阅读说明：本技术 粗糙化处理铜箔、带载体的铜箔、覆铜层叠板及印刷电路板 (Roughened copper foil, copper foil with carrier, copper-clad laminate, and printed wiring board ) 是由 细川真 高梨哲聪 沟口美智 平冈慎哉 于 2019-07-25 设计创作，主要内容包括：提供在覆铜层叠板的加工和/或印刷电路板的制造中可兼顾优异的蚀刻性和高抗剪强度的粗糙化处理铜箔。该粗糙化处理铜箔是在至少一侧具有粗糙化处理面的粗糙化处理铜箔,粗糙化处理面依据ISO25178测定的最大高度Sz为0.65～1.00μm、依据ISO25178测定的界面扩展面积比Sdr为1.50～4.20、依据ISO25178测定的峰顶点密度Spd为6.50×10~6～8.50×10~6个/mm~2。(Provided is a roughened copper foil which can achieve both excellent etching properties and high shear strength in processing a copper-clad laminate and/or manufacturing a printed wiring board. The roughened copper foil has at least one sideA roughened copper foil having a roughened surface, wherein the roughened surface has a maximum height Sz of 0.65 to 1.00 [ mu ] m as measured according to ISO25178, an interfacial expansion area ratio Sdr of 1.50 to 4.20 as measured according to ISO25178, and a peak top density Spd of 6.50X 10 as measured according to ISO25178 6 ～8.50×10 6 Per mm 2 。)

1. A roughened copper foil having a roughened surface on at least one side,

the roughening surface has a maximum height Sz of 0.65 to 1.00 [ mu ] m measured according to ISO25178, an interfacial expansion area ratio Sdr of 1.50 to 4.20 measured according to ISO25178, and a peak top density Spd of 6.50 x 10 measured according to ISO25178⁶～8.50×10⁶Per mm²。

2. The roughened copper foil according to claim 1, wherein the maximum height Sz is 0.65 to 0.90 μm.

3. The roughened copper foil according to claim 1 or 2, wherein the interfacial spreading area ratio Sdr is 1.80 to 3.50.

4. The roughened copper foil according to any one of claims 1 to 3, wherein the peak top density Spd is 7.65 x 10⁶～8.50×10⁶Per mm²。

5. The roughened copper foil according to any one of claims 1 to 4, wherein the product of the maximum height Sz, the interfacial expansion area ratio Sdr, and the peak top density Spd, Sz x Sdr x Spd, is 7.50 x 10⁶～2.70×10⁷(μm.pieces/mm)²)。

6. The roughened copper foil according to any one of claims 1 to 5, further comprising an antirust treatment layer and/or a silane coupling agent layer on the roughened surface.

7. A copper foil with a carrier, comprising: a carrier;

a peeling layer disposed on the carrier; and

the roughened copper foil according to any one of claims 1 to 6, which is provided on the peeling layer with the roughened surface as an outer side.

8. A copper-clad laminate comprising the roughened copper foil according to any one of claims 1 to 6.

9. A printed wiring board comprising the roughened copper foil according to any one of claims 1 to 6.

Technical Field

The invention relates to a roughened copper foil, a copper foil with a carrier, a copper-clad laminate and a printed circuit board.

Background

In recent years, MSAP (Modified Semi-Additive Process) has been widely used as a method for manufacturing a printed wiring board suitable for miniaturization of a circuit. The MSAP method is a method suitable for forming an extremely fine circuit, and is performed using a copper foil with a carrier in order to utilize the characteristics thereof. For example, as shown in fig. 1 and 2, an extra thin copper foil 10 is pressed and adhered to an insulating resin substrate 11 having a lower circuit 11b on a base substrate 11a by using a prepreg 12 and a primer layer 13 (step (a)), a carrier (not shown) is peeled off, and then a through hole 14 is formed by laser via-hole as necessary (step (b)). Next, the electroless copper plating layer 15 is provided (step (c)), and then, the dry film 16 is exposed and developed to mask the copper plating layer in a predetermined pattern (step (d)), and the electroplated copper layer 17 is provided (step (e)). After the dry film 16 is removed to form the wiring portions 17a (step (f)), unnecessary extra thin copper foils and the like between the adjacent wiring portions 17a and 17a are removed over the entire thickness thereof by etching (step (g)), and the wiring 18 formed in a predetermined pattern is obtained. Here, in order to improve physical adhesion between the circuit and the substrate, the surface of the ultra-thin copper foil 10 is generally subjected to roughening treatment.

Actually, several copper foils with a carrier, which are excellent in fine circuit formability by MSAP method or the like, have been proposed. For example, patent document 1 (international publication No. 2016/117587) discloses a carrier-attached copper foil provided with an extra thin copper foil having a surface on the release layer side with an average distance between peaks of 20 μm or less and a maximum height difference of waviness of 1.0 μm or less on the surface opposite to the release layer, and according to this aspect, both fine circuit formability and laser processability can be achieved. Further, patent document 2 (jp 2018 a-26590 a) discloses a carrier-attached copper foil having a ratio Sp/Spk of a maximum peak height Sp to a projected peak height Spk obtained in accordance with ISO25178 on the side surface of an extra thin copper layer of 3.271 to 10.739 for the purpose of improving the formability of a fine circuit.

Documents of the prior art

Patent document

Patent document 1: international publication No. 2016/117587

Patent document 2: japanese patent laid-open publication No. 2018-26590

Disclosure of Invention

In recent years, in order to form a further fine circuit by the above MSAP method or the like, further smoothing and fine reduction of coarse particles have been demanded for a copper foil. However, although the etching property of the copper foil associated with the miniaturization of the circuit is improved by the smoothing of the copper foil and the miniaturization of the roughening particles, the physical adhesion force of the copper foil to the substrate resin and the like is reduced. In particular, with the progress of thinning of circuits, a problem has been highlighted in that physical stress (i.e., shear stress) is applied to the circuits from the lateral direction in the mounting process of the printed wiring board, and the circuits are easily peeled off, thereby reducing the yield. In this regard, shear strength (shear strength) is one of the physical adhesion indexes of the circuit and the substrate, and in order to effectively avoid the above-mentioned circuit peeling, it is required to maintain the shear strength at a constant level or more. However, in order to secure a certain or more shear strength, the roughened particles of the copper foil have to be increased, and there is a problem that it is difficult to achieve a balance between etching properties.

The inventors of the present invention have obtained the following findings: in the roughened copper foil, by providing a surface profile in which the maximum height Sz, the interface spread area ratio Sdr, and the peak top density Spd defined in ISO25178 are each controlled to a predetermined range, it is possible to achieve both excellent etching properties and high shear strength in the processing of a copper-clad laminate and/or the production of a printed circuit board.

Accordingly, an object of the present invention is to provide a roughened copper foil which can achieve both excellent etching properties and high shear strength in processing a copper-clad laminate and/or manufacturing a printed wiring board.

According to one embodiment of the present invention, there is provided a roughened copper foil having a roughened surface on at least one side,

the maximum height Sz of the roughened surface is 0.65 to 1.00 [ mu ] m as measured according to ISO25178, the interfacial expansion area ratio Sdr is 1.50 to 4.20 as measured according to ISO25178, and the peak top density Spd is 6.50X 10 as measured according to ISO25178⁶～8.50×10⁶Per mm²。

According to another aspect of the present invention, there is provided a copper foil with a carrier, including: a carrier; a peeling layer disposed on the carrier; and the roughened copper foil provided on the release layer with the roughened surface as the outer side.

According to still another aspect of the present invention, there is provided a copper-clad laminate including the roughened copper foil.

According to still another aspect of the present invention, there is provided a printed wiring board comprising the roughened copper foil.

Drawings

Fig. 1 is a process flow chart for explaining the MSAP method, and is a diagram showing the first half process (processes (a) to (d)).

FIG. 2 is a process flow chart for explaining the MSAP method, and is a diagram showing the latter half of the processes (e) to (g)).

Fig. 3 is a schematic diagram for explaining a method of measuring shear strength.

Detailed Description

Definition of

The following shows definitions of terms and/or parameters used to define the present invention.

In the present specification, "maximum height Sz" means: a parameter representing the distance from the highest point to the lowest point of the surface, measured according to ISO 25178. The maximum height Sz can be determined by measuring a predetermined area (e.g., 6812 μm) of the roughened surface with a commercially available laser microscope²Two-dimensional region of (d) is measured and calculated.

In the present specification, the "interface spread area ratio Sdr" means: a parameter indicating how much the extended area (surface area) of a defined area increases relative to the area of the defined area, measured according to ISO 25178. The smaller this value, the closer to a flat surface shape, and the Sdr of a completely flat surface is 0. On the other hand, the larger the value, the more uneven the surface shape is expressed. For example, where the surface has an Sdr of 0.4, this indicates that the surface has increased surface area by 40% relative to a perfectly flat surface. The surface spread area ratio Sdr can be determined by measuring a predetermined area (for example, 6812 μm) of the roughened surface with a commercially available laser microscope²Two-dimensional region of (d) is measured and calculated.

In the present specification, the "peak top density Spd" means: a parameter representing the number of peak apexes per unit area, measured in accordance with ISO 25178. When this value is large, the number of contact points with other objects is large. The peak top density Spd can be determined by measuring the predetermined area (e.g., 6812 μm) of the roughened surface with a commercially available laser microscope²Two-dimensional region of (d) is measured and calculated.

In the present specification, the "electrode surface" of the support refers to a surface that is in contact with the cathode during production of the support.

In the present specification, the "precipitation surface" of the carrier refers to a surface on which electrolytic copper is precipitated at the time of production of the carrier, that is, a surface on which the electrolytic copper is not in contact with the cathode.

Roughened copper foil

The copper foil of the present invention is a roughened copper foil. The roughened copper foil has a roughened surface on at least one side. The thickness is largeThe maximum height Sz of the roughened surface is 0.65 to 1.00 μm, the interface expansion area ratio Sdr is 1.50 to 4.20, and the peak top density Spd is 6.50X 10⁶～8.50×10⁶Per mm². In this way, by providing the roughened copper foil with a surface profile in which the maximum height Sz, the interface spread area ratio Sdr, and the peak top density Spd are controlled to predetermined ranges, excellent etching properties and high shear strength can be achieved at the same time in the processing of the copper-clad laminate and/or the production of the printed wiring board.

Excellent etching properties and high shear strength are inherently difficult to achieve at the same time. This is because, as described above, it is generally required to reduce the roughening particles in order to improve the etching property of the copper foil, and it is generally required to increase the roughening particles in order to improve the shear strength of the circuit. On the other hand, according to the present invention, it is unexpectedly possible to achieve both excellent etching properties and high shear strength. In other words, the shear strength is not simply proportional to the specific surface area, the roughening height, and the like used in the conventional evaluation, and it is difficult to control the shear strength. In this regard, the present inventors have found that: in order to obtain the correlation with physical properties such as etching properties and shear strength, it is effective to combine the maximum height Sz with the interface expansion area ratio Sdr and the peak top density Spd for evaluation. Further, it has been found that by controlling the surface parameters to be within the above-mentioned predetermined ranges, a roughened copper foil having a fine surface with excellent etching properties and having a protrusion height and a protrusion density suitable for ensuring high shear strength and a specific surface area can be obtained. As described above, according to the roughened copper foil of the present invention, excellent etching properties and high shear strength can be achieved, and thus, excellent fine circuit formability and high circuit adhesion in terms of shear strength can be achieved at the same time.

From the viewpoint of achieving excellent etching properties and high shear strength in a well-balanced manner, the maximum height Sz of the roughened surface of the roughened copper foil is 0.65 to 1.00 μm, preferably 0.65 to 0.90 μm, and more preferably 0.65 to 0.80 μm. The roughened surface of the roughened copper foil has an interfacial spreading area ratio Sdr of 1.50 to 4.20, preferably 1.80 to 3.50, and more preferably 1.80 to 4.502.00 to 3.00. Further, the peak top density Spd of the roughened surface of the roughened copper foil was 6.50X 10⁶～8.50×10⁶Per mm²Preferably 7.65X 10⁶～8.50×10⁶Per mm²More preferably 7.80X 10⁶～8.30×10⁶Per mm²。

In the roughened copper foil, Sz × Sdr × Spd, which is the product of the maximum height Sz of the roughened surface, the interface spread area ratio Sdr, and the peak top density Spd, is preferably 7.50 × 10⁶～2.70×10⁷(μm.pieces/mm)²) More preferably 9.00X 10⁶～2.60×10⁷(μm.pieces/mm)²) More preferably 1.00X 10⁷～2.00×10⁷(μm.pieces/mm)²). Within such a range, it becomes easier to achieve both excellent etching properties and high shear strength.

The thickness of the roughened copper foil is not particularly limited, but is preferably 0.1 to 35 μm, more preferably 0.5 to 5.0 μm, and still more preferably 1.0 to 3.0. mu.m. The roughened copper foil is not limited to one obtained by roughening the surface of a normal copper foil, and may be one obtained by roughening the surface of a copper foil with a carrier.

The roughened copper foil has a roughened surface on at least one side. That is, the roughened copper foil may have roughened surfaces on both sides, or may have roughened surfaces on only one side. The roughened surface is typically provided with a plurality of roughened particles (projections), and the plurality of roughened particles are preferably formed of copper particles, respectively. The copper particles may be formed of metallic copper or a copper alloy.

The roughening treatment for forming the roughened surface is more preferably performed by forming roughening particles on the copper foil with copper or a copper alloy. For example, the roughening treatment is preferably performed in accordance with a plating method subjected to at least 2 plating processes including: a baking and plating step of precipitating and adhering fine copper particles to the copper foil; and a coating step for preventing the fine copper particles from falling off. In this case, for the baking and plating toolPreferably, 30 to 50ppm (more preferably 35 to 50ppm) of Carboxybenzotriazole (CBTA) is added to a copper sulfate solution containing copper at a concentration of 5 to 20g/L and sulfuric acid at a concentration of 180 to 240g/L, and the mixture is heated at 15 to 35 ℃ and at a temperature of 12 to 24A/dm²(more preferably 12 to 18A/dm)²) And performing electrodeposition. In addition, in the covering plating step, it is preferable that the copper sulfate solution containing copper with a concentration of 50 to 100g/L and sulfuric acid with a concentration of 200 to 250g/L is added at a temperature of 40 to 60 ℃ and a concentration of 2.3 to 4A/dm²(more preferably 2.5 to 3.5A/dm)²) And performing electrodeposition. In particular, in the baking and plating step, by adding carboxybenzotriazole in the above concentration range to the plating solution, it becomes easy to form projections suitable for satisfying the above surface parameters on the treated surface while maintaining the etching properties close to those of pure copper. Further, in the baking and plating step and the covering and plating step, by performing electrodeposition with a reduced current density as compared with the conventional method, it becomes easier to form projections suitable for satisfying the above-described surface parameters on the processed surface.

The roughened copper foil may be subjected to rust-proofing treatment to form a rust-proofing layer, as desired. The rust-preventive treatment preferably includes plating treatment using zinc. The plating treatment using zinc may be any of a zinc plating treatment and a zinc alloy plating treatment, and the zinc alloy plating treatment is particularly preferably a zinc-nickel alloy plating treatment. The zinc-nickel alloy treatment may be a plating treatment including at least Ni and Zn, and may further include other elements such as Sn, Cr, and Co. The Ni/Zn adhesion ratio in the zinc-nickel alloy plating is preferably 1.2 to 10, more preferably 2 to 7, and further preferably 2.7 to 4 in terms of mass ratio. The rust-preventive treatment preferably further includes chromate treatment, and the chromate treatment is more preferably performed on the surface of the plating layer including zinc after the plating treatment using zinc. Thus, the rust prevention property can be further improved. A particularly preferred rust-preventive treatment is a combination of a zinc-nickel alloy plating treatment and a subsequent chromate treatment.

The roughened copper foil may be one having a silane coupling agent layer formed by treating the surface with a silane coupling agent, as desired. This can improve moisture resistance, chemical resistance, adhesion to an adhesive or the like, and the like. The silane coupling agent layer can be formed by appropriately diluting the silane coupling agent, coating the diluted silane coupling agent, and drying the silane coupling agent. Examples of the silane coupling agent include epoxy-functional silane coupling agents such as 4-glycidylbutyltrimethoxysilane and 3-glycidoxypropyltrimethoxysilane, and amino-functional silane coupling agents such as 3-aminopropyltrimethoxysilane, N-2 (aminoethyl) 3-aminopropyltrimethoxysilane, N-3- (4- (3-aminopropyl) butoxy) propyl-3-aminopropyltrimethoxysilane and N-phenyl-3-aminopropyltrimethoxysilane; or mercapto-functional silane coupling agents such as 3-mercaptopropyltrimethoxysilane and the like, or olefin-functional silane coupling agents such as vinyltrimethoxysilane and vinylphenyltrimethoxysilane and the like; or an acryl-functional silane coupling agent such as 3-methacryloxypropyltrimethoxysilane; or imidazole-functional silane coupling agents such as imidazole silane; and triazine functional silane coupling agents such as triazine silane.

For the above reasons, the roughened copper foil preferably further includes a rust-preventive treatment layer and/or a silane coupling agent layer on the roughened surface, and more preferably includes both a rust-preventive treatment layer and a silane coupling agent layer. The rust-preventive treatment layer and the silane coupling agent layer may be formed not only on the roughened surface side of the roughened copper foil but also on the side where the roughened surface is not formed.

Copper foil with carrier

As described above, the roughened copper foil of the present invention can be provided in the form of a copper foil with a carrier. That is, according to a preferred aspect of the present invention, there is provided a copper foil with a carrier, comprising: a carrier; and a roughened copper foil provided on the peeling layer with the roughened surface as the outer side. Of course, the copper foil with carrier may be formed of a known layer other than the roughened copper foil of the present invention.

The carrier is a support for supporting the roughened copper foil to improve the handling thereof, and a typical carrier includes a metal layer. Examples of such a carrier include an aluminum foil, a copper foil, a stainless steel (SUS) foil, a resin film having a surface coated with a metal such as copper, and glass, and a copper foil is preferable. The copper foil may be any of a rolled copper foil and an electrolytic copper foil, and is preferably an electrolytic copper foil. The thickness of the carrier is typically 250 μm or less, preferably 9 to 200 μm.

The surface of the carrier on the release layer side is preferably smooth. That is, in the process for producing a copper foil with a carrier, an extra thin copper foil (before roughening treatment) is formed on the release layer side surface of the carrier. Therefore, the surface on the release layer side of the carrier is smoothed in advance, so that the outer surface of the extra thin copper foil can be smoothed, and the roughened surface having the maximum height Sz, the interfacial expansion area ratio Sdr, and the peak-to-peak density Spd within the above-described predetermined ranges can be easily realized by performing the roughening treatment on the smoothed surface of the extra thin copper foil. In order to smooth the surface of the carrier on the release layer side, for example, the surface roughness can be adjusted by polishing the surface of the cathode used in electrolytic foil formation of the carrier with a polishing wheel having a predetermined grain size number. That is, the surface profile of the cathode adjusted in this way is transferred to the electrode surface of the carrier, and the extra thin copper foil is formed on the electrode surface of the carrier through the release layer, whereby a smooth surface condition in which the above-described roughened surface is easily achieved can be given to the outer surface of the extra thin copper foil. The preferred buffing wheel has a particle size number of #2000 to #3000, more preferably #2000 to # 2500.

The release layer has a function of weakening the peel strength of the carrier, ensuring the stability of the strength, and further suppressing interdiffusion that may occur between the carrier and the copper foil during press forming at high temperature. The release layer is usually formed on one side of the carrier, but may be formed on both sides. The release layer may be any of an organic release layer and an inorganic release layer. Examples of the organic component used in the organic release layer include nitrogen-containing organic compounds, sulfur-containing organic compounds, carboxylic acids, and the like. Examples of the nitrogen-containing organic compound include a triazole compound and an imidazole compound, and among them, a triazole compound is preferable in that the releasability is easily stabilized. Examples of the triazole compound include 1,2, 3-benzotriazole, carboxybenzotriazole, N' -bis (benzotriazolylmethyl) urea, 1H-1,2, 4-triazole, and 3-amino-1H-1, 2, 4-triazole. Examples of the sulfur-containing organic compound include mercaptobenzothiazole, thiocyanuric acid, and 2-benzimidazolethiol. Examples of the carboxylic acid include monocarboxylic acid and dicarboxylic acid. On the other hand, examples of the inorganic component used in the inorganic release layer include Ni, Mo, Co, Cr, Fe, Ti, W, P, Zn, chromate-treated film, and the like. The release layer can be formed by bringing a solution containing a release layer component into contact with at least one surface of a carrier to fix the release layer component to the surface of the carrier. In the case of contacting the carrier with the release layer component-containing solution, the contacting may be performed by immersion in the release layer component-containing solution, spraying of the release layer component-containing solution, flowing down of the release layer component-containing solution, or the like. Further, a method of forming a film of a release layer component by a vapor phase method such as vapor deposition or sputtering may be employed. The fixation of the release layer component to the surface of the support may be performed by adsorption of a solution containing the release layer component, drying, electrodeposition of the release layer component in the solution containing the release layer component, or the like. The thickness of the release layer is typically 1nm to 1 μm, preferably 5nm to 500 nm.

Other functional layers may be provided between the peeling layer and the carrier and/or the roughening-treated copper foil as desired. As an example of such another functional layer, an auxiliary metal layer may be mentioned. The auxiliary metal layer is preferably formed of nickel and/or cobalt. By forming such an auxiliary metal layer on the surface side of the carrier and/or the surface side of the roughened copper foil, interdiffusion that may occur between the carrier and the roughened copper foil during hot-roll forming at high temperature or for a long time can be suppressed, and stability of the peel strength of the carrier can be ensured. The thickness of the auxiliary metal layer is preferably 0.001 to 3 μm.

Copper-clad laminated board

The roughened copper foil of the present invention is preferably used for producing a copper-clad laminate for a printed wiring board. That is, according to a preferred embodiment of the present invention, there is provided a copper-clad laminate including the above-described roughened copper foil. By using the roughened copper foil of the present invention, excellent etching properties and high shear strength can be achieved at the same time in the processing of the copper-clad laminate. The copper-clad laminate comprises: the invention provides a roughened copper foil; and a resin layer provided in close contact with the roughened surface of the roughened copper foil. The roughened copper foil may be provided on one side or both sides of the resin layer. The resin layer contains a resin, preferably an insulating resin. The resin layer is preferably a prepreg and/or a resin sheet. The prepreg is a generic name of a composite material in which a synthetic resin is impregnated into a base material such as a synthetic resin plate, a glass woven fabric, a glass nonwoven fabric, or paper. Preferred examples of the insulating resin include epoxy resin, cyanate resin, bismaleimide triazine resin (BT resin), polyphenylene ether resin, phenol resin, and the like. Examples of the insulating resin constituting the resin sheet include insulating resins such as epoxy resin, polyimide resin, and polyester resin. In addition, the resin layer may contain filler particles made of various inorganic particles such as silica and alumina, from the viewpoint of improving insulation properties and the like. The thickness of the resin layer is not particularly limited, but is preferably 1 to 1000. mu.m, more preferably 2 to 400. mu.m, and still more preferably 3 to 200. mu.m. The resin layer may be composed of multiple layers. The resin layer such as a prepreg and/or a resin sheet may be provided on the roughened copper foil through a primer resin layer applied to the surface of the copper foil in advance.

Printed circuit board

The roughened copper foil of the present invention is preferably used for the production of printed wiring boards. That is, according to a preferred embodiment of the present invention, there is provided a printed wiring board including the above-described roughened copper foil. By using the roughened copper foil of the present invention, excellent etching properties and high shear strength can be achieved at the same time in the production of printed wiring boards. The printed wiring board of the present embodiment includes a layer structure in which a resin layer and a copper layer are laminated. The copper layer is a layer derived from the roughened copper foil of the present invention. The resin layer is as described above for the copper-clad laminate. In short, the printed wiring board can be formed of a known layer, in addition to the roughened copper foil of the present invention. Specific examples of the printed wiring board include: a single-sided or double-sided printed wiring board obtained by bonding the roughened copper foil of the present invention to one or both sides of a prepreg, curing the copper foil to form a laminate, and forming a circuit on the laminate; multilayer printed wiring boards obtained by multilayering these components, and the like. Further, as other specific examples, a flexible printed wiring board, COF, TAB tape, and the like, in which the roughened copper foil of the present invention is formed on a resin film to form a circuit, can be given. Further, as other specific examples, there may be mentioned: a multilayer wiring board in which a resin-attached copper foil (RCC) is formed by applying the resin layer to the roughened copper foil of the present invention, the resin layer is laminated on the printed board as an insulating adhesive layer, and then the roughened copper foil is used as all or part of a wiring layer to form a circuit by a method such as a modified semi-additive process (MSAP) method or subtractive method; a multilayer wiring board in which a circuit is formed by a semi-additive method by removing the roughened copper foil; a direct build-up wafer (direct build on wafer) or the like in which lamination of a copper foil with resin and circuit formation are alternately repeated on a semiconductor integrated circuit. Specific examples of further developments include: an antenna element obtained by laminating the copper foil with resin on a base material and forming a circuit; panel/display electronic materials and window glass electronic materials laminated on glass and resin films via adhesive layers to form patterns; an electromagnetic wave shielding layer/film formed by coating a conductive adhesive on the roughened copper foil of the present invention. The roughened copper foil of the present invention is particularly suitable for MSAP process. For example, when a circuit is formed by the MSAP method, the configuration shown in fig. 2 can be employed.

Examples

The present invention will be described more specifically by the following examples.

Examples 1 to 8 and 12 to 14

A copper foil with a carrier including a roughened copper foil was produced and evaluated as follows.

(1) Preparation of the vector

Copper having the composition shown below was usedAn electrolyte, a cathode, and a DSA (dimensionally stable anode) as an anode, at a solution temperature of 50 ℃ and a current density of 70A/dm²Electrolytic copper foil with a thickness of 18 μm was produced as a carrier by electrolysis. At this time, as the cathode, an electrode whose surface roughness was adjusted by polishing the surface with a polishing wheel having a grain size number shown in table 1 was used.

< composition of copper electrolyte >

-copper concentration: 80g/L

-sulfuric acid concentration: 300g/L

-chlorine concentration: 30mg/L

-gum concentration: 5mg/L

(2) Formation of a Release layer

The electrode surface of the carrier subjected to acid washing treatment was immersed in a CBTA aqueous solution containing 1g/L Carboxybenzotriazole (CBTA), 150g/L sulfuric acid and 10g/L copper at a liquid temperature of 30 ℃ for 30 seconds to adsorb the CBTA component to the electrode surface of the carrier. Thus, a CBTA layer was formed as an organic release layer on the electrode surface of the carrier.

(3) Formation of auxiliary metal layer

The carrier having the organic release layer formed thereon was immersed in a solution containing nickel at a concentration of 20g/L prepared using nickel sulfate, and the solution temperature was 45 ℃, pH3, and current density was 5A/dm²Nickel was attached to the organic release layer in an amount corresponding to 0.001 μm thick. Thus, a nickel layer was formed as an auxiliary metal layer on the organic peeling layer.

(4) Formation of ultra-thin copper foil

Immersing the carrier with the auxiliary metal layer in a copper solution with the following composition, wherein the solution temperature is 50 ℃, and the current density is 5-30A/dm²An extra thin copper foil having a thickness of 1.5 μm was formed on the auxiliary metal layer by electrolysis.

< composition of solution >

-copper concentration: 60g/L

-sulfuric acid concentration: 200g/L

(5) Roughening treatment

The surface of the extra thin copper foil thus formed is subjected to roughening treatment. The roughening treatment is composed of the following steps: a baking and plating step of precipitating and adhering fine copper particles to the extra thin copper foil; and a covering plating step for preventing the fine copper particles from falling off. In the baking and plating step, Carboxybenzotriazole (CBTA) was added to an acidic copper sulfate solution containing copper at a concentration of 10g/L and sulfuric acid at a concentration of 200g/L at 25 ℃ to perform a roughening treatment at a current density shown in Table 1. In the subsequent blanket plating step, electrodeposition was performed under smooth plating conditions at a bath temperature of 52 ℃ and a current density shown in Table 1 using an acidic copper sulfate solution containing copper at a concentration of 70g/L and sulfuric acid at a concentration of 240 g/L. At this time, the CBTA concentration and current density in the firing step and the current density in the covering plating step were changed as appropriate as shown in table 1, thereby producing various samples having different characteristics of the roughened surface.

(6) Anti-rust treatment

The roughened surface of the obtained copper foil with a carrier is subjected to rust-proofing treatment consisting of zinc-nickel alloy plating treatment and chromate treatment. First, a solution containing 1g/L zinc, 2g/L nickel and 80g/L potassium pyrophosphate was used at a liquid temperature of 40 ℃ and a current density of 0.5A/dm²Under the condition (2), the surface of the roughened layer and the surface of the carrier are subjected to zinc-nickel alloy plating treatment. Next, an aqueous solution containing 1g/L chromic acid was used at a pH of 12 and a current density of 1A/dm²The surface treated with the zinc-nickel alloy plating is subjected to chromate treatment under the conditions of (1).

(7) Silane coupling agent treatment

An aqueous solution containing 5g/L of 3-glycidoxypropyltrimethoxysilane was adsorbed onto the roughened copper foil side surface of the copper foil with carrier, and water was evaporated by an electric heater to carry out the silane coupling agent treatment. At this time, the silane coupling agent treatment was not performed on the carrier side.

(8) Evaluation of

The copper foil with a carrier thus obtained was evaluated for various properties as follows.

(8a) Surface property parameters of roughened surface

By using a laser microscope (VK-X200, manufactured by KEYENCE CORPORATION)The surface roughness was analyzed, and the roughened surface of the roughened copper foil was measured in accordance with ISO 25178. Specifically, the area 6812 μm of the roughened surface of the roughened copper foil was increased 3000 times by the laser microscope²The surface profile of the area (d) is determined. After the surface profile of the obtained roughened surface is corrected for the surface slope, the maximum height Sz, the interface expansion area ratio Sdr, and the peak top density Spd are measured by surface property analysis. In this case, the Sz was measured with the cutoff wavelength obtained by the S filter set to 5.0 μm and the cutoff wavelength obtained by the L filter set to 0.025 mm. On the other hand, for the measurement of Sdr and Spd, the values are measured without performing cutoff by the S filter and the L filter. The results are shown in Table 1.

(8b) Circuit formability (evaluation of etching Property)

The obtained copper foil with a carrier was used to produce a laminate for evaluation. That is, a roughened copper foil of a copper foil with a carrier was laminated on the surface of an inner layer substrate via a prepreg (manufactured by Mitsubishi gas chemical Co., Ltd., GHPL-830NSF, thickness 0.1mm), thermocompression-bonded at a pressure of 4.0MPa and a temperature of 220 ℃ for 90 minutes, and then the carrier was peeled off to obtain a copper-clad laminate as a laminate for evaluation. A plurality of the evaluation laminates were prepared, and etching was performed with a sulfuric acid-hydrogen peroxide etching solution for different periods of time for each evaluation laminate, and the amount (depth) of etching required for complete disappearance of copper on the surface was measured. The measurement was performed by confirming with an optical microscope (500 times). The etching time can be controlled by changing the transport speed of the etching apparatus. More specifically, the etching of the laminate for evaluation was performed by gradually decreasing the transport speed (i.e., gradually increasing the etching time) so that the etching amount increases by 0.1 μm under the condition that the etching amount was 1.60 μm when the transport speed of the etching apparatus was 1.0 m/min. Then, the etching amount calculated from the transport speed at which residual copper was not detected by the optical microscope was set as the etching amount necessary for completely removing copper. For example, in the case where no residual copper was detected by an optical microscope after etching was performed at a transport speed of 0.5 m/min, the required etching amount was 3.20 μm (i.e., [ (1.0 m/min)/(0.5 m/min) ] × 1.60 μm ═ 3.20 μm). That is, a smaller value indicates that the copper on the surface can be removed with less etching. In other words, a smaller value indicates better etching properties. The etching amount required for completely removing copper obtained by the above measurement was evaluated in a graded manner according to the following criteria, and evaluations a and B were judged as passed. The results are shown in Table 1.

< evaluation criteria for etching Property >

-evaluation a: the required etching amount is 2.7 μm or less

-evaluation B: the required etching amount is more than 2.7 μm and 3.0 μm or less

-evaluation C: the required etching amount exceeds 3.0 μm

(8c) Sealing property (shear strength) of plating circuit

The dry film was bonded to the laminate for evaluation, and exposure and development were performed. On the developed laminate masked with the dry film, a copper layer having a thickness of 13.5 μm was deposited as a pattern plating layer, and then the dry film was peeled off. The exposed copper portion was etched with a sulfuric acid-hydrogen peroxide etching solution to prepare a circuit sample for measuring shear strength having a height of 15 μm, a width of 10 μm and a length of 150 μm. The shear strength was measured by pushing down a circuit sample for shear strength measurement from the transverse direction using a joint strength tester (4000 Plus bond tester, manufactured by Nordson DAGE). That is, as shown in fig. 3, the laminate 134 having the electric circuit 136 formed thereon is placed on the movable table 132, and is moved together with the table 132 in the arrow direction in the figure, the electric circuit 136 is pressed against the detector 138 fixed in advance, a lateral force is applied to the side surface of the electric circuit 136 to push down, the force (gf) at that time is measured by the detector 138, and the measured value is used as the shear strength. In this case, the test type was measured by a fracture test under conditions of a test height of 10 μm, a lowering speed of 0.050mm/s, a test speed of 100.0 μm/s, a tool movement amount of 0.05mm, and a fracture identification point of 10%. The obtained shear strength was evaluated in a graded manner according to the following criteria, and evaluations a and B were judged as passed. The results are shown in Table 1.

< evaluation criteria for shear Strength >

-evaluation a: shear strength of 6.00gf or more

-evaluation B: the shear strength is more than 5.00gf and less than 6.00gf

-evaluation C: shear strength of less than 5.00gf

Example 9(comparison)

The production and evaluation of the copper foil with carrier were carried out in the same manner as in example 1 except that the carrier was prepared by the following procedure and the extra thin copper foil was roughened by the following black plating step instead of the baking plating step and the covering plating step. The results are shown in Table 1.

(preparation of the support)

As the copper electrolytic solution, a sulfuric acid-acid copper sulfate solution having a composition shown below was used, a titanium electrode having a surface roughness Ra of 0.20 μm was used as a cathode, a DSA (dimensionally stable anode) was used as an anode, and the solution temperature was 45 ℃ and the current density was 55A/dm²The electrolytic copper foil having a thickness of 12 μm was obtained as a carrier by electrolysis.

< composition of sulfuric acid-acidic copper sulfate solution >

-copper concentration: 80g/L

-free sulfuric acid concentration: 140g/L

Bis (3-sulfopropyl) disulfide concentration: 30mg/L

-diallyl dimethyl ammonium chloride polymer concentration: 50mg/L

-chlorine concentration: 40mg/L

(Black plating step)

The deposition surface of the ultra-thin copper foil was treated with a black copper electrolytic solution for roughening having a composition shown below at a solution temperature of 30 ℃ and a current density of 50A/dm²And electrolysis was carried out for 4 seconds to perform black graining.

< composition of copper electrolytic solution for black roughening >

-copper concentration: 13g/L

-free sulfuric acid concentration: 70g/L

-chlorine concentration: 35mg/L

Sodium polyacrylate concentration: 400ppm of

Example 10(comparison)

A copper foil with a carrier was produced and evaluated in the same manner as in example 1, except that the surface of the ultra-thin copper foil was not roughened. The results are shown in Table 1.

Example 11(comparison)

A copper foil with a carrier was produced and evaluated in the same manner as in example 1, except that the baking plating step and the covering plating step were performed as follows. The results are shown in Table 1.

(roughening treatment)

In the baking and plating step, 2ppm of Carboxybenzotriazole (CBTA) was added to an acidic copper sulfate solution containing copper at a concentration of 10g/L and a sulfuric acid concentration of 120g/L at a liquid temperature of 25 ℃ at a current density of 15A/dm²Roughening treatment is performed. In the subsequent coating step, an acidic copper sulfate solution containing copper at a concentration of 70g/L and sulfuric acid at a concentration of 120g/L was used at a liquid temperature of 40 ℃ and a current density of 15A/dm²The electrodeposition is performed under the smooth plating condition of (1).

[ Table 1]