阅读说明：本技术 一种半导体级精密不锈钢管钝化装置 (Semiconductor-grade precise stainless steel pipe passivation device ) 是由 杨松江 苏海英 姚德坤 朱亚中 肖敏洁 刘叶婷 蒋廷恩 平浪 于 2021-09-08 设计创作，主要内容包括：本发明公开了一种半导体级精密不锈钢管钝化装置,包括钝化池、装料箱、装料筒、侧盖板、抬升机构、吊环、吊钩、控制装置,所述钝化池内盛放有钝化液,装料箱浸入钝化液内,装料箱呈长方体状,装料箱一侧开口,装料箱内设有若干根水平设置的装料筒,所述装料筒与装料箱的开口侧垂直,装置筒与装料箱的开口侧的对侧相固定,装料筒在装料箱的开口侧开口,所述装料箱的开口侧盖有一块侧盖板,侧盖板抵住装料筒的开口端,侧盖板的靠近装料箱侧设有两块固定板。本发明通过将抬升机构、装料筒相配合,使得不锈钢管之间不易发生相互碰撞,且不锈钢管可缓慢转动,使得不锈钢管各处均可与钝化液充分接触,保证了钝化效果。(The invention discloses a semiconductor-grade precise stainless steel pipe passivating device which comprises a passivating pool, a charging box, a charging barrel, side cover plates, a lifting mechanism, a lifting ring, a lifting hook and a control device, wherein passivating liquid is contained in the passivating pool, the charging box is immersed in the passivating liquid, the charging box is cuboid, one side of the charging box is open, a plurality of charging barrels which are horizontally arranged are arranged in the charging box, the charging barrel is perpendicular to the opening side of the charging box, the device barrel is fixed to the opposite side of the opening side of the charging box, the charging barrel is open at the opening side of the charging box, a side cover plate is arranged at the opening of the charging box, the side cover plate abuts against the opening end of the charging barrel, and two fixing plates are arranged on the side of the side cover plate, close to the charging box. According to the invention, the lifting mechanism and the charging barrel are matched, so that the stainless steel pipes are not easy to collide with each other, and the stainless steel pipes can rotate slowly, so that all parts of the stainless steel pipes can be fully contacted with the passivation solution, and the passivation effect is ensured.)

1. The utility model provides a precision stainless steel pipe passivating device of semiconductor level which characterized in that: comprises a passivation pool (1), a charging box (2), a charging barrel (20), side cover plates (21), a lifting mechanism (3), a hanging ring (25), a lifting hook (26) and a control device (4), wherein passivation solution is contained in the passivation pool (1), the charging box (2) is immersed in the passivation solution, the charging box (2) is cuboid, one side of the charging box (2) is open, a plurality of horizontally arranged charging barrels (20) are arranged in the charging box (2), the charging barrels (20) are vertical to the opening side of the charging box (2), the device barrels are fixed to the opposite side of the opening side of the charging box (2), the charging barrels (20) are open at the opening side of the charging box (2), the opening side cover of the charging box (2) is provided with one side cover plate (21), the side cover plates (21) abut against the opening end of the charging barrel (20), and two fixing plates (22) are arranged on the side of the side cover plates (21) close to the charging box (2), one fixing plate (22) is tightly attached to the outer top wall of the charging box (2), the other fixing plate (22) is tightly attached to one outer side wall of the charging box (2), a plurality of limiting holes (23) which are obliquely arranged are formed in the fixing plate (22), the axes of the limiting holes (23) in the two fixing plates (22) are located on the same vertical plane, the inclination angles and the directions of the limiting holes (23) in the two fixing plates (22) are the same, a plurality of limiting columns (24) which are in one-to-one correspondence with the limiting holes (23) are respectively arranged on the outer top wall of the charging box (2) and the outer side wall corresponding to the fixing plate (22), the limiting columns (24) penetrate through the limiting holes (23), a plurality of through holes are formed in the side wall, the top wall, the bottom wall, the side wall of the charging barrel (20) and the side cover plate (21) of the charging box (2), and two rows of lifting rings (25) are arranged on the charging box (2), two rows of rings (25) are close to respectively with the opening side vertically lateral wall of containing box (2), and every row of rings (25) are equipped with two rings (25) at least, and the array orientation of rings (25) in the same row is parallel with the lateral wall of containing box (2) that this row of rings (25) are close to, rings (25) are gone up to have hooked on lifting hook (26), and every row of lifting hook (26) correspond a lifting mechanism (3), and lifting hook (26) on the same row link to each other with same lifting mechanism (3), and lifting mechanism (3) are fixed on one mounting bracket (30), and mounting bracket (30) are located the top in passivation pond (1), and lifting mechanism (3) are controlled by controlling means (4).

2. The passivation device of the semiconductor-grade precision stainless steel pipe according to claim 1, characterized in that: the passivation pool (1) is internally provided with a temperature sensing device (11) and a heating device (12), and the temperature sensing device (11) and the heating device (12) are both connected with the control device (4).

3. The passivation device of the semiconductor-grade precision stainless steel pipe according to claim 1, characterized in that: a plurality of box cover plates (10) are covered on the passivation pool (1), and a plurality of gaps which are matched with the lifting mechanism (3) are formed between the box cover plates (10).

4. A semiconductor grade precision stainless steel tube passivating apparatus as claimed in claim 3, wherein: an air suction pipe (15) is arranged on one side wall of the passivation pool (1) and close to the top end, the air suction pipe (15) is connected with an air suction end of an air suction device (16), an air outlet end of the air suction device (16) is connected with a waste gas treatment device (17), and the air suction device (16) and the waste gas treatment device (17) are controlled by a control device (4).

5. The passivation device of the semiconductor-grade precision stainless steel pipe according to claim 1, characterized in that: the included angle between the limiting column (24) and the horizontal plane is 45 degrees.

6. The passivation device of the semiconductor-grade precision stainless steel pipe according to claim 1, characterized in that: lifting mechanism (3) are by motor (31), gear box (32), winding reel (33), stay cord (35) are constituteed, motor (31) and gear box (32) are all fixed on mounting bracket (30), the input shaft of gear box (32) links to each other with motor (31), gear box (32) have be three synchronous output shaft, every output shaft all links to each other one winding reel (33), winding reel (33) go up has stay cord (35), stay cord (35) end links to each other with lifting hook (26).

[ technical field ] A method for producing a semiconductor device

The invention relates to the technical field of stainless steel pipes, in particular to the technical field of passivation devices.

[ background of the invention ]

After the precise stainless steel pipe in the semiconductor industry is subjected to machining, welding and other working procedures, a large number of scratches and polishing marks are generated on the surface of the precise stainless steel pipe, so that the surface treatment of the precise stainless steel pipe in the semiconductor industry is one of effective ways for prolonging the service life of the precise stainless steel pipe. When the stainless steel pipe is passivated in the passivation pool, parts of the stainless steel pipe can be contacted with other objects inevitably, so that the passivation effect of the parts is not ideal.

[ summary of the invention ]

The invention aims to solve the problems in the prior art and provides a semiconductor-grade precise stainless steel pipe passivating device which can fully passivate a stainless steel pipe.

In order to achieve the purpose, the invention provides a passivation device for a semiconductor-grade precise stainless steel pipe, which comprises a passivation pool, a charging box, a charging barrel, side cover plates, a lifting mechanism, a lifting ring, a lifting hook and a control device, wherein passivation liquid is contained in the passivation pool, the charging box is immersed in the passivation liquid, the charging box is cuboid, one side of the charging box is open, a plurality of horizontally arranged charging barrels are arranged in the charging box, the charging barrel is vertical to the open side of the charging box, the device barrel is fixed to the side opposite to the open side of the charging box, the charging barrel is open at the open side of the charging box, the side cover plate of the opening of the charging box is provided with one side cover plate, the side cover plate is abutted against the open end of the charging barrel, the side of the side cover plate close to the charging box is provided with two fixing plates, one fixing plate is tightly attached to the outer top wall of the charging box, the other fixing plate is tightly attached to one outer side wall of the charging box, and the fixing plate is provided with a plurality of obliquely arranged limiting holes, the axes of the limiting holes on the two fixed plates are positioned on the same vertical plane, the inclination angles and the directions of the limiting holes on the two fixed plates are the same, a plurality of limiting posts which are in one-to-one correspondence with the limiting holes are arranged on the outer top wall of the charging box and the outer side wall corresponding to the fixed plates, the limiting posts penetrate through the limiting holes, a plurality of through holes are arranged on the side wall, the top wall, the bottom wall, the side wall of the charging barrel and the side cover plate of the charging box, two rows of lifting rings are arranged on the charging box and are respectively close to the side wall which is vertical to the opening side of the charging box, each row of lifting rings are at least provided with two lifting rings, the arrangement direction of the lifting rings in the same row is parallel to the side wall of the charging box which the lifting rings are close to, lifting hooks are hooked on the lifting rings, each row of lifting hooks corresponds to one lifting mechanism, the lifting hooks in the same row are connected with the same lifting mechanism, and the lifting mechanism is fixed on one mounting frame, the mounting bracket is positioned above the passivation pool, and the lifting mechanism is controlled by the control device.

Preferably, a temperature sensing device and a heating device are arranged inside the passivation tank, and both the temperature sensing device and the heating device are connected with the control device.

Preferably, the passivation tank is covered with a plurality of box cover plates, and a plurality of gaps which are matched with the lifting mechanism are formed between the box cover plates.

Preferably, a suction pipe is arranged on one side wall of the passivation tank close to the top end, the suction pipe is connected with a suction end of a suction device, an air outlet end of the suction device is connected with an exhaust gas treatment device, and the suction device and the exhaust gas treatment device are controlled by a control device.

Preferably, the included angle between the limiting column and the horizontal plane is 45 degrees.

Preferably, the lifting mechanism comprises a motor, a gear box, a winding drum and a pull rope, the motor and the gear box are both fixed on the mounting frame, an input shaft of the gear box is connected with the motor, the gear box is provided with three synchronous output shafts, each output shaft is connected with one winding drum, the pull rope is wound on the winding drum, and the tail end of the pull rope is connected with the lifting hook.

The invention has the beneficial effects that: according to the invention, the lifting mechanism and the charging barrel are matched, so that the stainless steel pipes are not easy to collide with each other, and the stainless steel pipes can slowly rotate, so that all parts of the stainless steel pipes can be fully contacted with the passivation solution, and the passivation effect is ensured; the suction device is matched with the waste gas treatment device, so that harmful gas generated in the passivation process can be effectively collected and treated.

The features and advantages of the present invention will be described in detail by embodiments in conjunction with the accompanying drawings.

[ description of the drawings ]

FIG. 1 is a front view of a semiconductor grade precision stainless steel pipe passivating device of the present invention;

FIG. 2 is a side view of the charging box of the passivation apparatus for semiconductor grade stainless steel pipe of the present invention;

FIG. 3 is a schematic diagram of a lifting mechanism of the semiconductor-grade precision stainless steel tube passivation device of the present invention.

In the figure: 1-a passivation pool, 2-a charging box, 3-a lifting mechanism, 4-a control device, 10-a box cover plate, 11-a temperature sensing device, 12-a heating device, 15-an air suction pipe, 16-an air suction device, 17-an exhaust gas treatment device, 20-a charging barrel, 21-a side cover plate, 22-a fixing plate, 23-a limiting hole, 24-a limiting column, 25-a hanging ring, 26-a hanging hook, 30-a mounting rack, 31-a motor, 32-a gear box, 33-a winding barrel and 35-a pull rope.

[ detailed description ] embodiments

Referring to fig. 1, 2 and 3, the invention relates to a passivation device for semiconductor grade precision stainless steel pipes, which comprises a passivation pool 1, a charging box 2, a charging barrel 20, a side cover plate 21, a lifting mechanism 3, a lifting ring 25, a lifting hook 26 and a control device 4, wherein passivation liquid is contained in the passivation pool 1, the charging box 2 is immersed in the passivation liquid, the charging box 2 is cuboid, one side of the charging box 2 is open, a plurality of horizontally arranged charging barrels 20 are arranged in the charging box 2, the charging barrel 20 is vertical to the open side of the charging box 2, the device barrel is fixed to the opposite side of the open side of the charging box 2, the charging barrel 20 is open at the open side of the charging box 2, the side cover plate 21 is provided with a side cover plate 21 on the side of the opening of the charging box 2, the side cover plate 21 is provided with two fixing plates 22 close to the open end of the charging box 20, one fixing plate 22 is close to the outer top wall of the charging box 2, the other fixing plate 22 is tightly attached to one outer side wall of the charging box 2, a plurality of limiting holes 23 which are obliquely arranged are arranged on the fixing plate 22, the axes of the limiting holes 23 on the two fixing plates 22 are positioned on the same vertical plane, the inclination angles and the directions of the limiting holes 23 on the two fixing plates 22 are the same, a plurality of limiting columns 24 which are in one-to-one correspondence with the limiting holes 23 are respectively arranged on the outer top wall of the charging box 2 and the outer side wall corresponding to the fixing plates 22, the limiting columns 24 penetrate through the limiting holes 23, a plurality of through holes are respectively arranged on the side wall, the top wall, the bottom wall, the side wall of the charging barrel 20 and the side cover plate 21 of the charging box 2, two rows of lifting rings 25 are arranged on the charging box 2, the two rows of lifting rings 25 are respectively close to the side wall which is perpendicular to the opening side wall of the charging box 2, each row of lifting rings 25 is at least provided with two lifting rings 25, and the arrangement direction of the lifting rings 25 in the same row is parallel to the side wall of the charging box 2 close to the lifting rings 25, the device is characterized in that lifting hooks 26 are hooked on the lifting rings 25, each row of lifting hooks 26 corresponds to one lifting mechanism 3, the lifting hooks 26 on the same row are connected with the same lifting mechanism 3, the lifting mechanisms 3 are fixed on a mounting frame 30, the mounting frame 30 is positioned above the passivation pool 1, the lifting mechanisms 3 are controlled by a control device 4, a temperature sensing device 11 and a heating device 12 are arranged inside the passivation pool 1, the temperature sensing device 11 and the heating device 12 are both connected with the control device 4, a plurality of box cover plates 10 are covered on the passivation pool 1, a plurality of gaps which are matched with the lifting mechanisms 3 are formed between the box cover plates 10, an air suction pipe 15 is arranged at a position, close to the top end, of one side wall of the passivation pool 1, the air suction pipe 15 is connected with an air suction end of an air suction device 16, an air outlet end of the air suction device 16 is connected with a waste gas treatment device 17, and the air suction device 16 and the waste gas treatment device 17 are controlled by the control device 4, the included angle between spacing post 24 and the horizontal plane is 45, lifting mechanism 3 comprises motor 31, gear box 32, winding reel 33, stay cord 35, and motor 31 and gear box 32 are all fixed on mounting bracket 30, and the input shaft of gear box 32 links to each other with motor 31, and gear box 32 has three synchronous output shaft, and every output shaft all links to each other one winding reel 33, and it has stay cord 35 to coil on the winding reel 33, and stay cord 35 end links to each other with lifting hook 26.

The working process of the invention is as follows:

in the working process of the semiconductor-grade precise stainless steel tube passivation device, a stainless steel tube with the diameter smaller than the inner diameter of each charging barrel 20 is placed in each charging barrel 20, the lifting mechanism 3 drives the charging box 2 to slowly swing, and the charging box 2 slowly rotates in the swinging process, so that all parts of the stainless steel tube can be fully contacted with passivation liquid, and the passivation effect is guaranteed.

The above embodiments are illustrative of the present invention, and are not intended to limit the present invention, and any simple modifications of the present invention are within the scope of the present invention.