阅读说明：本技术 用于锂离子电池阳极的组成调整的硅涂层 (Silicon coating for composition adjustment of lithium ion battery anodes ) 是由 C·于 王维洁 C·I·斯特凡 J·柏恩斯坦 D·西奥 于 2020-02-21 设计创作，主要内容包括：本文提供了用于锂离子电池电极的纳米结构和制造方法。在一些实施方案中,提供了涂覆有硅基涂层的纳米结构模版。所述硅涂层可以包括非保形的较多孔的富硅SiE-(x)层和在所述非保形的较多孔层上的保形的较致密的SiE-(x)层。在一些实施方案中,使用两种不同的沉积工艺：PECVD层以沉积非保形的富硅SiE-(x)层,和热CVD工艺以沉积保形的层。富硅SiE-(x)材料可防止硅晶畴生长,限制宏观膨胀,增加锂扩散速率并显著提高锂离子电池充电和放电循环期间的电池寿命。(Provided herein are nanostructures and methods of manufacture for electrodes of lithium ion batteries. In some embodiments, there is providedA nanostructured template coated with a silicon-based coating is provided. The silicon coating may comprise non-conformal, more porous silicon-rich SiE x A layer and a conformal denser SiE on the non-conformal more porous layer x And (3) a layer. In some embodiments, two different deposition processes are used: PECVD layer to deposit non-conformal silicon-rich SiE x A layer, and a thermal CVD process to deposit a conformal layer. Silicon-rich SiE x The material can prevent silicon crystalline domain growth, limit macroscopic expansion, increase lithium diffusion rate and significantly improve battery life during charge and discharge cycles of a lithium ion battery.)