阅读说明：本技术 一种生物亲和型各向异性磁电阻传感器及其制备方法 (Biological affinity type anisotropic magnetoresistance sensor and preparation method thereof ) 是由 刘明 周子尧 张晓慧 胡忠强 李春雷 查茜 于 2020-04-23 设计创作，主要内容包括：一种生物亲和型各向异性磁电阻传感器及其制备方法,包括基底、铁磁层和电极,铁磁层设置在基底上表面,铁磁层上表面设置有电极；基底为丝素蛋白纤维基底。本发明将生物亲和材料丝素蛋白纤维与各向异性磁阻传感器相结合的方法,克服了丝素蛋白的缺点,没有使用传统的光刻工艺,而是借助专门设计的掩模版,仅通过真空磁控溅射的方法,制作了具有生物亲和性的各向异性磁阻传感器。本发明使磁传感器具有了生物亲和性,可以拓宽其在生物医学领域的应用,且具有低成本、工艺简单的优点。(A bioaffinity type anisotropic magnetoresistance sensor and a preparation method thereof comprise a substrate, a ferromagnetic layer and electrodes, wherein the ferromagnetic layer is arranged on the upper surface of the substrate, and the electrodes are arranged on the upper surface of the ferromagnetic layer; the substrate is silk fibroin fiber substrate. The invention combines the bioaffinity material silk fibroin fiber with the anisotropic magneto-resistive sensor, overcomes the defects of silk fibroin, does not use the traditional photoetching technology, but only uses a vacuum magnetron sputtering method by means of a specially designed mask plate to manufacture the anisotropic magneto-resistive sensor with bioaffinity. The invention makes the magnetic sensor have biological affinity, can broaden the application of the magnetic sensor in the field of biomedicine, and has the advantages of low cost and simple process.)

1. A bioaffinity type anisotropic magnetoresistance sensor is characterized by comprising a substrate, a ferromagnetic layer and electrodes, wherein the ferromagnetic layer is arranged on the upper surface of the substrate; the substrate is silk fibroin fiber substrate.

2. The bioaffinity anisotropic magnetoresistive sensor of claim 1 wherein the ferromagnetic layer film is one of NiFe, NiCr, CoFe, CoFeB, FeGaB, SmFe, or FeCoSiB; the electrode is a copper electrode.

3. A method for manufacturing a bioaffinity type anisotropic magnetoresistive sensor, based on any one of claims 1 to 2, comprising the steps of:

step 1, preparing a silk fibroin fiber substrate for later use;

step 2, preparing a mask;

step 3, fixing the silk fibroin fiber substrate in the step 1 by using the mask in the step 2, and then preparing a ferromagnetic layer film by using the prepared silk fibroin fiber substrate;

step 4, growing electrodes on the ferromagnetic layer film to form a sample;

and 5, performing the most sensitive angle and corner test on the sample to obtain the qualified bioaffinity type anisotropic magnetoresistance sensor.

4. The method for preparing a bioaffinity type anisotropic magnetoresistive sensor according to claim 3, wherein step 1 specifically comprises:

1) extracting silk fibroin fiber from silkworm cocoon and purifying the silk fibroin fiber;

2) dissolving silk fibroin in a 1M LiCl/DMSO solution, and reacting with isocyano ethyl methacrylate at 60 ℃ for 5 hours in a dry nitrogen environment to prepare a mixture;

3) pouring the mixture into excessive cold ethanol to precipitate protein with conjugated methacrylate groups;

4) washing the protein mixture with a cold ethanol/acetone mixture, and centrifuging for 48 hours to obtain a fibroin solution;

5) and transferring the solution into a plastic container, determining the depth of the solution to be 4mm, standing for 12 hours, and taking off the solidified fibroin film after the solution is solidified to obtain the fibroin substrate.

5. The method for preparing a bioaffinity type anisotropic magnetoresistive sensor according to claim 3, wherein step 2 specifically comprises: the mask plate consists of a bottom layer, a middle layer and a top layer, wherein the bottom layer is a special aluminum alloy sheet with the thickness of 60X 3 mm; the intermediate layer is a 60 x 0.2mm custom aluminum alloy sheet, the intermediate layer having two patterns, one for growing ferromagnetic strips and the other for growing electrodes; the top layer was an aluminum alloy sheet with a thickness of 60 x 2 mm.

6. The method for preparing a bioaffinity type anisotropic magnetoresistive sensor according to claim 3, wherein step 3 specifically comprises: cutting the silk fibroin substrate to a proper size, blowing the surface of the silk fibroin substrate with nitrogen, and fixing the silk fibroin substrate on a film growth platform by using a special mask; after being transferred into a magnetron main cavity, a ferromagnetic film is grown by a direct current magnetron sputtering method under the vacuum condition of 8.5x10-8 Torr.

7. The method for preparing a bioaffinity type anisotropic magnetoresistive sensor according to claim 3, wherein step 4 specifically comprises: vacuum magnetron sputtering was used at 8.5x10^-8Growing a Cu electrode on the ferromagnetic thin film under the condition of vacuum degree of Torr.