阅读说明：本技术 集尘处理装置 (Dust collecting and processing device ) 是由 V·T·党 吉田干 于 2020-09-29 设计创作，主要内容包括：提供集尘处理装置,在更换过滤器时不使灰尘向周围扩散。一种集尘处理装置,其与干式研磨装置连结,从该干式研磨装置吸引包含灰尘的空气,将该灰尘和该空气分离,其中,该集尘处理装置包含：圆筒状主体,其与该干式研磨装置连结；吸引箱,其配设在该圆筒状主体的上板上；吸引源,其经由通气管道而与该吸引箱连结；过滤器单元,其配设在该圆筒状主体内,包含凸缘部、管以及过滤器,该凸缘部被该圆筒状主体的该上板支承,该管与该凸缘部一体地形成并具有多个细孔,该过滤器以能够装卸的方式外嵌于该管并由水溶性的材质构成；以及水喷射喷嘴,其配设在该吸引箱的内部,向该过滤器单元内喷射水。(Provided is a dust collection processing device which does not diffuse dust to the surroundings when a filter is replaced. A dust collection processing apparatus which is connected to a dry grinding apparatus, sucks air containing dust from the dry grinding apparatus, and separates the dust from the air, wherein the dust collection processing apparatus comprises: a cylindrical body connected to the dry polishing apparatus; a suction box disposed on the upper plate of the cylindrical body; a suction source connected to the suction box through a ventilation duct; a filter unit disposed in the cylindrical body, the filter unit including a flange portion supported by the upper plate of the cylindrical body, a pipe integrally formed with the flange portion and having a plurality of pores, and a filter detachably fitted to the pipe and made of a water-soluble material; and a water injection nozzle disposed inside the suction box and injecting water into the filter unit.)

1. A dust collecting and processing device which is connected with a dry grinding device, sucks air containing dust from the dry grinding device, and separates the dust and the air,

the dust collection processing device comprises:

a cylindrical body including a cylindrical side plate having an inlet for the air sucked from the dry grinding apparatus, an upper plate coupled to an upper portion of the cylindrical side plate, and a drain receiving portion coupled to a lower portion of the cylindrical side plate and having a drain opening;

a suction box disposed on the upper plate of the cylindrical body;

a suction source connected to the suction box through a ventilation duct;

a drain tank that stores drain water that drips through the drain opening of the drain receiver;

a filter unit disposed in the cylindrical body, the filter unit including a flange portion supported by the upper plate of the cylindrical body, a pipe integrally formed with the flange portion and having a plurality of pores, and a filter detachably fitted to the pipe and made of a water-soluble material; and

a water injection nozzle disposed inside the suction box and injecting water into the filter unit,

when the filter unit is replaced, water can be injected from the water injection nozzle into the filter unit, and the filter can be dissolved by the water to pull out the filter unit, which is only the flange portion and the pipe, from the cylindrical body.

Technical Field

The present invention relates to a dust collection processing apparatus.

Background

After grinding the workpiece using the grinding wheel, the grinding surface is ground using a grinding pad to remove irregularities of the grinding surface. The polishing process includes CMP polishing and dry polishing in which polishing is performed using a polishing liquid.

In the dry polishing, since the polishing pad is brought into contact with the workpiece to be polished, dust such as dust of the polishing pad and dust of the workpiece is generated. In order to remove these dusts from the processing chamber, a dust collection processing apparatus as disclosed in patent document 1 is attached to the polishing apparatus.

The dust collection processing device has a cylindrical filter inside, and collects dust by collecting the dust with the filter. If dust adheres to the filter, the dust collection processing capacity is reduced, and therefore the filter is replaced periodically.

Patent document 1: japanese patent laid-open publication No. 2004-001118

In the replacement of the filter, when the filter is removed from the dust collection processing apparatus, dust diffuses to the surroundings and contaminates the inside of the space in which the polishing apparatus and the dust collection processing apparatus are installed.

Disclosure of Invention

Therefore, an object of the present invention is to provide a dust collection and treatment device capable of preventing the interior of a space in which a grinding device and the dust collection and treatment device are installed from being contaminated when a filter unit is replaced.

According to the present invention, there is provided a dust collection processing apparatus connected to a dry polishing apparatus, for sucking air containing dust from the dry polishing apparatus and separating the dust from the air, the dust collection processing apparatus comprising: a cylindrical body including a cylindrical side plate having an inlet for the air sucked from the dry grinding apparatus, an upper plate coupled to an upper portion of the cylindrical side plate, and a drain receiving portion coupled to a lower portion of the cylindrical side plate and having a drain opening; a suction box disposed on the upper plate of the cylindrical body; a suction source connected to the suction box through a ventilation duct; a drain tank that stores drain water that drips through the drain opening of the drain receiver; a filter unit disposed in the cylindrical body, the filter unit including a flange portion supported by the upper plate of the cylindrical body, a pipe integrally formed with the flange portion and having a plurality of pores, and a filter detachably fitted to the pipe and made of a water-soluble material; and a water injection nozzle which is disposed inside the suction box and injects water into the filter unit, wherein when the filter unit is replaced, the water injection nozzle can inject water into the filter unit, and the filter can be dissolved by the water to pull out the filter unit, which is only the flange portion and the pipe, from the cylindrical body.

According to the dust collection processing apparatus of the present invention, the filter is dissolved by the flowing water, and therefore, the dust attached to the side surface of the filter can be discharged from the discharge port together with the filter. This prevents the space in which the polishing device and the dust collection processing device are installed from being contaminated when the filter unit is replaced.

Drawings

Fig. 1 is a perspective view showing the whole of a polishing apparatus having a dust collection processing apparatus.

Fig. 2 is an exploded perspective view of the filter unit.

Fig. 3 is a longitudinal sectional view of the dust collection processing apparatus.

Description of the reference symbols

1: a grinding device; 10: a base; 11: a column; 2: a filter unit; 20: a flange portion; 20 a: an upper surface; 200: an opening; 21: a tube; 21 a: an upper surface; 21 c: a side surface; 210: fine pores; 22: a filter; 22 c: a side surface; 220: the filter is hollow; 30: a holding table; 30 a: a holding surface; 31: a corrugated member; 35: a rotation axis; 5: a processing chamber; 50: a base plate; 500: an opening; 51a to 51 d: a side wall; 510: a baffle plate; 511: a guide rail; 512: a flapper movable member; 52: a top plate; 520: a 2 nd opening; 520 a: a sealing member; 56: a vent; 6: a grinding unit; 60: a main shaft; 61: a housing; 62: an electric motor; 63: a mounting seat; 64: a polishing pad; 64 a: grinding the surface; 65: a rotation axis; 7: a grinding and feeding mechanism; 70: a ball screw; 71: a guide rail; 72: an electric motor; 73: a lifting plate; 74: a holder; 75: a rotation axis; 8: a dust collection processing device; 81: a device housing; 810: an upper surface; 810 a: an opening; 82: a caster wheel; 83: a main body; 831: an outer cylinder; 831 a: an inlet; 832: an inner barrel; 832 a: the upper end of the inner cylinder; 832 b: the lower end of the inner cylinder; 833: an upper plate; 833 a: an upper opening; 834: a drain receiving section; 834 a: an opening for water drainage; 835: a central shaft; 84: an attraction source; 840: an air intake pipe; 841: an exhaust pipe; 851: a drain pipe; 851 b: the lower end of the drain pipe; 852: a drain tank; 852 a: the side surface is opened; 852 c: a side surface; 853: an overflow pipe; 854: a water outlet; 86: a suction box; 861 a: an outlet; 871: a breather pipe; 872: a connecting pipe; 875: an air duct; 877: an exhaust duct; 9: a water supply source; 90: a valve; 900: a valve control member; 91: a spray nozzle; 92: a water spray nozzle; l: water; la: a water surface; w: a workpiece; wa: the surface to be polished.

Detailed Description

1 grinding device

The polishing apparatus 1 shown in fig. 1 is a dry polishing apparatus for polishing a workpiece W. The polishing apparatus 1 will be described below. As shown in fig. 1, the polishing apparatus 1 includes: a base 10 extending in the Y-axis direction; and a column 11 provided upright on the + Y direction side of the base 10.

The polishing apparatus 1 has a holding table 30. The holding table 30 has a disk shape, and an upper surface thereof is a holding surface 30a for holding the workpiece W.

The holding table 30 is connected to a suction member not shown. The workpiece W can be sucked and held on the holding surface 30a by generating a suction force using a suction member or the like in a state where the workpiece W is placed on the holding surface 30a and transmitting the generated suction force to the holding surface 30 a.

A horizontal movement mechanism, not shown, is disposed below the holding table 30. The holding table 30 can be moved in the Y-axis direction by the horizontal movement mechanism. Further, a bellows 31 is disposed on the base 10. The bellows 31 expands and contracts when the holding table 30 moves in the Y-axis direction. The holding table 30 is connected to a not-shown rotating member and is rotatable about a rotation axis 35 in the Z-axis direction passing through the center of the holding table 30.

A polishing feed mechanism 7 for polishing and feeding the polishing unit 6 in the Z-axis direction is disposed on the-Y-direction side surface of the column 11. The grinding and feeding mechanism 7 includes: a ball screw 70 having a rotation axis 75 in the Z-axis direction; a pair of guide rails 71 arranged in parallel with the ball screw 70; a motor 72 that rotates the ball screw 70 about a rotation axis 75; a lift plate 73 having a nut screwed to the ball screw 70 and a side portion slidably contacting the guide rail 71; and a holder 74 coupled to the lifting plate 73 and holding the polishing unit 6.

When the ball screw 70 is rotated about the rotation axis 75 by the motor 72, the lifting plate 73 is moved up and down in the Z-axis direction while being guided by the guide rail 71, and the polishing unit 6 supported by the holder 74 is moved up and down in the Z-axis direction.

The polishing unit 6 has: a main shaft 60 having a rotation axis 65 in the Z-axis direction; a housing 61 rotatably supporting the main shaft 60; a motor 62 that rotates the main shaft 60 about a rotation axis 65; a disk-shaped mounting base 63 connected to the lower end of the main shaft 60; and a disk-shaped polishing pad 64 detachably attached to the lower surface of the mounting base 63.

The polishing pad 64 is made of a material such as nonwoven fabric such as felt or polyurethane, and contains abrasive grains having an appropriate size. For example, the diameter of the polishing pad 64 is larger than the diameter of the workpiece W, and the polishing surface 64a of the polishing pad 64 is in contact with the entire polished surface Wa of the workpiece W during polishing.

A rectangular parallelepiped processing chamber 5 is disposed below the polishing unit 6 on the base 10. The processing chamber 5 has: a base plate 50; side walls 51a to 51d connected to the outer periphery of the bottom plate 50 and erected in the Z-axis direction; and a top plate 52 facing the bottom plate 50 and connected to upper ends of the side walls 51a to 51 d. A circular opening 500 having a diameter slightly larger than that of the holding table 30 is formed in a substantially central portion of the bottom plate 50, and the holding table 30 protrudes from the opening 500.

The Y-direction side wall 51a has, for example, a not-shown carrying-in/out port formed by cutting into a substantially rectangular shape. Further, a shutter 510 that moves up and down in the Z-axis direction to open and close the carrying in/out port and a guide rail 511 that guides the up and down movement of the shutter 510 are disposed on the side wall 51a, and the shutter 510 can move up and down by a shutter movable member 512 such as an air cylinder.

For example, in a state where the shutter 510 is lifted up and the carrying in/out port is opened, the holding table 30 is moved in the Y-axis direction by using a horizontal movement mechanism, not shown, so that the holding table 30 can be moved inside the processing chamber 5 or moved outside the processing chamber 5. The processing chamber 5 is a space for performing polishing of the workpiece W.

The side wall 51d on the + Y direction side is formed with a vent 56.

A circular 2 nd opening 520 is formed in a substantially central portion of the top plate 52, the 2 nd opening 520 has a diameter slightly larger than the mounting seat 63 and the polishing pad 64, and a seal member 520a is disposed around the 2 nd opening 520. When the polishing unit 6 is driven by the polishing feed mechanism 7 and lowered in the-Z direction, the polishing pad 64 is accommodated in the processing chamber 5. In a state where the polishing pad 64 is accommodated in the processing chamber 5, the 2 nd opening 520 is tightly closed by the mounting seat 63 and the sealing member 520 a.

When the workpiece W is polished by the polishing apparatus 1, first, the workpiece W is placed on the holding surface 30a of the holding table 30 with the polished surface Wa facing upward, and the workpiece W is sucked and held on the holding surface 30a by operating a suction member not shown.

Then, the flapper 510 is moved in the + Z direction by the flapper movable member 512 to open the flapper 510, and the holding table 30 is moved in the + Y direction by a Y-axis direction moving member, not shown. Thus, the holding table 30 and the workpiece W held by the holding surface 30a of the holding table 30 are accommodated in the processing chamber 5 and positioned below the polishing pad 64.

Then, shutter 510 is moved in the-Z direction using shutter movable member 512 to close shutter 510. Next, the holding table 30 is rotated about the rotation axis 35 using a rotation member not shown. Further, the main shaft 60 is rotated about the rotation axis 65 by the motor 62. Thereby, the mounting base 63 coupled to the spindle 60 and the polishing pad 64 mounted on the mounting base 63 rotate about the rotation axis 65.

In a state where the workpiece W is rotated about the rotation axis 35 and the polishing pad 64 is rotated about the rotation axis 65, the polishing pad 64 is lowered in the-Z direction by the polishing feed mechanism 7. Thereby, the polishing surface 64a of the polishing pad 64 comes into contact with the polished surface Wa of the workpiece W, and the workpiece W is polished. When the workpiece W is polished by the polishing pad 64, polishing dust is generated.

At this time, since the polishing pad 64 is accommodated in the processing chamber 5 and the 2 nd opening 520 is tightly closed by the mounting seat 63 and the sealing member 520a, it is possible to prevent the polishing dust and the like generated by the polishing process from scattering from the 2 nd opening 520 to the outside of the processing chamber 5.

2 dust collecting and processing device

The polishing apparatus 1 is connected to a dust collection processing apparatus 8, and the dust collection processing apparatus 8 collects dust such as polishing dust generated by polishing of the workpiece W. The dust collection processing device 8 will be explained below.

The dust collection processing device 8 has a device case 81 having a rectangular parallelepiped shape. A circular opening 810a is formed in the upper surface 810 of the device case 81. Various components and the like of the dust collection processing device 8 are disposed in the space inside the device case 81 and on the device case 81.

A caster 82 for facilitating movement of the device case 81 is attached to the lower surface of the device case 81.

The dust collection processing device 8 has a main body 83. The main body 83 is, for example, a main body portion of a cyclone-type separating member, and has a function of separating dust and air. The body 83 has a hollow cylindrical shape and is made of a metal material such as stainless steel.

The main body 83 has an outer cylinder 831. The outer cylinder 831 has a diameter corresponding to the diameter of the circular opening 810a formed in the upper surface 810 of the device case 81. The outer cylinder 831 is disposed on the device case 81 in a state where, for example, the opening 810a of the upper surface 810 of the device case 81 coincides with the bottom surface of the outer cylinder 831, and there is no gap between the upper surface 810 and the outer cylinder 831.

An inlet 831a for air to enter is formed on the outer tub 831, and the inlet 831a is connected to a breather pipe 871. The end of the breather pipe 871 on the side not connected to the inlet 831a is connected to a breather port 56, and the breather port 56 is formed in the + Y direction side sidewall 51d of the processing chamber 5.

The body 83 has an upper plate 833. The upper plate 833 has a circular plate shape corresponding to the upper surface of the outer cylinder 831. A plurality of (three in fig. 1) upper openings 833a are formed in the upper plate 833.

A cylindrical suction box 86 is disposed on the upper plate 833 of the main body 83 so as to cover the upper side of the upper plate 833, and the suction box 86 has, for example, substantially the same diameter as the diameter of the upper plate 833.

An outlet 861a is formed in a side plate 861 of the suction tank 86, and the outlet 861a is connected to the connecting pipe 872. The connection pipe 872 is connected to an intake pipe 875, and the intake pipe 875 is connected to the intake pipe 840. The suction pipe 840 is connected to the suction source 84. That is, the suction tank 86 communicates with the suction source 84 via the connection pipe 872, the suction pipe 875, and the suction pipe 840.

The suction source 84 is connected to an exhaust pipe 841, and an exhaust duct 877 is connected to the exhaust pipe 841 on the side not connected to the suction source 84. An end portion of the exhaust duct 877 not connected to the exhaust pipe 841 is an exhaust port 877 a. The suction source 84, the suction pipe 840, and the exhaust pipe 841 are disposed inside the device case 81.

The suction source 84 includes, for example, a suction motor not shown. By operating the suction source 84, air inside the processing chamber 5 can be sucked through the suction box 86 and the main body 83, and the sucked air can be discharged to the space outside the dust collection processing apparatus 8 from the air outlet 877a of the air discharge duct 877.

A plurality of (three in fig. 1) water injection nozzles 92 are disposed inside the suction box 86. The water jet nozzles 92 are arranged above the upper opening 833a of the upper plate 833 such that their respective jet ports face in the-Z direction, for example. Further, the water spray nozzle 92 is connected to the water supply source 9 via a valve 90. A valve control unit 900 for controlling the open/close state of the valve 90 is disposed on a side surface of the device case 81, for example. By opening the valve 90 using the valve control portion 900 and supplying water from the water supply source 9, water can be sprayed from the water spray nozzle 92 toward the upper opening 833a of the upper plate 833.

Filter units 2 are detachably arranged in the main body 83, for example, in a number (three in fig. 1) corresponding to the number of the upper openings 833 a. As shown in fig. 2, the filter unit 2 has an annular flange portion 20. An opening 200 is formed substantially at the center of the flange portion 20.

The filter unit 2 has a tube 21. A plurality of pores 210 are formed in the side surface 21c of the tube 21. The pipe 21 hangs down from the flange portion 20, and the flange portion 20 is integrated with the pipe 21.

The filter unit 2 includes a filter 22 made of a cloth or a porous material made of a water-soluble material such as PVA. The filter 22 is a corrugated tube, and the filter 22 is wound around the outside of the side surface 21c of the tube 21 by inserting and fixing the tube 21 into a cylindrical hollow 220 formed at the substantially center of the filter 22.

As shown in fig. 3, the filter unit 2 enters the main body 83 through the upper opening 833a, and the flange portion 20 is supported by the upper plate 833.

An inner cylinder 832 is disposed between the main body 83 and the filter unit 2. An upper end 832a of the inner cylinder 832 is connected to and fixed to a lower surface side of the upper plate 833, and the inner cylinder 832 is supported by the upper plate 833. The outer cylinder 831 and the inner cylinder 832 share a center axis 835 in the Z-axis direction. The inner barrel 832 is shorter in length than the outer barrel 831.

For example, a shower nozzle 91 is disposed in an upper portion of a region between the outer tube 831 and the inner tube 832, and the shower nozzle 91 is connected to the water supply source 9. By causing the water supplied from the water supply source 9 to be sprayed from the spray nozzle 91 and to come into contact with the outer surface of the inner cylinder 832 and the inner surface of the outer cylinder 831 of the main body 83, dust adhering to the outer surface of the inner cylinder 832 and the inner surface of the outer cylinder 831 of the main body 83 can be washed away.

Further, the inner cylinder 832 may not be disposed inside the main body 83. When the inner cylinder 832 is not disposed inside the main body 83, the shower nozzle 91 may not be disposed at the upper portion inside the main body 83.

A funnel-shaped drain receiving portion 834 is provided at a lower portion of the main body 83. The drain receiver 834 is connected to the lower end of the outer tube 831 and disposed inside the device case 81. A drain opening 834a is formed in the drain receiving portion 834, and a drain pipe 851 is connected to the drain receiving portion 834 so as to hang down from the drain opening 834 a.

A bucket-shaped drain tank 852 is disposed below the drain pipe 851 so that the height position of the lower end 851b of the drain pipe 851 is lower than the height position of the upper end of the side surface 852c of the drain tank 852. A drain pipe 851 and a drain tank 852 are provided inside the apparatus case 81. In the drain tank 852, water L is stored so that the height position of the water surface La of the water L is higher than the height position of the lower end 851b of the drain pipe 851, and the lower end 851b of the drain pipe 851 is sealed with the water surface La.

A side opening 852a is formed in a side surface 852c of the drain tank 852, and an overflow pipe 853 for overflowing the water L stored in the drain tank 852 is connected to the side opening 852 a.

The end of the overflow pipe 853 on the side not connected to the side opening 852a is connected to the drain opening 854. The water L overflowing the drain tank 852 is discharged to the outside through the drain port 854 via the overflow pipe 853.

When the dust collecting processing device 8 described above is used to perform dust collection processing on dust inside the processing chamber 5 shown in fig. 1, the suction source 84 is operated to generate suction force. By the suction force generated by the suction source 84, the air containing dust inside the processing chamber 5 first flows out from the vent 56 and flows into the inside of the main body 83 from the inlet 831a formed in the outer tub 831 of the main body 83 through the vent 871.

The air containing dust flowing into the main body 83 from the inlet 831a rotates inside the main body 83 around the central axis 835, and spirally descends between the inner cylinder 832 and the outer cylinder 831 shown in fig. 3, for example. When the air containing dust that has reached the lower end 832b of the inner cylinder 832 flows into the interior of the inner cylinder 832 from the lower end 832b of the inner cylinder 832, the air rises spirally inside the inner cylinder 832 around the central axis 835.

At this time, the air containing dust collides with, for example, the inner surface of the outer tube 831 or the inner surface or the outer surface of the inner tube 832 due to the centrifugal force. Accordingly, the dust falls down to the drain receiving portion 834 without an amount of movement in the rotation direction, flows out of the main body 83 through the drain opening 834a formed in the drain receiving portion 834, passes through the inside of the drain pipe 851, and is accumulated in the drain tank 852.

The air containing dust flowing into the inner cylinder 832 contacts the outer surface 22c of the filter 22. Thereby, the dust is trapped by the filter 22, and the air flows into the inside of the filter 22 through the filter 22, thereby separating the dust and the air.

The air separated from the dust flows into the pipe 21 from the fine holes 210 of the pipe 21 shown in fig. 2, rises in the space inside the pipe 21, and flows out from the opening 200 of the flange portion 20 to the inside of the suction box 86 shown in fig. 1.

Then, the air is sucked from the suction source 84 through the connection pipe 872, the air intake pipe 875, and the air intake pipe 840 from the outlet 861a formed in the side plate 861 of the suction box 86, and is discharged from the air outlet 877a of the air exhaust pipe 877 to the space outside the dust collection processing apparatus 8 through the air exhaust pipe 841.

As described above, by performing the dust collection processing on the dust in the processing chamber 5 using the dust collection processing device 8, the dust adheres to the filter 22, and the function of collecting the dust in the dust collection processing device 8 is impaired. Therefore, the filter 22 of the filter unit 2 needs to be replaced.

When replacing the filter 22, the valve 90 is first opened by the valve control unit 900 shown in fig. 1, water is supplied from the water supply source 9 to the water spray nozzle 92, and water is sprayed from the water spray nozzle 92 into the filter unit 2. The water injected from the water injection nozzle 92 flows into the pipe 21 shown in fig. 2 from the opening 200 of the flange portion 20, and flows out to the outside of the pipe 21 from the plurality of fine holes 210 formed in the side surface 21c of the pipe 21.

When water flows out of the pipe 21, the water comes into contact with the filter 22 wound around the outside of the pipe 21, and the filter 22 is dissolved by the water. The aqueous solution containing the dissolved filter 22 falls in the-Z direction, and is stored in the drain tank 852 through the drain receiver 834 and the drain pipe 851.

For example, a drain pipe 851 is provided with a drain valve, not shown, and water is discharged from the water discharge nozzle 92 after the drain valve is closed, whereby water is stored in the main body 83. Accordingly, the filter 22 may be immersed and dissolved in the main body 83, and then the drain valve may be opened to drain water to the drain tank 852.

When all of the filter 22 wound around the outside of the pipe is dissolved in water, the filter unit 2 is formed only by the flange portion 20 and the pipe 21. The flange portion 20 of the filter unit 2, which is formed only by the flange portion 20 and the tube 21, is gripped and pulled out in the + Z direction from the main body 83, whereby the filter unit 2 can be pulled out from the main body 83.

Then, a new filter unit 2 is inserted from the upper opening 833 a. Thereby, the flange portion 20 is supported by the upper plate 833, and the new filter unit 2 is attached to the main body 83.

In order to slow down the replacement timing of the filter unit 2, the water jet nozzle 92 may be made to eject only air, and the air may be periodically ejected from the water jet nozzle 92 to blow off dust adhering to the outer surface of the filter unit 2. The dust collection processing device 8 may recognize the filter replacement timing by measuring the negative pressure in the connecting pipe 872 by a pressure gauge disposed at the outlet 861a, for example.

By dissolving the filter 22 made of a material such as PVA that can be dissolved in water by running water in this manner, dust adhering to the filter 22 can be prevented from spreading around when the filter 22 is replaced, and the space where the polishing apparatus 1 and the dust collection treatment apparatus 8 are provided can be prevented from being contaminated.