阅读说明：本技术 一种外置式的石英加工中心润滑液冷却系统装置 (External quartz machining center lubricating liquid cooling system device ) 是由 黄海鸥 秦一川 于 2021-01-22 设计创作，主要内容包括：本发明公开了一种外置式的石英加工中心润滑液冷却系统装置,包括石英加工中心和冷却装置,石英加工中心上设有喷淋管和润滑液收集槽,石英加工中心外侧设有润滑液存储室,润滑液存储室分别与润滑液收集槽、喷淋管相连,所述冷却装置包括壳体、水箱、压缩机、冷凝器,水箱内部安装有蒸发器,蒸发器、压缩机、冷凝器之间用管路连接后形成封闭水箱冷却回路,所述壳体上设有进水口、出水口、排水口和供水口,进水口和出水口之间用水管相连并形成闭环水路,部分水管伸入润滑液存储室内以对润滑液存储室内的润滑液进行冷却。本发明具有润滑液冷却时无需流向冷却装置防止润滑液中的石英颗粒堵住冷却装置,通过冷凝水与润滑液间接热交换来冷却等优点。(The invention discloses an external quartz processing center lubricating liquid cooling system device which comprises a quartz processing center and a cooling device, wherein a spray pipe and a lubricating liquid collecting tank are arranged on the quartz processing center, a lubricating liquid storage chamber is arranged on the outer side of the quartz processing center and is respectively connected with the lubricating liquid collecting tank and the spray pipe, the cooling device comprises a shell, a water tank, a compressor and a condenser, an evaporator is arranged in the water tank, the evaporator, the compressor and the condenser are connected through pipelines to form a closed water tank cooling loop, a water inlet, a water outlet and a water supply opening are formed in the shell, the water inlet and the water outlet are connected through water pipes to form a closed water path, and a part of water pipes extend into the lubricating liquid storage chamber to cool lubricating liquid in the lubricating liquid storage chamber. The invention has the advantages that the cooling device is prevented from being blocked by quartz particles in the lubricating liquid without flowing to the cooling device when the lubricating liquid is cooled, the cooling is carried out through indirect heat exchange between condensed water and the lubricating liquid, and the like.)

1. The utility model provides an external lubricated liquid cooling system device of quartz machining center, includes quartz machining center, is equipped with shower and lubricated liquid collecting vat on the quartz machining center, its characterized in that: still include cooling device, the quartz machining center outside is equipped with lubricated liquid locker room, and lubricated liquid locker room links to each other with lubricated liquid collecting vat, shower respectively with the pipeline, cooling device includes the casing, installs at inside water tank, compressor, the condenser of casing, water tank internally mounted has the evaporimeter, forms a confined water tank cooling circuit with the pipe connection back between evaporimeter, compressor, the condenser, is equipped with the expansion valve on the pipeline between condenser and the evaporimeter, be equipped with water inlet, delivery port, outlet and the supply opening that is linked together with the water tank on the casing, link to each other with the water pipe between water inlet and the delivery port and make and form closed loop water route, part in water pipe stretches into lubricated liquid locker room and cools off with the lubricated liquid in the lubricated liquid locker room.

2. The external quartz machining center lubricating fluid cooling system apparatus of claim 1, wherein: and a centrifugal machine and a filter are sequentially arranged between the lubricating liquid storage chamber and the pipeline connected with the spray pipe.

3. The external quartz machining center lubricating fluid cooling system apparatus of claim 2, wherein: the filter includes the base, installs at least one filtering component on the base, and filtering component includes filter screen, two backup pads and connecting plate, and backup pad and connecting plate are inside all to be equipped with the filter screen mounting groove, the edge of filter screen is placed in the filter screen mounting groove and is compressed tightly with a plurality of compact heap, between compact heap and the backup pad, between compact heap and the connecting plate, filtering component and base between can dismantle with the fastener respectively and link to each other two backup pad bilateral symmetry places, and uses between two backup pads and two connecting plates compact heap and fastener link to each other, the inside cavity that is equipped with of base, base side are equipped with the liquid outlet that is linked together with the cavity, link to each other with the pipeline between liquid outlet and.

4. The external quartz machining center lubricating fluid cooling system apparatus of claim 3, wherein: the upper ends of the supporting plate, the connecting plate and the base are provided with positioning mounting holes, the fasteners are connecting pins, and the connecting pins can be correspondingly mounted in the positioning mounting holes.

5. The external quartz machining center lubricating fluid cooling system apparatus of claim 3, wherein: the filtering component also comprises a plurality of reinforcing ribs for supporting the filter screen, and two ends of each reinforcing rib are connected with the supporting plate or the connecting plate.

6. The external quartz machining center lubricating fluid cooling system apparatus of claim 5, wherein: the support plate or the connecting plate is provided with a plugging part, the plugging part is positioned in the filter screen mounting groove, and the reinforcing rib can be plugged with the plugging part.

7. The external quartz machining center lubricating fluid cooling system apparatus of claim 3, wherein: the quantity of filter components is 3, and three filter components can be dismantled with the fastener after piling up perpendicularly and link to each other with the base, and the filter screen filtration pore diameter on the three filter components can be the same or from top to bottom decrease progressively in proper order.

8. The external quartz machining center lubricating fluid cooling system apparatus of claim 3, wherein: the quantity of filter components is 2, and two filter components can be dismantled continuously with the fastener after piling up perpendicularly with the base, and the filter screen filtration pore diameter on two filter components can be the same or from top to bottom decrease progressively in proper order.

9. The external quartz machining center lubricating fluid cooling system apparatus of any one of claims 1 to 8, wherein: and a drainage control switch is arranged on the drainage outlet.

[ technical field ] A method for producing a semiconductor device

The invention belongs to the technical field of lubricating liquid cooling devices, and particularly relates to an external quartz machining center lubricating liquid cooling system device.

[ background of the invention ]

The quartz processing center is a common automatic device for processing quartz, and generally comprises a quartz processing cutter, a liquid spraying pipe, a workbench, a protective cover, a control panel, a clamp, a cooling device and the like. Most of cooling devices of the existing quartz processing center are built-in, so that the working space of the quartz processing center is reduced, and the cooling devices are not convenient for operators to replace, maintain and the like; in addition, in the direct lubricated liquid collecting vat flow direction cooling device of following when lubricated liquid needs the cooling, when the lubricated liquid that thoughtlessly has quartz granule gets into cooling device, lead to the inside pipe blockage of cooling device easily, influence cooling device's normal work and the smooth circulation of lubricated liquid.

[ summary of the invention ]

The invention aims to solve the problems in the background art, and provides an external cooling system device for a lubricating liquid of a quartz machining center, which can prevent quartz particles in the lubricating liquid from blocking a cooling device without flowing to the cooling device when the lubricating liquid is cooled, realize effective cooling of the lubricating liquid through indirect heat exchange between condensed water and the lubricating liquid, and facilitate maintenance and replacement of an operator due to the external cooling device.

In order to achieve the purpose, the invention provides an external quartz processing center lubricating liquid cooling system device, which comprises a quartz processing center and a cooling device, wherein a spray pipe and a lubricating liquid collecting tank are arranged on the quartz processing center, a lubricating liquid storage chamber is arranged outside the quartz processing center and is respectively connected with the lubricating liquid collecting tank and the spray pipe through pipelines, the cooling device comprises a shell, a water tank, a compressor and a condenser which are arranged inside the shell, an evaporator is arranged inside the water tank, the evaporator, the compressor and the condenser are connected through pipelines to form a closed water tank cooling loop, an expansion valve is arranged on the pipeline between the condenser and the evaporator, a water inlet, a water outlet, a water discharging port and a water supply port which are communicated with the water tank are arranged on the shell, the water inlet and the water outlet are connected through a water pipe to form a closed water path between the water tank and, part of the water pipe extends into the lubricating liquid storage chamber to cool the lubricating liquid in the lubricating liquid storage chamber.

Preferably, a centrifugal machine and a filter are sequentially arranged between the lubricating liquid storage chamber and the pipeline connected with the spray pipe, so that the lubricating liquid flowing to the spray pipe can be sequentially subjected to centrifugal filtration treatment, quartz particles contained in the lubricating liquid are effectively removed, the high-quality completion of subsequent processing is ensured, and the subsequent cyclic utilization of the lubricating liquid is facilitated.

As preferred, the filter includes the base, installs at least one filtering component on the base, and filtering component includes filter screen, two backup pads and connecting plate, and backup pad and connecting plate inside all are equipped with the filter screen mounting groove, the edge of filter screen is placed in the filter screen mounting groove and is compressed tightly with a plurality of compact heap, can dismantle continuously with the fastener respectively between compact heap and the backup pad, between compact heap and the connecting plate, between filtering component and the base, two the backup pad bilateral symmetry is placed, and uses between two backup pads and two connecting plates compact heap and fastener link to each other, the inside cavity that is equipped with of base, the base side is equipped with the liquid outlet that is linked together with the cavity, links to each other with the pipeline between liquid outlet and the shower, and the whole easy dismounting of filter, the filter is good.

Preferably, the upper ends of the supporting plate, the connecting plate and the base are provided with positioning mounting holes, the fasteners are connecting pins, the connecting pins can be correspondingly mounted in the positioning mounting holes, and the connecting pins are inserted and connected, so that the supporting plate, the connecting plate, the base and the pressing block can be conveniently disassembled and assembled.

Preferably, the filter assembly further comprises a plurality of reinforcing ribs for supporting the filter screen, two ends of each reinforcing rib are connected with the supporting plate or the connecting plate, the reinforcing ribs can effectively support the filter screen, the filter screen is kept flat as much as possible, and the filter screen is guaranteed to be smoothly carried out.

Preferably, all be equipped with grafting portion on backup pad or the connecting plate, grafting portion is located the filter screen mounting groove, and the strengthening rib can peg graft with grafting portion, makes things convenient for the dismouting of strengthening rib to fix.

Preferably, the number of the filter assemblies is 3, the three filter assemblies are vertically stacked and then detachably connected with the base through fasteners, the diameters of filter screen filtering holes in the three filter assemblies can be the same or sequentially decreased from top to bottom, the three filter assemblies are arranged for filtering for multiple times, and the diameters of the filter screen filtering holes are sequentially decreased from top to bottom for classified filtering, so that the effective filtering of quartz particles in the lubricating liquid is ensured.

Preferably, the number of the filter assemblies is 2, the two filter assemblies are vertically stacked and then detachably connected with the base through fasteners, the diameters of filter screen filtering holes in the two filter assemblies can be the same or sequentially decreased from top to bottom, the double-layer filter assemblies are arranged for filtering for multiple times, and the diameters of the filter screen filtering holes are sequentially decreased from top to bottom for classified filtering, so that the effective filtering of quartz particles in the lubricating liquid is ensured.

Preferably, a drainage control switch is arranged on the drainage port, so that drainage of the water tank is conveniently controlled.

The invention has the beneficial effects that: according to the invention, the water tank in the cooling device is connected with the closed water pipe, part of the water pipe extends into the lubricating liquid storage chamber, and the low-temperature condensed water can be indirectly subjected to heat exchange with the lubricating liquid through the pipe wall of the water pipe to realize effective cooling of the lubricating liquid, so that the lubricating liquid is cooled without flowing to the cooling device to prevent quartz particles in the lubricating liquid from blocking the cooling device, and the cooling device is arranged outside the quartz processing center, so that an operator can conveniently perform operations such as water replenishing and draining on the cooling device; the lubricating liquid of the backflow spray pipe can be effectively filtered by additionally arranging the centrifugal machine and the filter, the recycling quality of the lubricating liquid is guaranteed, and the influence of quartz particles in the lubricating liquid on subsequent processing is reduced.

The features and advantages of the present invention will be described in detail by embodiments in conjunction with the accompanying drawings.

[ description of the drawings ]

FIG. 1 is a schematic structural diagram of one embodiment of the present invention;

FIG. 2 is a schematic structural diagram of one embodiment of the present invention;

FIG. 3 is a schematic view of a cooling apparatus according to an embodiment of the present invention;

FIG. 4 is a schematic diagram of a filter configuration according to an embodiment of the present invention;

FIG. 5 is a schematic view of a filter assembly according to one embodiment of the present invention;

FIG. 6 is a schematic structural view of a cooling device according to an embodiment of the present invention;

fig. 7 is a schematic structural diagram of a cooling device according to an embodiment of the present invention.

In the figure: 1-quartz processing center, 2-lubricating liquid storage chamber, 3-cooling device, 4-centrifuge, 5-filter, 11-spray pipe, 12-lubricating liquid collecting tank, 31-water tank, 32-evaporator, 33-compressor, 34-condenser, 35-expansion valve, 36-water supply port, 37-water outlet, 38-water inlet, 39-water outlet, 50-filtering component, 51-supporting plate, 52-pressing block, 53-reinforcing rib, 54-connecting plate, 55-fastener, 56-filter screen, 57-base, 58-positioning mounting hole and 59-liquid outlet.

[ detailed description ] embodiments

Embodiment 1 refers to fig. 1 and 3, which provide an external quartz processing center lubricating fluid cooling system device, including a quartz processing center 1 and a cooling device 3, the quartz processing center 1 is provided with a spray pipe 11 and a lubricating fluid collecting tank 12, the lubricating fluid collecting tank 12 is located below the spray pipe 11 and can collect the lubricating fluid dripped from the spray pipe 11, a lubricating fluid storage chamber 2 is provided outside the quartz processing center 1, the lubricating fluid storage chamber 2 is respectively connected with the lubricating fluid collecting tank 12 and the spray pipe 11 by pipelines, the cooling device 3 includes a housing, a water tank 31, a compressor 33 and a condenser 34 installed inside the housing, an evaporator 32 is installed inside the water tank 31, the evaporator 32, the compressor 33 and the condenser 34 are connected by pipelines to form a closed water tank cooling loop, an expansion valve 35 is provided on the pipeline between the condenser 34 and the evaporator 32, the shell is provided with a water inlet 38 communicated with the water tank 31, a water outlet 39, a water outlet 37 and a water supply port 36, the water inlet 38 and the water outlet 39 are connected through a water pipe to form a closed loop water path between the water tank 31 and the water pipe, part of the water pipe extends into the lubricating liquid storage chamber 2 to cool the lubricating liquid in the lubricating liquid storage chamber 2, the water outlet 37 is provided with a drainage control switch, the water tank 31 is provided with a water pump communicated with the water inlet 38, the lubricating liquid in the lubricating liquid storage chamber 2 can be pumped to the spraying pipe 11 by a suction pump, the suction pump can be installed inside the quartz processing center 1 and is connected with the spraying pipe 11 and a corresponding pipeline, the shell is provided with a ventilation opening, the lubricating liquid storage chamber 2 is stored with the lubricating liquid, and the lubricating liquid.

Embodiment 2 referring to fig. 2, fig. 4 and fig. 5, this embodiment, in addition to having all the structures of embodiment 1, further discloses that a centrifuge 4 and a filter 5 are sequentially arranged between pipelines connected with the lubricating fluid storage chamber 2 and the spray pipe 11, the filter 5 includes a base 57, and a filter assembly 50 installed on the base 57, the filter assembly 50 includes a filter screen 56, two support plates 51 and a connecting plate 54, filter screen installation grooves are respectively arranged inside the support plates 51 and the connecting plate 54, the edge of the filter screen 56 is placed in the filter screen installation groove and is pressed by a plurality of pressing blocks 52, the pressing blocks 52 and the support plates 51, the pressing blocks 52 and the connecting plate 54, the filter assembly 5 and the base 57 are detachably connected by fasteners 55, the two support plates 51 are placed in bilateral symmetry, the two support plates 51 and the two connecting plates 57 are connected by the pressing blocks 52 and the fasteners 55, a cavity, the side surface of the base 57 is provided with a liquid outlet 59 communicated with the cavity, the liquid outlet 59 is connected with the spray pipe 11 by a pipeline, wherein the filter screen 56 can be replaced by filter paper.

Furthermore, the upper ends of the supporting plate 51, the connecting plate 54 and the base 57 are provided with positioning and mounting holes 58, and the fastening member 55 is a connecting pin which can be correspondingly mounted with the corresponding positioning and mounting holes 58.

Further, the filter assembly 50 further includes a plurality of ribs 53 for supporting the filter screen, both ends of the ribs 53 are connected to the support plate 51 or the connection plate 54, and the ribs 53 are connected in a staggered manner.

Furthermore, the support plate 51 or the connecting plate 53 is provided with a plug part, the plug part is positioned in the filter screen mounting groove, and the reinforcing rib 53 can be plugged with the plug part.

Further, the number of the filter assemblies 50 is 3, three filter assemblies 50 are vertically stacked and detachably connected to the base 57 by the fastening members 55, and the filter holes of the filter nets 56 of the three filter assemblies 5 have the same diameter.

Embodiment 3 referring to fig. 6, except that the number of the filter assemblies 50 is 2, two filter assemblies 50 are vertically stacked and then detachably connected with a base 57 by a fastener 55, and the diameters of the filter holes of the filter screens 56 on the two filter assemblies 50 decrease from top to bottom in sequence, the other structures are the same as those of embodiment 2, and the filter screens 56 with different filter hole diameters can perform classified filtration on the lubricating liquid, so that the filtering effect of the quartz particles in the lubricating liquid is good.

Example 4 referring to fig. 7, the structure is the same as that of example 2 except that the number of filter elements 50 is 1 and the filter elements 50 are detachably coupled to a base 57 at the periphery thereof by fasteners 55.

The external quartz machining center lubricating liquid cooling system device works: the spray pipe 11 sprays the lubricating fluid to the position of the tool for processing the quartz in the quartz processing center 1, the lubricating fluid mixed with the quartz particles flows into the lubricating fluid storage chamber 2 after passing through the lubricating fluid collecting tank 12 and the pipeline, when the lubricating liquid in the lubricating liquid storage chamber 2 needs to be cooled, the low-temperature condensate water in the water tank 31 flows out from the water outlet 39, the low-temperature condensate water in the water pipe can perform indirect heat exchange with the lubricating liquid in the lubricating liquid storage chamber 2 through the pipe wall of the water pipe when passing through the lubricating liquid storage chamber 2, the temperature of the lubricating liquid is reduced after the heat exchange, the temperature of the condensate water in the water pipe is increased, then the condensate water is pumped back into the water tank 31 through the water inlet 38 along the water pipe, the temperature of the condensed water is reduced again by the action of the evaporator 32, the compressor 33 and the condenser 34, so as to realize the circulation refrigeration of the lubricating liquid, and the cooled lubricating liquid flows to the spray pipe 11 to realize the circulation use of the lubricating liquid;

when the cooled lubricating liquid needs to be filtered, the lubricating liquid containing quartz particles flows to the centrifuge 4, the centrifuge 4 disperses the lubricating liquid to enable the quartz particles to be relatively dispersed and then flows to the filter 5, the filter screen 56 on the filter 5 effectively filters the quartz particles, and the filtered lubricating liquid is sucked to the spray pipe 11 from the liquid outlet 59 on the base 57 through a pipeline, so that the circulating use of the lubricating liquid is realized;

when the filter screen 56 needs to be replaced and cleaned, the connecting pin 55 is pulled out, so that the pressing block 52, the supporting plate 51 and the connecting plate 54 are separated from one another and loosened, and in addition, an operator can select the filter screens 56 with different filter hole diameters and the number of the filter assemblies 50 mounted on the filter 5 according to the filtering requirements.

The above embodiments are illustrative of the present invention, and are not intended to limit the present invention, and any simple modifications of the present invention are within the scope of the present invention.