阅读说明：本技术 一种耐高温石英挠性加速度计伺服电路及其加工方法 (High-temperature-resistant quartz flexible accelerometer servo circuit and processing method thereof ) 是由 张明 阮晓明 徐鑫 赵国良 于 2019-10-22 设计创作，主要内容包括：本发明提供了一种耐高温石英挠性加速度计伺服电路及其加工方法,包括电容电压转换器、跨导/补偿放大器和反馈网络,所述电容电压转换器包括差动电容检测器和积分网络,差动电容检测器与加速度计表头的差动电容传感器连接,差动电容检测器、积分网络和跨导/补偿放大器依次连接,跨导/补偿放大器与加速度计表头的力矩器连接；反馈网络与跨导/补偿放大器连接；所述的伺服电路全部元器件采用耐150℃高温元器件,全部元器件采用厚膜混合集成工艺封装在厚膜陶瓷基板上。通过与耐高温加速度传感器匹配,可提升加速度系统模块器件的耐高温能力,完成极端环境下对加速度的测量。(The invention provides a high-temperature-resistant quartz flexible accelerometer servo circuit and a processing method thereof, and the high-temperature-resistant quartz flexible accelerometer servo circuit comprises a capacitance-voltage converter, a transconductance/compensation amplifier and a feedback network, wherein the capacitance-voltage converter comprises a differential capacitance detector and an integrating network; the feedback network is connected with the transconductance/compensation amplifier; all components of the servo circuit adopt components resistant to high temperature of 150 ℃, and all components are packaged on a thick film ceramic substrate by adopting a thick film hybrid integration process. Through being matched with a high-temperature-resistant acceleration sensor, the high-temperature-resistant capability of the acceleration system module device can be improved, and the measurement of the acceleration under the extreme environment is completed.)

1. A high-temperature-resistant quartz flexible accelerometer servo circuit is characterized by comprising a capacitance-voltage converter, a transconductance/compensation amplifier and a feedback network, wherein the capacitance-voltage converter comprises a reference triangular wave generator, a differential capacitance detector and an integrating network; the feedback network is connected with the transconductance/compensation amplifier; all components of the servo circuit adopt components resistant to high temperature of more than 150 ℃, and all components are packaged on a thick film ceramic substrate by adopting a thick film hybrid integration process.

2. the servo circuit of claim 1, wherein the voltage-to-capacitance converter is supplied with operating voltage by a positive three-terminal regulator and a negative three-terminal regulator; the positive and negative three-terminal voltage regulators, the capacitance-voltage converter and the transconductance/compensation amplifier all adopt integrated circuits.

3. The servo circuit of claim 2, wherein the positive three-terminal regulator, the negative three-terminal regulator, the capacitive voltage converter, the transconductance/compensation amplifier are bonded to the thick film ceramic substrate using a high temperature resistant conductive adhesive.

4. The servo circuit of claim 3, wherein the thick film ceramic substrate is printed with two or more layers of high temperature media.

5. The servo circuit of claim 1, wherein the capacitors of the servo circuit are high temperature multilayer ceramic capacitors.

6. The servo circuit of claim 1, wherein the high temperature multilayer ceramic dielectric capacitor has a size of 1210, 1206, or 0805.

7. The method for processing the servo circuit of the high temperature resistant quartz flexible accelerometer according to any one of claims 1 to 6, comprising the following steps:

The servo circuit adopts a high-temperature thick-film hybrid integration process, electronic plate-making software is used for carrying out layout and wiring on a circuit layout to form process manufacturing data, the process manufacturing data is converted into a photo-drawing negative film, a thick-film screen printing stencil is manufactured according to the photo-drawing negative film, a passive network is manufactured on a substrate through screen printing and thick-film sintering processes, and a semiconductor device and a micro element are assembled on the passive network; printing two layers of annular palladium-silver paste on the back surface of the substrate, welding the substrate on the shell by adopting a reflow soldering process, realizing the electrical interconnection between the chip and the passive network on the thick film substrate by a bonding technology, completing the interconnection between the circuit and the outer lead, and sealing the cap after the test is qualified.

8. The method of claim 8, wherein the high temperature multilayer ceramic capacitor is used as the capacitor in the servo circuit, and reflow soldering is used to solder the capacitor onto the palladium-silver pad of the substrate.

9. The processing method of the servo circuit of the high-temperature-resistant quartz flexible accelerometer according to claim 8, wherein a temperature sensor acquisition port is reserved at a leading-out end of the servo circuit and is used for being externally connected with a temperature sensor.

Technical Field

The invention relates to the design technology of a semiconductor hybrid integrated circuit, in particular to a high-temperature-resistant quartz flexible accelerometer servo circuit and a processing method thereof.

Background

The acceleration is a basic physical quantity characterizing the essence of the motion of the object, and the motion state of the object, including the speed, position, distance, vibration, swing and tilt state of the object, can be confirmed by measuring the acceleration of the moving object through the accelerometer. The quartz flexible accelerometer is one of key devices of a high-precision positioning and orientation system, and can be widely applied to the fields of aerospace, weapon guidance, oil exploration, geological exploration and the like. The exhaustion of global surface resources makes the development of exploration technology become an important means for solving the resource shortage, and with the increase of exploration depth and the enhancement of the working time of a drill bit, the working environment temperature of the accelerometer while drilling is higher and higher. The high-temperature resistant acceleration sensor is the attack and customs direction in the exploration field, and has a breakthrough in the technical aspect at present. Because the traditional quartz flexible accelerometer servo circuit has unsatisfactory electrical property in a high-temperature environment and cannot be used in an extreme environment for a long time after being matched with a high-temperature resistant acceleration sensor, the development of the high-temperature resistant quartz flexible accelerometer servo circuit has important significance for improving the performance and reliability of an accelerometer system in high-temperature operation.

The traditional implementation mode of the quartz flexible accelerometer servo circuit has the following defects:

1. The reliability of the circuit assembly process is low in a high-temperature environment.

The servo circuit of the traditional quartz flexible accelerometer adopts a thick film hybrid integrated assembly process, and the working temperature range is as follows: -40 ℃ to 85 ℃. In the circuit, a chip is bonded on a thick film ceramic substrate by adopting insulating glue, the thick film substrate is bonded on a shell by adopting the insulating glue, and the limit temperature of the insulating glue used in the assembling process is 150 ℃. If the circuit is in a high-temperature working environment temperature of 150 ℃ for a long time, the performance of an insulating rubber material in the circuit is degraded, so that the reliability of the circuit is reduced in a long-term critical high-temperature use process, and the measurement stability of the accelerometer is influenced.

2. the high temperature resistance of the circuit components can not meet the environmental requirements.

parameters of electronic components used in a servo circuit of a traditional quartz flexible accelerometer can change along with the rise of temperature, and under a high-temperature environment, the electronic components which have the greatest influence on electrical performance parameters in the servo circuit of the traditional quartz flexible accelerometer are chip ceramic dielectric capacitors. The electric capacity that uses in the circuit all adopts the conventional electric capacity of non-high temperature resistant material, and the operating temperature scope of this material electric capacity is: -55 ℃ to 125 ℃. The capacitance value deviation of the capacitor is uncontrollable in the environment of over 125 ℃, the voltage endurance capability is reduced, and the working state of the servo circuit is seriously influenced.

3. A temperature sensor port is not reserved in a leading-out end of a servo circuit of a traditional quartz flexible accelerometer, so that the temperature of the accelerometer cannot be measured, the inertial navigation system cannot monitor the temperature of the accelerometer in real time, temperature compensation cannot be carried out on the accelerometer, and the measurement accuracy of the acceleration is influenced.

Disclosure of Invention

The invention provides a high-temperature-resistant quartz flexible accelerometer servo circuit and a processing method thereof for solving the problems in the prior art. The circuit adopts a thick film hybrid integration process, the assembly process is improved through high temperature resistance, the working temperature of the servo circuit of the high temperature resistant quartz flexible accelerometer produced by the assembly process can reach 150 ℃, and the normal processing of the servo circuit on the signals of the acceleration sensor in a high temperature environment can be realized.

In order to achieve the purpose, the invention adopts the following technical scheme to realize the purpose:

A high-temperature-resistant quartz flexible accelerometer servo circuit comprises a capacitance-voltage converter, a transconductance/compensation amplifier and a feedback network, wherein the capacitance-voltage converter comprises a reference triangular wave generator, a differential capacitance detector and an integrating network; the feedback network is connected with the transconductance/compensation amplifier; all components of the servo circuit adopt components resistant to high temperature of more than 150 ℃, and all components are packaged on a thick film ceramic substrate by adopting a thick film hybrid integration process.

The voltage-capacitance converter is provided with working voltage by a positive three-terminal voltage stabilizer and a negative three-terminal voltage stabilizer; the positive and negative three-terminal voltage regulators, the capacitance-voltage converter and the transconductance/compensation amplifier all adopt integrated circuits.

The positive three-terminal voltage stabilizer, the negative three-terminal voltage stabilizer, the capacitance-voltage converter and the transconductance/compensation amplifier are adhered to the thick film ceramic substrate by using high temperature resistant conductive glue.

And two or more layers of high-temperature media are printed at the bonding part of the thick film ceramic substrate.

and the capacitors in the servo circuit are all high-temperature multilayer ceramic dielectric capacitors.

The size of the high-temperature multilayer ceramic dielectric capacitor is 1210, 1206 or 0805.

a processing method of a servo circuit of a high-temperature-resistant quartz flexible accelerometer comprises the following steps:

The servo circuit adopts a high-temperature thick-film hybrid integration process, electronic plate-making software is used for carrying out layout and wiring on a circuit layout to form process manufacturing data, the process manufacturing data is converted into a photo-drawing negative film, a thick-film screen printing stencil is manufactured according to the photo-drawing negative film, a passive network is manufactured on a substrate through screen printing and thick-film sintering processes, and a semiconductor device and a micro element are assembled on the passive network; printing two layers of annular palladium-silver paste on the back surface of the substrate, welding the substrate on the shell by adopting a reflow soldering process, realizing the electrical interconnection between the chip and the passive network on the thick film substrate by a bonding technology, completing the interconnection between the circuit and the outer lead, and sealing the cap after the test is qualified.

Preferably, the capacitor in the servo circuit is a high-temperature multilayer ceramic dielectric capacitor, the capacitor is assembled by adopting a reflow soldering process, and the capacitor is soldered on the palladium-silver pad of the substrate by using high-temperature soldering paste.

Preferably, a temperature sensor acquisition port is reserved at the leading-out end of the servo circuit and is used for being externally connected with a temperature sensor.

Compared with the prior art, the invention has the following beneficial effects:

According to the high-temperature-resistant quartz flexible accelerometer servo circuit, the high-temperature-resistant device and the high-temperature assembly process are adopted, so that the servo circuit can normally work in the environment of 150 ℃, and the problem of reliability of the servo circuit in the high-temperature environment is solved. A temperature sensor port is reserved at a leading-out end of the servo circuit, and temperature information required by the system for temperature compensation of the accelerometer can be provided. Through being matched with a high-temperature-resistant acceleration sensor, the high-temperature-resistant capability of the acceleration system module device can be improved, and the measurement of the acceleration under the extreme environment is completed.

Drawings

FIG. 1 is a block diagram of a quartz flexure accelerometer of the present invention;

FIG. 2 is a circuit block diagram of the present invention;

FIG. 3 is a circuit process flow diagram of the present invention;

FIG. 4 is a diagram of the back side profile of the circuit of the present invention.

Detailed Description

in order to more clearly illustrate the technical solutions in the embodiments of the present invention, the drawings needed to be used in the description of the embodiments will be briefly introduced below, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and it is obvious for those skilled in the art to obtain other drawings based on these drawings without creative efforts.

In order to make the objects, technical solutions and advantages of the present invention more apparent, the following description of the embodiments of the present invention with reference to the accompanying drawings and examples is given by way of illustration and not limitation.

As shown in figure 1, the high-temperature resistant quartz flexible accelerometer servo circuit and the processing method thereof provided by the invention comprise an accelerometer head and a servo circuit, wherein the accelerometer head comprises a torquer, a pendulum component dynamic module and a differential capacitance sensor which are sequentially connected, and the servo circuit comprises a capacitance-voltage converter and a transconductance/compensation amplifier which are sequentially connected. The capacitance-voltage converter is connected with a differential capacitance sensor of the accelerometer head, the transconductance/compensation amplifier is connected with a torquer of the accelerometer head, and the integrating network and the feedback network are connected with the capacitance-voltage converter and the transconductance/compensation amplifier.

The servo circuit of the quartz flexible accelerometer mainly comprises a capacitance-voltage converter, a transconductance/compensation amplifier and the like. The structure of the quartz flexible accelerometer is shown in figure 1. When acceleration ai acts along the input shaft of the accelerometer, the pendulous reed of the differential capacitance sensor deviates from the central position to generate the capacitance variation of 2 deltaC, a capacitance-voltage converter in a servo circuit detects the variation to output current, the current is integrated by a current integrator to output voltage, then the voltage is amplified by a transconductance/compensation amplifier and converted into current, the magnitude of the current is in direct proportion to the input acceleration, the polarity depends on the direction of the input acceleration, the output current is added to a torquer of a gauge head, and then rebalancing torque is generated to balance the inertia torque caused by ai. In the circuit, a positive three-terminal regulator and a negative three-terminal regulator provide working voltage for a differential capacitance voltage converter, as shown in fig. 2.

The processing method comprises the following steps: the servo circuit adopts a high-temperature thick film hybrid integration process, electronic plate-making software is used for reasonably arranging and wiring a circuit layout to form process manufacturing data, the process manufacturing data is converted into a photo-drawing negative film, a thick film screen printing stencil is manufactured according to the photo-drawing negative film, a passive network is manufactured on a substrate through thick film processes such as screen printing, sintering and the like, and a semiconductor device and a micro element are assembled on the passive network. The positive three-terminal voltage stabilizer, the negative three-terminal voltage stabilizer, the capacitance voltage converter and the transconductance/compensation amplifier are special integrated circuits, are adhered on the thick film ceramic substrate by using high-temperature conductive glue, and two layers of high-temperature media are printed at the adhered parts. The 1210, 1206 and 0805-size high-temperature multilayer ceramic dielectric capacitor is used, the capacitor is assembled by adopting a reflow soldering process, and the capacitor is soldered on a palladium-silver pad of a substrate by using high-temperature soldering paste. Printing two layers of palladium and silver on the back surface of the substrate, welding the substrate on the shell by adopting a reflow welding process, realizing the electrical interconnection between the chip and the passive network on the thick film substrate by adopting a bonding technology, completing the interconnection between the circuit and the external lead, carrying out an electrical property test on the circuit before the circuit is capped, and capping after the electrical property test is qualified. After the circuit assembly is completed, the circuit is subjected to high-temperature test screening, and the quality of the circuit is ensured. The circuit process flow is shown in figure 3.

The principle of the invention is as follows: a servo circuit of high-temp resistant quartz flexible accelerometer is prepared through mixing thick film, integrating, screen printing, sintering, etc. to form passive network on substrate, and assembling semiconductor device and miniature element. The special integrated circuit chip is adhered to the thick film ceramic substrate by using high-temperature conductive glue, and is electrically interconnected with the passive network on the thick film substrate through a bonding wire. The working temperature of the high-temperature multilayer ceramic dielectric capacitor is as follows: and the capacitor is assembled at the temperature of between 55 ℃ below zero and 200 ℃ by adopting a reflow soldering process. And printing an annular palladium-silver pad on the back surface of the substrate, and welding the substrate on the shell by adopting a reflow welding process. High-temperature solder is adopted for both capacitor welding and substrate welding, so that the reliability of the circuit in a high-temperature environment is ensured.

The servo circuit leading-out end is reserved with a temperature sensor collecting end, can be externally connected with a temperature sensor and is used for collecting the temperature of the quartz flexible accelerometer and transmitting the temperature information to a system, the function definition of the servo circuit leading-out end is shown in a table 1, and the shape structure of the back is shown in a figure 4.

TABLE 1

Serial number	Symbol	Terminal function
			1	ML	Lower end of torque connecting device
2	MH	connect the high end of the torque device
			3	VS-	Negative power supply terminal
4	VS+	Positive power supply terminal
			5	GND	ground wire
6	Tesf	Self-checking terminal
			7	C+	Differential capacitance detection terminal 1
8	C-	Differential capacitance detection terminal 2
			9	T1	Temperature sensor port 1
10	T2	Temperature sensor port 2

The invention relates to a high-temperature-resistant quartz flexible accelerometer servo circuit and a processing method thereof, wherein the high-temperature-resistant quartz flexible accelerometer servo circuit comprises a capacitance-voltage converter, a transconductance/compensation amplifier and a feedback network, the capacitance-voltage converter comprises a reference triangular wave generator, a differential capacitance detector and an integrating network, the differential capacitance detector is connected with a differential capacitance sensor of an accelerometer gauge head, the differential capacitance detector, the integrating network and the transconductance/compensation amplifier are sequentially connected, the transconductance/compensation amplifier is connected with a torquer of the accelerometer gauge head, and the feedback network is connected with the transconductance/compensation amplifier; all components of the servo circuit adopt components resistant to high temperature of 150 ℃, and are packaged on a thick film ceramic substrate by adopting a thick film hybrid integration process; the servo circuit can provide temperature information required by the system for temperature compensation of the accelerometer through an external temperature sensor interface. Through being matched with a high-temperature-resistant acceleration sensor, the high-temperature-resistant capability of the acceleration system module device can be improved, and the measurement of the acceleration under the extreme environment is completed.

Finally, it should be noted that: the above embodiments are only for illustrating the technical solutions of the present invention and not for limiting the same, and although the present invention is described in detail with reference to the above embodiments, those of ordinary skill in the art should understand that: modifications and equivalents may be made to the embodiments of the invention without departing from the spirit and scope of the invention, which is to be covered by the claims.