阅读说明：本技术 一种x射线管钨靶材制造方法 (Manufacturing method of X-ray tube tungsten target ) 是由 唐志宏 于 2020-04-13 设计创作，主要内容包括：本发明公开了一种X射线管钨靶材制造方法,提供钨板和无氧铜棒原材料,钨板背面加工成凹凸形状以增加接触面积(包括但不限于三角波锯齿型、方波齿型、波浪型、点阵型或其他不规则型等),钨板经过去油清洗、去除氧化皮、高温去气,无氧铜棒采用洗涤剂去油清洗及酸洗去除表面氧化层,钨板采用钼钉耗材固定在石墨托上,然后将组装好的石墨托与无氧铜棒放入石墨坩埚中,石墨坩埚放入真空加热炉中进行加热铸靶。该制造方法通过在钨板背面加工三角波锯齿面或者其他形状凹凸面作为钨-铜连接面,熔化的无氧铜包覆在钨板背面与侧面,增加钨板与无氧铜基体的接触面积,提升连接强度,并有效地增强了X射线管工作时阳极靶心的导热能力,使X射线管的可靠性和寿命有了极大的提升。(The invention discloses a method for manufacturing a tungsten target material of an X-ray tube, which comprises the steps of providing a tungsten plate and an oxygen-free copper rod as raw materials, processing the back surface of the tungsten plate into a concave-convex shape to increase the contact area (including but not limited to triangular wave sawtooth shape, square wave tooth shape, wave shape, dot matrix shape or other irregular shapes and the like), degreasing and cleaning the tungsten plate, removing oxide skin and degassing at high temperature, degreasing and cleaning the oxygen-free copper rod by using a detergent and pickling to remove a surface oxide layer, fixing the tungsten plate on a graphite support by using molybdenum nail consumables, then putting the assembled graphite support and the oxygen-free copper rod into a graphite crucible, and putting the graphite crucible into a vacuum heating furnace to heat a cast target. According to the manufacturing method, the triangular wave sawtooth surface or other concave-convex surfaces in other shapes are processed on the back surface of the tungsten plate to serve as the tungsten-copper connecting surface, the molten oxygen-free copper is coated on the back surface and the side surface of the tungsten plate, the contact area of the tungsten plate and the oxygen-free copper substrate is increased, the connecting strength is improved, the heat conduction capability of the anode target during the operation of the X-ray tube is effectively enhanced, and the reliability and the service life of the X-ray tube are greatly improved.)

1. A method for manufacturing a tungsten target of an X-ray tube comprises the following raw materials: a tungsten plate (1), an oxygen-free copper bar (2) and molybdenum nail consumables (3); still including the preparation mould: graphite holds in palm (4), graphite crucible (5) forming die, its characterized in that: the manufacturing method comprises the following steps:

s1, processing the back surface of the tungsten plate (1) into a triangular wave-shaped sawtooth surface or other concave-convex surfaces in other shapes by adopting powder metallurgy or cutting and polishing and other modes;

s2, the processed tungsten plate (1) needs to be cleaned by detergent to remove surface oil stains, washed by acid to remove an oxidation film and treated by vacuum high-temperature degassing procedures;

S3, arranging a fixing hole matched with the molybdenum nail consumable (3) on the surface of the graphite support (4), fixing the tungsten plate (1) on the graphite support (4) by using the fixing hole and the molybdenum nail consumable (3), and enabling the sawtooth surface or other concave-convex surfaces of the fixed tungsten plate (1) to face upwards;

s4, sequentially washing the oxygen-free copper bar (2) by using a detergent aqueous solution to remove surface oil stains, washing by using a hydrochloric acid and nitric acid aqueous solution to remove a surface oxidation film, and drying;

s5, placing the graphite support (4) provided with the tungsten plate (1) into a graphite crucible (5) to enable the concave-convex surface of the tungsten plate (1) to face upwards, and placing the oxygen-free copper rod (2) above the tungsten plate (1) with a distance of 0-2 mm between the tungsten plate and the oxygen-free copper rod;

s6, placing the graphite crucible (5) into a vacuum heating furnace for heating the cast target, wherein the vacuum degree of the vacuum furnace is controlled to be 1.0 multiplied by 10^-3～1.0×10^-5Pa, heating at 1200-1400 ℃, preserving heat for 10-40 min, and cooling in a furnace;

and S7, when the vacuum heating furnace is cooled to below 80 ℃, closing the vacuum and taking out the graphite crucible (5), taking out the anode tungsten target (6) after the target casting is finished, and processing the anode tungsten target into an anode structure required by actual production.

2. The method for manufacturing a tungsten target for an X-ray tube according to claim 1, wherein: the back of the tungsten plate (1) is processed into a triangular wave sawtooth surface or other concave-convex surfaces, and the larger the processed surface area is, the better the processed surface area is, and the processed surface is not limited to triangular wave sawtooth type, square wave tooth type, wave type, dot matrix type and the like under the condition that the processing conditions allow.

3. The method for manufacturing a tungsten target for an X-ray tube according to claim 1, wherein: the graphite crucible (5) is a casting melting forming die, a plurality of forming cavities are formed in the upper surface of the graphite crucible, each forming cavity consists of an upper cylindrical cavity with a large diameter and a lower cylindrical cavity with a small diameter, the shape and the size of the inner cavity of the upper cylindrical cavity are matched with the oxygen-free copper rod (2), and the shape and the size of the inner cavity of the lower cylindrical cavity are matched with the graphite support (4).

4. The method for manufacturing a tungsten target for an X-ray tube according to claim 1, wherein: molybdenum nail consumptive material (3) are fixed at the central point that has the graphite at certain inclination and hold in the palm (4) and put, and for guaranteeing that cast target in-process tungsten board (1) is fixed firm, the distance 0 ~ 2mm apart from tungsten board (1) edge when molybdenum nail consumptive material (3) are fixed tungsten board (1).

5. The method for manufacturing a tungsten target for an X-ray tube according to claim 1, wherein: the anode tungsten target (6) after the target casting in the step S7 is composed of a tungsten target (62), an oxygen-free copper matrix (63) and molybdenum nails (61), wherein the oxygen-free copper matrix (63) is coated on the bottom surface and the side surface of the tungsten target (62), and the molybdenum nails (61) are lower than the fixed part of the tungsten target (62).

6. The method for manufacturing a tungsten target for an X-ray tube according to claim 1, wherein: and (3) cleaning the molybdenum nail consumable (3) in the step S3 with an aqueous solution of a detergent to remove oil stains on the surface, cleaning with an aqueous solution of nitric acid and hydrofluoric acid to remove an oxide film on the surface, ultrasonically cleaning with acetone to remove other micro particles, and drying.

Technical Field

The invention relates to the technical field of X-ray tube control, in particular to a method for manufacturing a tungsten target of an X-ray tube.

Background

In the X-ray tube manufacturing industry, anode tungsten targets are an important component of the same, and are typically composed of a tungsten plate and a bonding substrate, sealed in a glass vacuum, ceramic vacuum, or metal-clad vacuum system. In the working process of the X-ray tube, a tungsten plate in the anode tungsten target assembly mainly plays a role in bearing the bombardment of high-speed electron flow, 1% of energy of the tungsten plate is converted into X-rays, 99% of energy of the tungsten plate is converted into heat energy, heat is conducted and radiated mainly through an anode base body connected with the tungsten plate, and meanwhile, high voltage needs to be applied to the anode base body to guide the direction of the electron flow of a cathode to enable the electron flow to bombard an anode target center at high speed. The oxygen-free copper material has excellent electric conductivity and heat conductivity, and is an ideal material for manufacturing the anode matrix.

During operation, the entire anode tungsten target is at 10^-6In a high vacuum environment with the pressure of above Pa, the surface of the tungsten plate bears high-speed electron bombardment, the surface temperature of the tungsten plate can reach above 1400 ℃ and even exceed the melting point of the tungsten plate, if the heat can not be conducted out in time, the tungsten plate is melted, deformed and cracked in a high-temperature environment and even falls off from a matrix, the service performance and the service life of the X-ray tube are greatly influenced, and therefore the requirement on connection between the tungsten plate and the matrix is very high.

Because the physical properties of the tungsten and the copper have large differences, the tungsten and the copper cannot form corresponding alloy phases, so that the tungsten and the copper cannot form metallurgical bonding by the traditional welding method. In the manufacturing industry of the X-ray tube, the traditional anode tungsten target is prepared by adopting a fusion casting mode, namely, metal copper is melted and sintered to the back of a tungsten plate to coat the tungsten plate by the metal copper, the tungsten plate usually adopted by the mode is a cylindrical tungsten plate, namely, the front and the back of the tungsten plate are both planar, the anode target tungsten-copper joint surface is a cylindrical surface and a bottom surface of the tungsten plate, the connection area is small, in the practical use process, tungsten target melting, large-amount volatilization, tungsten plate cracking and even falling and the like caused by poor anode heat conduction capability can often occur, the service life of the X-ray tube is seriously influenced, and meanwhile, the poor heat conduction capability also seriously restricts the development of the X-ray tube towards higher voltage and higher power.

In view of this, there is a need in the X-ray tube manufacturing industry to develop a method for preparing an anode tungsten target, which improves the heat conductivity of the anode.

Disclosure of Invention

The invention aims to solve the defects in the prior art and provides a method for manufacturing a tungsten target of an X-ray tube.

In order to achieve the purpose, the invention adopts the following technical scheme:

A method for manufacturing a tungsten target of an X-ray tube comprises the following raw materials: tungsten plates, oxygen-free copper bars and molybdenum nail consumables; still including the preparation mould: the manufacturing method of the graphite support and the graphite crucible forming die comprises the following steps:

s1, processing the back of the tungsten plate into a triangular wave-shaped sawtooth surface or other concave-convex surfaces by adopting methods such as powder metallurgy or cutting and polishing;

s2, the processed tungsten plate needs to be cleaned by detergent to remove surface oil stains, washed by acid to remove an oxidation film and treated by vacuum high-temperature degassing procedures;

s3, arranging a fixing hole matched with the molybdenum nail consumable on the surface of the graphite support, fixing the tungsten plate on the graphite support by using the fixing hole and the molybdenum nail consumable, and enabling the triangular wave-shaped sawtooth surface or other concave-convex surfaces of the fixed tungsten plate to face upwards;

s4, sequentially washing the oxygen-free copper bar by using a detergent aqueous solution to remove surface oil stains, washing by using a hydrochloric acid and nitric acid aqueous solution to remove a surface oxidation film, and drying;

s5, placing the graphite support provided with the tungsten plate into a graphite crucible, enabling the concave-convex surface of the tungsten plate to be upward, and placing an oxygen-free copper rod above the tungsten plate, wherein a distance of 0-2 mm is kept between the tungsten plate and the oxygen-free copper rod;

s6, putting the graphite crucible into a vacuum heating furnace to heat the cast target, wherein the vacuum degree of the vacuum furnace is controlled to be 1.0 multiplied by 10 ^-3～1.0×10^-5Pa, heating at 1200-1400 ℃, preserving heat for 10-40 min, and cooling in a furnace;

and S7, when the vacuum heating furnace is cooled to below 80 ℃, closing the vacuum and taking out the graphite crucible, taking out the anode tungsten target after the target casting is finished, and processing the anode tungsten target into an anode structure required by actual production.

Preferably, the back surface of the tungsten plate is processed into a triangular wave-shaped sawtooth surface or other concave-convex surfaces, and the larger the processed surface area is, the better the surface area is, and the processed surface includes but is not limited to triangular wave sawtooth type, square wave tooth type, wave type, array bump type and the like, as shown in fig. 1, fig. 2, fig. 3 and fig. 4 of the attached drawings of the specification.

Preferably, the graphite crucible is a casting melting forming die, the upper surface of the graphite crucible is provided with a plurality of forming cavities, each forming cavity consists of an upper cylindrical cavity with a large diameter and a lower cylindrical cavity with a small diameter, the shape and the size of the inner cavity of the upper cylindrical cavity are matched with the oxygen-free copper rod, and the shape and the size of the inner cavity of the lower cylindrical cavity are matched with the graphite support.

Preferably, the molybdenum nail consumable part is fixed at the central position of the graphite support with a certain inclination angle, and in order to ensure that the tungsten plate is fixed firmly in the target casting process, the distance between the molybdenum nail consumable part and the edge of the tungsten plate is 0-2 mm when the tungsten plate is fixed.

Preferably, the anode tungsten target material after the target casting in step S7 is composed of a tungsten target, an oxygen-free copper matrix and molybdenum nails, wherein the oxygen-free copper matrix is coated on the bottom and side surfaces of the tungsten target and the fixed portions of the molybdenum nails lower than the tungsten target.

Preferably, before use, the molybdenum nail consumable in the step S3 is sequentially subjected to cleaning by detergent aqueous solution to remove surface oil stains, cleaning by nitric acid and hydrofluoric acid aqueous solution to remove surface oxidation films, ultrasonic cleaning by acetone to remove other micro particles, and drying treatment.

The invention has the following beneficial effects:

1. the invention provides a method for manufacturing a tungsten target material of an X-ray tube, which is characterized in that a triangular wave-shaped sawtooth surface or other concave-convex surfaces with other shapes are processed on the back surface of a tungsten plate, in the target casting process, oxygen-free copper is melted and coated on the back and the side of the tungsten plate, so that the tungsten-copper connection area is greatly increased, the bonding strength of the tungsten and the copper is improved, the heat transfer area from the target center of the tungsten plate to the oxygen-free copper matrix is increased, the heat conduction and heat dissipation capacity of the anode is greatly improved, when the X-ray tube works, the heat of the anode target core subjected to the high-speed electron bombardment conversion can be conducted out through the anode oxygen-free copper substrate most efficiently, the performance of the tungsten target is improved more effectively, the tungsten target is prevented from failure faults such as melting, cracking and falling off due to the difficulty in dissipation of the heat, the service life of the X-ray tube is prolonged effectively, meanwhile, a process foundation is laid for the development of the X-ray tube towards the direction of higher voltage and higher power.

2. According to the manufacturing method of the X-ray tube tungsten target, before the molybdenum nails and the oxygen-free copper rods are used, the surfaces of the molybdenum nails and the oxygen-free copper rods are subjected to oil removal and oxide film removal treatment, so that the copper rods and the molybdenum nails are prevented from further containing grease and oxidation impurities during high-temperature fusion welding, and chemical reaction is avoided, so that the purity of finished products is higher; meanwhile, the graphite support and the graphite crucible which are made of graphite materials are adopted, and because the hardness of graphite is low, the melting point and the boiling point both exceed 3000 ℃, the graphite is not melted with copper liquid when being heated to 1200-1400 ℃, so that the subsequent demolding work is facilitated.

Drawings

FIG. 1 is a schematic structural view of a tungsten plate 1-a according to the present invention, the back of which is processed into a triangular sawtooth structure;

FIG. 2 is a schematic structural view of a tungsten plate 1-b according to the present invention, the back surface of which is processed into a wave-shaped structure;

FIG. 3 is a schematic structural view of a tungsten plate 1-c according to the present invention, the back surface of which is processed into a square-wave tooth structure;

FIG. 4 is a schematic view of a structure of a tungsten plate 1-d according to the present invention, wherein the back surface is processed into an array bump structure;

FIG. 5 is a schematic view of the structure of an oxygen-free copper rod provided by the present invention;

FIG. 6 is a schematic structural diagram of a general molybdenum nail consumable provided by the present invention;

FIG. 7 is a schematic structural view of molybdenum nail consumables dedicated for a triangular wave sawtooth structure tungsten plate provided by the present invention;

FIG. 8 is a schematic structural diagram of molybdenum nail consumables dedicated for a square-wave tooth-shaped tungsten plate according to the present invention;

FIG. 9 is a schematic view of a graphite susceptor according to the present invention;

FIG. 10 is a schematic view of a graphite crucible according to the present invention;

FIG. 11 is a schematic structural view of a triangular sawtooth structure tungsten plate provided by the present invention mounted on a graphite support by using a general molybdenum nail;

FIG. 12 is a schematic structural view of a triangular sawtooth structure tungsten plate provided in the present invention mounted on a graphite holder by using a special molybdenum nail;

fig. 13 is a schematic structural view of the wave-shaped structural tungsten plate provided by the present invention mounted on a graphite holder by using a universal molybdenum nail;

FIG. 14 is a schematic structural view of a square wave tooth-shaped tungsten plate provided by the invention mounted on a graphite support by adopting a universal molybdenum nail;

FIG. 15 is a schematic structural view of a square wave tooth-shaped tungsten plate of the present invention mounted on a graphite holder by using a special molybdenum nail;

FIG. 16 is a schematic structural view of the array bump type structural tungsten plate of the present invention mounted on a graphite holder by using a universal molybdenum nail;

FIG. 17 is a schematic view of a graphite susceptor and an oxygen-free copper rod placed in a graphite crucible in the practice of the present invention;

FIG. 18 is a schematic structural view of an anode tungsten target after the target casting is completed according to the present invention;

FIG. 19 is a schematic cross-sectional view of an anode tungsten target after completing the target casting process according to the present invention.

In the figure: 1 tungsten plate (1-a; 1-b; 1-c; 1-d), 2 oxygen-free copper rods, 3 molybdenum nail consumables (3-a; 3-c), 4 graphite holders, 5 graphite crucibles, 6 anode tungsten target materials, 61 molybdenum nails, 62 tungsten targets and 63 oxygen-free copper substrates.

Detailed Description

The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments.

In the description of the present invention, it is to be understood that the terms "upper", "lower", "front", "rear", "left", "right", "top", "bottom", "inner", "outer", and the like, indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, are merely for convenience in describing the present invention and simplifying the description, and do not indicate or imply that the device or element being referred to must have a particular orientation, be constructed and operated in a particular orientation, and thus, should not be construed as limiting the present invention.

First, example section

Example 1

A method for manufacturing a tungsten target of an X-ray tube comprises the following steps:

the method comprises the following raw materials: the back surface of the tungsten plate is provided with a triangular wave sawtooth type tungsten plate 1-a, an oxygen-free copper bar 2, a general molybdenum nail consumable 3 and a triangular wave sawtooth type tungsten plate special molybdenum nail consumable 3-a;

Still including the preparation mould: a graphite support 4 and a graphite crucible 5 forming die;

the manufacturing method comprises the following steps:

s1, processing the back of the tungsten plate 1 into a triangular wave sawtooth type 1-a by using a processing machine such as a milling machine, wherein the thickness a of the tungsten plate 1-a can be 3-6mm, and according to heat transfer simulation, the sawtooth angle alpha of the triangular wave structure takes 30-40 degrees, and the sawtooth depth d takes 0.3 a-0.5 a, as shown in the figure 1 of the attached drawing of the specification;

s2, cleaning the processed tungsten plate 1-a with a detergent aqueous solution to remove surface oil stains, cleaning with a nitric acid and hydrofluoric acid aqueous solution to remove a surface oxidation film, ultrasonically cleaning with acetone to remove other micro particles, drying, and degassing the tungsten plate 1-a in a high-temperature vacuum degassing furnace;

s3, providing a graphite support 4, processing the graphite support 4 into an inclination angle required by the design of an X-ray tube, processing 4 corresponding molybdenum nail holes on the surface of the graphite support 4, fixing a tungsten plate 1-a on the molybdenum nail holes of the graphite support 4 by adopting two general molybdenum nail consumables 3, and enabling a triangular wave sawtooth surface of the fixed tungsten plate 1-a to face upwards as shown in figure 11, or fixing the tungsten plate 1-a on the molybdenum nail holes of the graphite support 4 by adopting two molybdenum nail consumables 3-a special for the triangular wave sawtooth type tungsten plate, and locking the tungsten plate 1-a by a hook of the special molybdenum nail 3-a as shown in figure 12;

S4, washing the oxygen-free copper rod 2 with a detergent aqueous solution to remove surface oil stains, washing with a hydrochloric acid and nitric acid aqueous solution to remove a surface oxidation film, and drying; before use, the molybdenum nail consumable 3 (or 3-a) is sequentially cleaned by detergent aqueous solution to remove surface oil stains, cleaned by nitric acid and hydrofluoric acid aqueous solution to remove a surface oxidation film, cleaned by acetone ultrasonic wave to remove other micro particles and dried;

s5, placing the graphite support 4 provided with the tungsten plate 1-a into a graphite crucible 5, enabling the triangular wave sawtooth surface of the tungsten plate 1-a to be upward, and placing the oxygen-free copper rod 2 above the tungsten plate 1-a, wherein the distance between the two is kept to be 1-2 mm; the invention provides a graphite crucible 5, the number of tungsten target material sets which can be installed in each crucible is determined according to the size of a furnace chamber and the actual production condition, 6 sets of anode tungsten target materials can be installed in the graphite crucible 5 in the embodiment of the invention, as shown in figure 17;

s6, placing the graphite crucible 5 after being installed into a vacuum heating furnace for heating cast targets, wherein the vacuum degree of the vacuum furnace is 1.0 multiplied by 10^-5Pa, the heating temperature is 1400 ℃, the heat preservation is carried out for 40min, the furnace is cooled, as the melting point of the oxygen-free copper is 1084 ℃ and the melting point of the tungsten is 3400 ℃, when the vacuum furnace is heated to 1400 ℃, the oxygen-free copper rod 2 is melted, in the heat preservation process, the liquid copper uniformly flows downwards to coat the back and the side of the tungsten plate 1-a, the tungsten-copper connection is realized, after the heating is stopped, the liquid copper is slowly cooled and solidified to form an anode tungsten target raw material, the whole process is carried out in the vacuum environment, and the oxygen-free copper and the tungsten material are ensured not to be oxidized;

S7, when the vacuum heating furnace is cooled to below 80 ℃, the vacuum is closed, the graphite crucible 5 is taken out, the anode tungsten target 6 after the target casting is finished is taken out, as shown in fig. 18 and 19, and the anode tungsten target is processed into an anode structure required by actual production.

Example 2

A method for manufacturing a tungsten target of an X-ray tube comprises the following steps:

the method comprises the following raw materials: the back side is provided with a tungsten plate 1-b with a wave-shaped structure, an oxygen-free copper bar 2 and a general molybdenum nail consumable 3;

still including the preparation mould: a graphite support 4 and a graphite crucible 5 forming die;

the manufacturing method comprises the following steps:

s1, machining the back of the tungsten plate 1 into a wave shape 1-b by adopting a machining machine such as a milling machine, wherein the thickness a of the tungsten plate 1-b can be 3-6mm, and according to the heat transfer simulation, the wave width b of the wave-shaped structure is 1-2 mm, and the wave depth d is 0.1 a-0.3 a, as shown in the attached figure 2 of the specification;

s2, sequentially cleaning the processed tungsten plate 1-b by detergent aqueous solution to remove surface oil stains, cleaning by nitric acid and hydrofluoric acid aqueous solution to remove a surface oxidation film, ultrasonically cleaning by acetone to remove other tiny particles, drying, and degassing the tungsten plate 1-b in a high-temperature vacuum degassing furnace;

s3, providing a graphite support 4, processing the graphite support 4 into an inclination angle required by the design of an X-ray tube, processing 4 corresponding molybdenum nail holes on the surface of the graphite support 4, fixing a tungsten plate 1-b on the molybdenum nail holes of the graphite support 4 by adopting two universal molybdenum nail consumables 3, and enabling the wave-shaped surface of the fixed tungsten plate 1-a to face upwards as shown in FIG. 13;

S4, washing the oxygen-free copper rod 2 with a detergent aqueous solution to remove surface oil stains, washing with a hydrochloric acid and nitric acid aqueous solution to remove a surface oxidation film, and drying; before the molybdenum nail consumable 3 is used, the molybdenum nail consumable is sequentially washed by detergent aqueous solution to remove surface oil stains, washed by nitric acid and hydrofluoric acid aqueous solution to remove a surface oxidation film, ultrasonically washed by acetone to remove other tiny particles and dried;

s5, placing the graphite support 4 provided with the tungsten plate 1-b into a graphite crucible 5, enabling the wave-shaped surface of the tungsten plate 1-b to face upwards, and placing the oxygen-free copper rod 2 above the tungsten plate 1-b, wherein the distance between the two is kept to be 1-2 mm; the invention provides a graphite crucible 5, the number of tungsten target material sets which can be installed in each crucible is determined according to the size of a furnace chamber and the actual production condition, 6 sets of anode tungsten target materials can be installed in the graphite crucible 5 in the embodiment of the invention, as shown in figure 17;

s6, placing the graphite crucible 5 after being installed into a vacuum heating furnace for heating cast targets, wherein the vacuum degree of the vacuum furnace is 1.0 multiplied by 10^-5Pa, the heating temperature is 1400 ℃, the heat preservation is carried out for 40min, the furnace is cooled, as the melting point of the oxygen-free copper is 1084 ℃ and the melting point of the tungsten is 3400 ℃, when the vacuum furnace is heated to 1400 ℃, the oxygen-free copper rod 2 is melted, in the heat preservation process, the liquid copper uniformly flows downwards to coat the back and the side of the tungsten plate 1-b, the tungsten-copper connection is realized, after the heating is stopped, the liquid copper is slowly cooled and solidified to form an anode tungsten target raw material, the whole process is carried out in the vacuum environment, and the oxygen-free copper and the tungsten material are ensured not to be oxidized;

S7, when the vacuum heating furnace is cooled to below 80 ℃, the vacuum is closed, the graphite crucible 5 is taken out, the anode tungsten target 6 after the target casting is finished is taken out, as shown in fig. 18 and 19, and the anode tungsten target is processed into an anode structure required by actual production.

Example 3

A method for manufacturing a tungsten target of an X-ray tube comprises the following steps:

the method comprises the following raw materials: the back surface of the square-wave tooth-shaped tungsten plate is provided with a square-wave tooth-shaped tungsten plate 1-c, an oxygen-free copper bar 2, a universal molybdenum nail consumable 3 and a square-wave tooth-shaped tungsten plate special molybdenum nail consumable 3-c;

still including the preparation mould: a graphite support 4 and a graphite crucible 5 forming die;

the manufacturing method comprises the following steps:

s1, processing the back of the tungsten plate 1 into a square wave tooth shape 1-c by adopting a processing machine such as a milling machine, wherein the thickness a of the tungsten plate 1-c can be 3-6mm, and according to the heat transfer simulation, the wave width b of the square wave structure is 1-3mm, and the wave depth d is 0.2 a-0.4 a, as shown in the attached figure 3 of the specification;

s2, sequentially cleaning the processed tungsten plate 1-c by detergent aqueous solution to remove surface oil stains, cleaning by nitric acid and hydrofluoric acid aqueous solution to remove a surface oxidation film, ultrasonically cleaning by acetone to remove other tiny particles, drying, and degassing the tungsten plate 1-c in a high-temperature vacuum degassing furnace;

s3, providing a graphite support 4, processing the graphite support 4 into an inclination angle required by the design of an X-ray tube, processing 4 corresponding molybdenum nail holes on the surface of the graphite support 4, fixing a tungsten plate 1-c on the molybdenum nail holes of the graphite support 4 by adopting two universal molybdenum nail consumables 3, enabling the square wave tooth surface of the fixed tungsten plate 1-c to be upward as shown in figure 14, or fixing the tungsten plate 1-c on the molybdenum nail holes of the graphite support 4 by adopting two square wave tooth type tungsten plate special molybdenum nail consumables 3-c, and locking the tungsten plate 1-c by a hook of the special molybdenum nail 3-c as shown in figure 15;

S4, washing the oxygen-free copper rod 2 with a detergent aqueous solution to remove surface oil stains, washing with a hydrochloric acid and nitric acid aqueous solution to remove a surface oxidation film, and drying; before use, the molybdenum nail consumable 3 (or 3-c) is sequentially cleaned by detergent aqueous solution to remove surface oil stains, cleaned by nitric acid and hydrofluoric acid aqueous solution to remove a surface oxidation film, cleaned by acetone ultrasonic wave to remove other micro particles and dried;

s5, placing the graphite support 4 provided with the tungsten plate 1-c into a graphite crucible 5, enabling the square wave tooth surface of the tungsten plate 1-c to be upward, and placing the oxygen-free copper rod 2 above the tungsten plate 1-c, wherein the distance between the two is kept to be 1-2 mm; the invention provides a graphite crucible 5, the number of tungsten target material sets which can be installed in each crucible is determined according to the size of a furnace chamber and the actual production condition, 6 sets of anode tungsten target materials can be installed in the graphite crucible 5 in the embodiment of the invention, as shown in figure 17;

s6, placing the graphite crucible 5 after being installed into a vacuum heating furnace for heating cast targets, wherein the vacuum degree of the vacuum furnace is 1.0 multiplied by 10^-5Pa, the heating temperature is 1400 ℃, the heat preservation is carried out for 40min, the furnace is cooled, as the melting point of the oxygen-free copper is 1084 ℃ and the melting point of the tungsten is 3400 ℃, when the vacuum furnace is heated to 1400 ℃, the oxygen-free copper rod 2 is melted, in the heat preservation process, the liquid copper uniformly flows downwards to coat the back and the side of the tungsten plate 1-c, the tungsten-copper connection is realized, after the heating is stopped, the liquid copper is slowly cooled and solidified to form an anode tungsten target raw material, the whole process is carried out in the vacuum environment, and the oxygen-free copper and the tungsten material are ensured not to be oxidized;

S7, when the vacuum heating furnace is cooled to below 80 ℃, the vacuum is closed, the graphite crucible 5 is taken out, the anode tungsten target 6 after the target casting is finished is taken out, as shown in fig. 18 and 19, and the anode tungsten target is processed into an anode structure required by actual production.

Example 4

A method for manufacturing a tungsten target of an X-ray tube comprises the following steps:

the method comprises the following raw materials: the back side is provided with a tungsten plate 1-d with an array salient point type structure, an oxygen-free copper bar 2 and a general molybdenum nail consumable 3;

still including the preparation mould: a graphite support 4 and a graphite crucible 5 forming die;

the manufacturing method comprises the following steps:

s1, processing the back of the tungsten plate 1 into an array bump type structure 1-d by a processing machine such as a milling machine, wherein the thickness a of the tungsten plate 1-d can be 3-6mm, and according to the heat transfer simulation, the bump pitch b of the array bump structure is 1-2mm, and the bump height d is 0.1 a-0.3 a, as shown in the attached figure 4 of the specification;

s2, sequentially cleaning the processed tungsten plates 1-d by detergent aqueous solution to remove surface oil stains, cleaning by nitric acid and hydrofluoric acid aqueous solution to remove surface oxidation films, ultrasonically cleaning by acetone to remove other micro particles, drying, and degassing the tungsten plates 1-d in a high-temperature vacuum degassing furnace;

s3, providing a graphite support 4, processing the graphite support 4 into an inclination angle required by the design of an X-ray tube, processing 4 corresponding molybdenum nail holes on the surface of the graphite support 4, fixing a tungsten plate 1-d on the molybdenum nail holes of the graphite support 4 by adopting two universal molybdenum nail consumables 3, and enabling an array bump structure of the fixed tungsten plate 1-d to face upwards as shown in figure 16;

S4, washing the oxygen-free copper rod 2 with a detergent aqueous solution to remove surface oil stains, washing with a hydrochloric acid and nitric acid aqueous solution to remove a surface oxidation film, and drying; before the molybdenum nail consumable 3 is used, the molybdenum nail consumable is sequentially washed by detergent aqueous solution to remove surface oil stains, washed by nitric acid and hydrofluoric acid aqueous solution to remove a surface oxidation film, ultrasonically washed by acetone to remove other tiny particles and dried;

s5, placing the graphite support 4 provided with the tungsten plate 1-d into a graphite crucible 5, enabling the profile of the array salient points of the tungsten plate 1-d to be upward, and placing the oxygen-free copper rod 2 above the tungsten plate 1-d, wherein the distance between the two is kept to be 1-2 mm; the invention provides a graphite crucible 5, the number of tungsten target material sets which can be installed in each crucible is determined according to the size of a furnace chamber and the actual production condition, 6 sets of anode tungsten target materials can be installed in the graphite crucible 5 in the embodiment of the invention, as shown in figure 17;

s6, placing the graphite crucible 5 after being installed into a vacuum heating furnace for heating cast targets, wherein the vacuum degree of the vacuum furnace is 1.0 multiplied by 10^-5Pa, the heating temperature is 1400 ℃, the heat preservation is carried out for 40min, the furnace is cooled, as the melting point of the oxygen-free copper is 1084 ℃ and the melting point of the tungsten is 3400 ℃, when the vacuum furnace is heated to 1400 ℃, the oxygen-free copper rod 2 is melted, in the heat preservation process, the liquid copper uniformly flows downwards to coat the back and the side of the tungsten plate 1-d, the tungsten-copper connection is realized, after the heating is stopped, the liquid copper is slowly cooled and solidified to form an anode tungsten target raw material, the whole process is carried out in the vacuum environment, and the oxygen-free copper and the tungsten material are ensured not to be oxidized;

S7, when the vacuum heating furnace is cooled to below 80 ℃, the vacuum is closed, the graphite crucible 5 is taken out, the anode tungsten target 6 after the target casting is finished is taken out, as shown in fig. 18 and 19, and the anode tungsten target is processed into an anode structure required by actual production.

According to the invention, the anode tungsten target 6 after target casting is finished consists of a tungsten target 62, an oxygen-free copper matrix 63 and a molybdenum nail 61, wherein the oxygen-free copper matrix 63 is coated on the bottom surface and the side surface of the tungsten target 62 and the molybdenum nail 61 is lower than the fixed part of the tungsten target 62, the oxygen-free copper and the tungsten material have large connecting area, high bonding strength and large heat conducting area, the anode tungsten target 6 is processed into an anode structure required by an X-ray tube, when the anode structure is sealed in a glass or ceramic vacuum system, the tungsten target 62 bears high-speed electron current bombardment to generate a large amount of heat, the heat is quickly conducted and radiated through the oxygen-free copper matrix 63 connected with the tungsten target 62, the tungsten target 62 can be effectively protected from melting and cracking, the service performance and the service life of the X-ray tube are effectively improved.

Second, practice the detection part

In the above embodiments 1 to 4, the back surface of the tungsten plate is processed into concave and convex surfaces with different shapes to increase the tungsten-copper contact surface, in the actual use process of the target, the anode tungsten target materials manufactured in the embodiments 1 to 4 are respectively selected and applied to the inside of an 80KV high-voltage power supply X-ray tube to obtain the X-ray tube (1 to 4), and meanwhile, the anode tungsten target materials manufactured by four planar tungsten plates are selected and applied to the 80KV high-voltage power supply X-ray tube (5 to 8) for service life comparison.

According to the detection and practical use data, the anode tungsten target produced by the manufacturing method provided by the invention is applied to the inside of an X-ray tube, so that the service life of the X-ray tube can be prolonged, the heat dissipation effect of the tungsten target is improved, and the phenomena of cracking and melting of the target are avoided.

The above description is only for the preferred embodiment of the present invention, but the scope of the present invention is not limited thereto, and any person skilled in the art should be considered to be within the technical scope of the present invention, and the technical solutions and the inventive concepts thereof according to the present invention should be equivalent or changed within the scope of the present invention.