谐振器设备

文档序号:1836091 发布日期:2021-11-12 浏览:23次 >En<

阅读说明:本技术 谐振器设备 (Resonator device ) 是由 S·巴朗德拉斯 E·库尔容 F·伯纳德 A·拉维斯基 于 2020-03-19 设计创作,主要内容包括:本发明涉及一种测量应力的谐振器设备,该谐振器设备包括至少两个谐振器,每个谐振器包括被布置在位于压电基板上或压电基板中的两个反射结构之间的叉指换能器结构,其特征在于,所述至少两个谐振器按照使得所述至少两个谐振器具有两个不同的波传播方向的方式来布置和定位,并且每个谐振器包括至少两个部分,所述至少两个谐振器的两个部分之间的区域形成腔,其中,所述腔由所述至少两个谐振器共享。本发明还涉及一种包括至少一个如前所述的谐振器设备的差分感测设备。(The invention relates to a resonator device for measuring stress, comprising at least two resonators, each resonator comprising an interdigital transducer structure arranged between two reflecting structures located on or in a piezoelectric substrate, characterized in that the at least two resonators are arranged and positioned in such a way that they have two different wave propagation directions and each resonator comprises at least two parts, the area between the two parts of the at least two resonators forming a cavity, wherein the cavity is shared by the at least two resonators. The invention also relates to a differential sensing device comprising at least one resonator device as described above.)

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