阅读说明：本技术 自旋轨道扭矩器件中的切换轨迹的控制 (Control of switching trajectories in spin orbit torque devices ) 是由 T·蓬 C·加格 于 2020-06-05 设计创作，主要内容包括：三端子器件包括磁性隧道结(MTJ)和自旋轨道扭矩(SOT)生成层。MTJ具有第一磁性层、位于第一磁性层下方的隧道势垒层和位于隧道势垒下方的第二磁性层,其中SOT生成层直接位于第二磁性层下方。第二磁性层具有非对称的形状,使得与第二磁性层相关联的残余状态的平均磁化具有与SOT生成层中的电流方向正交的平面内分量。(The three-terminal device includes a Magnetic Tunnel Junction (MTJ) and a spin-orbit torque (SOT) generating layer. The MTJ has a first magnetic layer, a tunnel barrier layer located below the first magnetic layer, and a second magnetic layer located below the tunnel barrier, wherein the SOT generating layer is located directly below the second magnetic layer. The second magnetic layer has an asymmetric shape such that an average magnetization of a residual state associated with the second magnetic layer has an in-plane component orthogonal to a direction of current flow in the SOT generation layer.)

1. A three-terminal device comprising:

(a) a Magnetic Tunnel Junction (MTJ), the MTJ comprising: (i) a first magnetic layer; (ii) a tunnel barrier layer located below the first magnetic layer; and (iii) a second magnetic layer located below the tunnel barrier; and

(b) a Spin Orbit Torque (SOT) generating layer directly below the second magnetic layer;

wherein the second magnetic layer has an asymmetric shape such that an average magnetization of a residual state associated with the second magnetic layer has an in-plane component orthogonal to a direction of current flow in the SOT generation layer.

2. The device of claim 1, wherein the device is part of a non-volatile inverter circuit formed by a series connection of the MTJ in (a) and another MTJ.

3. The device of claim 1, wherein the device is part of a non-volatile NAND or NOR gate formed using a combination of series and parallel connections of the MTJ in (a) with three other MTJs.

4. The device of claim 1, wherein the second magnetic layer asymmetric shape is a trapezoid.

5. The device of claim 1, wherein the three terminal device forms part of a non-volatile cache memory device.

6. The device of claim 1, wherein the three terminal device forms part of a low temperature memory device.

7. The device of any preceding claim, wherein the SOT generating layer is made of a material that exhibits a spin hall effect.

8. The device of claim 7, wherein the material is selected from the group consisting of W, Pt, Ta, and combinations thereof.

9. The device of claim 7, wherein the SOT generating layer is made of oxygen doped tungsten.

10. A device, comprising:

(a) a first Magnetic Tunnel Junction (MTJ), the first MTJ comprising: (i) a first magnetic layer; (ii) a first tunnel barrier layer located below the first magnetic layer; and (iii) a second magnetic layer located below the first tunnel barrier;

(b) a second Magnetic Tunnel Junction (MTJ), the second MTJ comprising: (i) a third magnetic layer; (ii) a second tunnel barrier layer located below the first magnetic layer; and (iii) a fourth magnetic layer underlying the second tunnel barrier;

(c) a common Spin Orbit Torque (SOT) generating layer directly beneath both the second magnetic layer of the first MTJ and the fourth magnetic layer of the second MTJ;

wherein the SOT generated in the common SOT generation layer sets a first magnetic state in the second magnetic layer and sets a second magnetic state in the fourth magnetic layer, the first magnetic state being opposite to the second magnetic state.

11. The device of claim 10, wherein the first MTJ and the second MTJ are each shaped as an asymmetric element.

12. The device of claim 10, wherein the asymmetric element is shaped like a trapezoid.

13. The device of claim 10, wherein the first and/or third magnetic layers comprise any one or combination of: a Synthetic Antiferromagnetic (SAF) layer, an exchange bias layer, and a layer having a coercivity higher than a coercivity of the second magnetic layer.

14. The device of claim 10, wherein the second magnetic layer and/or the fourth magnetic layer comprise a CoFeB alloy and/or a NiFe alloy.

15. The device of claim 10, wherein the device forms part of a non-volatile cache memory device.

16. The device of claim 10, wherein the device forms part of a low temperature memory device.

17. The device of claim 10, wherein the common SOT generation layer is made of oxygen doped tungsten.

18. The device of claim 10, wherein the common SOT generation layer is made of a material that exhibits a spin hall effect.

19. The device of claim 18, wherein the material is selected from the group consisting of W, Pt, Ta, and combinations thereof.

20. A method, comprising:

(a) providing a three-terminal device comprising, in order, a spin-orbit torque (SOT) generating layer, an in-plane magnetized free layer whose magnetic moment can be switched with a spin-transfer torque produced by the SOT generating layer, a tunnel barrier, and a reference magnetic layer whose orientation remains fixed during device operation, wherein:

write plus and write minus terminals in electrical contact with opposite ends of the SOT generating layer;

a read terminal in electrical contact with the reference magnetic layer; and

the magnetic free layer has an asymmetric shape such that an average magnetization of a residual state of the free layer has an in-plane component orthogonal to the current direction; and

(b) passing a current along the SOT generating layer between terminals of the SOT generating layer to switch a magnetic state of the magnetic free layer even without applying a magnetic field when a direction of the passed current is oriented along an easy axis of magnetization of the magnetic free layer.

21. The method of claim 20, wherein the reference layer comprises any one or a combination of: a Synthetic Antiferromagnetic (SAF) layer, an exchange bias layer, and a layer having a coercivity higher than a coercivity of the second magnetic layer.

22. The method of claim 20, wherein the magnetic free layer does not include a magnetic domain wall in a residual state.

23. The method of claim 20, wherein the anisotropy of the magnetic free layer results primarily from magnetostatic interaction between magnetic moments in the magnetic free layer.

24. The method of claim 20, wherein the magnetic free layer comprises a CoFeB alloy and/or a NiFe alloy.

25. The method of claim 20, wherein the three terminal device forms a portion of a non-volatile cache memory device.

26. The method of claim 20, wherein the three terminal device forms a portion of a low temperature memory device.

27. The method of claim 20, wherein the SOT generating layer is made of oxygen doped tungsten.

28. The method of claim 20, wherein the SOT generation layer is made of one or more materials that exhibit spin hall effect.

Technical Field

The present invention relates generally to the field of memory and logic devices. More particularly, the present invention relates to non-volatile spintronic (spintronic) memory and logic devices and circuits that use the spin-orbit torque (spin torque) phenomenon to switch the magnetization of adjacent magnetic layers.

Background

Currently, there is great interest in three-terminal spintronic devices as a potential non-volatile replacement for charge-based semiconductor devices in caches, such as Static Random Access Memory (SRAM). The writing mechanism is based on the controlled manipulation of the magnetic moment using a Spin Transfer Torque (STT) generated by spin-orbit interaction. One approach towards three-terminal magnetic memory devices is based on current-induced motion of magnetic domain walls (single domain wall racetrack memory elements) in nano-mirror wires. The second approach is to switch the magnetization of adjacent magnetic nano-elements by using SOT. One mechanism for reading out the magnetic state in either type of device uses a Magnetic Tunnel Junction (MTJ) based on the Tunnel Magnetoresistance (TMR) effect. Other readout mechanisms include the extraordinary hall effect.

Although larger in overall footprint than conventional two-terminal spin-transfer torque magnetic random access memory (STT-MRAM) MTJ devices, these three-terminal devices may be advantageous for high speed memory applications. The separation of the read and write paths in a three terminal device makes the optimization of materials and the individual read and write schemes significantly easier to handle. Additionally, one of the loss mechanisms in conventional STT-MRAM MTJ devices is dielectric breakdown of the tunnel barrier, which occurs when a large voltage required for high speed operation is applied across the tunnel barrier during the write process. In a three terminal device, this loss mechanism is eliminated since the read and write paths are separate.

These three terminal devices are primarily based on the switching of magnetic nano-elements, using spin-polarized current generated in a close non-magnetic metal layer by the spin hall effect. The spin hall effect converts longitudinal charge current to transverse spin current. For cache memory applications, replacement devices are required to have both reliable operation and fast switching times. In a conventional three-terminal device configuration, the current-induced spin polarization and the magnetic easy axis lie in the same plane and are collinear with each other. Although deterministic switching can be achieved in such a configuration, it is difficult to achieve high-speed reliable operation on a short timescale due to the need for thermal fluctuations in order to initiate the switching process. This phenomenon is well known in conventional two-terminal STT-MRAM devices, and it results in a so-called "write error rate" for switching below 10 ns.

In modern computing systems utilizing Complementary Metal Oxide Semiconductor (CMOS) technology, the devices used to perform computational tasks close to the logic core, including register files, cache memory, and main memory, are volatile. As such, the digital information retained in these devices needs to be transferred to the peripheral non-volatile memory circuitry. This data transmission process causes a significant amount of propagation delay. Further, the access speed of these non-volatile devices is much slower than the access speed of the memory located near the logic core. Thus, there is a need for high speed nonvolatile memory and logic circuits that can be placed in close proximity.

Embodiments of the present invention seek to improve upon prior art systems and methods.

Disclosure of Invention

In one aspect, the present invention provides a three-terminal device comprising: (a) a Magnetic Tunnel Junction (MTJ), the MTJ comprising: (i) a first magnetic layer; (ii) a tunnel barrier layer located below the first magnetic layer; and (iii) a second magnetic layer located below the tunnel barrier; (b) a Spin Orbit Torque (SOT) generating layer directly below the second magnetic layer; and wherein the second magnetic layer has an asymmetric shape such that an average magnetization of a residual state associated with the second magnetic layer has an in-plane component orthogonal to a direction of current flow in the SOT generation layer.

In another aspect, the present invention provides a device comprising: (a) a first Magnetic Tunnel Junction (MTJ), the first MTJ comprising: (i) a first magnetic layer; (ii) a first tunnel barrier layer located below the first magnetic layer; and (iii) a second magnetic layer located below the tunnel barrier; (b) a second Magnetic Tunnel Junction (MTJ), the second MTJ comprising: (i) a third magnetic layer; (ii) a second tunnel barrier layer located below the first magnetic layer; and (iii) a fourth magnetic layer located below the tunnel barrier; (c) a common Spin Orbit Torque (SOT) generating layer directly beneath both the second magnetic layer of the first MTJ and a fourth magnetic layer of the second MTJ; wherein the SOT generated in the common SOT generation layer sets a first magnetic state in the second magnetic layer and sets a second magnetic state in the fourth magnetic layer, the first magnetic state being opposite to the second magnetic state.

In another aspect, the present invention provides a method comprising: (a) providing a three-terminal device comprising, in order, a Spin Orbit Torque (SOT) generating layer, an in-plane magnetized free layer whose magnetic moment can be switched with spin transfer torque generated by the SOT generating layer, a tunnel barrier, and a reference magnetic layer whose orientation remains fixed during device operation, wherein: a write-plus (write-plus) terminal and a write-minus (write-minus) terminal are in electrical contact with opposite ends of the SOT-generating layer; a read terminal in electrical contact with the reference magnetic layer; and the magnetic free layer has an asymmetric shape such that an average magnetization of a residual state of the free layer has an in-plane component orthogonal to the current direction; and (b) passing a current along the SOT generating layer between terminals of the SOT generating layer to switch a magnetic state of the magnetic free layer even without application of a magnetic field when a direction of the passed current is oriented along an easy axis of the magnetic free layer.

Drawings

The present disclosure in accordance with one or more various examples is described in detail with reference to the following drawings. The drawings are provided for illustrative purposes only and depict only examples of the invention. These drawings are provided to facilitate the reader's understanding of the disclosure and should not be taken as limiting the breadth, scope, or applicability of the disclosure. It should be noted that for clarity and ease of illustration, the drawings are not necessarily drawn to scale.

FIG. 1A depicts D_xxSchematic of a three terminal SOT device in a configuration where the easy axis of magnetization of the magnetic nano-elements is along the x-direction and the current I_xCollinear with the easy axis direction.

FIG. 1B depicts D_xySchematic of a three terminal SOT device in a configuration in which the magnetic nanoparticles areThe easy axis of magnetization of the element is along the x-direction, and the current I_yOrthogonal to the easy axis direction.

FIG. 1C depicts a schematic of a preferred embodiment of the present invention in which the magnetic nanoelements have an asymmetric shape.

FIG. 2A shows a time-resolved magnetization diagram from a micromagnetic simulation, showing the magnetization at D when a 500ps long positive current pulse is applied to the W (O) layer_xxThere is no handover in the configuration.

Fig. 2B shows current pulses used in micromagnetic simulations.

FIGS. 3A and 3B show time-resolved magnetization plots from micromagnetic simulations, showing a left leg (D) with negative tilt_xx-) Current induced switching in the right angle trapezoidal patterned element. Current-induced switching from the + x and-x states occurs with positive and negative currents, respectively, after application of a 500ps current pulse.

FIGS. 4A-4B show rectangles D that are not defective for the + x and-x magnetization directions, respectively_xxMagnetization configuration of the residual state of the device.

Fig. 4C-4D show the final state magnetization diagrams after applying 500ps current pulses for positive and negative polarity current pulses, respectively.

FIG. 4E shows the average magnetization under positive and negative current pulses<m_x>Time evolution of (c).

FIGS. 5A-5B show rectangles D having defects at the lower left edge for + x and-x magnetization directions, respectively_xxMagnetization configuration of the residual state of the device.

5C-5D depict the final state magnetization diagrams after applying 500ps current pulses to the positive and negative polarity current pulses, respectively.

FIG. 5E shows the average magnetization under positive and negative current pulses<m_x>Time evolution of (c).

FIGS. 6A-6B show rectangles D with defects at the upper left edge for + x and-x magnetization directions, respectively_xxMagnetization configuration of the residual state of the device.

6C-6D depict the final state magnetization diagrams after applying 500ps current pulses to the positive and negative polarity current pulses, respectively.

FIG. 6E shows the average magnetization under positive and negative current pulses<m_x>Time evolution of (c).

FIGS. 7A-7B show rectangles D of symmetric defects with + x and-x magnetization directions, respectively_xxMagnetization configuration of the remnant state of the device, showing stabilization of the C state.

7C-7D depict the final state magnetization diagrams after applying 500ps current pulses to the positive and negative polarity current pulses, respectively.

FIG. 7E shows the average magnetization under positive and negative current pulses<m_x>Time of (c) is advanced.

FIG. 8A shows D_xx-Of different current pulses of the device<m_x>Time evolution of (c).

FIG. 8B depicts current pulses and magnetization versus time for the 200ps case, outlining the four-step magnetization reversal process.

FIG. 9A depicts a right angle trapezoidal device D as calculated by micromagnetic simulation_xxMagnetization configuration of initial state of type.

Fig. 9B shows a magnetization diagram showing the time evolution of the magnetization of a non-switching event with a current pulse width of 100 ps.

Fig. 9C shows a magnetization diagram showing the time evolution of the magnetization of a switching event with a current pulse width of 200 ps.

FIG. 10A shows D_xyOf different current pulses of the device<m_x>Time progression of (a).

Fig. 10B shows a magnetization diagram showing the time evolution of the magnetization with switching events of a current pulse of 600 ps.

FIGS. 11A-B depict patterning D as right angle trapezoids_xx-And D_xx+SEM image of the device.

FIGS. 11C-D show that the remnant state magnetizations are shown as being respectively from D_xx-And D_xx+And (4) micro-magnetic simulation calculation of the device.

FIGS. 12A-12B show D, respectively_xx-And D_xx+RH loop of measurement of the device, in which the drawing is insertedThe symbols show the reference layer and free layer magnetization orientations.

FIGS. 12C-12D show D, respectively_xx-And D_xx+The measured RI loop of the device with the reference and free layer magnetization directions shown by the legends.

FIGS. 13A and 13B show truth tables summarizing_xx-And D_xx+Switched and unswitched conditions of the device.

FIG. 14 shows mirror image D connected in series and sharing a common W (O) layer_xx-And a schematic diagram of a non-volatile inverter (NOT gate) circuit implemented by a Dxx + device.

Fig. 15A to 15B show equivalent circuit diagrams of a nonvolatile inverter (NOT gate) circuit in the write and read modes, respectively.

15C-D depict non-limiting implementations of NAND gates in write and read modes.

15E-F depict non-limiting implementations of NOR gates in write and read modes.

Fig. 16 depicts a truth table describing the operation of a non-volatile inverter.

FIG. 17 depicts a graph based on D_xx-And D_xx+Experimental demonstration of the operation of series connected inverters of the device. The input voltage, the resistance of the two devices, and the output voltage as a function of the number of iterations are plotted.

Detailed Description

While the invention has been illustrated and described in a preferred embodiment, the invention can be produced in many different configurations. There is depicted in the drawings, and herein will be described in detail, a preferred embodiment of the invention with the understanding that the present disclosure is to be considered an exemplification of the principles of the invention, as well as the associated functional specifications for its construction and is not intended to limit the invention to the embodiment illustrated. Many other possible variations within the scope of the invention will occur to those skilled in the art.

Note that in this specification, reference to "one embodiment" or "an embodiment" means that the feature so mentioned is included in at least one embodiment of the invention. Further, separate references to "one embodiment" in this specification do not necessarily refer to the same embodiment; however, unless so stated and except as will be readily apparent to one of ordinary skill in the art, these embodiments are not mutually exclusive. Thus, the invention may include any of the various combinations and/or integrations of the embodiments described herein.

FIG. 1A shows a schematic three-terminal device configuration for switching magnetic nanoelements with spin-orbit torque. The three-terminal configuration is represented as type D_xxWherein the first subscript indicates the magnetization easy axis of the magnetic nano-element and the second subscript indicates the current direction. The magnetic nano-elements to be switched form part of the MTJ structure and are in direct contact with the layer that produces the SOT when a current is applied through it. This layer is denoted as spin-orbit layer throughout.

The three-terminal device 100 includes: (a) a Magnetic Tunnel Junction (MTJ)102, the MTJ102 comprising: (i) a first magnetic layer 104; (ii) a tunnel barrier layer 106 located below the first magnetic layer 104; and (iii) a second magnetic layer 108 located below the tunnel barrier 106; and (b) a Spin Orbit Torque (SOT) generating layer 110, the SOT generating layer 110 being located directly below the second magnetic layer 108. In fig. 1A, the magnetization direction in the MTJ and the current-induced spin polarization direction in the SOT generation layer are orthogonal to each other. Further, in fig. 1A, a first contact and a second contact are provided at opposite ends in the SOT generation layer 110, and a third contact is provided on the first magnetic layer 104.

Examples of materials for the first magnetic layer include, for example, synthetic antiferromagnetic layers comprised of CoFe-based alloys separated by Ru layers, and exchange bias layers, where a thin ferromagnetic layer comprised of a CoFe-based alloy is placed adjacent to an antiferromagnet such as IrMn or PtMn. The tunnel barrier is typically composed of MgO, and the second magnetic layer is also composed of a CoFe-based alloy. Non-limiting examples of materials for the magnetic layer include CoFe alloys (e.g., CoFeB) and NiFe alloys (e.g., Ni)₈₀Fe₂₀)。

The spin orbit layer is electrically connected at both ends thereof such that when a voltage source is applied, a current (Ix) flowing in the spin orbit layer travels in a direction parallel to the easy axis of magnetization of the magnetic free layer adjacent thereto and generates a Spin Orbit Torque (SOT) in the magnetic layer. The conductive channel is a write path. The mechanism behind SOT generation in this device is through the spin hall effect that occurs in heavy metals such as Pt, W and Ta and their alloys. In a non-limiting example, the SOT generating layer is an oxygen doped tungsten layer w (o) formed by reactively sputtering a thin tungsten film in the presence of oxygen. It has been experimentally demonstrated that this material produces a spin hall angle of-50%. The third terminal of the device is connected to the top of the MTJ so that the resistance state of the MTJ can be discerned by magnetoresistive sensing from the tunnel magnetoresistance effect. Sensing can be accomplished by flowing a current through either of the write terminal and the terminal connected to the top of the MTJ. In a preferred embodiment, a current pulse of sufficient current density and nanosecond time scale is applied to the write channel, and depending on the direction of the current, the magnetic state of the MTJ can be set along with its subsequent resistance state.

For comparison, fig. 1B shows a prior art method of switching magnetic nano-elements in a three terminal configuration. We denote this three-terminal configuration as type D_xy。

At D_xxIn a type device, the magnetization and current induced spin polarization are orthogonal to each other when the SOT is initially applied. In contrast, for D_xyThe magnetization and spin polarization in the initial state of the device (fig. 1B) are collinear with each other. At D_xxSwitching is undesirable in the device because the SOT rotates the magnetization only towards the in-plane hard-axis direction (± y direction). In the passage of D_xxWhen the w (o) layer in the device removes the current, the magnetization rotates back towards its original direction.

FIG. 1C depicts a schematic of a preferred embodiment of the present invention in which the magnetic nanoelements have an asymmetric shape. The magnetic nano-elements have an asymmetric shape such that the average magnetization of the remnant state has an in-plane component orthogonal to the direction of current flow. In a preferred embodiment, the current direction and the easy axis of the magnetic nano-element are collinear.

FIG. 2A is 500ps long as shown by FIG. 2BD under positive current pulse of_xxThis is illustrated by time-resolved micromagnetic simulation of the SOT switching of the 200nmx100nm element in the configuration. In this simulation, the SOT is modeled as a damping-like torque derived from the spin hall effect. As expected, micromagnetic simulations show magnetization oriented toward the in-plane hard-axis direction of the device (± y-direction, for ± I, respectively_xCurrent) is rotated (upper right diagram of fig. 2A). The damping-like contribution of the SOT (from the magnetization of the spin-polarized film) when the magnetization rotates towards the spin-polarized directionThe method for preparing the high-performance nano-particles is provided, wherein,is STT, a_jIs a damping-like spin-torque parameter,is a normalized magnetization, andspin polarization) disappears. Therefore, the magnetization cannot be driven through the hard axis orientation, and therefore, no magnetization reversal occurs regardless of the polarity of the current applied to the w (o) layer (fig. 2B).

Although these simulations are performed in the zero temperature limit, thermal fluctuations at limited temperatures can drive magnetization reversal because the energy barrier for magnetization rotating toward ± x-direction is suppressed when the magnetization is in the hard axis direction. However, this inversion mechanism is random and not suitable for technical applications. Thus, D_xyAnd D_xxThe effects of thermal fluctuations during switching of the device are complementary. For D_xyDevice, thermal fluctuation is responsible for starting the switching dynamics (switching dynamics), but as the cone angle for magnetization precession is established for inversion, the magnitude of the SOT increases, driving the inversion process. At D_xxIn the device, the SOT initiates the switching process, but the thermal fluctuations establish an initial bias point for subsequent magnetization reversal to occur after application of current to the w (o) layer.

Based on this understanding, D can occur if an internal magnetic field exists to facilitate the inversion process when the magnetization is directed toward the intermediate hard-axis state by the SOT_xxDeterministic switching in configuration. Thus, fast switching can occur without thermal fluctuations at the starting point or at intermediate points of the switching trajectory.

Micromagnetic simulations of magnetic nanoelements with right trapezoid shapes are shown in fig. 3A-3B and are subjected to the same current pulses as in fig. 2B. Micromagnetic simulations show that magnetization rotation towards the in-plane hard-axis direction under SOT is greater in the wider cross-section of the trapezoid, while magnetization in the narrow cross-section of the trapezoid favors pointing tangentially to the nanoelement boundaries (fig. 3A-3B 500ps time frame). This is because the shape anisotropy energy density is large in the narrower section of the trapezoid. Depending on the polarity of the current pulse, the magnetization at the tip of the trapezoid has a component along or opposite the initial magnetization direction (FIGS. 3A-3B compare I_xMagnetization at 500 ps). The preferred orientation of the moments is determined by the internal effective magnetic field of the nano-elements and mainly originates from magnetostatic and exchange interactions.

This can also be observed in the residual state of the nano-elements, where the magnetization of the slanted edges of the trapezium is related to the magnetization state of the rectangular area. Upon removal of the current pulse, magnetization reversal can occur through the growth of the domain starting from the upper left corner. If the magnetization has a component in the same direction as the initial state of the trapezoidal tip, no switching occurs. Similar arguments apply to the case where the magnetization starts from-x orientation, where the reversal only occurs with a negative current (fig. 3B). Further, in the case of the right trapezoid with positive slope on the left, the current required to switch to the ± x configuration becomes ± I_x. In this mechanism, the switching current magnitude is equivalent to switching to the ± x state. Thus, by designing the sample geometry such that an internal magnetic field can initiate the inversion process, it is possible to do without an external magnetic field at D_xxDeterministic switching with controlled switching current polarity is achieved in the device.

In fact, the presence of even small lithographic defects that conventionally occur due to line edge roughness is at D_xxAlso significantly and sufficiently shadow in the configurationThe micromagnetic state is manipulated to affect its switching dynamics. To illustrate this point, consider at D_xxThree different magnetic nano-elements of size 200nm x100nm in a configuration in which the same current pulses as used in the simulation shown in fig. 2B were applied. In the first case (fig. 4A-4E), the nano-elements are perfectly rectangular, but in the other two cases, defects are introduced in the form of missing voxels (voxels) in the upper left corner (fig. 5A-5E) or lower left corner (fig. 6A-6E) of the nano-elements, with dimensions of 6nm x 6 nm. Each figure (fig. 4A-4B, fig. 5A-5B, fig. 6A-6B) shows the relaxed state of the magnetization (replayed state) of each structure. In the following discussion, these devices are referred to as devices #1, #2, and # 3.

In the relaxed state of device #1, although these moments curl toward these edges under the influence of the demagnetizing field, the net magnetization along the y-axis<m_y>Is zero. When a current pulse is applied across the w (o) layer, the damping-like torque from the SOT will cause the magnetization to temporarily rotate toward a direction orthogonal to the easy axis. When the current pulse is removed, the magnetization relaxes toward the easy axis in the same orientation as the initial state of the nanoelement, as when positive (+ I) is applied_x) And negative (-I)_x) Shown in the end state of magnetization at the time of the current pulse (see fig. 4C and 4D, respectively). Magnetization in nano-elements upon application of current pulses<m_x>The dynamic process is shown in the temporal evolution of the spatial mean (fig. 4E). There is no switching because there is no additional torque causing the magnetization to rotate when the SOT makes the magnetization orthogonal to the easy axis.

In the case of device #2 (fig. 5A-5B), defects were introduced in the lower left corner, and the relaxed magnetization state acquires finite m in the form of edge domains in the nanoelements_yAnd (4) components. The relaxed state shown here is referred to as the S state. Note that m_yComponent and m_xThe states of the components are related (i.e., the S-state has two different orientations). The S state is stabilized by the placement of defects that cause an internal static magnetic field and break the symmetry along the y-axis. When a current pulse is applied, the magnetization rotates toward the spin accumulation direction. However, caused by edge geometry defectsThe demagnetizing field provides additional torque to drive the reversal. Thus, switching is observed when the current pulse is removed (fig. 5C). For the opposite current pulse polarity (fig. 5D), the internal field acts in the + x direction and no switching is observed. The temporal evolution of the magnetization during this switching process is summarized in fig. 5E. Here, the quasi-ballistic (quasi-ballistic) nature of the switching process is also evident.

The defects are located on opposite edges of device #3, and therefore the sensing of the internal static magnetic field is reversed. Note that the orientation of the S state in the residual state of magnetization is opposite to the second case (fig. 6A and 6B). As a result of the defective position, not only the residual state is different, but also the switching behavior with respect to the current polarity is reversed (fig. 6C-6E). Therefore, the location of these small lithographic defects is critical in affecting the residual state as well as the switching current polarity and its overall switching trajectory.

D_xxA significant feature of the handover procedure is that the handover procedure is characterized by<m_x>And coherent rotation of the moment across the entire free layer, as evidenced by the graphs of the time evolution of the magnetization (fig. 5E and 6E). In contrast, D_xyDevice show<m_x>And incoherent inversion involving many metastable states. Thus, with D_xxCompared with, D_xyCan be much longer.

It should also be noted that in the case where the defects are symmetrically placed about the device geometry and share a common edge, no switching occurs. It is further noted that if the trapezoid is perfectly symmetrical about the x-axis, no switching occurs, since the magnetization on the two edges of the nano-element rotate in opposite directions. In this case, the remnant state magnetization corresponds to the C-state (FIGS. 7A-7B). Thus, the fringe domains point in opposite directions both in the remnant state and upon application of a current pulse. Upon application of a current pulse to the spin-orbit layer, the demagnetizing field induced by the defect provides a torque in the opposite direction on the edges of the nanoelements. Thus, no net m is produced at the end of the current pulse_xComponent, and no switching occurs (FIGS. 7C-7E)

Micromagnetic simulationAlso shown is D based on this mechanism_xxThe switching process may be compared to D_xyFaster switching process, e.g. by magnetization of nano-elements<m_x>Is characterized by a monotonic evolution of the spatial average with respect to time. Micromagnetic simulations were performed to understand right angle trapezoidal devices (specifically, D)_xxDevice type) on a fast time scale. In fig. 8A, for a current flowing in the + x direction, different current pulses having current pulse widths in the range from 100ps to 400ps, the spatial average of the normalized magnetization component in the x direction<m_x>Plotted as a function of time. The initial state of magnetization in each simulation is oriented primarily in the x-direction, as shown in the snapshot of the micromagnetic simulation in fig. 9A.

The switching process takes place in four steps, which can be identified from the time trace and divided for the case of 200ps current pulses (fig. 8B). 1) The magnetization is first rotated from the + x direction toward the + y direction by the SOT. 2) After 200ps, in this case the current is removed and the magnetization acquires a small component in the direction of inversion due to the shape anisotropy caused by the right trapezoid shape, as described in the main text. 3) Magnetization reversal occurs through the growth of domain walls. 4) The magnetization relaxes to its final equilibrium state by precession (precession) adjacent to its equilibrium state. Fast switching with pulse widths as short as 150ps can be achieved using this mechanism (see solid black line of fig. 8A). It is further noted that the switching is "quasi-ballistic" and that the switching is achieved within almost one precession period. However, the relaxation of the magnetization in step 4) involves several precessions, but is deterministic. Unlike other fast time-scale switching schemes that use non-collinear instants, this scheme is insensitive to the width of the current pulse used when the current pulse exceeds the critical pulse width.

Fig. 9B and 9C compare the switching dynamics of non-switching and switching events. In the case of a 100ps current pulse width, where no switching occurs, the magnetization rotates towards the + y direction due to the SOT, but there is not enough time to reorient to be perfectly orthogonal to the current direction. Thus, the magnetization does not generate any component in the reversal direction at the end of the current pulse. The return of the magnetization towards its original direction starts from the domain formed on the upper right corner of the nano-element. This edge is preferred given the lower shape anisotropy density. In contrast, for the case of 200ps, at the end of the current pulse, the magnetization has rotated orthogonal to the direction of the current and forms a component along the inversion direction, which is the component that later forms the nucleation point of the inversion domain moving in from the upper left corner of the nano-element. The magnetization switches within one precession period and does not involve any eddy current states.

In contrast, D_xySwitching of the device at the same current density requires several precession cycles during the inversion process and involves many metastable eddy current states. At D_xyMicromagnetic simulations on the device to correlate its switching dynamics with D_xxAnd (5) comparing the devices. D considered in FIGS. 4A-4E_xxThe devices were identical, simulations were performed on rectangular devices with dimensions of 200nm x100nm, and for current pulse lengths ranging from 200 and 1200 ps. During current pulses<m_x>The evolution with respect to time (fig. 10A) is non-monotonic. Furthermore, D_xyThe device involves a number of precession cycles for switching to occur, and D_xxThe device switches within one precession period.

Time-resolved magnetization map display from simulation, D_xyThe magnetization reversal process at a 600ps current pulse is complex and incoherent involving a non-uniform magnetization state with many eddy current nucleation (fig. 10B). In contrast, D_xxThe magnetization diagram shown in fig. 9B in the device does not involve excitation of higher order spin wave modes and is more coherent. In practice, the excitation of these modes results in a non-monotonic inversion process and requires longer current pulses to complete a reliable switching event. In addition, from<m_x>The precession frequency is non-unity, indicating that different regions of the magnetic nanoelement precess at different frequencies.

Switching based on the above scheme was experimentally studied by examining devices in which the MTJ was patterned into a right trapezoid. FIGS. 11A and 11B illustrate Scanning Electron Microscope (SEM) micrographs of two such devices that have been fabricated, with 150n MTJ at both substratesm and 100nm long and have a width of 75 nm. Use and for manufacturing of D_xyThe same manufacturing process of the device, the MTJ stack (stack) is patterned into a trapezoidal shape down to the w (o) layer. These devices will be referred to as D having a negative slope left and a positive slope left_xx-And D_xx+With the last subscript letter indicating the slope of the left hand side of the trapezoid.

Fig. 11C and 11D show the residual states of magnetization of the two devices, respectively, as calculated by micromagnetic simulation. Magnetic fields H for application along the x-direction are shown in FIGS. 12A and 12B, respectively_xD of (A)_xx-And D_xx+The RH ring of the device. Both devices have nominally the same RH ring, which means that the reference layer magnetizations in both devices are oriented in the same direction. The magnetization directions of the free layer and the reference layer are in fig. 12A and 12B. D is shown in the RI-rings of FIGS. 12C and 12D, respectively, performed using 1ms current pulses_xx-And D_xx+Current-induced switching of the device. A magnetic field applied in the x-direction is also applied to compensate for the dipole field from the reference layer for current induced switching measurements.

At D_xx-In the device, positive (negative) currents drive the switching from AP → P (P → AP), respectively, and at D_xx+The opposite hand-off occurs. The magnetization direction that has been switched at a given current can be determined by comparing the RH and RI loops of a device of a given geometry, and the magnetization directions of the two devices are shown in the insets of fig. 12C and 12D. Since the reference layer magnetization orientation is fixed under the current pulse, the free layer magnetization has been switched in different directions, D_xx+And D_xx-The devices have the same current polarity. The experimentally observed switching in fig. 12C-12D is in fact consistent with that predicted by micromagnetic simulations (fig. 3A and 3D). Truth table (FIGS. 13A-13B) summarizes D_xx-And D_xx+Basic switching operation of the device.

Deterministic switching of such devices, determined by their geometry, may be potentially useful in constructing non-volatile nanomagnetic logic circuits that require switching of several nanomagnets in a complementary fashion. Illustrating that D can be used with a shared common W (O) layer_xx+And D_xx-Operation of the device built non-volatile inverter (NOT gate) (fig. 10). If two devices have their reference layers pointing in the same direction, D_xx+And D_xx-Switching to the opposite resistance state with the same polarity current applied. By convention that the reference layer magnetization points in the-x direction, for positive currents, D_xx+The device will have a ratio of D_xx-Higher resistance of the device. Similarly, when a pulse of reverse current polarity is applied, with D_xx+Device comparison, D_xx-The device will have a higher resistance.

Fig. 15A and 15B show an equivalent circuit model of the nonvolatile inverter device. The circuit model of NOT gate contains a flag D_xx+And D_xxTwo devices of (2). In the write mode (FIG. 15A), the voltage input (V)_in1) Is applied to D_xx+And D_xx-The write + terminals of both devices and the write-terminals of both devices are grounded. During read mode, V_DDIs applied to D_xx+And D is a read terminal_xx+And D_xx-Is connected to V_outAnd D is_xx-The read terminal of (1) is grounded. In practical device applications, D_xx+Supply voltage V of_DDAnd D_xx-The ground on the upper signal can remain connected throughout device operation because the tunnel junction resistance is much greater than the resistance of the spin Hall layer, thus imposing V on the spin Hall layer during the write mode_INDuring this time, most of the current will flow through the spin hall layer.

D_xx+And D_xx-The device can be considered a complementary type of device similar to a transistor in CMOS technology. The connection of the two series devices thus acts as a non-volatile inverter, since once D_xx+And D_xx-The devices have switched to their respective states and the logic output will remain. The truth table in fig. 16 summarizes the inverter operation. Up to 20 iterations of operation of such an inverter circuit are shown (fig. 17). 2.5V and 1ms long pulses were used in this demonstration. Therefore, the generalization of this type of logic for building AND OR gates is straightforward AND these concepts are borrowed from CMOS logic.The advantage in this circuit compared to CMOS is that it is non-volatile and has no static power consumption. This approach can also be used to control the state of nanomagnetic elements in nanomagnetic logic schemes that require magnetic nanoelements to be coupled and in close proximity by their dipole fields. In addition, improvements in the TMR and spin torque efficiency of spin-orbit materials will increase the performance characteristics of the logic devices presented herein.

Embodiments of the present invention use magnetic nanoelements patterned into asymmetric shapes, allowing the use of spin-orbit torque to switch the magnetic nanoelements, where the magnetization and write currents are collinear in the absence of an external magnetic field. In a preferred embodiment, the magnetic nano-elements are in-plane magnetized and form part of an MTJ. The state of the nanomagnet is discerned from the magnetoresistive read across the MTJ.

One aspect of the present invention is that the switching trajectories and terminal magnetic states of the magnetic free layer can be controllably manipulated by lithographically patterning the device geometry to change its micromagnetic state. A second aspect of the invention is that no thermal fluctuations are required to initiate switching because the spin polarization direction of the spin-polarized current generated by spin-orbit interaction is non-collinear with the magnetization direction. This can potentially reduce the write error rate typically observed in short pulse length operation in conventional two terminal STT-MRAM devices.

Another aspect of the present invention is that by forming a mirror patterned device, it is possible to achieve switching of two magnetic nano-elements to complementary states in the same write current direction. Furthermore, such complementary switching of the magnetic nano-element device may form a non-volatile logic circuit. The invention discloses a non-volatile inverter circuit formed by such magnetic nano-elements.

In another embodiment, the present invention provides a device comprising: (a) a first Magnetic Tunnel Junction (MTJ), the first MTJ comprising: (i) a first magnetic layer; (ii) a first tunnel barrier layer underlying the first magnetic layer; and (iii) a second magnetic layer underlying the tunnel barrier; (b) a second Magnetic Tunnel Junction (MTJ), the second MTJ comprising: (i) a third magnetic layer; (ii) a second tunnel barrier layer underlying the first magnetic layer; and (iii) a fourth magnetic layer underlying the tunnel barrier; (c) a common Spin Orbit Torque (SOT) generating layer directly beneath both the second magnetic layer of the first MTJ and a fourth magnetic layer of the second MTJ; wherein the SOT generated in the common SOT generation layer sets a first magnetic state in the second magnetic layer and sets a second magnetic state in the fourth magnetic layer, the first magnetic state being opposite to the second magnetic state. FIG. 14 depicts such a non-limiting example showing this embodiment, where the two MTJs 1402 and 1406 share a common SOT generating layer 1406.

In fig. 14, the circuit is formed by a series connection of two MTJs by a non-volatile inverter (NOT gate). FIG. 14 shows mirror image D connected in series and sharing a common W (O) layer_xx-And D_xx+The device implements a schematic of a non-volatile inverter (NOT gate). FIG. 15A shows a circuit level diagram of a non-volatile inverter in a write mode of the circuit, where the write voltage V_inIs applied to both devices. In the read mode (FIG. 15B), at V_DDThere is a series connection of two MTJs to ground. Here, the write terminal is disconnected from the power supply.

In another embodiment, the circuit is formed of series and parallel connections of a non-volatile NAND gate and a NOR gate through an MTJ. 15C-D depict non-limiting implementations of NAND gates in write and read modes. 15E-F depict non-limiting implementations of NOR gates in write and read modes. The write mode circuitry is the same for both NAND and NOR gates, and two Ds are used_xx+And two D_xx-A device. A group D_xx+And D_xx-The write-plus terminal of the device is connected to V_in1And the other group is connected to V_in2. For read-out, in NAND gates, D_xx-The devices being connected in series, and D_xx+Are connected in parallel. For read-out, in NOR, D_xx-The devices being connected in parallel, and D_xx+Are connected in series.

The above embodiments show an efficient implementation of controlling the switching trajectories in spin-orbit torque devices by a micro-magnetic configuration. While various preferred embodiments have been shown and described, it will be understood that there is no intent to limit the invention by such disclosure, but rather, is intended to cover all modifications falling within the scope of the invention, as defined in the appended claims.