阅读说明：本技术 一种真空焊接炉 (Vacuum welding furnace ) 是由 向军 王钊一 冯霞霞 王金磊 于 2021-08-16 设计创作，主要内容包括：本发明提供了一种真空焊接炉,包括工作台和炉盖,所述工作台上从左至右依次设置有预热区、真空焊接区和冷却区,所述炉盖中设有瞬时加热扩散机构,氮气通过所述瞬时加热扩散机构加热后进入所述焊接炉内；所述炉盖中,位于所述真空焊接区的上方设置有仓罩,所述炉盖中还设置有出气口,所述出气口连接有油气分离装置。通过设置瞬时加热扩散机构和油气分离装置,氮气经过瞬时加热扩散机构加热后进入焊接炉内赶走焊接炉内的空气,从而避免锡膏氧化影响焊接效果,同时避免了温度较低的氮气直接接触工件造成焊接空洞率大的问题；通过设置油气分离装置能够分离混合气体中的油液并将油液回收进行利用,节约焊油用量,降低制造成本。(The invention provides a vacuum welding furnace, which comprises a workbench and a furnace cover, wherein a preheating zone, a vacuum welding zone and a cooling zone are sequentially arranged on the workbench from left to right; and a bin cover is arranged above the vacuum welding area in the furnace cover, a gas outlet is also arranged in the furnace cover, and the gas outlet is connected with an oil-gas separation device. By arranging the instantaneous heating diffusion mechanism and the oil-gas separation device, nitrogen is heated by the instantaneous heating diffusion mechanism and then enters the welding furnace to drive away air in the welding furnace, so that the welding effect is prevented from being influenced by oxidation of solder paste, and the problem of high welding voidage caused by direct contact of nitrogen with a workpiece at a lower temperature is avoided; through setting up the fluid in the oil-gas separation device can the separation mist and recycle fluid, practice thrift the welding oil quantity, reduce manufacturing cost.)

1. The utility model provides a vacuum welding furnace, is including installing workstation (2) on fixed frame (1) and articulated the installation be in bell (3) on workstation (2), bell (3) can be done the lid and close workstation (2) are gone up or the switching of open mode, workstation (2) are gone up and are set gradually preheating zone (4), vacuum welding district (5) and cooling space (6) from a left side to the right side, its characterized in that:

an instantaneous heating diffusion mechanism (7) is arranged above the preheating zone (4) in the furnace cover (3), and nitrogen enters the welding furnace after being heated by the instantaneous heating diffusion mechanism (7);

a bin cover (8) is arranged above the vacuum welding area (5) in the furnace cover (3), the bin cover (8) is installed in the furnace cover (3) through a driving mechanism, and the driving mechanism can drive the bin cover (8) to be covered on a support plate (9) of the vacuum welding area (5) to form a sealed inner cavity;

an air outlet (11) is further formed in the furnace cover (3), and the air outlet (11) is connected with an oil-gas separation device.

2. A vacuum welding furnace as defined in claim 1, wherein: a plurality of supporting tables (12) are transversely arranged on the workbench (2), each supporting table (12) is composed of a plurality of supporting blocks (120) which are longitudinally arranged at intervals, a transfer rod (13) is arranged between every two adjacent supporting blocks (120), the transfer rods (13) are transversely arranged, and one end of each transfer rod (13) is fixedly arranged on the movable frame (14) and can move along the transverse or vertical direction of the movable frame (14);

a linear bearing (15) is arranged below the transfer rod (13), a window hole (16) is formed between the adjacent supporting blocks (120), a shell (150) of the linear bearing (15) is fixedly installed on the workbench (2) and is positioned below the window hole (16), an optical axis (151) of the linear bearing (15) penetrates into the window hole (16) along the vertical direction and can move along the vertical direction, a concave supporting groove (17) is formed in the top of the optical axis (151), a rod body of the transfer rod (13) is embedded into the supporting groove (17), a supporting wheel (18) is installed in the supporting groove (17), a wheel wall of the supporting wheel (18) is attached to a rod wall of the transfer rod (13), and a rotating center of the supporting wheel (18) is arranged along the horizontal direction and is perpendicular to the transfer rod (13);

fixed mounting has along horizontal guide rail (19) that sets up on adjustable shelf (14), it is provided with slider (20) to slide on guide rail (19), the bottom fixed mounting of optical axis (151) is in on slider (20).

3. A vacuum welding furnace as defined in claim 1, wherein: the instantaneous heating diffusion mechanism (7) comprises a mounting groove (21) and an air guide groove (22) which is arranged on a cover plate (10) penetrating through the furnace cover (3), the mounting groove (21) is arranged on the lower end face of the cover plate (10) and communicated with the air guide groove (22), a baffle (23) is mounted in the mounting groove (21), the baffle (23) is arranged in a gap with the bottom of the mounting groove (21), the baffle (23) is arranged in a gap with the wall of the mounting groove (21), and a gap between the baffle (23) and the mounting groove (21) forms an air inlet heating channel (24); the top of apron (10) is equipped with installation piece (25), be provided with air inlet end (26) and spread groove (27) that are linked together in installation piece (25), spread groove (27) with lead air groove (22) and be linked together.

4. A vacuum welding furnace as defined in claim 1, wherein: a suction pipe (30) is arranged on the bin cover (8); one end of the suction pipe (30) is communicated with the sealed inner cavity, the other end of the suction pipe (30) is connected with a reversing valve (31), the reversing valve (31) is provided with a first connecting port (32), a second connecting port (33) and a third connecting port (34), the first connecting port (32) is connected with a nitrogen inlet pipe (35), the second connecting port (33) is connected with a vacuum tank (36), and the third connecting port (34) is connected with the suction pipe (30),

when the reversing valve (31) is connected at the left position, the second connecting port (33) is communicated with the third connecting port (34), and the sealed inner cavity is pumped into a vacuum state;

when the reversing valve (31) is connected to the right, the first connecting port (32) is communicated with the third connecting port (34), and the nitrogen inlet pipe (35) is used for filling nitrogen into the sealed inner cavity.

5. A vacuum welding furnace as defined in claim 1, wherein: the bin cover (8) is limited by a peripheral plate (40) and a top plate (41), an inwards concave annular sealing groove (42) is formed in the bottom end face of the peripheral plate (40), the annular sealing groove (42) is wound on the periphery of the sealing inner cavity, a sealing rubber strip (43) is installed in the annular sealing groove (42), and the sealing rubber strip (43) can be in sealing fit with the upper end face of the carrier plate (9); still be provided with water-cooling passageway (44) on storehouse cover (8), water-cooling passageway (44) are followed sealed inner chamber's periphery is around establishing, the one end of water-cooling passageway (44) is equipped with into water end (440), and the other end is equipped with out water end (441).

6. A vacuum welding furnace as defined in claim 1, wherein: the driving mechanism comprises a driving cylinder (45) and a guide pillar (46), wherein a cylinder body of the driving cylinder (45) is fixedly arranged on a support (47) of the furnace cover (3), a piston rod of the driving cylinder (45) is fixedly connected with the bin cover (8), the piston rod of the driving cylinder (45) extends to drive the bin cover (8) to cover the support plate (9) to form the sealed inner cavity, one end of the guide pillar (46) is fixedly arranged on the bin cover (8), the guide pillar (46) is parallel to the piston rod of the driving cylinder (45), and a guide sleeve (48) matched with the guide pillar (46) is arranged on the support (47).

7. A vacuum welding furnace as defined in claim 1, wherein: the oil-gas separation device comprises a cylinder body (50), wherein a second air inlet pipe (51) communicated with the air outlet (11) is arranged on the side wall of the cylinder body (50), an air outlet pipe (52) is arranged at the top of the cylinder body (50), an oil outlet (53) is arranged at the bottom of the cylinder body (50), a metal filter screen cylinder (54) is arranged in an inner cavity of the cylinder body (50), the top of the metal filter screen cylinder (54) is fixedly installed in the cylinder body (50) through a mounting flange (55), an inner cavity of the metal filter screen cylinder (54) is communicated with the air outlet pipe (52), and ionization pipes (56) are arranged on two sides of the metal filter screen cylinder (54) in the inner cavity of the cylinder body (50).

8. A vacuum welding furnace as defined in claim 7, wherein: the metal filter screen cylinder (54) is of a double-layer structure arranged at intervals inside and outside, a plurality of filter holes (57) are distributed on the peripheral wall of the metal filter screen cylinder (54) along the circumferential direction and the axial direction, the bottom of the metal filter screen cylinder (54) is U-shaped, an oil leakage port (58) is formed in the bottom of the metal filter screen cylinder (54), and a recovery tank (59) is arranged on the lower side of the oil outlet (53).

9. The vacuum welding furnace of claim 4, wherein: the vacuum tank (36) is connected with a vacuum pump (37), and when the negative pressure value in the vacuum tank (36) is higher than the preset pressure, the vacuum pump (37) works to pump out gas in the vacuum tank (36).

10. A vacuum welding furnace as defined in claim 1, wherein: one end of the furnace cover (3) is hinged on the workbench (2) through a first hinge point (60), a connecting buckle (61) is arranged at one end of the top of the furnace cover (3) far away from the first hinge point (60), a driving oil cylinder (62) is fixedly arranged on the frame (1), a piston rod of the driving oil cylinder (62) is arranged upwards along the vertical direction, a lock catch (63) is fixedly arranged at the tail end of a piston rod of the driving oil cylinder (62), a reversing wheel (64) is arranged on the frame (1) and above the driving oil cylinder (62), a dragging steel cable (65) is fixedly arranged on the lock catch (63), the middle part of the dragging steel cable (65) is hung on the reversing wheel (64), the other end of the dragging steel cable (65) is fixedly arranged on the connecting buckle (61), a piston rod of the driving oil cylinder (62) extends to drive the furnace cover (3) to cover the workbench (2); and a piston rod of the driving oil cylinder (62) contracts to drive the furnace cover (3) to be far away from the workbench (2).

Technical Field

The invention relates to the field of semiconductor manufacturing, in particular to a vacuum welding furnace.

Background

The surface adhesion technology is a technology for welding and adhering a crystal grain on the surface of a copper lead frame by using tin paste, generally needs to be carried out in a welding furnace, the molten tin paste coats a pin of the crystal grain by melting the tin paste at high temperature in the welding furnace, and after the tin paste is cooled to be solid, the crystal grain can be electrically connected with a copper foil circuit on the power device lead frame. When the welding furnace works, nitrogen needs to be introduced to extrude oxygen in the furnace out of the furnace body, and further poor quality caused by oxygen tin oxide paste and the like is prevented.

When nitrogen is introduced into the existing welding furnace, the nitrogen is generally not heated and directly contacts with a material sheet, so that the temperature of the material sheet is reduced, the subsequent welding quality is influenced, and the void ratio is high; or the nitrogen is preheated by a special pipeline preheating device and then is introduced into the welding furnace, and although the nitrogen can be effectively preheated by the mode, the structure is complex and the manufacturing cost is high. And in the working process of the welding furnace, oil particles are vaporized and then are pumped out of the welding furnace along with nitrogen, if the oil gas is not separated and recycled, the environment can be polluted, the using amount of the welding oil is increased, and the manufacturing cost is increased.

Disclosure of Invention

The invention aims to solve the technical problems that when nitrogen is introduced into the existing welding furnace, the existing welding furnace is generally not heated and directly contacts with a material sheet, so that the temperature of the material sheet is reduced, the subsequent welding quality is influenced, and the void ratio is high; or the nitrogen is preheated by a special pipeline preheating device and then is introduced into the welding furnace, although the nitrogen can be effectively preheated by the mode, the structure is complex, the manufacturing cost is high, oil particles are vaporized and then are pumped out of the welding furnace along with the nitrogen in the working process of the welding furnace, if the oil and gas are not separated and recovered, the environment is polluted, the using amount of the welding oil is increased, and the manufacturing cost is increased.

The technical scheme adopted by the invention for solving the technical problems is as follows: a vacuum welding furnace comprises a workbench arranged on a fixed rack and a furnace cover hinged on the workbench, wherein the furnace cover can be switched between a covering state and an opening state, a preheating region, a vacuum welding region and a cooling region are sequentially arranged on the workbench from left to right, an instantaneous heating diffusion mechanism is arranged above the preheating region in the furnace cover, and nitrogen enters the welding furnace after being heated by the instantaneous heating diffusion mechanism; a bin cover is arranged above the vacuum welding area in the furnace cover, the bin cover is arranged in the furnace cover through a driving mechanism, and the driving mechanism can drive the bin cover to be arranged on a support plate of the vacuum welding area to form a sealed inner cavity; an air outlet is also formed in the furnace cover and is connected with an oil-gas separation device.

Further: a plurality of supporting tables are transversely arranged on the workbench, each supporting table is composed of a plurality of supporting blocks which are arranged at intervals along the longitudinal direction, a transfer rod is arranged between every two adjacent supporting blocks, the transfer rods are transversely arranged, and one end of each transfer rod is fixedly arranged on the movable frame and can move along the transverse direction or the vertical direction of the movable frame; a linear bearing is arranged below the transfer rod, a window hole is formed between every two adjacent supporting blocks, a shell of the linear bearing is fixedly installed on the workbench and located below the window hole, an optical axis of the linear bearing is inserted into the window hole in the vertical direction and can move in the vertical direction, an inwards concave supporting groove is formed in the top of the optical axis, a rod body of the transfer rod is embedded into the supporting groove, a supporting wheel is installed in the supporting groove, the wheel wall of the supporting wheel is attached to the rod wall of the transfer rod, and the rotation center of the supporting wheel is arranged in the horizontal direction and perpendicular to the transfer rod; the movable frame is fixedly provided with a guide rail which is transversely arranged, the guide rail is provided with a sliding block in a sliding manner, and the bottom of the optical axis is fixedly arranged on the sliding block.

Further: the instantaneous heating diffusion mechanism comprises a mounting groove and an air guide groove which penetrates through a cover plate of the furnace cover, the mounting groove is arranged on the lower end face of the cover plate and is communicated with the air guide groove, a baffle is mounted in the mounting groove, the baffle is arranged in a gap with the bottom of the mounting groove, the baffle is arranged in a gap with the wall of the mounting groove, and a gas inlet heating channel is formed in the gap between the baffle and the mounting groove; the top of apron is equipped with the installation piece, be provided with the inlet end and the spread groove that are linked together in the installation piece, the spread groove with lead the gas groove and be linked together.

Further: a suction pipe is arranged on the bin cover; one end of the suction pipe is communicated with the sealed inner cavity, the other end of the suction pipe is connected with a reversing valve, the reversing valve is provided with a first connecting port, a second connecting port and a third connecting port, the first connecting port is connected with a nitrogen gas inlet pipe, the second connecting port is connected with a vacuum tank, the third connecting port is connected with the suction pipe, when the reversing valve is connected at the left position, the second connecting port is communicated with the third connecting port, and the sealed inner cavity is sucked into a vacuum state; when the right position of the reversing valve is connected, the first connecting port is communicated with the third connecting port, and the nitrogen gas inlet pipe is used for filling nitrogen gas into the sealed inner cavity.

Further: the bin cover is limited by a peripheral plate and a top plate, an inwards concave annular sealing groove is formed in the bottom end face of the peripheral plate, the annular sealing groove is arranged around the periphery of the sealing inner cavity, a sealing rubber strip is installed in the annular sealing groove, and the sealing rubber strip can be in sealing fit with the upper end face of the carrier plate; still be provided with the water-cooling passageway on the storehouse cover, the water-cooling passageway is followed sealed inner chamber's periphery is around establishing, the one end of water-cooling passageway is equipped with the end of intaking, and the other end is equipped with out the water end.

Further: the driving mechanism comprises a driving cylinder and a guide pillar, the cylinder body of the driving cylinder is fixedly arranged on the support of the furnace cover, the piston rod of the driving cylinder is fixedly connected with the bin cover, the piston rod of the driving cylinder extends to drive the bin cover to be arranged on the support plate to form the sealed inner cavity, one end of the guide pillar is fixedly arranged on the bin cover, the guide pillar is parallel to the piston rod of the driving cylinder, and the support is provided with a guide sleeve matched with the guide pillar.

Further: the oil-gas separation device comprises a barrel, a second air inlet pipe communicated with the air outlet is arranged on the side wall of the barrel, an air outlet pipe is arranged at the top of the barrel, an oil outlet is arranged at the bottom of the barrel, a metal filter screen cylinder is arranged in the inner cavity of the barrel, the top of the metal filter screen cylinder is fixedly installed in the barrel through an installation flange, the inner cavity of the metal filter screen cylinder is communicated with the air outlet pipe, and ionization pipes are arranged on two sides of the metal filter screen cylinder in the inner cavity of the barrel.

Further: the metal filter screen cylinder is of a double-layer structure with an inner part and an outer part arranged at intervals, a plurality of filter holes are distributed on the peripheral wall of the metal filter screen cylinder along the circumferential direction and the axial direction, the bottom of the metal filter screen cylinder is U-shaped, an oil leakage port is arranged at the bottom of the metal filter screen cylinder, and a recovery tank is arranged at the lower side of the oil outlet.

Further: and the vacuum tank is connected with a vacuum pump, and when the negative pressure value in the vacuum tank is higher than the preset pressure, the vacuum pump works to pump out the gas in the vacuum tank.

Further: one end of the furnace cover is hinged to the workbench through a first hinge point, a connecting buckle is arranged at the top of the furnace cover, one end of the furnace cover, which is far away from the first hinge point, a driving oil cylinder is fixedly mounted on the rack, a piston rod of the driving oil cylinder is arranged upwards along the vertical direction, a lock catch is fixedly mounted at the tail end of the piston rod of the driving oil cylinder, a reversing wheel is arranged on the rack and above the driving oil cylinder, a dragging steel cable is fixedly mounted on the lock catch, the middle part of the dragging steel cable is hung on the reversing wheel, the other end of the dragging steel cable is fixedly mounted on the connecting buckle, and the extension of the piston rod of the driving oil cylinder can drive the furnace cover to be closed on the workbench; and a piston rod of the driving oil cylinder contracts to drive the furnace cover to be far away from the workbench.

The vacuum welding furnace has the beneficial effects that the instantaneous heating diffusion mechanism and the oil-gas separation device are arranged, nitrogen enters the welding furnace after being heated by the instantaneous heating diffusion mechanism to drive away air in the welding furnace, so that the welding effect is prevented from being influenced by tin paste oxidation, and the problem of high welding void ratio caused by the fact that nitrogen with lower temperature directly contacts a workpiece is avoided; through setting up the fluid in the oil-gas separation device can the separation mist and recycle fluid, practice thrift the welding oil quantity, reduce manufacturing cost.

Drawings

The invention is further illustrated with reference to the following figures and examples.

FIG. 1 is a schematic view of a vacuum welding furnace according to the present invention;

FIG. 2 is a schematic view of the structure in which the support table is mounted on the work table;

FIG. 3 is a schematic view of the arrangement of the window between the support blocks;

FIG. 4 is a schematic view of the internal structure of the linear bearing with the optical axis inserted in the aperture;

FIG. 5 is a schematic view of a linear axial optical axis mounted on a slider;

FIG. 6 is a schematic view of the structure of the supporting wheel mounted in the supporting groove and carrying the transfer rod;

FIG. 7 is a schematic structural view of an instantaneous heating diffusion mechanism;

FIG. 8 is a schematic view showing a structure in which the installation groove and the air guide groove are provided in the cover plate;

FIG. 9 is a schematic view of the structure in which the baffle is mounted on the cover plate;

FIG. 10 is a schematic view of the construction of the mounting block and the bezel;

FIG. 11 is a schematic connection diagram of the diverter valve;

FIG. 12 is a schematic view of an annular seal groove in the shroud;

FIG. 13 is a cross-sectional view of the shroud;

FIG. 14 is a schematic view of the drive mechanism;

FIG. 15 is a schematic view of the structure of the oil-gas separation device;

FIG. 16 is a schematic diagram of a two-layer construction of a metal filter screen cartridge;

FIG. 17 is a schematic view of a driving oil cylinder driving a furnace cover to close or open through dragging a steel cable.

In the figure, 1, a frame, 2, a workbench, 3, a furnace cover, 4, a preheating zone, 5, a vacuum welding zone, 6, a cooling zone, 7, an instant heating diffusion mechanism, 8, a bin cover, 9, a carrier plate, 10, a cover plate, 11, an air outlet, 12, a support table, 120, a support block, 13, a transfer rod, 14, a movable frame, 15, a linear bearing, 150, a shell, 151, an optical axis, 16, a window hole, 17, a support groove, 18, a support wheel, 19, a guide rail, 20, a slide block, 21, a mounting groove, 22, an air guide groove, 23, a baffle plate, 24, an air inlet heating channel, 25, a mounting block, 26, an air inlet end, 27, a connecting groove, 30, a suction pipe, 31, a reversing valve, 32, a first connecting port, 33, a second connecting port, 34, a third connecting port, 35, a nitrogen inlet pipe, 36, a vacuum tank, 37, a vacuum pump, a 40, a peripheral plate, 41, a top plate, 42, an annular sealing groove, 43. the device comprises a sealing rubber strip, 44, a water-cooling channel, 440, a water inlet end, 441, a water outlet end, 45, a driving cylinder, 46, a guide pillar, 47, a support, 48, a guide sleeve, 50, a cylinder body, 51, a second air inlet pipe, 52, an air outlet pipe, 53, an oil outlet, 54, a metal filter screen cylinder, 55, a mounting flange, 56, an ionization pipe, 57, a filter hole, 58, an oil leakage port, 59, a recovery tank, 60, a first hinge point, 61, a connecting buckle, 62, a driving oil cylinder, 63, a lock buckle, 64, a reversing wheel, 65 and a dragging steel cable.

Detailed Description

Reference will now be made in detail to embodiments of the present invention, examples of which are illustrated in the accompanying drawings, wherein like or similar reference numerals refer to the same or similar elements or elements having the same or similar function throughout. The embodiments described below with reference to the accompanying drawings are illustrative only for the purpose of explaining the present invention, and are not to be construed as limiting the present invention. On the contrary, the embodiments of the invention include all changes, modifications and equivalents coming within the spirit and terms of the claims appended hereto.

In the description of the present invention, it is to be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "axial", "radial", "circumferential", and the like, indicate orientations and positional relationships based on the orientations and positional relationships shown in the drawings, and are used merely for convenience of description and for simplicity of description, and do not indicate or imply that the device or element being referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore, should not be considered as limiting the present invention.

Furthermore, the terms "first," "second," and the like are used for descriptive purposes only and are not to be construed as indicating or implying relative importance. In the description of the present invention, it is to be noted that, unless otherwise explicitly specified or limited, the terms "connected" and "connected" are to be interpreted broadly, e.g., as being fixed or detachable or integrally connected; can be mechanically or electrically connected; may be directly connected or indirectly connected through an intermediate. The specific meanings of the above terms in the present invention can be understood in specific cases to those skilled in the art. In addition, in the description of the present invention, "a plurality" means two or more unless otherwise specified.

Any process or method descriptions in flow charts or otherwise described herein may be understood as representing modules, segments, or portions of code which include one or more executable instructions for implementing specific logical functions or steps of the process, and alternate implementations are included within the scope of the preferred embodiment of the present invention in which functions may be executed out of order from that shown or discussed, including substantially concurrently or in reverse order, depending on the functionality involved, as would be understood by those reasonably skilled in the art of the present invention.

As shown in fig. 1, the present invention provides a vacuum welding furnace, which comprises a workbench 2 mounted on a fixed frame 1 and a furnace cover 3 hinged on the workbench 2, wherein the furnace cover 3 can be switched between a covering state and an opening state on the workbench 2, a preheating zone 4, a vacuum welding zone 5 and a cooling zone 6 are sequentially arranged on the workbench 2 from left to right, an instantaneous heating diffusion mechanism 7 is arranged above the preheating zone 4 in the furnace cover 3, and nitrogen enters the welding furnace after being heated by the instantaneous heating diffusion mechanism 7; a bin cover 8 is arranged above the vacuum welding area 5 in the furnace cover 3, the bin cover 8 is arranged in the furnace cover 3 through a driving mechanism, and the driving mechanism can drive the bin cover 8 to be covered on a support plate 9 of the vacuum welding area 5 to form a sealed inner cavity; an air outlet 11 is further formed in the furnace cover 3, and the air outlet 11 is connected with an oil-gas separation device.

When the tray with the workpieces works, the tray with the workpieces sequentially passes through the preheating zone 4, the vacuum welding zone 5 and the cooling zone 6, the workpieces in the tray are preheated to a set temperature by the preheating zone 4, the workpieces are subjected to vacuum welding by the vacuum welding zone 5, and then the workpieces are cooled in the cooling zone 6, so that the assembly line type preheating, vacuum welding and cooling work is completed. The nitrogen enters the welding furnace to drive away the air in the welding furnace after being heated by the instantaneous heating diffusion mechanism 7, thereby avoiding the influence of the oxidation of the solder paste on the welding effect and simultaneously avoiding the problem of high welding void ratio caused by the direct contact of the nitrogen with lower temperature with the workpiece. Because the mixed gas discharged from the gas outlet 11 contains a large amount of oil particles, the oil in the mixed gas can be separated by the oil-gas separation device, and the oil is recycled, so that the using amount of the welding oil is saved, and the manufacturing cost is reduced.

Referring to fig. 2, 3, 4, 5 and 6, a plurality of support tables 12 are transversely disposed on the worktable 2, each support table 12 is composed of a plurality of support blocks 120 longitudinally spaced apart from each other, a transfer rod 13 is disposed between adjacent support blocks 120, the transfer rod 13 is transversely disposed, and one end of the transfer rod 13 is fixedly mounted on the movable frame 14 and can move along the transverse or vertical direction of the movable frame 14; a linear bearing 15 is arranged below the transfer rod 13, a window hole 16 is arranged between adjacent support blocks 120, a housing 150 of the linear bearing 15 is fixedly mounted on the workbench 2 and is positioned below the window hole 16, an optical axis 151 of the linear bearing 15 penetrates through the window hole 16 along the vertical direction and can move along the vertical direction, a concave support groove 17 is arranged at the top of the optical axis 151, a rod body of the transfer rod 13 is embedded in the support groove 17, a support wheel 18 is mounted in the support groove 17, a wheel wall of the support wheel 18 is attached to a rod wall of the transfer rod 13, and a rotation center of the support wheel 18 is arranged along the horizontal direction and is perpendicular to the transfer rod 13; the movable frame 14 is fixedly provided with a guide rail 19 transversely arranged, the guide rail 19 is provided with a sliding block 20 in a sliding manner, and the bottom of the optical axis 151 is fixedly arranged on the sliding block 20.

In operation, trays containing workpieces are transferred between adjacent support tables 12 by means of transfer bars 13, the transfer bars 13 moving in the following order: s1 moving upward, supporting the tray higher than the upper end of the support platform 12; s2 transverse movement drives the tray to move to the next support platform 12; s3 moves back down to below the upper end surface of the support base 12 so that the tray is placed on the support base 12. In the prior art, the transfer rod 13 is generally fixedly mounted on the movable frame 14 so as to be capable of moving along with the movable frame 14, but for a plurality of stations, when the transfer rod 13 is long, the part of the transfer rod 13 far away from the movable frame 14 can be bent downwards under the gravity, so that the tray transfer is blocked.

In the scheme, the window holes 16 are formed between the adjacent supporting blocks 120, and the linear bearings 15, the sliders 20 and the guide rails 19 are matched, so that the supporting wheels 18 in the supporting grooves 17 support the transfer rods 13, the bending deformation of the transfer rods 13 under the gravity is avoided, the stability of tray transfer is ensured, and the service life of the transfer rods 13 is prolonged. Due to the fact that the moving frequency of the transfer rod 13 is high, the arrangement of the linear bearing 15 can guarantee flexibility and stability of movement in the vertical direction. The arrangement of the supporting wheel 18 converts static friction force into rolling friction, reduces the abrasion speed of the transfer rod 13, and further prolongs the service life of the transfer rod 13. The matching of the sliding block 20 and the guide rail 19 ensures that the sliding block 20 moves reversely along the guide rail 19 to offset when the transfer rod 13 moves horizontally along the movable frame 14, thereby ensuring that the optical axis 151 is in a static state in the horizontal direction; when the transfer rod 13 moves up and down along with the movable frame 14, the sliding block 20 moves up and down along with the guide rail 19, so that the optical axis 151 is guaranteed to support the transfer rod 13, and the support structure of the guide rail 19 of the sliding block 20 and the linear bearing 15 is simple and stable, and the support cost is low.

As shown in fig. 7, 8, 9 and 10, the instantaneous heating diffusion mechanism 7 includes an installation groove 21 and an air guide groove 22 disposed through the cover plate 10 of the furnace cover 3, the installation groove 21 is disposed on the lower end surface of the cover plate 10 and is communicated with the air guide groove 22, a baffle 23 is installed in the installation groove 21, the baffle 23 is disposed in a gap with the bottom of the installation groove 21, the baffle 23 is disposed in a gap with the wall of the installation groove 21, and a gap between the baffle 23 and the installation groove 21 forms an air inlet heating channel 24; the top of the cover plate 10 is provided with a mounting block 25, the mounting block 25 is provided with an air inlet end 26 and a connecting groove 27 which are communicated, and the connecting groove 27 is communicated with the air guide groove 22.

When nitrogen is introduced into the existing welding furnace, the nitrogen is generally not heated and directly contacts with a workpiece, so that the temperature of the workpiece is reduced, the subsequent welding quality is influenced, and the void ratio is high; or the nitrogen is preheated by a special pipeline preheating device and then is introduced into the welding furnace, and although the nitrogen can be effectively preheated by the mode, the structure is complex and the manufacturing cost is high.

When the scheme works, nitrogen is introduced into the mounting block 25 through the air inlet end 26 of the mounting block 25, and air is supplied to the air guide groove 22 through the connecting groove 27, so that the split structure is low in manufacturing cost and convenient to assemble and disassemble. Simultaneously through setting up mounting groove 21 in apron 10, and install baffle 23 in mounting groove 21, nitrogen gas is blocked by baffle 23 when entering through air guide groove 22, and get into the welding furnace through admitting air heating channel 24, because baffle 23 is higher at the during operation temperature, nitrogen gas is heated by baffle 23 gradually at the in-process that admits air heating channel 24 circulates, thereby reach higher temperature after and contact with the tablet, thereby avoided the lower nitrogen gas of temperature to cause the big problem of tablet void ratio, this kind of mode has used the heat energy of welding furnace self to heat nitrogen gas in a flexible way simultaneously, thereby the energy has been practiced thrift, accord with the environmental protection theme of present energy-saving emission reduction.

As shown in fig. 11, 12, 13 and 14, the hood 8 is provided with a suction pipe 30; one end of the suction pipe 30 is communicated with the sealed inner cavity, the other end of the suction pipe 30 is connected with a reversing valve 31, the reversing valve 31 is provided with a first connecting port 32, a second connecting port 33 and a third connecting port 34, the first connecting port 32 is connected with a nitrogen inlet pipe 35, the second connecting port 33 is connected with a vacuum tank 36, the third connecting port 34 is connected with the suction pipe 30, when the reversing valve 31 is connected at the left position, the second connecting port 33 is communicated with the third connecting port 34, and the sealed inner cavity is sucked to be in a vacuum state; when the reversing valve 31 is connected to the right, the first connection port 32 is communicated with the third connection port 34, and the nitrogen inlet pipe 35 is used for filling nitrogen into the sealed inner cavity.

Because the solder paste can produce the welding hole in the air direct soldering, the welding hole can lead to the rosin joint desoldering to produce the defective products greatly, reduces the yield of product. In the prior art, two connecting pipelines are generally arranged on the bin cover 8, one pipeline is used for introducing nitrogen, and the other pipeline is used for pumping vacuum, so that the structure of the bin cover 8 is complex, and the nitrogen consumption is increased.

When the material is placed on the workbench 2, the driving mechanism drives the bin cover 8 to cover the support plate 9 to form a sealed inner cavity, and the sealed inner cavity is pumped into a vacuum state through the vacuum tank 36 and the reversing valve 31, so that the formation of welding holes of the product is reduced, and the welding quality is improved. And after welding is finished, nitrogen is filled into the sealed inner cavity through the nitrogen inlet pipe 35 to break the vacuum state, so that the driving mechanism drives the bin cover 8 to be far away from the carrier plate 9. The nitrogen gas charging pipeline and the vacuum pumping pipeline are integrated, the charging of nitrogen gas and the vacuum pumping are realized through the suction pipe 30, the structure of the bin cover 8 is simplified, meanwhile, the nitrogen gas inlet pipe 35, the vacuum tank 36 and the suction pipe 30 are connected through the reversing valve 31, the reversing valve 31 can be connected in the left position, the space in the vacuum bin can be rapidly pumped into a vacuum state by utilizing the negative pressure of the vacuum tank 36, the reversing valve 31 can be connected in the right position, the nitrogen gas can be charged into the vacuum bin to break the vacuum state, the nitrogen gas using amount is saved by 30% through the structural design, and meanwhile, the switching of the sealed inner cavity state is facilitated.

The vacuum tank 36 is connected with a vacuum pump 37, and when the negative pressure value in the vacuum tank 36 is higher than the preset pressure, the vacuum pump 37 works to pump out the gas in the vacuum tank 36. Through set up vacuum pump 37 on vacuum tank 36, can be in the default pressure within range with vacuum tank 36 through vacuum pump 37 work, this kind of vacuum tank 36 adds vacuum pump 37's structural design, does not need the vacuum storehouse vacuum pump 37 all to carry out work when pumping the vacuum at every turn, and then has saved vacuum pump 37's power consumption, accords with current energy-conserving the environmental protection requirement of reducing row.

The bin cover 8 is defined by a peripheral plate 40 and a top plate 41, an inwards concave annular sealing groove 42 is formed in the bottom end face of the peripheral plate 40, the annular sealing groove 42 is arranged around the periphery of the sealing inner cavity, a sealing rubber strip 43 is installed in the annular sealing groove 42, and the sealing rubber strip 43 can be in sealing fit with the upper end face of the carrier plate 9; still be provided with water-cooling channel 44 on the housing 8, water-cooling channel 44 is followed sealed inner chamber's periphery is around establishing, water-cooling channel 44's one end is equipped with into water end 440, and the other end is equipped with out water end 441.

In the working process, because the temperature of the support plate 9 is high and can even reach 400-500 ℃, when the bin cover 8 is covered on the support plate 9, high temperature can be transferred to the bin cover 8 and even transferred to the driving mechanism through the bin cover 8, and therefore the service lives of the bin cover 8 and the driving mechanism are shortened.

This scheme during operation is through set up in storehouse cover 8 along the water-cooling channel 44 of the periphery of seal cavity around establishing to send into the cooling water in the peripheral plate 40 of storehouse cover 8 through end 440 of intaking, the in-process that the cooling water circulates along water-cooling channel 44 cools off storehouse cover 8 and joint strip 43, then discharges from water end 441, has avoided high temperature energy to transmit actuating mechanism through storehouse cover 8 on, thereby has improved storehouse cover 8 and actuating mechanism's life.

The driving mechanism comprises a driving cylinder 45 and a guide pillar 46, a cylinder body of the driving cylinder 45 is fixedly arranged on a support 47 of the furnace cover 3, a piston rod of the driving cylinder 45 is fixedly connected with the bin cover 8, the piston rod of the driving cylinder 45 extends to drive the bin cover 8 to cover the support plate 9 to form the sealed inner cavity, one end of the guide pillar 46 is fixedly arranged on the bin cover 8, the guide pillar 46 is arranged in parallel with the piston rod of the driving cylinder 45, and a guide sleeve 48 matched with the guide pillar 46 is arranged on the support 47.

During operation, the piston rod of the driving cylinder 45 extends to push the bin cover 8 to cover the support plate 9 to form a sealed inner cavity, so that subsequent vacuum welding can be performed, and after the vacuum welding is completed, the piston rod of the driving cylinder 45 contracts, so that the bin cover 8 is far away from the support plate 9, and the workpiece can be conveniently transported. The cooperation of the guide post 46 and the guide sleeve 48 further improves the stability of the bin cover 8 in the movement process, and avoids the air leakage of the sealed inner cavity caused by the inclination of the bin cover 8.

Referring to fig. 15 and 16, the oil-gas separation device includes a cylinder 50, a second air inlet pipe 51 communicated with the air outlet 11 is disposed on a side wall of the cylinder 50, an air outlet pipe 52 is disposed at a top of the cylinder 50, an oil outlet 53 is disposed at a bottom of the cylinder 50, a metal filter screen cylinder 54 is disposed in an inner cavity of the cylinder 50, a top of the metal filter screen cylinder 54 is fixedly mounted in the cylinder 50 through a mounting flange 55, an inner cavity of the metal filter screen cylinder 54 is communicated with the air outlet pipe 52, and ionization pipes 56 are disposed at two sides of the metal filter screen cylinder 54 in the inner cavity of the cylinder 50.

In the working process of the welding furnace, because the temperature can reach more than 400 ℃, in the process of vacuum pumping, oil particles are vaporized and then can be pumped out of the welding furnace along with nitrogen, and if the oil gas is not separated and recycled, the environment can be polluted, the using amount of welding oil is increased, and the manufacturing cost is increased.

When the scheme works, mixed gas enters the cylinder body 50 through the second gas inlet pipe 51, the ionization pipe 56 works to generate an electric field, suspended oil particles in the mixed gas are separated from nitrogen and adsorbed on the metal filter screen cylinder 54 under the action of the electric field, are gradually condensed into large oil drops, are gathered at the cylinder bottom under the action of gravity, and are discharged from the oil outlet 53 to recover welding oil; the separated nitrogen gas passes through a metal filter screen cylinder 54 and is discharged from the gas outlet pipe 52.

The metal filter screen cylinder 54 is of a double-layer structure with an inner part and an outer part arranged at intervals, a plurality of filter holes 57 are distributed on the peripheral wall of the metal filter screen cylinder 54 along the circumferential direction and the axial direction, the bottom of the metal filter screen cylinder 54 is U-shaped, an oil leakage port 58 is arranged at the bottom of the metal filter screen cylinder 54, and a recovery tank 59 is arranged at the lower side of the oil outlet 53.

The metal filter screen cylinder 54 with the double-layer structure can improve the contact area with the mixed gas, so that the efficiency of oil-liquid particle separation and condensation is improved, the collection efficiency of the welding oil can be improved by the structural design of the bottom of the metal filter screen cylinder 54 with the U-shaped structure, and the collected welding oil is discharged from the oil leakage port 58. The solder oil discharged from the oil outlet 53 is collected by gravity into the recovery tank 59 to be recovered and utilized, thereby reducing the manufacturing cost.

As shown in fig. 17, one end of the furnace cover 3 is hinged to the workbench 2 through a first hinge point 60, a connecting buckle 61 is arranged at one end of the top of the furnace cover 3, which is far away from the first hinge point 60, a driving cylinder 62 is fixedly mounted on the frame 1, a piston rod of the driving cylinder 62 is arranged upward along the vertical direction, a lock catch 63 is fixedly mounted at the tail end of the piston rod of the driving cylinder 62, a reversing wheel 64 is arranged above the driving cylinder 62 on the frame 1, a dragging cable 65 is fixedly mounted on the lock catch 63, the middle part of the dragging cable 65 is hung on the reversing wheel 64, the other end of the dragging cable 65 is fixedly mounted on the connecting buckle 61, and the piston rod of the driving cylinder 62 extends to drive the furnace cover 3 to cover the workbench 2; the piston rod of the driving oil cylinder 62 contracts to drive the furnace cover 3 to be far away from the workbench 2.

Through the cooperation of the driving oil cylinder 62, the reversing wheel 64 and the dragging steel cable 65, the structure is compared with a structure that the piston rod of the driving oil cylinder 62 is directly hinged on the furnace cover 3, the driving oil cylinder 62 can be installed at a position far away from the furnace cover 3 to control the opening and closing of the furnace cover 3, the driving oil cylinder 62 is further prevented from occupying a space near the welding furnace, and the space utilization rate is improved. Meanwhile, the driving oil cylinder 62 has certain self-locking capacity, and the current position can be effectively kept after the position of the furnace cover 3 is adjusted, so that the furnace cover 3 is prevented from being accidentally covered.

In the description herein, references to the description of the term "one embodiment," "some embodiments," "an example," "a specific example," or "some examples," etc., mean that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the invention. In this specification, a schematic representation of the term does not necessarily refer to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples.

In light of the foregoing description of the preferred embodiment of the present invention, many modifications and variations will be apparent to those skilled in the art without departing from the spirit and scope of the invention. The technical scope of the present invention is not limited to the content of the specification, and must be determined according to the scope of the claims.