阅读说明：本技术 微型光波导的微压力传感器及系统 (Micro-pressure sensor and system of micro optical waveguide ) 是由 武贵敏 于 2021-09-10 设计创作，主要内容包括：本申请涉及微型光波导的微压力传感器及系统,具体而言,涉及压力检测领域。本申请提供的微型光波导的微压力传感器,传感器包括：第一光波导管、第二光波导管、受压层、透明弹性层和椭球透明部；本申请的微压力传感器该受压层将压力传递至该透明弹性层,该透明弹性层在压力的作用下发生形变,进而使得该压力作用在该透明弹性层内部的椭球透明部上,则该椭球透明部的发生形变产生一定的转动,即改变了光信号在该椭球透明部内部的传播路径,从而改变通过该第一光波导管传递到该第二光波导管的光信号,即使得本申请的微压力传感器输出光的光谱发生改变,并根据输出光的光谱与待测压力的对应关系,得到待测压力。(The application relates to a micro-pressure sensor and a system of micro optical waveguides, in particular to the field of pressure detection. The application provides a micro-pressure sensor of miniature optical waveguide, the sensor includes: the optical waveguide comprises a first optical waveguide, a second optical waveguide, a pressure-receiving layer, a transparent elastic layer and an ellipsoidal transparent part; this micro pressure sensor of this application should receive the layer and transmit pressure to this transparent elastic layer, this transparent elastic layer takes place deformation under the effect of pressure, and then make this pressure act on the transparent portion of the ellipsoid of this transparent elastic layer inside, then the emergence deformation of this transparent portion of ellipsoid produces certain rotation, the propagation path of light signal in this transparent portion of ellipsoid inside has been changed promptly, thereby change the light signal that transmits this second light waveguide through this first light waveguide, even make the spectrum of the output light of this application change, and according to the spectrum of output light and the corresponding relation of the pressure that awaits measuring, obtain the pressure that awaits measuring.)

1. A micro-pressure sensor of micro-optic waveguide, the sensor comprising: the optical waveguide comprises a first optical waveguide, a second optical waveguide, a pressure-receiving layer, a transparent elastic layer and an ellipsoidal transparent part; the one end of first optical waveguide is provided with transparent elastic layer, transparent elastic layer keeps away from one side of first optical waveguide is provided with the second optical waveguide, the inside of transparent elastic layer is provided with the transparent portion of ellipsoid, just the major axis of the transparent portion of ellipsoid with the optical axis direction of first optical waveguide becomes certain angle, the outside parcel of transparent elastic layer is provided with the pressure receiving portion, wherein, transparent elastic layer takes place to deform under the effect of pressure.

2. The micro-pressure sensor of micro-optical waveguide of claim 1, wherein the material of the transparent part of the ellipsoid is a polyester material.

3. The micro-pressure sensor of micro-optical waveguide as claimed in claim 2, wherein the material of the transparent elastic layer is at least one of phenolic resin, epoxy resin and polyurethane rubber.

4. The micro-pressure sensor of claim 3, wherein the surface of the transparent part is provided with a grating structure, and the grating structure is a plurality of grooves parallel to each other.

5. The micro-pressure sensor with micro-optical waveguide as claimed in claim 4, wherein the transparent part of the ellipsoid has noble metal nanoparticles embedded on its surface.

6. The micro-pressure sensor of claim 5, wherein the transparent portion of the ellipsoid is doped with a photosensitive material.

7. The micro-pressure sensor of claim 6, wherein the photosensitive material is germanium or boron.

8. A micro-pressure sensing system of micro-optical waveguides, the system comprising: the micro-pressure sensor comprises a light source, a spectrometer, a computer and the micro-pressure sensor with the micro-optical waveguide as claimed in any one of claims 1 to 7, wherein the light source and the spectrometer are respectively arranged on two sides of a first optical waveguide and a second optical waveguide of the sensor, the spectrometer is used for acquiring a spectrum of output light of the sensor, the computer is in communication connection with the spectrometer, and the computer is used for acquiring the pressure to be measured according to a corresponding relation between the spectrum of the output light acquired by the spectrometer and the pressure to be measured.

Technical Field

The application relates to the field of pressure detection, in particular to a micro-pressure sensor and a system of micro optical waveguides.

Background

Physical pressure refers to the force that occurs at the contact surface of two objects, either the vertical force of a gas against a solid and the surface of a liquid, or the vertical force of a liquid against the surface of a solid. (the force between objects acting vertically on the surface of the object due to mutual squeezing, called pressure.) for example, the force of a football against the ground, the force of an object against a slope, the force of a hand against a wall, etc.

Due to the development of the technology, the requirements on the accuracy and the sensitivity of the device in the prior art are high, so that the detection or the measurement of the tiny pressure is required in the prior art, and the detection of the tiny pressure in the prior art is the same as the detection method and the detection device of the common pressure.

However, the prior art apparatus for detecting pressure has a large error in the detected micro-pressure due to insufficient accuracy, and the detected micro-pressure is inaccurate.

Disclosure of Invention

The present invention is directed to provide a micro-pressure sensor and a system for micro-optical waveguide, which solve the problem that the micro-pressure detected by the device for detecting pressure in the prior art has a large error when detecting the micro-pressure due to the insufficient precision, so that the detected micro-pressure is inaccurate.

In order to achieve the above purpose, the embodiment of the present invention adopts the following technical solutions:

in a first aspect, the present application provides a micro-pressure sensor for micro-optical waveguides, the sensor comprising: the optical waveguide comprises a first optical waveguide, a second optical waveguide, a pressure-receiving layer, a transparent elastic layer and an ellipsoidal transparent part; the one end of first optical waveguide is provided with transparent elastic layer, and one side that first optical waveguide was kept away from to transparent elastic layer is provided with the second optical waveguide, and the inside of transparent elastic layer is provided with the transparent portion of ellipsoid, and the major axis of the transparent portion of ellipsoid becomes certain angle with the optical axis direction of first optical waveguide, and the outside parcel of transparent elastic layer is provided with the portion of being pressed, and wherein, deformation takes place for transparent elastic layer under the effect of pressure.

Optionally, the material of the ellipsoidal transparent portion is a polyester material.

Optionally, the material of the transparent elastic layer is at least one of phenolic resin, epoxy resin and polyurethane rubber.

Optionally, a grating structure is disposed on the surface of the ellipsoidal transparent portion, and the grating structure is a plurality of grooves parallel to each other.

Optionally, the surface of the ellipsoidal transparent part is embedded with noble metal nanoparticles.

Optionally, the ellipsoidal transparent portion is doped with a photosensitive material.

Optionally, the photosensitive material is germanium or boron.

In a second aspect, the present application provides a micro-pressure sensing system with a micro-optical waveguide, the system comprising: the micro-pressure sensor comprises a light source, a spectrometer, a computer and the micro-pressure sensor of the micro-optical waveguide in any one of the first aspect, wherein the light source and the spectrometer are respectively arranged on two sides of a first optical waveguide and a second optical waveguide of the sensor, the spectrometer is used for acquiring a spectrum of output light of the sensor, the computer is in communication connection with the spectrometer, and the computer is used for acquiring pressure to be measured according to a corresponding relation between the spectrum of the output light acquired by the spectrometer and the pressure to be measured.

The invention has the beneficial effects that:

the application provides a micro-pressure sensor of miniature optical waveguide, the sensor includes: the optical waveguide comprises a first optical waveguide, a second optical waveguide, a pressure-receiving layer, a transparent elastic layer and an ellipsoidal transparent part; one end of the first optical waveguide is provided with a transparent elastic layer, one side of the transparent elastic layer, which is far away from the first optical waveguide, is provided with a second optical waveguide, an ellipsoid transparent part is arranged inside the transparent elastic layer, and the long axis of the ellipsoid transparent part and the included angle of the first optical waveguide form a certain angle, and a pressure receiving part is wrapped outside the transparent elastic layer, wherein the transparent elastic layer deforms under the action of pressure, when the micro-pressure sensor of the application detects the pressure, the pressure to be detected acts on the pressure receiving layer, the pressure receiving layer transmits the pressure to the transparent elastic layer, the transparent elastic layer deforms under the action of the pressure, and further the pressure acts on the ellipsoid transparent part inside the transparent elastic layer, and as the transparent elastic layer deforms, the deformation of the ellipsoid transparent part generates a certain rotation, so that the included angle between the long axis of the ellipsoid transparent part and the first optical waveguide changes, the transmission path of the optical signal in the ellipsoidal transparent part is changed, so that the optical signal transmitted to the second optical waveguide through the first optical waveguide is changed, namely, the spectrum of the output light of the micro-pressure sensor is changed, and the pressure to be measured is obtained according to the corresponding relation between the spectrum of the output light and the pressure to be measured; this application is because the structure is comparatively simple to the measurement to minute-pressure turns into the detection to the spectrum of outputting light, because prior art is all higher to the detection precision, the degree of accuracy and the sensitivity of light signal, then make the minute-pressure that finally obtains through the spectrum of outputting light also have the advantage that detection precision is high, the degree of accuracy is high and sensitivity is high, consequently the minute-pressure sensor of this application is suitable for the measurement to minute-pressure.

Drawings

In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings needed to be used in the embodiments will be briefly described below, it should be understood that the following drawings only illustrate some embodiments of the present invention and therefore should not be considered as limiting the scope, and for those skilled in the art, other related drawings can be obtained according to the drawings without inventive efforts.

Fig. 1 is a schematic structural diagram of a micro-pressure sensor with a micro-optical waveguide according to an embodiment of the present invention;

FIG. 2 is a schematic cross-sectional view of a micro-pressure sensor with a micro-optical waveguide according to an embodiment of the present invention;

fig. 3 is a schematic perspective view of a micro-pressure sensor with a micro-optical waveguide according to an embodiment of the present invention.

Icon: 10-a first optical waveguide; 20-a second optical waveguide; 30-a transparent elastic layer; 40-a pressed layer; 50-ellipsoidal transparency.

Detailed Description

In order to make the objects, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are one embodiment of the present invention, and not all embodiments. The components of embodiments of the present invention generally described and illustrated in the figures herein may be arranged and designed in a wide variety of different configurations.

Thus, the following detailed description of the embodiments of the present invention, presented in the figures, is not intended to limit the scope of the invention, as claimed, but is merely representative of selected embodiments of the invention. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.

Fig. 1 is a schematic structural diagram of a micro-pressure sensor with a micro-optical waveguide according to an embodiment of the present invention; FIG. 2 is a schematic cross-sectional view of a micro-pressure sensor with a micro-optical waveguide according to an embodiment of the present invention; FIG. 3 is a schematic perspective view of a micro-pressure sensor with a micro-optical waveguide according to an embodiment of the present invention; as shown in fig. 1, 2 and 3, the present application provides a micro-pressure sensor of a micro-optical waveguide, the sensor including: a first optical waveguide 10, a second optical waveguide 20, a pressure-receiving layer 40, a transparent elastic layer 30, and an ellipsoidal transparent portion 50; one end of first optical waveguide 10 is provided with transparent elastic layer 30, and one side that transparent elastic layer 30 kept away from first optical waveguide 10 is provided with second optical waveguide 20, and the inside of transparent elastic layer 30 is provided with the transparent portion 50 of ellipsoid, and the major axis of the transparent portion 50 of ellipsoid becomes certain angle with first optical waveguide 10, and the outside parcel of transparent elastic layer 30 is provided with the pressure receiving portion, and wherein, transparent elastic layer 30 takes place to deform under the effect of pressure.

For ease of understanding, the components of the micro-pressure sensor of the present application will now be described separately:

first optical waveguide 10 and second optical waveguide 20, and first optical waveguide 10 and second optical waveguide 20 are used for transmitting optical signals, where first optical waveguide 10 is identical to second optical waveguide 20, and for convenience of distinction, the optical waveguide where optical signals are first incident is referred to as first optical waveguide 10, and specific dimensions and other parameters of first optical waveguide 10 and second optical waveguide 20 are set according to actual needs, and are not specifically limited herein, where first optical waveguide 10 and second optical waveguide 20 are internally provided with a light-transmitting medium, and first optical waveguide 10 and second optical waveguide 20 are coaxially disposed when disposed, such that one end of first optical waveguide 10 is close to one end of second optical waveguide 20, and a gap is disposed between first optical waveguide 10 and second optical waveguide 20, and the gap is used for disposing transparent elastic layer 30, the specific size of the gap is set according to actual needs, and is not particularly limited herein. In practice, first optical waveguide 10 is located closer to the light source and second optical waveguide 20 is located further from the light source.

The term "optical waveguide" is to be construed as a dielectric device, also known as a dielectric optical waveguide, that guides the propagation of light waves therein. Optical waveguides fall into two broad categories: one category is integrated optical waveguides, including planar (thin film) media optical waveguides and strip media optical waveguides, which are typically part of an optoelectronic integrated device (or system) and are therefore referred to as integrated optical waveguides; another type is a cylindrical optical waveguide, commonly referred to as an optical fiber (optical fiber).

A transparent elastic layer 30, the transparent elastic layer 30 being made of transparent elastic material, so that the transparent elastic layer 30 deforms under the action of pressure, in order to make the micro-pressure sensor of the present application have higher precision, the transmittance of the transparent elastic layer 30 is set to be the same as the transmittance of the first optical waveguide 10 and the second optical waveguide 20, the transparent elastic layer 30 is disposed in the gap between the first optical waveguide 10 and the second optical waveguide 20, in practical application, because the first optical waveguide 10 and the second optical waveguide 20 are generally cylindrical structures, the transparent elastic layer 30 is also set to have a radius slightly smaller than or equal to the cylindrical structure of the first optical waveguide 10 and the second optical waveguide 20, so as to reduce the loss of optical signals through the transparent elastic layer 30, and further improve the precision of the micro-pressure obtained by the present application through the detection of optical signals, in practical applications, the axial center portion of the transparent elastic layer 30 is connected to the first optical waveguide 10 and the second optical waveguide 20, so that the transparent elastic layer 30 is contracted in the axial direction by the pressure.

A pressed layer 40, the pressed layer 40 is wrapped outside the transparent elastic part and used for bearing pressure and transmitting the pressure to the transparent elastic layer 30, the pressed layer 40 is wrapped outside the transparent elastic layer 30 and used for protecting the transparent elastic layer 30, and the transparent elastic layer 30 is prevented from directly contacting with the external surface to be tested for pressure, so that the transparent elastic layer 30 is prevented from physical damage; and in practical application, this portion of receiving is light-tight material, avoids entering into the inside optical signal transmission of this transparent elastic layer 30 outside, reduces the loss of optical signal in this transparent elastic layer 30 inside for this application detects the degree of accuracy and the precision of the structure of little pressure and all obtains improving through the optical signal, and general this portion of receiving is flexible material.

An ellipsoid transparent part 50, the ellipsoid transparent part 50 is arranged inside the transparent elastic layer 30, the center of the ellipsoid transparent part 50 is arranged on the axis of the transparent elastic layer 30, and the included angle between the long axis of the ellipsoid transparent part 50 and the transparent elastic part is a certain angle, because the ellipsoid transparent part 50 is made of transparent material and the transmissivity of the ellipsoid transparent part 50 is greater than or equal to that of the transparent elastic layer 30, the loss of the optical signal passing through the ellipsoid transparent part 50 is reduced; when detecting the pressure, the pressure acts on the transparent elastic layer 30 through the pressure receiving portion to deform the transparent elastic layer 30, and further transmit the pressure and the deformation to the ellipsoidal transparent portion 50, the ellipsoidal transparent portion 50 rotates under the pressure, and further extrude the transparent elastic portion, so that the transparent elastic portion further deforms, and since the optical signal passes through the transparent elastic portion and the ellipsoidal transparent portion 50, and both the transparent elastic portion and the ellipsoidal transparent portion 50 deform, the path of the optical signal passing through the transparent elastic portion and the ellipsoidal transparent portion 50 changes, and further the spectrum of the light emitted through the transparent elastic portion changes, the light emitted from the transparent elastic portion is transmitted through the second optical waveguide 20, and the spectrum of the light emitted from the second optical waveguide 20 is detected, obtaining the pressure to be measured according to the corresponding relation between the spectrum of the output light and the pressure to be measured, wherein in practical application, the corresponding relation between the spectrum of the output light and the pressure to be measured is obtained according to experimental measurement and is not specifically limited herein; the pressure to be measured is obtained according to the corresponding relationship between the spectrum of the output light and the pressure to be measured, in practical application, various mapping relationships can be established, or the mapping relationship between the spectrum of the output light and the pressure to be measured can be established through known experimental data, so that in the practical application process, the pressure to be measured can be obtained through the mapping relationship between the spectrum of the output light received by the spectrometer and the pressure to be measured by using the mapping relationship, and the manner of establishing the mapping relationship is the prior art, which is not described herein again.

The utility model provides a micro pressure sensor's specific beneficial effect, because this application adopts the spectral change characterization of emergent light to wait to survey the micro pressure, make the detection result and testing process all have stronger interference immunity and stability, and this application structure is comparatively simple, and will turn into the detection to the spectrum of outputting light to the measurement of micro pressure, because prior art is to the detection precision of light signal, degree of accuracy and sensitivity are all higher, make the micro pressure that finally obtains through the spectrum of outputting light also have the detection precision height, the degree of accuracy is high and the high advantage of sensitivity, consequently the micro pressure sensor of this application is suitable for the measurement to micro pressure.

Optionally, the material of the ellipsoidal transparent portion 50 is a polyester material.

Because the polyester material has higher transmissivity, and has better elasticity, when light signal passes through this transparent portion of ellipsoid 50 for light signal's loss reduces, and this polyester material still easily processes simultaneously, receives pressure easily to deform, and has good resilience, consequently adopts transparent portion of ellipsoid 50 of this polyester material not only to make the precision and the degree of accuracy improvement of the detection micro-pressure of this application, can also prolong the life of this application's micro-pressure sensor.

Optionally, the material of the transparent elastic layer 30 is at least one of phenolic resin, epoxy resin and polyurethane rubber.

The material of the transparent elastic layer 30 may be any one of phenolic resin, epoxy resin and polyurethane rubber, or a mixed material of multiple compositions of phenolic resin, epoxy resin and polyurethane rubber, and is not specifically limited herein, because phenolic resin, epoxy resin and polyurethane rubber can change the light transmittance of the transparent elastic layer 30 under the action of pressure, the precision and sensitivity of the micro-pressure sensor for detecting pressure are improved.

Optionally, the surface of the ellipsoidal transparent part 50 is provided with a grating structure, which is a plurality of mutually parallel grooves.

Set up a plurality of recesses that are parallel to each other on this ellipsoid transparent 50's surface, a plurality of recesses form the grating structure jointly, the distance between this a plurality of recesses that are parallel to each other and the concrete parameter of every recess are decided according to actual need, do not specifically limit here, when this ellipsoid transparent 50 takes place to rotate, the corresponding emergence in position of this grating structure changes, and then make the coupling condition of light signal and grating structure change, further make the change of light signal more obvious, thereby make this application pass through the precision and the sensitivity of the spectral detection pressure of emergent light higher.

Optionally, the surface of the ellipsoidal transparent part 50 is embedded with noble metal nanoparticles.

The noble metal nanoparticles are arranged on the surface of the transparent ellipsoidal part 50, when an optical signal is irradiated on the transparent ellipsoidal part 50, under the action of the optical signal, surface plasmons are generated on the surface of the transparent ellipsoidal part 50, an electromagnetic field is limited on the surface of the transparent ellipsoidal part 50, and the electromagnetic field on the surface of the transparent ellipsoidal part 50 is enhanced due to the action of the surface plasmons, so that the optical signal passing through the transparent ellipsoidal part 50 is further changed by the electromagnetic field, and when the transparent ellipsoidal part 50 rotates, the change of the electromagnetic field is obvious, so that the optical signal emitted by the transparent ellipsoidal part 50 is correspondingly changed, and the accuracy and the sensitivity of the pressure detection are improved. The material of the noble metal nanoparticles may be any one of noble metals, or may be a mixed material of a plurality of noble metals, and is not particularly limited herein.

Optionally, the ellipsoidal transparent portion 50 is doped with a photosensitive material.

The refractive index of the photosensitive material changes under the action of pressure, so that the transmittance of the transparent ellipsoidal part 50 further changes, and therefore, under the action of pressure, the spectral change of an optical signal emitted from the transparent ellipsoidal part 50 of the photosensitive material is larger, and therefore the photosensitive material is doped in the transparent ellipsoidal part 50, so that the pressure detection accuracy of the application is higher.

Optionally, the photosensitive material is germanium or boron.

The photosensitive material may be germanium, boron, or a mixed material of germanium and boron, and is not particularly limited herein.

The application provides a micro-pressure sensing system of miniature optical waveguide, the system includes: the micro-pressure sensor comprises a light source, a spectrometer, a computer and the micro-pressure sensor with the micro-optical waveguide, wherein the light source and the spectrometer are respectively arranged on two sides of a first optical waveguide 10 and a second optical waveguide 20 of the sensor, the spectrometer is used for acquiring the spectrum of output light of the sensor, the computer is in communication connection with the spectrometer, and the computer is used for acquiring the pressure to be measured according to the corresponding relation between the spectrum of the output light acquired by the spectrometer and the pressure to be measured.

The above is only a preferred embodiment of the present invention, and is not intended to limit the present invention, and various modifications and changes will occur to those skilled in the art. Any modification, equivalent replacement, or improvement made within the spirit and principle of the present invention should be included in the protection scope of the present invention.