阅读说明：本技术 一种建立零件加工坐标系的方法 (Method for establishing part machining coordinate system ) 是由 贺皑 杨希 任静 胡立 段巨坤 于 2021-07-26 设计创作，主要内容包括：本发明公开了一种建立零件加工坐标系的方法,属于航空结构件加工技术领域,包括将待加工零件划分工位-选定监测点并进行标记-利用三坐标测量机建立坐标系并记录各监测点的位置-再在工装夹具上重新建立坐标系并重新记录各监测点的位置-根据前两次的测量结果计算偏差-判断是否符合要求-不符合要求时进行调整至符合要求位置,同时还公开了调整方法,可以解决现有技术中,没有合适的适用于航空结构件中多面接头、精铸件等结构复杂且缺少加工余量零件的加工坐标系构建方法,或现有的零件加工坐标系,不能满足加工精度要求的问题。(The invention discloses a method for establishing a part machining coordinate system, which belongs to the technical field of aviation structural part machining and comprises the steps of dividing a part to be machined into stations, selecting monitoring points and marking, establishing the coordinate system by using a three-coordinate measuring machine and recording the positions of the monitoring points, reestablishing the coordinate system on a tool clamp and recording the positions of the monitoring points again, calculating deviation according to the measurement results of the previous two times, judging whether the deviation meets the requirements or not, adjusting the position to the position meeting the requirements when the deviation does not meet the requirements, meanwhile, an adjusting method is also disclosed, and the problem that in the prior art, no proper machining coordinate system construction method suitable for parts with complex structures such as multi-surface joints and precision castings and lacking machining allowance exists, or the existing part machining coordinate system cannot meet the machining precision requirement.)

1. A method of establishing a part machining coordinate system, comprising the steps of:

a. dividing a part into K stations for processing, processing the reference characteristics of the part at a station 1, and respectively assigning n corresponding monitoring points marked as PT1-PTn on the processing surfaces of the rest K-1 stations for monitoring the displacement of the part at the current processing station in each coordinate axis direction of XYZ, wherein the monitoring points are distributed to cover the part processing area at the current station, and K is more than or equal to 2;

b. after the processing of the jth station of the part is finished, establishing a measuring coordinate system X ' Y ' Z ' on a three-coordinate measuring machine by using the reference characteristics of the part, measuring the position of a monitoring point PT1-PTn on a station j +1, and recording the measuring result, wherein j belongs to 1 and j is less than k;

c. when a part enters a station j +1 for processing, the part is firstly installed on a tool clamp, and then a processing coordinate system is established on processing equipment by using an indirect reference on the tool clamp, wherein the processing coordinate system is marked as an initial coordinate system X₀Y₀Z₀Measuring the position of the monitoring point PT1-PTn again by using the initial coordinate system, and recording the measurement result;

d. according to the measurement results of the step b and the step c, alpha monitoring points are used for monitoring Z-direction coordinate displacement and calculating a Z coordinate deviation value delta Z alpha of the monitoring points; the beta monitoring points are used for monitoring the Y-direction coordinate displacement and calculating the Y-coordinate deviation value delta Y beta; gamma monitoring points are used for monitoring X-direction coordinate displacement and calculating an X coordinate deviation value delta X gamma, wherein alpha + beta + gamma = n;

e. judging whether the deviation values delta z alpha, delta y beta and delta x gamma of the measurement results in the step d exceed required values, wherein the required values do not exceed 25% of the minimum value of the tolerance zone of the characteristic positions of the parts on the station j + 1;

f. when the deviation value of the measurement result in the step e does not exceed the required value, the initial coordinate system can be used as a processing coordinate system of the part in the station; otherwise, the initial coordinate system should be adjusted until the deviation value does not exceed the required value.

2. The method for establishing the part machining coordinate system as claimed in claim 1, wherein in the step a, the number of the monitoring points satisfies the following requirements: through the displacement of 3 at least monitoring point monitoring part in Z axle direction, through the displacement of 2 at least monitoring point monitoring part in X or Y axle direction, through the displacement of 1 at least monitoring point monitoring part in the third coordinate axis direction.

3. The method for establishing the part processing coordinate system as claimed in claim 2, wherein in the step a, the positions of the monitoring points satisfy the following requirements: the monitoring point is positioned on the molded surface or the center of the hole, and when the monitoring point is positioned on the molded surface, the vector direction of the monitoring point is parallel to the direction of the coordinate axis monitored by the monitoring point; when the monitoring point is positioned at the center of the hole, the vector direction of the monitoring point is perpendicular to the direction of the coordinate axis monitored by the monitoring point.

4. A method of establishing a part machining coordinate system according to claim 3, wherein in step f, the method of adjusting the initial coordinate system when the deviation of the initial coordinate system exceeds a desired value comprises the steps of:

firstly adjusting Z coordinate deviation

a1. Firstly, an initial coordinate system X is set₀Y₀Z₀Z-zero point Z of₀Maximum value max [ Δ z α ] in offset Δ z α]To obtain Z₁I.e. Z₁= Z₀ +max[Δzα]Recording the offset coordinate system X on the processing device₀Y₀Z₁Then, subtracting the maximum value of Δ z α from all Δ z α results in Δ ZTe = Δ Ze-max [ Δ z α [ ]]If so, the value of delta ZTe is less than or equal to 0, wherein e is more than or equal to 1 and less than or equal to alpha;

b1. then, according to the calculated delta ZTe value, the parts are padded, and the padding processing is sequentially carried out from the minimum value of | delta ZTe |, wherein the padding size is equal to | delta ZTe |, and the padding position is between the part positioning surface corresponding to the delta ZTe and the tool clamp positioning surface or between the tool clamp and the machine tool workbench;

c1. using the adjusted coordinate system X on the processing equipment after the adjustment is completed₀Y₀Z₁Measuring a monitoring point of the vector direction of the part on the Z axis, and calculating whether a Z coordinate deviation value in the current measurement result and the measurement result in the step b exceeds a required value or not;

d1. if the required value is not exceeded, performing subsequent operation, otherwise, repeating the steps a1-c1 until the calculated result does not exceed the required value;

readjusting Y-coordinate deviation and X-coordinate deviation

e1. And after the Z coordinate is adjusted to meet the requirement, adjusting the Y coordinate deviation value delta Y beta and the X coordinate deviation value delta X gamma, determining a Z-direction zero point according to the sequence of establishing a coordinate system, determining a Y or X-direction zero point by using two points, and determining the rest X or Y-direction zero point by using one point.

5. The method for establishing the part processing coordinate system as claimed in claim 4, wherein the adjusting the Y coordinate deviation and the X coordinate deviation in step e1 comprises the following steps:

a', determining X, Y coordinate axis adjustment sequence, calculating the projection lengths of the connecting line of the two monitoring points on the X axis and the Y axis respectively according to the coordinate values of the two monitoring points in the measurement result in the step b, taking the axis with the larger projection length as the coordinate axis which is adjusted firstly, and then adjusting the other coordinate axis;

b ', calculating to obtain an included angle theta' between a connecting line of the two monitoring points and the coordinate axis which is determined in the step a 'and is adjusted in advance according to the coordinate values of the two monitoring points in the measurement result in the step b, wherein the included angle theta' is specified as a minimum angle required for rotating the coordinate axis forward to be parallel to the connecting line of the two monitoring points, and is specified as positive in a counterclockwise direction;

c ', calculating to obtain an included angle theta between a connecting line of the two monitoring points and the coordinate axis which is determined in the step a' and is adjusted in advance according to the coordinate values of the two monitoring points in the measurement result in the step c, wherein the included angle theta is specified as a minimum angle required for rotating the coordinate axis forward to be parallel to the BC connecting line, and the counterclockwise direction is specified as positive;

d ', calculating to obtain the angular deviation delta theta = theta-theta', and setting the reverse time direction pointer as positive;

e', converting the coordinate system X obtained in the step a1 into a coordinate system X₀Y₀Z₁C, translating the origin of coordinates, wherein the translation value is equal to the coordinate value of one monitoring point measured in the step c; then the coordinate system X₀Y₀Z₁The three coordinate axis directions are all translated to obtain a coordinate system X_aY_aZ_a；

f 'and then winding the previously adjusted coordinate axes determined in step a' around a coordinate system X_aY_aZ_aThe coordinate origin of (2) is rotated by an angle delta theta in the XY plane, the counterclockwise direction is positive, and a coordinate system X is obtained_bY_bZ_b，；

g', and then the coordinate system X_bY_bZ_bTranslating the origin of the coordinate, wherein the translation value is equal to the reverse value of the coordinate value measured by the same monitoring point in the step e' in the step b, and obtaining a coordinate system X_cY_cZ_c；

h', final verification of coordinate system X_cY_cZ_cWhether the requirements are met.

Technical Field

The invention relates to the technical field of aviation structural part machining, in particular to a method for establishing a part machining coordinate system, which is particularly suitable for accurately machining parts with complex structures and lack of machining allowance, such as multi-surface joints, precision castings and the like in aviation structural parts.

Background

In aerospace structures, to ensure the assembly relationship and interchangeability of parts, datums are often used to constrain the location and orientation of part features. I.e. a part of the features on the part are designated as a reference, and the relative position and orientation requirements between other characteristics of the part (such as the external surface, the hole center) and the reference must be satisfied. For parts with simple structures, the part reference and the part characteristics constrained by the reference are processed at the same station, and the requirements on the relative position and the direction between the part characteristics and the reference can be well met.

However, for parts with complex structures and requiring multiple stations for machining, the characteristics of the reference and the parts constrained by the reference cannot be machined at the same station, and measures must be taken to perform reference transmission between different stations to establish a more accurate machining coordinate system, so that qualified products can be machined.

For parts with sufficient machining allowance, a common method is to machine a temporary reference at each station for establishing a machining coordinate system for the next station. However, for parts with complex structures and lacking machining allowance, such as multi-surface joints and precision castings, because insufficient materials are used for machining temporary references, only a tool fixture can be used as an indirect reference to establish a part machining coordinate system. At the moment, the part machining coordinate system is greatly influenced by the manufacturing precision and the clamping condition of the tool clamp and the part, and the product is unqualified in serious conditions.

The patent application describes the technical scheme that a measured coordinate value is compared with a digital-analog theoretical coordinate value, and the problem that the difference between the tool state and the digital-analog theoretical state is too large is solved. The method can not meet the requirement of relative positions among product characteristics, is used for machining parts with complex structures such as multi-surface joints and precision castings and lack of machining allowance, and often has the problem that each surface of the product can be machined, but the relative positions of all surfaces of the product are inaccurate, so that the product is ultra-poor.

Therefore, a method for constructing a machining coordinate system of parts with complex structures and lack of machining allowance, such as multi-surface joints, precision castings and the like, which are suitable for aviation structural components, is needed to assist in precise machining of the aviation structural components.

Disclosure of Invention

The invention aims to provide a method for establishing a part machining coordinate system, which comprises the steps of establishing an initial coordinate system on machining equipment by using an indirect reference on a tool clamp, and measuring a monitoring point (point/hole center) at a specified position on a part on the initial coordinate system; the method has the advantages that a measurement coordinate system is established on a three-coordinate measuring machine by using the reference characteristics of the parts, monitoring points (points/hole centers) at the same positions on the parts are measured on the measurement coordinate system, and the problems that the machining precision of the parts is influenced because no machining coordinate system construction method which is suitable for parts with complex structures and lack of machining allowance, such as multi-surface joints, precision castings and the like, exists in the prior art can be solved.

The invention is realized by the following technical scheme:

a method of establishing a part machining coordinate system, comprising the steps of:

a. dividing a part into K stations for processing, processing the reference characteristics of the part at a station 1, and respectively assigning n corresponding monitoring points marked as PT1-PTn on the processing surfaces of the rest K-1 stations for monitoring the displacement of the part at the current processing station in each coordinate axis direction of XYZ, wherein the monitoring points are distributed to cover the part processing area at the current station, and K is more than or equal to 2;

b. after the processing of the jth station of the part is finished, establishing a measuring coordinate system X ' Y ' Z ' on a three-coordinate measuring machine by using the reference characteristics of the part, measuring the position of a monitoring point PT1-PTn on a station j +1, and recording the measuring result, wherein j belongs to 1 and j is less than k;

c. when a part enters a station j +1 for processing, the part is firstly installed on a tool clamp, and then a processing coordinate system is established on processing equipment by using an indirect reference on the tool clamp, wherein the processing coordinate system is marked as an initial coordinate system X₀Y₀Z₀And the position of the monitoring point PT1-PTn is measured again by using the initial coordinate system,and recording the measurement result;

d. according to the measurement results of the step b and the step c, alpha monitoring points are used for monitoring Z-direction coordinate displacement and calculating a Z coordinate deviation value delta Z alpha of the monitoring points; the beta monitoring points are used for monitoring the Y-direction coordinate displacement and calculating the Y-coordinate deviation value delta Y beta; gamma monitoring points are used for monitoring X-direction coordinate displacement and calculating an X coordinate deviation value delta X gamma, wherein alpha + beta + gamma = n;

e. judging whether the deviation values delta z alpha, delta y beta and delta x gamma of the measurement results in the step d exceed required values, wherein the required values do not exceed 25% of the minimum value of the tolerance zone of the characteristic positions of the parts on the station j + 1;

f. when the deviation value of the measurement result in the step e does not exceed the required value, the initial coordinate system can be used as a processing coordinate system of the part in the station; otherwise, the initial coordinate system should be adjusted until the deviation value does not exceed the required value.

Further, in step a, the number of the monitoring points should meet the following requirements: through the displacement of 3 at least monitoring point monitoring part in Z axle direction, through the displacement of 2 at least monitoring point monitoring part in X or Y axle direction, through the displacement of 1 at least monitoring point monitoring part in the third coordinate axis direction.

Further, in step a, the position of the monitoring point should meet the following requirements: the monitoring point is positioned on the molded surface or the center of the hole, and when the monitoring point is positioned on the molded surface, the vector direction of the monitoring point is parallel to the direction of the coordinate axis monitored by the monitoring point; when the monitoring point is positioned at the center of the hole, the vector direction of the monitoring point is perpendicular to the direction of the coordinate axis monitored by the monitoring point.

Further, in step f, when the deviation of the initial coordinate system exceeds a required value, the method for adjusting the initial coordinate system comprises the following steps:

firstly adjusting Z coordinate deviation

a1. Firstly, an initial coordinate system X is set₀Y₀Z₀Z-zero point Z of₀Maximum value max [ Δ z α ] in offset Δ z α]To obtain Z₁I.e. Z₁= Z₀ +max[Δzα]Recording the offset coordinate system X on the processing device₀Y₀Z₁Then, subtracting the maximum value of Δ z α from all Δ z α results in Δ ZTe = Δ Ze-max [ Δ z α [ ]]If so, the value of delta ZTe is less than or equal to 0, wherein e is more than or equal to 1 and less than or equal to alpha;

b1. then, according to the calculated delta ZTe value, the parts are padded, and the padding processing is sequentially carried out from the minimum value of | delta ZTe |, wherein the padding size is equal to | delta ZTe |, and the padding position is between the part positioning surface corresponding to the delta ZTe and the tool clamp positioning surface or between the tool clamp and the machine tool workbench;

c1. using the adjusted coordinate system X on the processing equipment after the adjustment is completed₀Y₀Z₁Measuring a monitoring point of the vector direction of the part on the Z axis, and calculating whether a Z coordinate deviation value in the current measurement result and the measurement result in the step b exceeds a required value or not;

d1. if the required value is not exceeded, performing subsequent operation, otherwise, repeating the steps a1-c1 until the calculated result does not exceed the required value;

readjusting Y-coordinate deviation and X-coordinate deviation

e1. And after the Z coordinate is adjusted to meet the requirement, adjusting the Y coordinate deviation value delta Y beta and the X coordinate deviation value delta X gamma, determining a Z-direction zero point according to the sequence of establishing a coordinate system, determining a Y or X-direction zero point by using two points, and determining the rest X or Y-direction zero point by using one point.

Further, in step e1, the adjusting the Y coordinate deviation and the X coordinate deviation includes the following steps:

a', determining X, Y coordinate axis adjustment sequence, calculating the projection lengths of the connecting line of the two monitoring points on the X axis and the Y axis respectively according to the coordinate values of the two monitoring points in the measurement result in the step b, taking the axis with the larger projection length as the coordinate axis which is adjusted firstly, and then adjusting the other coordinate axis;

b ', calculating to obtain an included angle theta' between a connecting line of the two monitoring points and the coordinate axis which is determined in the step a 'and is adjusted in advance according to the coordinate values of the two monitoring points in the measurement result in the step b, wherein the included angle theta' is specified as a minimum angle required for rotating the coordinate axis forward to be parallel to the connecting line of the two monitoring points, and is specified as positive in a counterclockwise direction;

c ', calculating to obtain an included angle theta between a connecting line of the two monitoring points and the coordinate axis which is determined in the step a' and is adjusted in advance according to the coordinate values of the two monitoring points in the measurement result in the step c, wherein the included angle theta is specified as a minimum angle required for rotating the coordinate axis forward to be parallel to the BC connecting line, and the counterclockwise direction is specified as positive;

d ', calculating to obtain the angular deviation delta theta = theta-theta', and setting the reverse time direction pointer as positive;

e', converting the coordinate system X obtained in the step a1 into a coordinate system X₀Y₀Z₁C, translating the origin of coordinates, wherein the translation value is equal to the coordinate value of one monitoring point measured in the step c; then the coordinate system X₀Y₀Z₁The three coordinate axis directions are all translated to obtain a coordinate system X_aY_aZ_a；

f 'and then winding the previously adjusted coordinate axes determined in step a' around a coordinate system X_aY_aZ_aThe coordinate origin of (2) is rotated by an angle delta theta in the XY plane, the counterclockwise direction is positive, and a coordinate system X is obtained_bY_bZ_b，；

g', and then the coordinate system X_bY_bZ_bTranslating the origin of the coordinate, wherein the translation value is equal to the reverse value of the coordinate value measured by the same monitoring point in the step e' in the step b, and obtaining a coordinate system X_cY_cZ_c；

h', final verification of coordinate system X_cY_cZ_cWhether the requirements are met.

Compared with the prior art, the invention has the following advantages and beneficial effects:

firstly, the invention adopts a method of measuring the appointed monitoring point (point/hole center) of each station based on the part standard, directly obtains the actual position relation between each station and the part standard, then measures the monitoring point (point/hole center) of the same position of the part on the processing equipment, and finally uses whether the deviation value of the two measurement results exceeds the required value as the basis for judging whether the processing coordinate system meets the requirement, thereby greatly improving the accuracy of the relative relation between the part characteristic and the standard in multi-station processing.

The invention further provides a method for adjusting the machining coordinate system, and the method has general applicability in the field of part finish machining.

And thirdly, according to the scheme, starting from the second station, a method for measuring monitoring points of each station based on the part datum is adopted before the subsequent stations are processed, and the actual position relation between each station and the part datum is directly obtained, so that datum transmission errors among different stations are reduced.

The method for establishing the part machining coordinate system is also applicable to the condition that the surfaces of the parts have relative position relation, except the condition that the reference for each surface of the parts is the same.

Drawings

FIG. 1 is a schematic view of the measurement of parts of the embodiment.

FIG. 2 is a schematic diagram of the measurement coordinate system X ' Y ' Z ' and the machining coordinate system XYZ of the parts in the embodiment.

Detailed Description

The present invention will be described in further detail with reference to examples, but the embodiments of the present invention are not limited thereto.

Example (b):

the embodiment provides a method for establishing a part machining coordinate system, which takes machining a certain precision casting part of an airplane as an example to understand the technical scheme, and the specific scheme is as follows:

as shown in fig. 1, the part is divided into 3 stations for processing, and a station 3 for processing the part is needed. The processing content is as follows: and (3) processing the round hole 1 with the phi of 8mm and the round hole 2 with the phi of 4mm on the D surface in place. The position tolerance of the D surface relative to the ABC reference is +/-0.2 mm, and the position degree of the circular hole 1 and the circular hole 2 relative to the ABC reference is phi 0.2 mm.

Wherein the reference surface A, the reference hole B and the reference hole C are already processed in place at the station 1.

The process of establishing the machining coordinate system by the station 3 is as follows:

a. 10 monitoring points are selected on the station 3 and are marked as PT1-PT10, wherein PT1-PT8 are used for monitoring Z-direction coordinate displacement, and PT9 and PT10 are used for monitoring X, Y-direction coordinate displacement.

b. After the part is machined in the station 2, establishing a measuring coordinate system X ' Y ' Z ' on a three-coordinate measuring machine by using an ABC reference to measure the positions of monitoring points PT1-PT10 on the station 3, and recording the measuring result. The measuring coordinate system X ' Y ' Z ' coincides ideally with the machining coordinate system XYZ of the station 3.

c. When a part enters the station 3 for processing, the part is firstly installed on the tool clamp, and then a processing coordinate system is established on processing equipment by using an indirect reference on the tool clamp, wherein the processing coordinate system is marked as an initial coordinate system X₀Y₀Z₀And measuring the positions of the monitoring points PT1-PT10 by using the coordinate system, and recording the measurement result.

d. Calculating deviation values of the measurement results in the steps b and c, wherein for PT1-PT8, Z coordinate deviation values delta Z alpha of the 8 monitoring points are calculated respectively (delta Z1-delta Z8, delta Z1= Z1-Z ' 1; delta Z2= Z2-Z ' 2 … delta Z8= Z8-Z ' 8); calculating Y coordinate deviation values delta Y beta (delta Y9-delta Y10, delta Y9= Y9-Y '9, and delta Y10= Y10-Y' 10) of the two monitoring points for PT9 and PT10 respectively; for PT9, its X coordinate deviation value Δ X γ (Δ X9, Δ X9= X9-X' 9) is calculated.

The calculated deviation and the required value of each monitoring point PT1-PT10 are shown in the following table 1.

Table 1:

PT	1	2	3	4	5	6	7	8	9	10	required value
												x									0.09		0.05
y									0.14	0.22	0.05
												z	0.07	-0.03	0.06	-0.05	-0.01	0.06	-0.04	0.08			0.1

e. And d, judging whether the deviation values delta z 1-delta z8, delta y 9-delta y10 and delta x9 of the measurement results in the step d exceed the required values, wherein the required values do not exceed 25% of the minimum value of the tolerance band of the characteristic positions of the parts on the station 3.

Because the position tolerance of the D surface relative to the ABC reference is +/-0.2 mm, the required value is not more than 0.1mm, namely | delta z alpha | is less than or equal to 0.1mm, (1 is less than or equal to alpha) is less than or equal to 8); as the position degrees of the round hole 1 and the round hole 2 relative to the ABC reference are phi 0.2mm, the required values are not more than 0.05mm, namely delta y9 is not more than 0.05mm, delta y10 is not more than 0.05mm, and delta x9 is not more than 0.05 mm.

As can be seen from the foregoing, the deviation values PT1-PT8 in Table 1 do not exceed the required values, and the deviation values PT9 and PT10 exceed the required values.

In the present embodiment, PT1-PT8 is used to monitor the Z-direction zero point, and PT1-PT8 meets the use requirement according to step e, so that it is not necessary to adjust the Z-direction zero point of the coordinate system. PT9 and PT10 are used for monitoring X, Y to the zero point of the coordinate, and according to the step e, PT9 and PT10 do not meet the use requirement, so that the Y coordinate and the X coordinate need to be adjusted.

The adjustment process is as follows, with reference to fig. 2:

in this embodiment, an included angle θ is formed between a connection line of the centers of the circular holes 1 and 2 and the X-axis.

Measuring coordinate values (x' ″) of centers of two round holes in the result according to step b₁，y＇₁）、（x＇₂，y＇₂) Respectively (0.06, -0.13), (600.15, 30.22), when the connecting line of the centers of the round hole 1 and the round hole 2 is calculated to form an angle theta ', theta ' = ATan [ (y ')₂- y＇₁)/ (x＇₂- x＇₁)]=0.05053 °, positive against the time hand.

C, measuring coordinate values (x) of the centers of the two round holes according to the measurement result in the step c₁，y₁）、（x₂，y₂) Respectively (0.15, 0.01), (600.236, 30.44), and then the connecting line of the centers of the round hole 1 and the round hole 2 forms an included angle theta with the X axis, theta = ATan [ (y)₂-y₁)/ (x₂-x₁)]= 0.05067 °, positive against the time hand.

And thirdly, calculating to obtain the angle deviation delta theta = theta-theta' =0.00014 degrees of the X axis, and setting the reverse direction needle to be positive.

Fourthly, obtaining the angle deviation Delta theta of the X axis according to the coordinate values of the centers of the two round holes and calculation, and converting the coordinate system X into the coordinate system X₀Y₀Z₀The origin of the coordinates is translated to the center of the circular hole 1 to obtain a coordinate system X₁Y₁Z₀Wherein the X-direction translation value is X₁=0.15mm, Y-direction translation value is Y₁=0.01mm。

Fifthly, coordinate system X₁Y₁Z₀The X-axis rotation angle Δ θ =0.00014 ° of (a) is obtained as a coordinate system X₂Y₂Z₀。

Sixthly, coordinate system X₂Y₂Z₀The coordinate origin is translated to obtain a coordinate system X₃Y₃Z₀Wherein the X-direction translation value is-X₁= -0.06mm, Y-shift value-Y₁=0.13mm。

Seventhly, verifying the adjusted coordinate system X₃Y₃Z₀Whether the requirements are met.

Using the new coordinate system X on the processing equipment₃Y₃Z₀And (5) measuring the positions of monitoring points PT1-PT10, and judging whether the measurement result meets the requirements or not according to the repeated steps b-e. If satisfactory, the coordinate system X can be used₃Y₃Z₀And (4) processing the coordinate system, otherwise, stopping operation, analyzing reasons, and adjusting the coordinate system to meet the requirements.

The above description is only a preferred embodiment of the present invention, and is not intended to limit the present invention in any way, and all simple modifications and equivalent variations of the above embodiments according to the technical spirit of the present invention are included in the scope of the present invention.