Scanning electrochemical microscope path planning method and device based on script analysis

文档序号:1859690 发布日期:2021-11-19 浏览:15次 中文

阅读说明:本技术 基于脚本解析的扫描电化学显微镜路径规划方法及装置 (Scanning electrochemical microscope path planning method and device based on script analysis ) 是由 牛利 张硕 包宇 刘振邦 虞恭鹏 刘罡 马英明 王伟 于 2021-07-28 设计创作,主要内容包括:本发明公开了基于脚本解析的扫描电化学显微镜路径规划方法及装置,方法包括:获取自定义编写脚本或者用户输入脚本;根据所述自定义编写脚本或者所述用户输入脚本,生成扫描路径;或者通过单色位图生成扫描路径;根据所述扫描路径确定指令序列脚本;根据所述指令序列脚本确定扫描电化学显微镜的设置参数;根据所述设置参数确定所述扫描电化学显微镜的路径,并完成相应实验。本发明提高了路径规划的灵活性,可广泛应用于数据处理技术领域。(The invention discloses a scanning electrochemical microscope path planning method and a device based on script analysis, wherein the method comprises the following steps: acquiring a custom writing script or a user input script; generating a scanning path according to the custom writing script or the user input script; or generating a scanning path through a monochrome bitmap; determining an instruction sequence script according to the scanning path; determining the setting parameters of the scanning electrochemical microscope according to the instruction sequence script; and determining the path of the scanning electrochemical microscope according to the setting parameters, and completing a corresponding experiment. The invention improves the flexibility of path planning and can be widely applied to the technical field of data processing.)

1. A scanning electrochemical microscope path planning method based on script analysis is characterized by comprising the following steps:

acquiring a custom writing script or a user input script;

generating a scanning path according to the custom writing script or the user input script; or generating a scanning path through a monochrome bitmap;

determining an instruction sequence script according to the scanning path;

determining the setting parameters of the scanning electrochemical microscope according to the instruction sequence script;

and determining the path of the scanning electrochemical microscope according to the setting parameters, and completing a corresponding experiment.

2. The method of claim 1, wherein generating a scan path according to the custom scripted, script-based scanning electrochemical microscope path planning method comprises:

acquiring a basic instruction and a high-level instruction in the custom writing script;

generating a scanning path according to the basic instruction and the high-level instruction;

wherein the base instruction comprises: a displacement instruction of the scanning probe moving up, down, left and right, a movement speed instruction of the motor, a displacement increment instruction of the motor, a retention time instruction of the scanning probe at a scanning point, and an instruction of current collection of the scanning point;

the high-level instructions include: a condition judgment instruction, a circulation instruction, an electrode open-circuit potential instruction in measurement work, a working electrode disconnection instruction and an electrochemical experiment method introduction instruction.

3. The method of claim 1, wherein generating a scan path according to the user input script comprises:

analyzing the user input script item by item;

performing semantic analysis on each script obtained by analysis, and analyzing to obtain an instruction sequence set; wherein the instruction sequence set comprises a basic instruction and a high-level instruction.

4. The method of claim 3, wherein analyzing the user input script on a case-by-case basis comprises:

judging whether the current script is an ending instruction, if so, ending the script analysis step; if not, sending an instruction to a lower computer to read an instruction return value of the lower computer, and analyzing a next script instruction according to the instruction return value.

5. The method of claim 1, wherein generating the scan path from a monochromatic bitmap comprises:

converting the monochrome bitmap into a two-dimensional array;

setting a pixel interval in a bitmap according to the two-dimensional array;

and determining the starting point and the ending point of the scanning path to generate the scanning path.

6. A scanning electrochemical microscope path planning device based on script analysis is characterized by comprising:

the first module is used for acquiring a custom writing script or a user input script;

the second module is used for generating a scanning path according to the custom writing script or the user input script; or generating a scanning path through a monochrome bitmap;

a third module for determining an instruction sequence script according to the scan path;

the fourth module is used for determining the setting parameters of the scanning electrochemical microscope according to the instruction sequence script;

and the fifth module is used for determining the path of the scanning electrochemical microscope according to the setting parameters and completing corresponding experiments.

7. An electronic device comprising a processor and a memory;

the memory is used for storing programs;

the processor executing the program realizes the method according to any one of claims 1-5.

8. A computer-readable storage medium, characterized in that the storage medium stores a program, which is executed by a processor to implement the method according to any one of claims 1-5.

Technical Field

The invention relates to the technical field of data processing, in particular to a scanning electrochemical microscope path planning method and device based on script analysis.

Background

Scanning Electrochemical Microscopy (SECM) is one type of microscope. Working on the electrochemical principle, the electrochemical current given by the oxidation or reduction of a substance in a micro-area can be measured. The highest resolution currently achievable is on the order of tens of nanometers, with very small electrodes (probes) driven to scan close to the sample, which can be a conductor, insulator or semiconductor, to obtain the corresponding micro-area electrochemistry and related information. The conventional secm uses ITO as a scanning substrate, modification and etching are carried out on the ITO, and the scanning probe microscope has a positive feedback mode and a negative feedback mode working mode, so that the conductive property of the substrate can be reflected through the current, and the despise imaging of the shape of the scanning substrate is realized.

The SECM can not only study heterogeneous reaction kinetics of the scanning probe and the substrate and homogeneous reaction kinetics in the solution, but also distinguish electrochemical nonuniformity of micro-regions on the surface of the electrode, give the appearance of the surface of a conductor and an insulator, even carry out micro-processing on materials, study a plurality of important biological processes and the like. SECM is a reality since it is being investigated for pharmacological release, phase transfer catalysis, dynamic processes, etc.

The scanning imaging is shown by thermodynamic diagrams, namely xy axis is a scanning area of the probe, z axis is the current intensity of the scanning area, and different current intensities can express the material property of the scanning substrate.

Microfabrication (micromachining technology): the scanning probe provides a fixed potential which can carry out oxidation and reduction reactions on the scanning substrate so as to complete the deposition and etching of the scanning substrate.

Script (script): is a sequence of instructions described in a particular programming language. Execution of the instructions is performed by the interpreter in a logical or sequential order.

Monochrome bitmap: there are pixel maps of only two colors, black and white.

Matrix: the image is described by a matrix, the rows and columns of the matrix represent the number of pixels in length and width on the image, and the value of the matrix is only 0 and 255, wherein 0 represents white and 255 represents black.

The existing scanning electrochemical microscope can only scan through a single path, such as an S-type scanning path and an E-type scanning path, and a user needs to set related experimental parameters in advance, and parameters such as a scanning moving direction, a moving distance, a moving speed, a displacement distance and the like for planning the S-type scanning path and the E-type scanning path, and the two scanning paths are relatively fixed and have low operation flexibility.

Disclosure of Invention

In view of this, the embodiments of the present invention provide a method and an apparatus for planning a path of a scanning electrochemical microscope based on script analysis, which have high flexibility.

The invention provides a scanning electrochemical microscope path planning method based on script analysis, which comprises the following steps:

acquiring a custom writing script or a user input script;

generating a scanning path according to the custom writing script or the user input script; or generating a scanning path through a monochrome bitmap;

determining an instruction sequence script according to the scanning path;

determining the setting parameters of the scanning electrochemical microscope according to the instruction sequence script;

and determining the path of the scanning electrochemical microscope according to the setting parameters, and completing a corresponding experiment.

Optionally, the generating a scanning path according to the custom script writing includes:

acquiring a basic instruction and a high-level instruction in the custom writing script;

generating a scanning path according to the basic instruction and the high-level instruction;

wherein the base instruction comprises: a displacement instruction of the scanning probe moving up, down, left and right, a movement speed instruction of the motor, a displacement increment instruction of the motor, a retention time instruction of the scanning probe at a scanning point, and an instruction of current collection of the scanning point;

the high-level instructions include: a condition judgment instruction, a circulation instruction, an electrode open-circuit potential instruction in measurement work, a working electrode disconnection instruction and an electrochemical experiment method introduction instruction.

Optionally, the generating a scanning path according to the user input script includes:

analyzing the user input script item by item;

performing semantic analysis on each script obtained by analysis, and analyzing to obtain an instruction sequence set; wherein the instruction sequence set comprises a basic instruction and a high-level instruction.

Optionally, the analyzing the user input script item by item includes:

judging whether the current script is an ending instruction, if so, ending the script analysis step; if not, sending an instruction to a lower computer to read an instruction return value of the lower computer, and analyzing a next script instruction according to the instruction return value.

Optionally, generating the scan path through a monochrome bitmap includes:

converting the monochrome bitmap into a two-dimensional array;

setting a pixel interval in a bitmap according to the two-dimensional array;

and determining the starting point and the ending point of the scanning path to generate the scanning path.

The embodiment of the invention also provides a scanning electrochemical microscope path planning device based on script analysis, which comprises:

the first module is used for acquiring a custom writing script or a user input script;

the second module is used for generating a scanning path according to the custom writing script or the user input script; or generating a scanning path through a monochrome bitmap;

a third module for determining an instruction sequence script according to the scan path;

the fourth module is used for determining the setting parameters of the scanning electrochemical microscope according to the instruction sequence script;

and the fifth module is used for determining the path of the scanning electrochemical microscope according to the setting parameters and completing corresponding experiments.

The embodiment of the invention also provides the electronic equipment, which comprises a processor and a memory;

the memory is used for storing programs;

the processor executes the program to implement the method as described above.

An embodiment of the present invention further provides a computer-readable storage medium, where the storage medium stores a program, and the program is executed by a processor to implement the method described above.

The embodiment of the invention also discloses a computer program product or a computer program, which comprises computer instructions, and the computer instructions are stored in a computer readable storage medium. The computer instructions may be read by a processor of a computer device from a computer-readable storage medium, and the computer instructions executed by the processor cause the computer device to perform the foregoing method.

The embodiment of the invention obtains a custom writing script or a user input script; generating a scanning path according to the custom writing script or the user input script; or generating a scanning path through a monochrome bitmap; determining an instruction sequence script according to the scanning path; determining the setting parameters of the scanning electrochemical microscope according to the instruction sequence script; and determining the path of the scanning electrochemical microscope according to the setting parameters, and completing a corresponding experiment. The invention improves the flexibility of path planning.

Drawings

In order to more clearly illustrate the technical solutions in the embodiments of the present application, the drawings needed to be used in the description of the embodiments are briefly introduced below, and it is obvious that the drawings in the following description are only some embodiments of the present application, and it is obvious for those skilled in the art to obtain other drawings based on these drawings without creative efforts.

FIG. 1 is a flowchart illustrating the overall steps provided by an embodiment of the present invention;

fig. 2 is a schematic diagram of two-dimensional matrix conversion according to an embodiment of the present invention.

Detailed Description

In order to make the objects, technical solutions and advantages of the present application more apparent, the present application is described in further detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the present application and are not intended to limit the present application.

Aiming at the problems in the prior art, the invention provides a script analysis method based on a description language to realize the self-defined planning of a path, further realize the path self-definition of a scanning probe based on the self experiment requirement, or analyze based on the existing script of a user, generate a corresponding scanning path and set experiment parameters. And the user can select the script written by the user in the upper computer interface. In addition, a self-defined path is provided for micro-processing and electroetching based on the scanning electrochemical probe microscope, patterning processing can be carried out in a script mode, different path planning algorithms are introduced on the basis of the method, parameters such as motor running speed, displacement precision and probe acquisition time are further controlled, the scanning path is optimized, and probe displacement precision is improved. The method has higher flexibility and expands the application scene of the instrument.

The invention provides a scanning electrochemical microscope path planning method based on script analysis, which comprises the following steps:

acquiring a custom writing script or a user input script;

generating a scanning path according to the custom writing script or the user input script; or generating a scanning path through a monochrome bitmap;

determining an instruction sequence script according to the scanning path;

determining the setting parameters of the scanning electrochemical microscope according to the instruction sequence script;

and determining the path of the scanning electrochemical microscope according to the setting parameters, and completing a corresponding experiment.

Optionally, the generating a scanning path according to the custom script writing includes:

acquiring a basic instruction and a high-level instruction in the custom writing script;

generating a scanning path according to the basic instruction and the high-level instruction;

wherein the base instruction comprises: a displacement instruction of the scanning probe moving up, down, left and right, a movement speed instruction of the motor, a displacement increment instruction of the motor, a retention time instruction of the scanning probe at a scanning point, and an instruction of current collection of the scanning point;

the high-level instructions include: a condition judgment instruction, a circulation instruction, an electrode open-circuit potential instruction in measurement work, a working electrode disconnection instruction and an electrochemical experiment method introduction instruction.

Optionally, the generating a scanning path according to the user input script includes:

analyzing the user input script item by item;

performing semantic analysis on each script obtained by analysis, and analyzing to obtain an instruction sequence set; wherein the instruction sequence set comprises a basic instruction and a high-level instruction.

Optionally, the analyzing the user input script item by item includes:

judging whether the current script is an ending instruction, if so, ending the script analysis step; if not, sending an instruction to a lower computer to read an instruction return value of the lower computer, and analyzing a next script instruction according to the instruction return value.

Optionally, generating the scan path through a monochrome bitmap includes:

converting the monochrome bitmap into a two-dimensional array;

setting a pixel interval in a bitmap according to the two-dimensional array;

and determining the starting point and the ending point of the scanning path to generate the scanning path.

The embodiment of the invention also provides a scanning electrochemical microscope path planning device based on script analysis, which comprises:

the first module is used for acquiring a custom writing script or a user input script;

the second module is used for generating a scanning path according to the custom writing script or the user input script; or generating a scanning path through a monochrome bitmap;

a third module for determining an instruction sequence script according to the scan path;

the fourth module is used for determining the setting parameters of the scanning electrochemical microscope according to the instruction sequence script;

and the fifth module is used for determining the path of the scanning electrochemical microscope according to the setting parameters and completing corresponding experiments.

The embodiment of the invention also provides the electronic equipment, which comprises a processor and a memory;

the memory is used for storing programs;

the processor executes the program to implement the method as described above.

An embodiment of the present invention further provides a computer-readable storage medium, where the storage medium stores a program, and the program is executed by a processor to implement the method described above.

The embodiment of the invention also discloses a computer program product or a computer program, which comprises computer instructions, and the computer instructions are stored in a computer readable storage medium. The computer instructions may be read by a processor of a computer device from a computer-readable storage medium, and the computer instructions executed by the processor cause the computer device to perform the foregoing method.

The following describes in detail the implementation process of the path planning method of the scanning electrochemical microscope according to the present invention with reference to the attached drawings: as shown in fig. 1:

1. the script can be graphically dragged or written by script writing software provided by the software. The scan path script is mainly used for primarily setting scan path parameters, including basic instructions and advanced instructions. Basic instructions include, but are not limited to, the following: the method comprises the steps of (1) a displacement instruction (go/back/left/right in micrometer) for moving the scanning probe up and down and left and right, a movement speed (speed in micrometer/second) of the motor and a displacement Increment of the motor, namely a movement Distance (Distance Increment in micrometer) of the motor, and Current Acquisition (Current Acquisition) for a scanning point when the scanning probe stays at the scanning point for a period (time in millisecond). Besides the basic command, a certain logic judgment command such as an IF-ElSE or a cycle command FOR, etc., a command FOR measuring the open-circuit potential of the working electrode or introducing other electrochemical experiment methods (such as performing other electrochemical experiments under a certain condition, but not constant potential experiments), and whether to disconnect the working electrode (on/off) is also provided.

2. If the user has self-defined scripts, the method analyzes the self-defined scripts of the user, firstly analyzes each script one by one, the written scripts generate corresponding instructions through semantic analysis, the instructions are executed in sequence, and finally the analyzed scripts generate a complete instruction sequence set under the electrode moving speed. And generating a related instruction sequence set, wherein the generated instruction sequence set is generally a combination of a basic instruction and a high-level instruction, generating related path planning and probe state parameters (generally parameters such as a moving step length, a retention time and an acquisition time) or experimental method information according to the generated instruction sequence set, and planning a system scanning path and controlling the probe state parameters so as to scan conveniently.

3. During micro-processing, path generation can be performed by adopting a monochrome bitmap. Since there are only black and white in a monochrome bitmap, black is considered to be the probe scan path. That is, only black needs to be recognized, and connecting black into a line is a scanning path. The monochrome bitmap is first parsed and the image is converted into a 2-valued two-dimensional matrix. As shown in fig. 2, in the conversion, black is 255 and white is 0, the length and width of the graph are obtained first, for example, the graph is a monochrome bitmap of 5 × 4 pixels, the graph can be converted into a two-dimensional matrix of 5 rows and 4 columns, each pixel corresponds to a value in the two-dimensional matrix, and the two-dimensional matrix after the analysis of the monochrome bitmap can be obtained. After the pixel pitch is set to be the pixel pitch, such as 5X4 pixels, which can be linked with the actual scanning area, if the pixel pitch is set to be 30 microns, the image is mapped to the actual distance position of 150 microns X120 microns ((5X30 microns) X (4X30 microns)). Parameters such as probe applied potential, applied potential time and the like can be set for describing a scanning path and a probe control method, the parameters are combined with a high-level instruction, the current collected by the probe can be used for judging the electrochemical corrosion or electrochemical deposition degree, the displacement position and the probe state of the scanning probe can be described by the method, a scanning instruction sequence set is finally generated, and the patterning function of the scanning electrochemical microscope is completed by executing the instruction sequence set.

4. The experiment was started and one of the three modes was selected for the experiment. After the experiment is finished, the experimental mode or script and experimental data are stored, so that a user can conveniently check the experimental mode or script and experimental data at any time in the later experimental process.

It will be appreciated that the conventional SECM provides a single scan path, with greater flexibility by performing the patterning process in a script or image fashion. On the premise of a known scanning path, different path planning algorithms can be introduced by adopting a script mode, conditions such as motor speed, displacement accuracy and the like can be intelligently planned through the path planning algorithms, the path of a complex image, such as a curve or a line segment with radian, can be more finely described, and further higher scanning and micro-processing accuracy is achieved.

The script solves the problem that the scanning path is too single in the experimental process. The method can control the scanning path of the probe according to the set script and plan and control the state of the probe according to the required scanning area.

In conclusion, the flexibility of the SECM scanning path is expanded, the conventional SECM scanning path is single, the patterning processing is carried out by introducing a script or image mode, the flexibility is high, different path planning algorithms are introduced on the premise of the known scanning path, parameters such as displacement precision, motor running speed and scanning probe staying time are intelligently regulated and controlled, and the scanning precision and the state control of the electrode are improved.

In alternative embodiments, the functions/acts noted in the block diagrams may occur out of the order noted in the operational illustrations. For example, two blocks shown in succession may, in fact, be executed substantially concurrently, or the blocks may sometimes be executed in the reverse order, depending upon the functionality/acts involved. Furthermore, the embodiments presented and described in the flow charts of the present invention are provided by way of example in order to provide a more thorough understanding of the technology. The disclosed methods are not limited to the operations and logic flows presented herein. Alternative embodiments are contemplated in which the order of various operations is changed and in which sub-operations described as part of larger operations are performed independently.

Furthermore, although the present invention is described in the context of functional modules, it should be understood that, unless otherwise stated to the contrary, one or more of the described functions and/or features may be integrated in a single physical device and/or software module, or one or more functions and/or features may be implemented in a separate physical device or software module. It will also be appreciated that a detailed discussion of the actual implementation of each module is not necessary for an understanding of the present invention. Rather, the actual implementation of the various functional modules in the apparatus disclosed herein will be understood within the ordinary skill of an engineer, given the nature, function, and internal relationship of the modules. Accordingly, those skilled in the art can, using ordinary skill, practice the invention as set forth in the claims without undue experimentation. It is also to be understood that the specific concepts disclosed are merely illustrative of and not intended to limit the scope of the invention, which is defined by the appended claims and their full scope of equivalents.

The functions, if implemented in the form of software functional units and sold or used as a stand-alone product, may be stored in a computer readable storage medium. Based on such understanding, the technical solution of the present invention may be embodied in the form of a software product, which is stored in a storage medium and includes instructions for causing a computer device (which may be a personal computer, a server, or a network device) to execute all or part of the steps of the method according to the embodiments of the present invention. And the aforementioned storage medium includes: a U-disk, a removable hard disk, a Read-Only Memory (ROM), a Random Access Memory (RAM), a magnetic disk or an optical disk, and other various media capable of storing program codes.

The logic and/or steps represented in the flowcharts or otherwise described herein, e.g., an ordered listing of executable instructions that can be considered to implement logical functions, can be embodied in any computer-readable medium for use by or in connection with an instruction execution system, apparatus, or device, such as a computer-based system, processor-containing system, or other system that can fetch the instructions from the instruction execution system, apparatus, or device and execute the instructions. For the purposes of this description, a "computer-readable medium" can be any means that can contain, store, communicate, propagate, or transport the program for use by or in connection with the instruction execution system, apparatus, or device.

More specific examples (a non-exhaustive list) of the computer-readable medium would include the following: an electrical connection (electronic device) having one or more wires, a portable computer diskette (magnetic device), a Random Access Memory (RAM), a read-only memory (ROM), an erasable programmable read-only memory (EPROM or flash memory), an optical fiber device, and a portable compact disc read-only memory (CDROM). Additionally, the computer-readable medium could even be paper or another suitable medium upon which the program is printed, as the program can be electronically captured, via for instance optical scanning of the paper or other medium, then compiled, interpreted or otherwise processed in a suitable manner if necessary, and then stored in a computer memory.

It should be understood that portions of the present invention may be implemented in hardware, software, firmware, or a combination thereof. In the above embodiments, the various steps or methods may be implemented in software or firmware stored in memory and executed by a suitable instruction execution system. For example, if implemented in hardware, as in another embodiment, any one or combination of the following techniques, which are known in the art, may be used: a discrete logic circuit having a logic gate circuit for implementing a logic function on a data signal, an application specific integrated circuit having an appropriate combinational logic gate circuit, a Programmable Gate Array (PGA), a Field Programmable Gate Array (FPGA), or the like.

In the description herein, references to the description of the term "one embodiment," "some embodiments," "an example," "a specific example," or "some examples," etc., mean that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the invention. In this specification, the schematic representations of the terms used above do not necessarily refer to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples.

While embodiments of the invention have been shown and described, it will be understood by those of ordinary skill in the art that: various changes, modifications, substitutions and alterations can be made to the embodiments without departing from the principles and spirit of the invention, the scope of which is defined by the claims and their equivalents.

While the preferred embodiments of the present invention have been illustrated and described, it will be understood by those skilled in the art that various changes in form and details may be made therein without departing from the spirit and scope of the invention as defined by the appended claims.

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