 was chosen purely for the sake of conceptual clarity. Fig. 4 shows only one possible implementation of the concepts presented by some embodiments of the invention. For example, the same proposed method can be extended to accommodate driving numerous comb drive actuators independently and sensing their capacitance.

FIG. 5 is a flow chart that schematically illustrates a method for simultaneously driving a MEMS device and indicating a position of an actuator by sensing a corresponding capacitance, in accordance with an embodiment of the present invention. At a sensing step 70, the function generator 39 applies a sensing voltage to a first electrode of a comb drive actuator of the MEMS device. The first electrode may be connected to a stator of an actuator of the MEMS mirror. At the same time, at a drive step 72, the position controller 55 commands the high voltage source 50 to apply a drive voltage to the second electrode of the comb drive actuator of the MEMS device. The second electrode may be connected to a rotor of an actuator of the MEMS mirror.

Next, amplifier 56 collects the resulting sensed waveform in the high voltage domain, at a sensed waveform collection step 74. Amplifier 56 then filters out the reference high voltage (i.e., the drive voltage) at a filtering step 76. Sensing circuitry, such as voltmeter 44, measures the resulting sensed waveform in the low voltage domain at a sensed waveform measurement step 78. The processor uses the measured sensed waveform to calculate the capacitance of the comb drive actuator, at a capacitance calculation step 80. Finally, it processes or calculates the position of the comb drive actuator (e.g., the corresponding MEMS mirror position) at a position calculation step 82.

The flow chart shown in fig. 5 is chosen purely for the sake of conceptual clarity. For example, other flow diagrams may describe position sensing of multiple MEMS devices using a common time-division measurement architecture for measuring multiple different sensed waveforms.

Although the embodiments described herein relate primarily to optical MEMS applications, the methods and systems described herein may also be used in other MEMS applications, such as MEMS gyroscopes, MEMS accelerometers, and MEMS actuators (e.g., in lens focusing devices).

It will thus be appreciated that the embodiments described above are cited by way of example, and that the present invention is not limited to what has been particularly shown and described hereinabove. Rather, the scope of the present invention includes both combinations and subcombinations of the various features described hereinabove, as well as variations and modifications thereof which would occur to persons skilled in the art upon reading the foregoing description and which are not disclosed in the prior art. Documents incorporated by reference in this patent application are considered an integral part of the present application, but only the definitions in this specification should be considered if any term in these incorporated documents is defined to conflict with a definition explicitly or implicitly made in this specification.