阅读说明：本技术 一种用于静电吸盘的打磨喷液装置 (A hydrojet device that polishes for electrostatic chuck ) 是由 李君� 陈茂雄 石锗元 肖伟 于 2021-07-27 设计创作，主要内容包括：本发明公开了一种用于静电吸盘的打磨喷液装置,属于静电吸盘技术领域,包括储液装置、用于调节出液大小的调液装置和出液装置,所述储液装置中设有搅拌装置,所述调液装置与所述储液装置通过第一管件连通,所述出液装置与所述调液装置通过第二管件连通。(The invention discloses a polishing and liquid spraying device for an electrostatic chuck, which belongs to the technical field of electrostatic chucks and comprises a liquid storage device, a liquid adjusting device and a liquid outlet device, wherein the liquid adjusting device is used for adjusting the size of liquid outlet, a stirring device is arranged in the liquid storage device, the liquid adjusting device is communicated with the liquid storage device through a first pipe fitting, and the liquid outlet device is communicated with the liquid adjusting device through a second pipe fitting.)

1. The utility model provides a hydrojet device of polishing for electrostatic chuck which characterized in that: the liquid adjusting device is communicated with the liquid storage device through a first pipe fitting, and the liquid outlet device is communicated with the liquid adjusting device through a second pipe fitting.

2. An abrasive liquid spray apparatus for electrostatic chuck as claimed in claim 1, wherein: the liquid storage device comprises a liquid storage tank with an upper end open, a liquid adding pipe is arranged on the side wall of the liquid storage tank and communicated with the liquid storage tank, and the liquid inlet end of the liquid adding pipe faces upwards.

3. An abrasive liquid spray apparatus for electrostatic chuck as claimed in claim 2, wherein: the stirring device comprises a stirring driving piece and a stirring assembly arranged in the liquid storage tank.

4. An abrasive liquid jet apparatus for electrostatic chuck as claimed in claim 3, wherein: the stirring assembly comprises a stirring shaft and stirring blades arranged on the stirring shaft, the stirring driving part is a driving motor, and the power output end of the driving motor is connected with the stirring shaft.

5. An abrasive liquid jet apparatus for electrostatic chuck as claimed in claim 4, wherein: the driving motor is arranged at the upper end of the support frame, the support frame is provided with a mounting hole for mounting a stirring shaft, the support frame is arranged above the liquid storage tank, and the support frame is detachably connected with the liquid storage tank.

6. An abrasive liquid spray apparatus for electrostatic chuck as claimed in claim 5, wherein: the liquid outlet device comprises a liquid outlet pipe, one end of the liquid outlet pipe is communicated with the second pipe fitting, and external threads are arranged on the outer side wall of the other end of the liquid outlet pipe.

7. An abrasive liquid spray apparatus for electrostatic chuck as claimed in claim 6, wherein: transfer liquid device including adjusting support, regulation plastic hose and regulating wheel, adjust plastic hose's one end with first pipe connection, adjust plastic hose's the other end with second pipe connection, be equipped with on the regulation support and be used for the installation adjust plastic hose's recess, the regulating wheel is installed on the regulation support, the outer lane of regulating wheel with adjust plastic hose's lateral wall laminating, the regulating wheel is the eccentric wheel.

8. An abrasive liquid spray apparatus for electrostatic chuck as claimed in claim 7, wherein: be equipped with the transfer pump on the first pipe fitting, the drain pipe is kept away from one of second pipe fitting is served and is installed the atomising head, the atomising head be equipped with external screw-thread fit's internal thread.

9. An abrasive liquid spray apparatus for electrostatic chuck as claimed in claim 8, wherein: be equipped with first fixing device on the liquid storage device, first fixing device include for the first mounting panel and the second mounting panel of liquid storage pot symmetry, the upper end of first mounting panel is equipped with a plurality of first fixed mounting holes, the upper end of second mounting panel is equipped with a plurality of second fixed mounting holes.

10. An abrasive liquid spray apparatus for electrostatic chuck as claimed in claim 9, wherein: the liquid outlet device is provided with a second fixing device, the second fixing device comprises a first arc-shaped clamp and a second arc-shaped clamp, the first arc-shaped clamp is hinged to the liquid outlet device, the first arc-shaped clamp is provided with a first fixing hole, and the second arc-shaped clamp is provided with a second fixing hole.

Technical Field

The invention relates to the technical field of electrostatic chucks, in particular to a polishing liquid spraying device for an electrostatic chuck.

Background

The electrostatic chuck is an important core component in a plasma chamber in the semiconductor manufacturing industry, has the functions of adsorbing a wafer, simultaneously realizing temperature control and radio frequency control, ensuring the uniformity of the wafer, and being wear-resistant and corrosion-resistant under the vacuum, high-voltage and strong-corrosion environments and incapable of generating arc discharge.

The electrostatic chuck directly decides the chip yield, because of it has very high technical degree of difficulty and threshold, receives the attention of big type chip producer at home and abroad, and the processing of polishing need be carried out to the ceramic panel on the electrostatic chuck, does not set up liquid spray device on the equipment of polishing of current ceramic panel, consequently, needs a liquid spray device of polishing for electrostatic chuck.

Disclosure of Invention

The invention aims to provide a polishing liquid spraying device for an electrostatic chuck, which can spray liquid when polishing the ceramic surface of the electrostatic chuck and reduce the heat productivity of the ceramic surface.

In order to solve the technical problems, the technical scheme of the invention is as follows:

the polishing liquid spraying device for the electrostatic chuck comprises a liquid storage device, a liquid adjusting device and a liquid outlet device, wherein the liquid adjusting device is used for adjusting the size of liquid, a stirring device is arranged in the liquid storage device, the liquid adjusting device is communicated with the liquid storage device through a first pipe fitting, and the liquid outlet device is communicated with the liquid adjusting device through a second pipe fitting.

Preferably, the liquid storage device comprises a liquid storage tank with an upper end open, a liquid adding pipe is arranged on the side wall of the liquid storage tank, the liquid adding pipe is communicated with the liquid storage tank, and the liquid inlet end of the liquid adding pipe faces upwards.

Preferably, the stirring device comprises a stirring driving member and a stirring assembly arranged in the liquid storage tank.

Preferably, the stirring assembly comprises a stirring shaft and stirring blades arranged on the stirring shaft, the stirring driving part is a driving motor, and the power output end of the driving motor is connected with the stirring shaft.

Preferably, the driving motor is arranged at the upper end of the support frame, a mounting hole for mounting the stirring shaft is formed in the support frame, the support frame is arranged above the liquid storage tank, and the support frame is detachably connected with the liquid storage tank.

Preferably, the liquid outlet device comprises a liquid outlet pipe, one end of the liquid outlet pipe is communicated with the second pipe fitting, and an external thread is arranged on the outer side wall of the other end of the liquid outlet pipe.

Preferably, transfer the liquid device including adjusting the support, adjusting plastic hose and regulating wheel, adjust plastic hose's one end with first pipe connection, adjust plastic hose's the other end with second pipe connection, be equipped with on the regulation support and be used for the installation adjust plastic hose's recess, the regulating wheel is installed on adjusting the support, the outer lane of regulating wheel with adjust plastic hose's lateral wall laminating, the regulating wheel is the eccentric wheel.

Preferably, be equipped with the transfer pump on the first pipe fitting, the drain pipe is kept away from one of second pipe fitting is served and is installed the atomising head, the atomising head be equipped with external screw thread complex internal thread.

Preferably, be equipped with first fixing device on the liquid storage device, first fixing device include for the first mounting panel and the second mounting panel of liquid storage pot symmetry, the upper end of first mounting panel is equipped with a plurality of first fixed mounting holes, the upper end of second mounting panel is equipped with a plurality of second fixed mounting holes.

Preferably, the liquid outlet device is provided with a second fixing device, the second fixing device comprises a first arc-shaped clamp and a second arc-shaped clamp, the first arc-shaped clamp is hinged to the liquid outlet device, the first arc-shaped clamp is provided with a first fixing hole, and the second arc-shaped clamp is provided with a second fixing hole.

Adopt above-mentioned technical scheme, owing to be equipped with the stock solution device for can store the liquid that sprays the department of polishing, owing to be equipped with and transfer the liquid device, make can adjust the play liquid size of play liquid device, owing to be equipped with out the liquid device, make the liquid in the stock solution device can spray between head and ceramic surface through going out the liquid device, owing to be equipped with agitating unit, make and to stir the liquid in the stock solution device.

Drawings

FIG. 1 is a schematic structural diagram of a polishing liquid spraying device for an electrostatic chuck according to the present invention;

FIG. 2 is an enlarged schematic view of the connection between the liquid storage device and the stirring device according to the present invention;

FIG. 3 is an enlarged schematic view of a second fastening device of the present invention;

FIG. 4 is a left enlarged view of the liquid storage device of the present invention;

FIG. 5 is a right enlarged view of the liquid storage device of the present invention.

Detailed Description

The following further describes embodiments of the present invention with reference to the drawings. It should be noted that the description of the embodiments is provided to help understanding of the present invention, but the present invention is not limited thereto. In addition, the technical features involved in the embodiments of the present invention described below may be combined with each other as long as they do not conflict with each other.

As shown in fig. 1 to 5, fig. 1 is a schematic structural diagram of a polishing and fluid-spraying device for an electrostatic chuck according to the present invention, fig. 2 is an enlarged structural diagram of a connection between a fluid storage device and a stirring device according to the present invention, fig. 3 is an enlarged structural diagram of a second fixing device according to the present invention, fig. 4 is an enlarged structural diagram of a left side of the fluid storage device according to the present invention, fig. 5 is an enlarged structural diagram of a right side of the fluid storage device according to the present invention, and includes a fluid storage device, a fluid adjusting device for adjusting a fluid output size, and a fluid output device, wherein the fluid storage device is provided with the stirring device, the fluid adjusting device is communicated with the fluid storage device through a first pipe 2, the fluid output device is communicated with the fluid adjusting device through a second pipe 3, the fluid storage device is used for storing cutting fluid, the stored cutting fluid passes through the first pipe 2, passes through the fluid adjusting device, flows into the second pipe 3, and finally the fluid output device sprays the electrostatic cutting fluid on a surface of a ceramic plate for a polishing head and a chuck, when the liquid discharging device is used, the liquid storage device is higher than the liquid adjusting device, the liquid adjusting device is higher than the liquid discharging device, and liquid is discharged through gravity;

the liquid storage device comprises a liquid storage tank 1 with an opening at the upper end, a liquid feeding pipe is arranged on the side wall of the liquid storage tank 1, liquid can be added into the liquid storage tank 1 through the liquid feeding pipe, the liquid feeding pipe is communicated with the liquid storage tank 1, the liquid inlet end of the liquid feeding pipe is upward, so that cutting liquid can be conveniently added into the liquid storage tank 1, and the cutting liquid in the liquid storage tank 1 is prevented from flowing out;

the stirring device comprises a stirring driving part and a stirring assembly arranged in the liquid storage tank 1, the stirring assembly is used for stirring the cutting fluid, the stirring driving part is used for driving the stirring assembly to stir the cutting fluid, and in order to save energy, the stirring driving part can be controlled, and the stirring assembly is intermittently controlled to operate;

the stirring assembly comprises a stirring shaft 8 and stirring blades 9 arranged on the stirring shaft 8, the stirring driving part is a driving motor 7, the power output end of the driving motor 7 is connected with the stirring shaft 8, the stirring device is used for stirring the cutting fluid in the fluid reservoir 1, when the ceramic plate used for the production of the electrostatic chuck is polished, ceramic grinding powder needs to be added into the cutting fluid, if the cutting fluid with the ceramic grinding powder is not stirred, the ceramic grinding powder can be precipitated at the bottom of the fluid reservoir 1, the concentration of the ceramic grinding powder in the cutting fluid is overhigh, and therefore the cutting fluid needs to be stirred, the ceramic grinding powder particles in the cutting fluid are distributed more uniformly, the surface of the ceramic plate is ground more smoothly, the surface roughness is smaller, and the surface quality of the ceramic plate meets the manufacturing requirements of the electrostatic chuck;

the driving motor 7 is arranged at the upper end of the support frame 10, the support frame 10 is provided with a mounting hole for mounting the stirring shaft 8, the support frame 10 is arranged above the liquid storage tank 1, and the support frame 10 is detachably connected with the liquid storage tank 1;

the cutting fluid used in grinding of the ceramic plate for the electrostatic chuck is small in amount, the driving motor 7 is also small and is convenient to mount and fix, a groove matched with the driving motor 7 can be formed in the upper end of the support frame 10, the driving motor 7 is mounted in the groove, the driving motor 7 is fixed on the support frame 10 through glue, the power output end of the mounted driving motor 7 faces downwards, the power output shaft of the driving motor 7 is a polygonal shaft, a polygonal groove matched with the polygonal shaft is formed in the stirring shaft 8 in a conventional mode, the stirring shaft 8 is mounted below the driving motor 7, internal threads are formed in the inner side wall of the upper end of the liquid storage tank 1, external threads matched with the internal threads of the inner side wall of the liquid storage tank 1 are formed in the outer side wall of the lower portion of the support frame 10, the support frame 10 is connected with the liquid storage tank 1 through threaded connection, and mounting and dismounting are convenient;

the liquid outlet device comprises a liquid outlet pipe 15, one end of the liquid outlet pipe 15 is communicated with the second pipe fitting 3, external threads are arranged on the outer side wall of the other end of the liquid outlet pipe 15, and different spray heads are convenient to install and replace by arranging the external threads;

the liquid adjusting device comprises an adjusting support 4, an adjusting plastic hose 6 and an adjusting wheel 5, one end of the adjusting plastic hose 6 is connected with the first pipe fitting 2, the other end of the adjusting plastic hose 6 is connected with the second pipe fitting 3, a groove for installing the adjusting plastic hose 6 is formed in the adjusting support 4, the adjusting wheel 5 is installed on the adjusting support 4, the outer ring of the adjusting wheel 5 is attached to the outer side wall of the adjusting plastic hose 6, the adjusting wheel 5 is an eccentric wheel, and the flux of the adjusting plastic hose 6 can be changed by rotating the adjusting wheel 5, so that the amount of cutting liquid passing through the liquid adjusting device is adjusted;

the infusion pump 20 is arranged on the first pipe fitting 2, the end, far away from the second pipe fitting 3, of the liquid outlet pipe 15 is provided with the spray head 21, the spray head 21 is provided with an internal thread matched with the external thread, liquid spraying operation can be better performed by arranging the infusion pump 20, cutting liquid can be sprayed on the surface of the ceramic plate more uniformly through the spray head 21, and grinding of the surface of the ceramic plate is facilitated;

the liquid storage device is provided with a first fixing device, the first fixing device comprises a first mounting plate 11 and a second mounting plate 12 which are symmetrical relative to the liquid storage tank 1, the upper end of the first mounting plate 11 is provided with a plurality of first fixing mounting holes 13, the upper end of the second mounting plate 12 is provided with a plurality of second fixing mounting holes 14, the first fixing mounting holes 13 can be through holes, the second fixing mounting holes 14 can be threaded holes, the first mounting plate 11 and the second mounting plate 12 are connected through bolts, the first mounting plate 11 and the second mounting plate 12 are both thin plates capable of generating certain deformation, and the liquid storage device is fixedly mounted on equipment for polishing ceramic plates;

a second fixing device is arranged on the liquid outlet device and comprises a first arc-shaped clamp 16 and a second arc-shaped clamp 18, the first arc-shaped clamp 16 is hinged with the liquid outlet pipe 15, the second arc-shaped clamp 18 is fixedly connected with the liquid outlet pipe 15, a first fixing hole 17 is formed in the first arc-shaped clamp 16, a second fixing hole 19 is formed in the second arc-shaped clamp 18, the first fixing hole 17 can be a through hole, the second fixing hole 19 can be a threaded hole, the first arc-shaped clamp 16 and the second arc-shaped clamp 18 are oppositely clamped on a circular shell for mounting a polishing head, and the circular shell for mounting the polishing head cannot rotate;

owing to be equipped with the stock solution device, make can store the liquid that sprays the department of polishing, owing to be equipped with and transfer the liquid device, make can adjust the play liquid size of going out the liquid device, owing to be equipped with out the liquid device, make the liquid in the stock solution device can spray between head and ceramic surface through going out the liquid device, owing to be equipped with agitating unit, make can stir the liquid in the stock solution device, the granule stirring of polishing in the liquid in the stock solution device, make the ceramic surface that electrostatic chuck used more level and more smooth.

The embodiments of the present invention have been described in detail with reference to the accompanying drawings, but the present invention is not limited to the described embodiments. It will be apparent to those skilled in the art that various changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the invention, and the scope of protection is still within the scope of the invention.