柔性基板及其制作方法以及电子装置

文档序号:1078469 发布日期:2020-10-16 浏览:1次 >En<

阅读说明:本技术 柔性基板及其制作方法以及电子装置 (Flexible substrate, manufacturing method thereof and electronic device ) 是由 周黎斌 任竹运 于 2018-02-07 设计创作,主要内容包括:本发明公开一种柔性基板的制作方法,包括以下步骤:提供一刚性基板;在所述刚性基板上形成至少一个图案化的光阻层;在每个光阻层上形成柔性基底;朝向所述刚性基板远离所述柔性基底一侧发射激光,使得所述激光通过所述刚性基板后照射到所述光阻层,所述柔性基底及所述光阻层从所述刚性基板剥离,进而形成所述柔性基板。由于在刚性基板形成光阻层,使得所述柔性基板更容易剥离,提高了所述柔性基板的剥离效率,避免在剥离过程中对所述柔性基底上的结构造成损坏,进而提高了柔性基板的制程良率。本发明亦提供一种柔性基板和电子装置。(The invention discloses a manufacturing method of a flexible substrate, which comprises the following steps: providing a rigid substrate; forming at least one patterned photoresist layer on the rigid substrate; forming a flexible substrate on each photoresist layer; and emitting laser towards one side of the rigid substrate, which is far away from the flexible substrate, so that the laser irradiates the photoresist layer after passing through the rigid substrate, and the flexible substrate and the photoresist layer are stripped from the rigid substrate, thereby forming the flexible substrate. The flexible substrate is easier to strip due to the fact that the photoresist layer is formed on the rigid substrate, stripping efficiency of the flexible substrate is improved, damage to the structure on the flexible substrate in the stripping process is avoided, and the process yield of the flexible substrate is improved. The invention also provides a flexible substrate and an electronic device.)

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