阅读说明：本技术 一种晶体取出装置 (A kind of crystal withdrawing device ) 是由 万冠军 刘星 柏文文 张亮 李斌 张健 许登基 于 2019-08-20 设计创作，主要内容包括：本发明提供了一种晶体取出装置,包括：筒体,其内侧壁具有向内凸出的台阶,所述台阶用于放置附着晶体装置,所述筒体的顶端对称设置有多个弹性件；压盖,其外侧具有边沿,中部设置有按压晶体的凸台,所述边沿和凸台之间形成凹槽,所述边沿端部对应设置有多个与所述弹性件连接的安装部。本发明通过筒体和压盖中间的弹性件,使凸台的力均匀作用于晶体上,防止晶体取出过程中晶体开裂。本申请的装置结构简单,可方便的取出晶体,能够防止晶体取出过程中晶体开裂,保证取出的晶体的完好性及提高了工作效率。(The present invention provides a kind of crystal withdrawing devices, comprising: cylinder, inner sidewall have inwardly projecting step, and for the step for placing attachment crystal unit, the top of the cylinder is symmetrically arranged with multiple elastic components；Gland, outside have edge, and middle part is provided with the boss of pressing crystal, forms groove between the edge and boss, the edge end is correspondingly arranged on multiple mounting portions connecting with the elastic component.The present invention makes the power stepless action of boss crystal cleavage during on crystal, preventing crystal from taking out by the elastic component among cylinder and gland.The apparatus structure of the application is simple, can be taken out conveniently crystal, crystal cleavage during capable of preventing crystal from taking out, and guarantees the integrity of the crystal taken out and improves work efficiency.)

1. a kind of crystal withdrawing device characterized by comprising

Cylinder, inner sidewall have inwardly projecting step, and the step is for placing attachment crystal unit, the top of the cylinder End is symmetrically arranged with multiple elastic components；

Gland, outside have edge, and middle part is provided with the boss of pressing crystal, forms groove between the edge and boss, The edge end is correspondingly arranged on multiple mounting portions connecting with the elastic component.

2. crystal withdrawing device according to claim 1, which is characterized in that the step is L shape step, L shape step Width is equal to or less than the thickness of attachment crystal unit, and the height of L shape step is less than the height of attachment crystal unit.

3. crystal withdrawing device according to claim 1, which is characterized in that the outer diameter of the gland and the outer diameter of cylinder are big Cause equal, the height at edge is less than the height of boss, and the thickness at edge is less than the thickness on cylinder top.

4. crystal withdrawing device according to claim 1, which is characterized in that the elastic component is spring, with the spring The mounting portion of dismantling connection is hole slot.

5. crystal withdrawing device according to claim 4, which is characterized in that the quantity of the spring is 3-6；It is preferred that , it is 4.

6. crystal withdrawing device according to claim 1, which is characterized in that the outer cover of the cylinder is equipped with shell, outside The height of shell is approximately equal to the sum of the height of cylinder and gland.

7. crystal withdrawing device according to claim 1, which is characterized in that the cylinder and gland are by high purity graphite material Material or the organic material of high-purity are made.

8. crystal withdrawing device according to claim 1, which is characterized in that the top end opening of the cylinder, bottom are laid with There is soft material layer；Preferably, the soft material layer is foam cotton.

9. crystal withdrawing device according to claim 1, which is characterized in that the attachment crystal unit is crucible or hollow The seed crystal bracket of perforation.

10. crystal withdrawing device according to claim 1, which is characterized in that be provided with handle at the top of the gland；It is excellent Choosing, the handle is T-handle.

Technical field

The present invention relates to a kind of crystal withdrawing devices, belong to crystal production apparatus field.

Background technique

Silicon carbide (SiC) monocrystalline have high thermal conductivity, high-breakdown-voltage, carrier mobility be high, chemical stability very High excellent semiconductor physics can be fabricated to the high frequency to work under high temperature, intense radiation conditions, high power electronic device Part and opto-electronic device have huge application value in national defence, high-tech, industrial production, power supply, field of power transformation, are counted as The third generation semiconductor material with wide forbidden band of great development prospect.

Currently, physical vaporous deposition (PVT) is to grow carborundum crystals commonly used approach, with carbonization in this method Si powder is raw material, and the silicon carbide powder in crucible, which is heated to certain temperature, significantly to distil, and the silicon carbide decomposed Gas can be transported along temperature gradient and be agglomerated at silicon carbide seed.In general, seed crystal to be placed on to the seed crystal support of hollow perforation Frame upper end, seed crystal bracket are placed on inside crucible, cover crucible cover；Or seed crystal is placed directly within the upper end of the crucible, then cover earthenware Crucible lid, the growth for seed crystal.It after crystal growth, needs to take out crystal, the crystal being attached on crucible or seed crystal bracket, It is complete at present to hit crucible or the taking-up of seed crystal bracket on station by hand, easily cause crystal cleavage, low efficiency.The prior art In, there are no a kind of devices that the crystal by crucible body or seed crystal bracket takes out.

Summary of the invention

To solve the above-mentioned problems, it this application provides a kind of crystal withdrawing device, avoids by by hand in station The drawbacks of crystal, is taken out in upper shock, prevents from taking crystallization process crystal cleavage and improve work efficiency.

The application the technical solution adopted is as follows:

A kind of crystal withdrawing device, comprising: cylinder, inner sidewall have inwardly projecting step, and the step is for putting Attachment crystal unit is set, the top of the cylinder is symmetrically arranged with multiple elastic components；Gland, outside have edge, and middle part is set It is equipped with the boss of pressing crystal, forms groove between the edge and boss, the edge end is correspondingly arranged on multiple and institute State the mounting portion of elastic component connection.

Further, the step is L shape step, and the width of L shape step is equal to or less than the thickness of attachment crystal unit, The height of L shape step is less than the height of attachment crystal unit.

Further, the outer diameter of the gland and the outer diameter of cylinder are roughly equal, and the height at edge is less than the height of boss, The thickness at edge is less than the thickness on cylinder top.

Further, the elastic component is spring, and the mounting portion with the spring dismantling connection is hole slot.

Preferably, the quantity of the spring is 3-6；It preferably, is 4.

Further, the outer cover of the cylinder is equipped with shell, and the height of shell is approximately equal to the height of cylinder and gland The sum of degree.

Further, the cylinder and gland are made of the organic material of high purity graphite material or high-purity.

Further, the top opening of the cylinder, bottom are equipped with soft material layer；Preferably, the soft material Layer is foam cotton.

Further, the attachment crystal unit is the seed crystal bracket of crucible or hollow perforation.

Further, handle is provided at the top of the gland；Preferably, the handle is T-handle.

The application's has the beneficial effect that

(1) the application uses cylinder and gland structure, after attachment crystal unit is put at cylinder step, the boss of gland Pressing acts on crystal, makes crystal loose or dislocation, can be taken out conveniently crystal.

(2) the application makes the power stepless action of boss on crystal, prevents crystalline substance by the elastic component among cylinder and gland Crystal cleavage during body takes out.

(3) apparatus structure of the application is simple, can be taken out conveniently crystal, and crystal is opened during capable of preventing crystal from taking out It splits, guarantee the integrity of the crystal taken out and improves work efficiency.

Detailed description of the invention

The drawings described herein are used to provide a further understanding of the present application, constitutes part of this application, this Shen Illustrative embodiments and their description please are not constituted an undue limitation on the present application for explaining the application.In the accompanying drawings:

Fig. 1 is the schematic diagram of apparatus of the present invention；

Fig. 2 is the carborundum crystals photo taken out using apparatus of the present invention；

Fig. 3 is the carborundum crystals photo taken out using art methods；

Wherein, 1, shell；2, cylinder；3, gland；4, step；5, edge；6, boss；7, groove；8, spring；9, handle； 10, seed crystal bracket；11, carborundum crystals.

Specific embodiment

The application is described in detail below with reference to embodiment, but the application is not limited to these embodiments.

Many details are explained in the following description in order to fully understand the application, still, the application may be used also To be implemented using other than the one described here other modes, therefore, the protection scope of the application is not by described below Specific embodiment limitation.

In addition, in the description of the present application, it is to be understood that term " on ", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outside", etc. instructions orientation or positional relationship be orientation based on the figure Or positional relationship, it is merely for convenience of description the application and simplifies description, rather than the device or element of indication or suggestion meaning It must have a particular orientation, be constructed and operated in a specific orientation, therefore should not be understood as the limitation to the application.

All the embodiments in this specification are described in a progressive manner, same and similar portion between each embodiment Dividing may refer to each other, and each embodiment focuses on the differences from other embodiments.

In addition, term " first ", " second " are used for descriptive purposes only and cannot be understood as indicating or suggesting relative importance Or implicitly indicate the quantity of indicated technical characteristic.Define " first " as a result, the feature of " second " can be expressed or Implicitly include one or more of the features.In the description of the present application, the meaning of " plurality " is two or more, Unless otherwise specifically defined.

In this application unless specifically defined or limited otherwise, term " installation ", " connected ", " connection ", etc. terms answer It is interpreted broadly, for example, it may be being fixedly connected, may be a detachable connection, or is integral；It can be mechanical connection, It can be electrical connection, can also be communication；It can be directly connected, two can also be can be indirectly connected through an intermediary The interaction relationship of connection or two elements inside a element.For the ordinary skill in the art, Ke Yigen The concrete meaning of above-mentioned term in this application is understood according to concrete condition.

In this application unless specifically defined or limited otherwise, fisrt feature in the second feature " on " or " down " can be with It is that the first and second features directly contact or the first and second features pass through intermediary mediate contact.In retouching for this specification In stating, the description of reference term " one embodiment ", " some embodiments ", " example ", " specific example " or " some examples " etc. Mean that particular features, structures, materials, or characteristics described in conjunction with this embodiment or example are contained at least one of the application In embodiment or example.In the present specification, schematic expression of the above terms are necessarily directed to identical embodiment Or example.Moreover, particular features, structures, materials, or characteristics described can be in any one or more of the embodiments or examples It can be combined in any suitable manner.

This application provides a kind of crystal withdrawing devices, suitable for growing taking for crystal on the seed crystal of crucible inner upper end Out, it is particularly suitable for growing the taking-up of crystal using seed crystal bracket, the crystal includes but is not limited to silicon carbide, monocrystalline silicon, more Crystal silicon etc..

As described in Figure 1, crystal withdrawing device provided by the present application includes cylinder 2 and gland 3.

In one embodiment, the inner sidewall of cylinder 2 has inwardly projecting step 4, and step 4 is brilliant for placing attachment Body device, the top of cylinder 2 are symmetrically arranged with multiple springs 8；The outside of gland 3 has edge 5, and middle part is provided with pressing crystal Boss 6, between edge 5 and boss 6 formed groove 7,5 end of edge be correspondingly arranged on installation spring 8 hole slot.When crystal is raw After length, needs to take out in the crystal for growing attachment in crucible or on seed crystal bracket, attachment crystal unit is put into cylinder 2 In step at, by by spring correspondence be mounted at hole slot, uniformly firmly be slowly pressed downward gland 3, boss 6 acts on crystal On, after crystal is by uniform pressing force, it can be loosened on crucible or seed crystal bracket, to make crystal and crucible or seed crystal support Frame separation, to be taken out conveniently crystal.The setting of groove 7 extrudes crystal convenient for boss 6, can also press piezocrystal to avoid in boss 6 Seed crystal bracket is broken when body, and seed crystal bracket may be reused.

The step is L shape step, and the width of L shape step is equal to or less than the thickness of attachment crystal unit, L shape step Height is less than the height of attachment crystal unit.The specific size of L shape step is adjustable, as long as guaranteeing that boss 6 can press Crystal will not encounter 2 inner wall of cylinder when crystal falls off.When the seed crystal bracket of attachment crystal is placed on the lower surface of L shape step Afterwards, during taking crystalline substance, it is pressed downward gland 3, crystal will not collide the inner wall of cylinder 2 from loose or dislocation on seed crystal bracket, crystal.

The outer diameter of the outer diameter and cylinder 2 of the gland 3 is roughly equal, and the height at edge 5 is less than the height of boss 6, edge 5 Thickness be less than 2 top of cylinder thickness.Due to when the height that the height at edge 5 is less than boss 6, which can increase gland boss, to be pushed Stroke, guarantee relative ease extrude crystal.When taking crystalline substance, L shape step can be placed in the inside of groove 7, and boss 6 can enter To the intracavitary of attachment crystal unit.The size of edge 5 and boss 6 is adjustable, as long as guaranteeing that boss 6 can act on one section of crystal Distance.

Preferably, the difference in height of edge 5 and boss 6 is less than the height of L shape step, and when boss 6 presses crystal, boss 6 is stretched Enter to the intracavitary maximum distance of cylinder 2 be edge 5 and boss 6 difference in height, only need so that crystal loose or dislocation, without exerting oneself The too long distance of crystal is acted on, in case torque easily causes the cracking of crystal too much.

In a kind of optional embodiment, other elastic components that spring 8 can also be may be implemented using this field are corresponding The mounting portion for connecting the elastic component can also be in such a way that this field may be implemented.During taking crystalline substance, due to elastic component Presence, can have a buffer function to the power for acting on crystal, prevent from overexerting to crystal and cause crystal cleavage.Elastic component with The connection of mounting portion is to be detachably connected, and other any ways that this field may be implemented can also be used.

Preferably, the quantity of the spring 8 is 3-6；It preferably, is 4.4 symmetrically arranged springs 8 ensure that pressure The uniformity that lid 3 is exerted oneself, it is also more convenient using dismantling.

In one embodiment, which further includes shell 1,1 set of the shell outside in cylinder 2, and the height of shell 1 is big Cause the sum of the height for being equal to cylinder 2 Yu gland 3.Shell 1, cylinder 2 only retain dismountable gap between gland 3.Shell 1 It playing a protective role, when avoiding firmly pushing gland 3, the height of the double swerve of gland 3, shell cannot be too big, with Exempt to influence in gland 3 spring from the dismounting in hole slot, it has not been convenient to which gland takes out.

In one embodiment, the cylinder 2 and gland 3 are by high purity graphite material or the organic material system of high-purity At.High purity graphite material or the organic material of high-purity refer to material of the purity of graphite or organic matter 99.999% or more Material to guarantee to pollute crystal with the material of crystal contact, and can also guarantee to avoid the pollution to seed crystal bracket The reuse of seed crystal bracket, save the cost.

The top opening of the cylinder 2, bottom are equipped with soft material layer；Preferably, the soft material layer is foam Cotton.When the setting of soft material layer avoids that crystal is fallen down on seed crystal bracket, crystal causes to be crushed.The cylinder 2 can also be adopted With the cylindrical body of hollow perforation, it is only necessary to spread foam cotton when taking crystalline substance, below cylindrical body, prevent crystal from breaking into pieces.

The attachment crystal unit is the seed crystal bracket of crucible or hollow perforation.According to this field routine, seed crystal bracket or The bore of crucible body is all circle, and therefore, herein described cylinder 2 and shell 1 are hollow cylindrical body or analogous shape.

The top of the gland 3 is provided with handle 9；Preferably, the handle is T-handle.Handle is held, gland is facilitated Downwards firmly.

Top when in use, is put into the platform of cylinder 2 by the device of the application with the seed crystal bracket 10 of carborundum crystals 11 At rank 4, alignment hole slot is packed into spring, holds handle and uniformly firmly slowly pushes gland 3 simultaneously, damages to avoid deflection when pushing Bad seed crystal bracket and the pushing damage crystal that overexerts, boss 6 act on crystal, and crystal loose or dislocation is in the bottom of cylinder 2. Then gland 3 is removed, crystal is taken out.Plane of crystal is complete, without any cracking scratch damage, as shown in Figure 2.

Comparative example 1

After top is taken out with the seed crystal bracket of crystal, crystal is taken out by hitting or colliding seed crystal bracket, crystal table There are cracking, scratch and damage in face, as shown in Figure 3.

The above, only embodiments herein, the protection scope of the application is not by these specific embodiments Limitation, but determined by following claims.To those skilled in the art, the application can have various Change and variation.All any modification, equivalent replacement, improvement and so within the technical idea and principle of the application, should all Comprising within the scope of protection of this application.