阅读说明：本技术 一种低温探针台的工件容载腔体 (Workpiece containing and carrying cavity of low-temperature probe station ) 是由 黄晓婷 于 2020-04-08 设计创作，主要内容包括：本发明提供了一种低温探针台的工件容载腔体,涉及低温探针台技术领域,支杆末端均嵌入设置于腔体内侧,且载物台外壁四侧均开有开口,对工件的四侧进行稳固,工件不会出现滑动甚至是掉落出载物台的情况,并且不妨碍正常的检测工作,撑板前端开有滑道,且撑板前端滑动连接有连接板,连接板后端固定有与其为一体的滑块,且滑块位于滑道内部并与滑道滑动连接,通过连接板支撑显微镜的上下移动,便于检测人员使用显微镜对工件进行观察,解决了工件在进行低温探针时不便于被固定好,以致于在工作时工件出现移动甚至是掉落的情况,造成工作的不便,并且工作中需要运用到显微镜对工件进行观察,显微镜不易垂直对工件进行成像的问题。(The invention provides a workpiece containing and carrying cavity of a low-temperature probe station, which relates to the technical field of low-temperature probe stations, wherein the tail end of a supporting rod is embedded in the inner side of the cavity, openings are formed in four sides of the outer wall of an object stage, so that the four sides of a workpiece are stable, the workpiece cannot slide or even fall out of the object stage and normal detection work is not hindered, a slide way is formed in the front end of a supporting plate, a connecting plate is connected to the front end of the supporting plate in a sliding manner, a slide block integrated with the connecting plate is fixed at the rear end of the connecting plate, the slide block is positioned in the slide way and is in sliding connection with the slide way, the slide block supports the microscope to move up and down through the connecting plate, so that a detector can observe the workpiece by using the microscope conveniently, the problem that the workpiece is not fixed well when the low-temperature probe is carried out is solved, the problem that the workpiece moves or even falls when the work is caused, the working inconvenience is caused, and the microscope is needed to observe the workpiece when the work is carried out, the microscope is not easy to vertically image the workpiece.)

1. The utility model provides a cavity is carried to work piece appearance of low temperature probe platform, includes cavity (1) and fagging (5), fagging (5) welding is in cavity (1) rear end, its characterized in that:

an object carrying table (2) is arranged in the cavity (1), supporting rods (201) are fixedly connected to four sides of the bottom end of the object carrying table (2), the tail ends of the supporting rods (201) are embedded in the inner side of the cavity (1), openings (202) are formed in four sides of the outer wall of the object carrying table (2), movable grooves (203) are formed in the top surface of the object carrying table (2) and located right above the openings (202), screw rods (4) are arranged in the openings (202), rotating cores (401) are inserted in the centers of the screw rods (4), clamping plates (3) are connected in the movable grooves (203) in a sliding mode, and racks (301) integrated with the clamping plates are fixed on the outer sides of the clamping plates (3);

slide (501) have been opened to fagging (5) front end, and fagging (5) front end sliding connection has connecting plate (6), connecting plate (6) rear end is fixed with slider (601) rather than as an organic whole, and slider (601) are located slide (501) inside and with slide (501) sliding connection.

2. The workpiece holding cavity of the cryogenic probe station as claimed in claim 1, wherein: the four sides of the outer wall of the cavity (1) are provided with connecting ports (101), the openings (202) and the connecting ports (101) are alternately distributed, and the object stage (2) is connected with the cavity (1) through a support rod (201).

3. The workpiece holding cavity of the cryogenic probe station as claimed in claim 1, wherein: the opening (202) and the movable groove (203) are communicated with each other, the clamping plates (3) are in an L shape, the screw rod (4) is rotatably connected with the opening (202) through the rotating core (401), and the rear end of the screw rod (4) protrudes and extends into the movable groove (203).

4. The workpiece holding cavity of the cryogenic probe station as claimed in claim 3, wherein: the rack (301) is clamped with the screw (4), and the clamping plate (3) moves up and down in the movable groove (203).

5. The workpiece holding cavity of the cryogenic probe station as claimed in claim 1, wherein: the clamping plates (3) are annularly arranged.

6. The workpiece holding cavity of the cryogenic probe station as claimed in claim 1, wherein: the slide (501) is internally provided with corresponding openings (502) at the rear end of the slide block (601), and the number of the corresponding openings (502) in the slide (501) is a plurality of and is vertically arranged.

Technical Field

The invention relates to the technical field of a low-temperature probe station, in particular to a workpiece containing and carrying cavity of the low-temperature probe station.

Background

The probe station is mainly applied to the testing of semiconductor industry, photoelectric industry, integrated circuits and packaging. The low-temperature vacuum probe station is a nondestructive electrical characterization and measurement platform for providing vacuum and low-temperature test conditions for wafers, devices and materials (films, nano, graphene, electronic materials, superconducting materials, ferroelectric materials and the like), the workpiece holding cavity of the conventional low-temperature probe station has a single structure, the workpiece is not convenient to be fixed well when the low-temperature probe is carried out, so that the workpiece moves or even falls when in work, the work is inconvenient, a microscope is required to be used for observing the workpiece in work, and the microscope is not easy to vertically image the workpiece.

Disclosure of Invention

The technical problem to be solved by the invention is as follows: the work piece is not convenient for to be fixed when carrying out the low temperature probe, so that the condition that removes or even drops appears in the during operation work piece, causes the inconvenience of work, and need use the microscope to observe the work piece in the work, the difficult vertical formation of image to the work piece of microscope, to the problem that prior art exists, provides the work piece of a low temperature probe platform and holds and carry the cavity.

The technical problem to be solved by the invention is realized by adopting the following technical scheme: a workpiece containing and carrying cavity of a low-temperature probe station comprises a cavity and a supporting plate, wherein the supporting plate is welded at the rear end of the cavity;

an object stage is arranged in the cavity, support rods are fixedly connected to four sides of the bottom end of the object stage, the tail ends of the support rods are embedded into the inner side of the cavity, openings are formed in four sides of the outer wall of the object stage, movable grooves are formed in the top surface of the object stage and are located right above the openings, screw rods are arranged in the openings, rotating cores are inserted in the centers of the screw rods, clamping plates are slidably connected to the inner portions of the movable grooves, and racks integrated with the clamping plates are fixed to the outer sides of the clamping plates;

the supporting plate is characterized in that a slide way is arranged at the front end of the supporting plate, the front end of the supporting plate is connected with a connecting plate in a sliding mode, a slide block integrated with the connecting plate is fixed at the rear end of the connecting plate, and the slide block is located inside the slide way and connected with the slide way in a sliding mode.

Preferably, the four sides of the outer wall of the cavity are provided with connecting ports, the openings and the connecting ports are alternately distributed, and the objective table is connected with the cavity through a support rod.

Preferably, the opening and the movable groove are communicated with each other, the clamping plates are in an L shape, the screw is rotatably connected with the opening through the rotating core, and the rear end of the screw protrudes and extends into the movable groove.

Preferably, the rack and the screw rod are mutually clamped, and the clamping plate moves up and down in the movable groove.

Preferably, the clamping plates are annularly arranged.

Preferably, the inside and the slider rear end of slide all open and correspond the mouth, and the mouth quantity that corresponds in the slide be a plurality of and be perpendicular the arranging.

Compared with the prior art, the invention has the beneficial effects that:

the inspection personnel take up the work piece and place on the objective table, the work piece is placed the back, the screw rod is moved respectively to the inspection personnel subdividing, the screw rod is in the pivoted, the cardboard can remove along with the rotation of screw rod, the accessible screw rod adjusts the cardboard and blocks the work piece on the objective table well, the inspection personnel moves all cardboards down according to this method, four cardboards block four sides of work piece respectively, stabilize the work piece, the work piece just can not appear sliding or even the condition that drops out the objective table in the testing process, and do not hinder normal detection achievement.

The inspection personnel can be in advance with observing with microscope connection on the connecting plate, and microscopical camera lens is perpendicular downwards towards in the objective table, can use microscope to observe the work piece, will correspond intraoral bolt and unscrew, the slider can slide in the slide, let microscopical camera lens be close to the work piece downwards, inspection personnel move microscope to suitable state after, can twist the bolt of outside into corresponding two again and correspond in the middle of mouthful, fix the current position of slider, support microscopical reciprocating through the connecting plate, the inspection personnel of being convenient for use microscope to observe the work piece.

Drawings

FIG. 1 is a schematic view of the overall structure of the present invention;

FIG. 2 is a schematic view of the stage structure of the present invention;

FIG. 3 is a partially enlarged view of the stage structure of the present invention;

FIG. 4 is a schematic view of a card board structure of the present invention;

FIG. 5 is a schematic view of the screw structure of the present invention;

fig. 6 is a schematic view of the strut structure of the present invention.

The labels in the figure are: the device comprises a cavity 1, a connecting port 101, an objective table 2, a support rod 201, an opening 202, a movable groove 203, a clamping plate 3, a rack 301, a screw rod 4, a rotary core 401, a supporting plate 5, a slide way 501, a corresponding port 502, a connecting plate 6 and a slide block 601.

Detailed Description

In order to make the objects, technical solutions and advantages of the present invention more apparent, the present invention will be described in detail with reference to the accompanying drawings and specific embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the invention and are not intended to limit the invention.

Referring to fig. 1 to 6, the present invention provides a workpiece holding cavity of a cryogenic probe station, including a cavity 1 and a supporting plate 5, wherein the supporting plate 5 is welded at the rear end of the cavity 1, and the following describes each component of the workpiece holding cavity of a cryogenic probe station in detail:

an object stage 2 is arranged in the cavity 1, support rods 201 are fixedly connected to four sides of the bottom end of the object stage 2, the tail ends of the support rods 201 are embedded into the inner side of the cavity 1, openings 202 are formed in four sides of the outer wall of the object stage 2, movable grooves 203 are formed in the top surface of the object stage 2 and located right above the openings 202, screw rods 4 are arranged in the openings 202, rotating cores 401 are inserted into the centers of the screw rods 4, clamping plates 3 are slidably connected to the inner sides of the movable grooves 203, racks 301 integrated with the clamping plates 3 are fixed to the outer sides of the clamping plates 3, firstly, a tester needs to install all structures of a low-temperature probe, connectors 101 are formed in the four sides of the outer wall of the cavity 1, the openings 202 and the connectors 101 are alternately distributed, the object stage 2 is connected with the cavity 1 through the support rods 201, the probe structure is installed in the connectors 101, and the probe can be located in the cavity 1, the clamping plates 3 are arranged in a ring shape, the probes are respectively positioned in the spaces among the clamping plates 3, after the probe structure is installed, the detection process is performed, the workpiece is cut into a disc shape to facilitate the detection work of a detection person, the detection person takes up the workpiece and places the workpiece on the object stage 2, after the workpiece is placed, the detection person respectively slides the screw rods 4, the openings 202 and the movable grooves 203 are communicated with each other, the clamping plates 3 are all in an L shape, the screw rods 4 are rotatably connected with the openings 202 through rotary cores 401, the rear ends of the screw rods 4 protrude and extend into the movable grooves 203, the screw rods 4 rotate in the openings 202 through the rotary cores 401, the racks 301 are mutually clamped with the screw rods 4, the clamping plates 3 move up and down in the movable grooves 203, and are clamped between the screw rods 4 and the clamping plates 3, and the outer walls of the screw rods 4 are provided with a plurality of inclined threads, therefore, when the screw rod 4 rotates, the clamping plates can move along with the rotation of the screw rod 4, workpieces are placed in front of the objective table 2, the clamping plates 3 are at the highest positions to ensure that the workpieces are smoothly placed, after the workpieces are placed respectively, a detector can adjust the clamping plates 3 through the screw rod 4 to clamp the workpieces on the objective table 2, the clamping plates 3 in the L shape clamp the workpieces at the inner sides, the detector moves all the clamping plates 3 downwards according to the method, the four clamping plates 3 clamp the four sides of the workpieces respectively to stabilize the workpieces, the workpieces cannot slide or even fall out of the objective table 2 in the detection process, the positions of the connecting ports 101 and the clamping plates 3 are alternately arranged, and probes face the positions where the workpieces are clamped by the clamping plates 3 and do not hinder normal detection work;

the front end of the supporting plate 5 is provided with a slide way 501, the front end of the supporting plate 5 is connected with a connecting plate 6 in a sliding manner, the rear end of the connecting plate 6 is fixed with a slide block 601 integrated with the connecting plate, the slide block 601 is positioned in the slide way 501 and is connected with the slide way 501 in a sliding manner, the surface of the connecting plate 6 is uniformly provided with a plurality of corresponding openings 502, a tester can connect a microscope for observation on the connecting plate 6 in advance, the lens of the microscope vertically faces downwards to the objective table 2, the tester can slide the slide block 601 to the top of the slide way 501, the inside of the slide way 501 and the rear end of the slide block 601 are both provided with a plurality of corresponding openings 502, the corresponding openings 502 in the slide way 501 are vertically arranged, the corresponding openings 502 on the slide block 601 can correspond to the corresponding openings 502 with the highest position on the slide way 501, the tester fixes the slide block 601 and the slide way 501 by using the external corresponding openings 502, and processes the workpiece at a low temperature through an external low temperature probe, at last, the workpiece can be observed by using a microscope, bolts in the corresponding openings 502 are screwed off, the sliding block 601 can slide in the slide way 501, the connecting plate 6 keeps vertical up-and-down movement through the sliding block 601 and the slide way 501, the connecting plate 6 vertically moves downwards, a lens of the microscope is made to be close to the workpiece downwards, after the microscope is moved to a proper state by a detector, the external bolts can be screwed into the two corresponding openings 502 again, the current position of the sliding block 601 is fixed, the up-and-down movement of the microscope is supported by the connecting plate 6, and the detector can observe the workpiece by using the microscope conveniently.

The present invention should be considered as limited only by the preferred embodiments of the invention, and not limited to the above embodiments, and it should be understood that any modifications, equivalents and improvements made within the spirit and principle of the invention are included in the scope of the invention.