阅读说明：本技术 一种真空蒸发提纯设备 (Vacuum evaporation purification equipment ) 是由 步怀立 高光伟 辛岩 马瑞 付秀华 于 2021-10-25 设计创作，主要内容包括：本发明公开了一种多温度段真空蒸发提纯设备,涉及提纯技术领域,包括炉体、坩埚、多个加热室和结晶器,坩埚、多个加热室和结晶器位于炉体内,多个加热室沿炉体的高度方向排列,结晶器位于相邻的两个加热室之间,并且结晶器连通相邻的两个加热室,沿炉体内从下到上的方向,多个加热室的加热温度从高到低排列,坩埚位于炉体底部的加热室内。蒸气经过炉体底部的加热室加热后在第一个结晶器进行结晶,然后再进入上方的下一个加热室和结晶器,各个加热室的加热温度不同,各个结晶器的温度不同,通过多温度段加热和多个结晶器实现不同蒸发物在不同位置的结晶收集。(The invention discloses a multi-temperature-section vacuum evaporation purification device, which relates to the technical field of purification and comprises a furnace body, a crucible, a plurality of heating chambers and a crystallizer, wherein the crucible, the plurality of heating chambers and the crystallizer are positioned in the furnace body, the plurality of heating chambers are arranged along the height direction of the furnace body, the crystallizer is positioned between two adjacent heating chambers, the crystallizer is communicated with the two adjacent heating chambers, the heating temperatures of the plurality of heating chambers are arranged from high to low along the direction from bottom to top in the furnace body, and the crucible is positioned in the heating chamber at the bottom of the furnace body. The steam is heated by a heating chamber at the bottom of the furnace body and then crystallized in a first crystallizer, and then enters a next heating chamber and a next crystallizer above, the heating temperature of each heating chamber is different, the temperature of each crystallizer is different, and the crystallization collection of different evaporants at different positions is realized through multi-temperature section heating and a plurality of crystallizers.)

1. A vacuum evaporation purification equipment is characterized in that: including furnace body (2), crucible (3), a plurality of heating chamber and crystallizer (5), crucible (3), a plurality of the heating chamber with crystallizer (5) are located in furnace body (2), it is a plurality of the heating chamber is followed the direction of height of furnace body (2) is arranged, crystallizer (5) are located adjacent two between the heating chamber, and crystallizer (5) intercommunication adjacent two the heating chamber is followed from the orientation of bottom to top in furnace body (2), and is a plurality of the heating temperature of heating chamber is arranged from high to low, crucible (3) are located furnace body (2) bottom in the heating chamber.

2. The vacuum evaporation purification apparatus according to claim 1, wherein: the number of the heating chambers is five, and the heating temperatures of the five heating chambers are arranged from high to low along the direction from bottom to top in the furnace body (2).

3. The vacuum evaporation purification apparatus according to claim 1, wherein: a thermocouple (7) is arranged in the heating chamber.

4. The vacuum evaporation purification apparatus according to claim 3, wherein: the thermocouple (7) is an S-type platinum rhodium thermocouple.

5. The vacuum evaporation purification apparatus according to claim 1, wherein: still include condenser (6), condenser (6) set up furnace body (2) top, furnace body (2) top with condenser (6) intercommunication.

6. The vacuum evaporation purification apparatus according to claim 1, wherein: the furnace body (2) comprises a furnace body (8) and a manual door (9) hinged with the furnace body (8), and the manual door (9) and the furnace body (8) are locked through a locking device.

7. The vacuum evaporation purification apparatus according to claim 6, wherein: the locking device is a hand wheel lock, the hand wheel lock is arranged at the edge of the manual door (9), the hand wheel lock comprises a hand wheel (10) and a lock frame (11), one end of the lock frame (11) is hinged to the furnace body (8), and the other end of the lock frame (11) is in threaded connection with the hand wheel (10).

8. The vacuum evaporation purification apparatus according to claim 1, wherein: the vacuum furnace is characterized by further comprising a vacuum system (1) communicated with the furnace body (2), wherein the vacuum system (1) comprises a molecular pump, a roots pump, a rotary vane pump, a vacuum trap and a vacuum pipeline, and the rotary vane pump, the roots pump, the molecular pump, the vacuum trap and the furnace body (2) are sequentially connected through the vacuum pipeline.

9. The vacuum evaporation purification apparatus according to claim 1, wherein: and a metal heat shield is arranged on the wall surface of the heating chamber (4).

Technical Field

The invention relates to the technical field of purification, in particular to vacuum evaporation purification equipment.

Background

The evaporation purification is a material extraction means that a specific component in a material is evaporated by heating the material, and then condensed and collected. With the development of scientific technology, the requirements for the purity of the substances used have increased. In many fields, it is required to have "ultra pure" substances, sometimes up to five nines or eight nines, and even higher. Research has shown that in industrial heat-resistant materials, good heat resistance is obtained when the impurities in the alloy are as low as less than one gram per ton. Semiconductor technology has higher requirements for materials. In addition, studies on ultrapure materials have found that many ultrapure materials have unexpected properties.

The existing evaporation and purification equipment adopts single-temperature-section collection, and cannot meet the requirements of material diversity and one-time purification and collection of various components in the material.

Disclosure of Invention

Therefore, the invention provides vacuum evaporation purification equipment to solve the problem that the existing purification equipment cannot meet the requirement of one-time purification and collection of multiple components in a material.

In order to achieve the above purpose, the invention provides the following technical scheme:

the utility model provides a vacuum evaporation purification equipment, includes furnace body, crucible, a plurality of heating chambers and crystallizer are located the furnace body, and a plurality of heating chambers are arranged along the direction of height of furnace body, and the crystallizer is located between two adjacent heating chambers to two adjacent heating chambers of crystallizer intercommunication, along the direction from the bottom up in the furnace body, the heating temperature of a plurality of heating chambers is arranged from high to low, and the crucible is located the heating chamber of furnace body bottom.

Further, the number of the heating chambers is five, and the heating temperature of each heating chamber is arranged from high to low along the direction from bottom to top in the furnace body.

Furthermore, a thermocouple is arranged in the heating chamber.

Further, the thermocouple is a type S platinum rhodium thermocouple.

Further, still include the condenser, the condenser setting is at the furnace body top, furnace body top and condenser intercommunication.

Further, the furnace body includes furnace body and with furnace body articulated manual door, manual door and furnace body lock through locking device.

Furthermore, the locking device is a hand wheel lock, the hand wheel lock is arranged on the edge of the manual door and comprises a hand wheel and a lock frame, one end of the lock frame is hinged with the furnace body, and the other end of the lock frame is in threaded connection with the hand wheel.

Further, still include the vacuum system with the furnace body intercommunication, vacuum system includes molecular pump, lobe pump, vane rotary pump, vacuum trap and vacuum line, and vane rotary pump, lobe pump, molecular pump, vacuum trap and furnace body pass through vacuum line in order and connect.

Furthermore, a metal heat shield is arranged on the wall surface of the heating chamber.

The invention has the following advantages: the steam is heated by a heating chamber at the bottom of the furnace body and then crystallized in a first crystallizer, and then enters a next heating chamber and a next crystallizer above, the heating temperature of each heating chamber is different, the temperature of each crystallizer is different, and the crystallization collection of different evaporants at different positions is realized through multi-temperature section heating and a plurality of crystallizers.

Drawings

In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below. It should be apparent that the drawings in the following description are merely exemplary, and that other embodiments can be derived from the drawings provided by those of ordinary skill in the art without inventive effort.

The structures, ratios, sizes, and the like shown in the present specification are only used for matching with the contents disclosed in the specification, so that those skilled in the art can understand and read the present invention, and do not limit the conditions for implementing the present invention, so that the present invention has no technical significance, and any structural modifications, changes in the ratio relationship, or adjustments of the sizes, without affecting the functions and purposes of the present invention, should still fall within the scope covered by the contents disclosed in the present invention.

FIG. 1 is a schematic structural diagram of a vacuum evaporation purification apparatus according to an embodiment of the present invention;

fig. 2 is a schematic structural diagram of a hand wheel lock of a vacuum evaporation purification apparatus according to an embodiment of the present invention.

In the figure: 1-a vacuum system; 2-furnace body; 3-a crucible; 4-a first stage heating chamber; 5-a crystallizer; 6-a condenser; 7-a thermocouple; 8-furnace body; 9-a manual door; 10-a hand wheel; 11-locking frame.

Detailed Description

The present invention is described in terms of particular embodiments, other advantages and features of the invention will become apparent to those skilled in the art from the following disclosure, and it is to be understood that the described embodiments are merely exemplary of the invention and that it is not intended to limit the invention to the particular embodiments disclosed. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.

In the present specification, the terms "upper", "lower", "left", "right", "middle", and the like are used for clarity of description, and are not intended to limit the scope of the present invention, and changes or modifications in the relative relationship may be made without substantial changes in the technical content.

As shown in fig. 1, the embodiment of the present invention provides a multi-temperature-zone vacuum evaporation purification apparatus, which comprises a furnace body 2, a crucible 3, a plurality of heating chambers and a crystallizer 5, wherein the crucible 3, the plurality of heating chambers and the crystallizer 5 are located in the furnace body 2, the plurality of heating chambers are arranged along the height direction of the furnace body 2, the crystallizer 5 is located between two adjacent heating chambers, the crystallizer 5 communicates the two adjacent heating chambers, and the heating temperatures of the plurality of heating chambers are arranged from high to low along the direction from bottom to top in the furnace body 2. Specifically, the crucible 3 is located in a heating chamber at the bottom of the furnace body 2, the first-stage heating chamber 4 is located at the lower end of the furnace body 2, the crucible 3 is located in the first-stage heating chamber 4, five heating chambers are arranged in the scheme, five gradient temperature sections are arranged in the vertical direction, the heating temperatures of the five heating chambers are arranged from top to bottom in the furnace body 2, heating materials of the crucible 3 in the first-stage heating chamber 4 generate steam, the steam is heated by the first-stage heating chamber 4 and then crystallized in the first-stage crystallizer 5, then enters the next-stage heating chamber and the crystallizer 5 above, and finally enters the fifth-stage heating chamber and the fifth-stage crystallizer 5 at the top end in the furnace body 2, the heating temperatures of the heating chambers at all stages are different, the temperatures of the crystallizers 5 at all stages are different, and the crystallization collection of different evaporants at different positions is realized through multi-temperature section heating.

In an alternative embodiment, shown in figure 1, a thermocouple 7 is provided within the heating chamber. Thermocouple 7, PLC electrical unit and power pass through circuit connection, and every heating chamber has an independent thermocouple 7 and controls temperature, controls heating temperature, is equipped with thermocouple 7 and crucible 3 in the first level heating chamber 4 of below, and heating temperature is the highest, only is equipped with thermocouple 7 in second level heating chamber to the fifth level heating chamber, and the heating temperature of each thermocouple 7 is different, makes the heating chamber of difference have different temperatures.

In an alternative embodiment, the thermocouple 7 is a platinum rhodium thermocouple of the S type, but also a thermocouple made of another alloy.

In an alternative embodiment, as shown in fig. 1, the multi-temperature-stage vacuum evaporation purification device comprises a condenser 6, wherein the condenser 6 is arranged at the top of the furnace body 2, and the top of the furnace body 2 is communicated with the condenser 6. The top condenser 6 condenses the steam, preventing the material from volatilizing and wasting.

In an alternative embodiment, as shown in fig. 2, the furnace body 2 is a split shell type structure, and includes a furnace body 8 and a manual door 9 hinged to the furnace body, a hand wheel lock is provided at an edge of the manual door 9, specifically, the hand wheel lock includes a hand wheel 10 and a lock frame 11, one end of the lock frame is hinged to the furnace body, the other end of the lock frame is in threaded connection with the hand wheel, and the hand door is tightly locked to the furnace body by tightening the hand wheel.

In an alternative embodiment, as shown in fig. 1, the multi-temperature stage vacuum evaporation purification apparatus comprises a vacuum system 1 communicated with a furnace body 2, wherein the vacuum system 1 is a three-stage pump system and comprises a molecular pump, a roots pump, a rotary vane pump, a vacuum trap and a vacuum pipeline, and the rotary vane pump, the roots pump, the molecular pump and the furnace body 2 are connected in sequence.

In an alternative embodiment, the walls of the heating chamber are provided with a metal heat shield. The heating chamber is for dividing half formula structure, and two half section of thick bamboo constitute a heating chamber, make things convenient for subsequent maintenance and repair.

Although the invention has been described in detail above with reference to a general description and specific examples, it will be apparent to one skilled in the art that modifications or improvements may be made thereto based on the invention. Accordingly, such modifications and improvements are intended to be within the scope of the invention as claimed.