阅读说明：本技术 电子器件的三维可视化显示方法及系统 (Three-dimensional visual display method and system for electronic device ) 是由 朱煜 吴振华 于 2020-04-28 设计创作，主要内容包括：本发明提供了一种电子器件的三维可视化显示方法及系统,该方法包括：对电子器件的结构和/或电学特性进行模拟,得到第一可视化数据,其中,所述电子器件包括半导体器件和/或集成电路,所述第一可视化数据包括所述电子器件的三维网格位置信息和/或格点上物理量；将所述第一可视化数据中的三维网格位置信息和/或格点上物理量按照数据类型转换为适于进行虚拟三维显示的第二可视化数据；将所述第二可视化数据在虚拟空间中渲染,以在所述虚拟空间显示所述电子器件的结构和/或物理量。在本发明中,可以将三维半导体器件或集成电路直观呈现在三维虚拟空间中,并且使得该三维操作空间不受显示屏幕尺寸的限制。(The invention provides a three-dimensional visual display method and a system of an electronic device, wherein the method comprises the following steps: simulating the structure and/or electrical characteristics of an electronic device to obtain first visual data, wherein the electronic device comprises a semiconductor device and/or an integrated circuit, and the first visual data comprises three-dimensional grid position information and/or grid point physical quantities of the electronic device; converting the three-dimensional grid position information and/or the physical quantity on the grid points in the first visual data into second visual data suitable for virtual three-dimensional display according to the data type; rendering the second visualization data in a virtual space to display the structural and/or physical quantities of the electronic device in the virtual space. In the present invention, a three-dimensional semiconductor device or an integrated circuit can be intuitively presented in a three-dimensional virtual space, and the three-dimensional operation space is not limited by the size of a display screen.)

1. A three-dimensional visual display method of an electronic device, comprising:

simulating the structure and/or electrical characteristics of an electronic device to obtain first visual data, wherein the electronic device comprises a semiconductor device and/or an integrated circuit, and the first visual data comprises three-dimensional grid position information and/or grid point physical quantities of the electronic device;

converting the three-dimensional grid position information and/or the physical quantity on the grid points in the first visual data into second visual data suitable for virtual three-dimensional display according to the data type;

rendering the second visualization data in a virtual space to display the structural and/or physical quantities of the electronic device in the virtual space.

2. The method according to claim 1, wherein converting the three-dimensional grid position information and/or the physical quantity on the grid point in the first visualization data into the second visualization data suitable for virtual three-dimensional display according to data type comprises at least one of the following:

for the geometric body in the first visual data, performing data conversion according to the geometric dimension and material property of the semiconductor device/integrated circuit to generate a three-dimensional grid and a material map;

performing data conversion on the isosurface in the first visual data to generate an isosurface of a three-dimensional scalar field;

for the contour line in the first visualization data, making a contour line of a three-dimensional scalar field on a specified two-dimensional section;

for the heat map in the first visualization data, performing a heat map of a three-dimensional scalar field on a specified two-dimensional section;

generating a stream cluster of a three-dimensional vector field using a stream conservation principle and a traffic for the stream cluster in the first visualization data;

converting the physical quantities of the density class and the fluid class in the first visualization data into a particle system presentation in a visualization tool;

for the phonon vibrational modes of the material in the first visualization data, converting to a presentation with simple harmonic vibrations of atoms in a unit cell;

converting the Fermi surface of the material in the first visual data into a closed curved surface presentation adopting a first Brillouin zone;

for a three-dimensional energy band of a material in the first visualization data, converting to rendering with multiple curved surfaces of a first brillouin zone;

and converting the amplitude and the phase of the wave function in the first visual data into presentation by simple harmonic oscillators distributed on a space lattice.

3. The method according to claim 1, wherein before converting the three-dimensional grid position information and/or the physical quantities on grid points in the first visualization data into second visualization data suitable for virtual three-dimensional display according to data types, the method further comprises:

storing the first visualization data, wherein the data format of the stored first visualization data comprises at least one of the following: finite element non-uniform grid points, finite difference uniform grid points and three-dimensional pixel grid points; wherein a file format of the stored first visualization data comprises at least one of: binary files, ASCII text files.

4. The method according to claim 1, characterized in that displaying in said virtual space structural and/or physical quantities of said electronic device comprises at least one of:

displaying the structure and/or physical quantity of the electronic device in the virtual space according to the process steps;

displaying the structure and/or physical quantity of the electronic device in the virtual space according to a time sequence evolution sequence;

displaying the structure and/or physical quantity of the electronic device in the virtual space according to different process steps or different time sequence evolution sequences;

displaying a user-selected portion of the structure and/or physical quantities of the electronic device in the virtual space.

5. The method according to claim 1, characterized in that after displaying the structural and/or physical quantities of the electronic device in the virtual space, the method further comprises:

acquiring an operation instruction of a user on the displayed electronic device;

and changing the structure and/or physical quantity of the displayed electronic device according to the operation instruction.

6. The method according to claim 5, wherein the changing of the displayed structure and/or physical quantity of the electronic device according to the operation instruction comprises at least one of:

changing the geometry and/or shape of the electronic device of the virtual display;

changing the doping concentration and/or doping profile of the semiconductor material of the virtually displayed electronic device;

changing a material property of the electronic device virtually displayed, wherein the material property comprises at least one of: mobility, stress or electron-hole recombination rate of the semiconductor material; resistivity or work function of the metal material; the dielectric constant of the insulating material;

changing the three-dimensional connection mode of the virtually displayed electronic device;

continuously adjusting a gate voltage or bias voltage of the electronic device of the virtual display;

adding or deleting one or more semiconductor materials of the electronic device virtually displayed.

7. The method of claim 5, wherein the operational instructions comprise at least one of: the gesture, eye movement, voice, facial expression or head movement of the user, or an instruction generated by the user operating the virtual laser pointer, or an instruction generated by the user operating the infrared handle.

8. The method of claim 1, wherein the structural and/or electrical characteristics of the semiconductor device/integrated circuit are simulated at a local server, or at a remote server, or at the cloud to generate the first visual data.

9. The method according to claim 1, characterized in that after displaying the structural and/or physical quantities of the electronic device in the virtual space, the method further comprises:

acquiring operation instructions of one or more users on the displayed electronic device in a real or virtual space;

generating third visual data according to the operation instruction;

and presenting the operation result of the electronic device in the real or virtual space by the one or more users to other users in the same or different real or virtual space according to the third visual data.

10. The method according to any one of claims 1 to 9, characterized in that after displaying the structural and/or physical quantities of the electronic device in the virtual space, the method further comprises:

and acquiring the identification of the displayed electronic device by the user by using the virtual tool, and storing the identification content.

11. Method according to any of claims 1 to 9, characterized in that after displaying the virtual structure and/or physical quantities of the electronic device, the method further comprises:

acquiring image information of the virtual electronic device;

and uploading the image information to a social platform or sharing the image information through an email.

12. The method according to any one of claims 1 to 9, wherein the physical quantity of the electronic device comprises at least one of:

doping concentration, charge density, current density, band edge, quasi-fermi level, electrostatic potential, electric field, mobility, stress, heat.

13. A three-dimensional visual display system of an electronic device, comprising:

the electronic device comprises a calculation engine and a display engine, wherein the calculation engine is used for simulating the structure and/or electrical characteristics of an electronic device to obtain first visual data, the electronic device comprises a semiconductor device and/or an integrated circuit, and the first visual data comprises three-dimensional grid position information and/or grid point physical quantities of the electronic device;

the data conversion unit is used for converting the three-dimensional grid position information and/or the physical quantity on the grid points in the first visual data into second visual data suitable for virtual three-dimensional display according to the data type;

a visualization tool for rendering the second visualization data in the virtual space to display a structural and/or physical quantity of the electronic device in the virtual space.

14. The system of claim 13, further comprising:

the sensor or the camera is used for acquiring an operation instruction of a user for operating the virtually displayed electronic device; wherein the operation instruction comprises at least one of: instructions generated by the user's gestures, eye movements, voice, facial expressions, or head movements, or instructions generated by the user operating a virtual laser pointer, or instructions generated by the user operating an infrared handle.

15. The system of claim 13, wherein the compute engine comprises at least one of:

the system comprises a material simulation calculation engine, a semiconductor process device simulation calculation engine and a circuit simulation calculation engine.

16. The system of claim 13, wherein the computing engine is located on a local server, or on a remote server, or on a cloud.

17. The system of claim 13, wherein the electronics comprise at least one of: the three-dimensional transistor array comprises a three-dimensional fin transistor, a plurality of stacked and connected nanowire transistors, a three-dimensional vertical transistor, a three-dimensional vertical NAND memory, a three-dimensional DRAM memory, a three-dimensional FeRAM memory, a three-dimensional RRAM memory and a three-dimensional integrated circuit.

18. The system of claim 13, wherein the visualization tool comprises at least one of: VR visualization tool, AR visualization tool, MR visualization tool.

19. A non-transitory computer-readable storage medium, having stored thereon a computer program, wherein the computer program is configured to perform the method of any one of claims 1 to 12 when executed.

20. An electronic device comprising a non-volatile memory and a processor, wherein a computer program is stored in the memory, and wherein the processor is arranged to execute the computer program to perform the method of any of claims 1 to 12.

Technical Field

The invention relates to the field of computer aided design of semiconductor devices and integrated circuits, in particular to a three-dimensional visual display method and a three-dimensional visual display system for electronic devices.

Background

In recent years, moore's law is slowing down as the size of individual transistors approaches the atomic limit. As such, three-dimensional integrated circuits are utilizing three dimensions to address scaling challenges. I.e. changing the geometry of the transistor from 2D to 3D or vertically stacked planar circuits. As technology nodes scale from microns to nanometers, the design of MOSFETs has evolved from planar FETs to finfets and stacked-nanosheet FETs. For example, existing 3D V-NAND memory with 92-layer functional structure is like a nano-scale skyscraper. Furthermore, as shown in fig. 1, by stacking silicon wafers or dies and vertically interconnecting them to fabricate a 3D integrated circuit, the 3D integrated circuit has significant advantages such as higher device density, shorter interconnections and lower power consumption, compared to a planar layout.

However, existing TCAD tools do not address the complexities of three-dimensional semiconductor device and integrated circuit design. For example, when using existing TCAD tools, the equipment engineer must continue to drag and rotate the semiconductor device with the mouse to view its structure on the 2D screen.

Disclosure of Invention

The embodiment of the invention provides a three-dimensional visual display method and a three-dimensional visual display system for an electronic device, which are used for at least solving the problem that the existing TCAD tool in the related art cannot meet the complexity of design of a three-dimensional semiconductor device and an integrated circuit.

According to an embodiment of the present invention, there is provided a three-dimensional visual display method of an electronic device, the method including: simulating the structure and/or electrical characteristics of an electronic device to obtain first visual data, wherein the electronic device comprises a semiconductor device and/or an integrated circuit, and the first visual data comprises three-dimensional grid position information and/or grid point physical quantities of the electronic device; converting the three-dimensional grid position information and/or the physical quantity on the grid points in the first visual data into second visual data suitable for virtual three-dimensional display according to the data type; rendering the second visualization data in a virtual space to display the structural and/or physical quantities of the electronic device in the virtual space.

Optionally, the three-dimensional grid position information and/or the physical quantity on the grid point in the first visualization data are converted into second visualization data suitable for virtual three-dimensional display according to the data type, and the second visualization data include at least one of the following data: for the geometric body in the first visual data, performing data conversion according to the geometric dimension and material property of the semiconductor device/integrated circuit to generate a three-dimensional grid and a material map; performing data conversion on the isosurface in the first visual data to generate an isosurface of a three-dimensional scalar field; for the contour line in the first visualization data, making a contour line of a three-dimensional scalar field on a specified two-dimensional section; for the heat map in the first visualization data, performing a heat map of a three-dimensional scalar field on a specified two-dimensional section; generating a stream cluster of a three-dimensional vector field using a stream conservation principle and a traffic for the stream cluster in the first visualization data; converting the physical quantities of the density class and the fluid class in the first visualization data into a particle system presentation in a visualization tool; for the phonon vibrational modes of the material in the first visualization data, converting to a presentation with simple harmonic vibrations of atoms in a unit cell; converting the Fermi surface of the material in the first visual data into a closed curved surface presentation adopting a first Brillouin zone; for a three-dimensional energy band of a material in the first visualization data, converting to rendering with multiple curved surfaces of a first brillouin zone; and converting the amplitude and the phase of the wave function in the first visual data into presentation by simple harmonic oscillators distributed on a space lattice.

Optionally, before converting the three-dimensional grid position information and/or the physical quantity on the grid point in the first visualization data into second visualization data suitable for virtual three-dimensional display according to data type, the method further includes: storing the first visualization data, wherein the data format of the stored first visualization data comprises at least one of the following: finite element non-uniform grid points, finite difference uniform grid points and three-dimensional pixel grid points; wherein a file format of the stored first visualization data comprises at least one of: binary files, ASCII text files.

Optionally, displaying a structural and/or physical quantity of the electronic device in the virtual space includes at least one of: displaying the structure and/or physical quantity of the electronic device in the virtual space according to the process steps; displaying the structure and/or physical quantity of the electronic device in the virtual space according to a time sequence evolution sequence; displaying the structure and/or physical quantity of the electronic device in the virtual space according to different process steps or different time sequence evolution sequences; displaying a user-selected portion of the structure and/or physical quantities of the electronic device in the virtual space.

Optionally, after displaying the structure and/or physical quantity of the electronic device in the virtual space, the method further comprises: acquiring an operation instruction of a user on the displayed electronic device; and changing the structure and/or physical quantity of the displayed electronic device according to the operation instruction.

Optionally, the structural and/or physical quantity of the electronic device displayed is changed according to the operation instruction, and the change includes at least one of the following: changing the geometry and/or shape of the electronic device of the virtual display; changing the doping concentration and/or doping profile of the semiconductor material of the virtually displayed electronic device; changing a material property of the electronic device virtually displayed, wherein the material property comprises at least one of: mobility, stress or electron-hole recombination rate of the semiconductor material; resistivity or work function of the metal material; the dielectric constant of the insulating material; changing the three-dimensional connection mode of the virtually displayed electronic device; continuously adjusting a gate voltage or bias voltage of the electronic device of the virtual display; adding or deleting one or more semiconductor materials of the electronic device virtually displayed.

Optionally, the operation instruction includes at least one of: the gesture, eye movement, voice, facial expression or head movement of the user, or an instruction generated by the user operating the virtual laser pointer, or an instruction generated by the user operating the infrared handle.

Optionally, wherein the structural and/or electrical characteristics of the semiconductor device/integrated circuit are simulated at a local server, or a remote server, or on the cloud to generate the first visualization data.

Optionally, after displaying the structure and/or physical quantity of the electronic device in the virtual space, the method further comprises: acquiring operation instructions of one or more users on the displayed electronic device in a real or virtual space; generating third visual data according to the operation instruction; and presenting the operation result of the electronic device in the real or virtual space by the one or more users to other users in the same or different real or virtual space according to the third visual data.

Optionally, after displaying the structure and/or physical quantity of the electronic device in the virtual space, the method further comprises: and acquiring the identification of the displayed electronic device by the user by using the virtual tool, and storing the identification content.

Optionally, after displaying the virtual structure and/or physical quantity of the electronic device, the method further comprises: acquiring image information of the virtual electronic device; and uploading the image information to a social platform or sharing the image information through an email.

Optionally, the physical quantity of the electronic device comprises at least one of: doping concentration, charge density, current density, band edge, quasi-fermi level, electrostatic potential, electric field, mobility, stress, heat.

According to another embodiment of the present invention, there is provided a three-dimensional visual display system of an electronic device, the system including: the electronic device comprises a calculation engine and a display engine, wherein the calculation engine is used for simulating the structure and/or electrical characteristics of an electronic device to obtain first visual data, the electronic device comprises a semiconductor device and/or an integrated circuit, and the first visual data comprises three-dimensional grid position information and/or grid point physical quantities of the electronic device; the data conversion unit is used for converting the three-dimensional grid position information and/or the physical quantity on the grid points in the first visual data into second visual data suitable for virtual three-dimensional display according to the data type; a visualization tool for rendering the second visualization data in the virtual space to display a structural and/or physical quantity of the electronic device in the virtual space.

Optionally, the system further comprises: and the sensor or the camera is used for acquiring an operation instruction of the user for operating the virtually displayed electronic device.

Optionally, the operation instruction includes at least one of: instructions generated by the user's gestures, eye movements, voice, facial expressions, or head movements, or instructions generated by the user operating a virtual laser pointer, or instructions generated by the user operating an infrared handle.

Optionally, the calculation engine comprises at least one of: the system comprises a material simulation calculation engine, a semiconductor process device simulation calculation engine and a circuit simulation calculation engine.

Optionally, the computing engine is disposed on a local server, or disposed on a remote server, or disposed on a cloud.

Optionally, the electronic device comprises at least one of: the three-dimensional transistor array comprises a three-dimensional fin transistor, a plurality of stacked and connected nanowire transistors, a three-dimensional vertical transistor, a three-dimensional vertical NAND memory, a three-dimensional DRAM memory, a three-dimensional FeRAM memory, a three-dimensional RRAM memory and a three-dimensional integrated circuit.

Optionally, the visualization tool comprises at least one of: VR visualization tool, AR visualization tool, MR visualization tool.

According to a further embodiment of the present invention, there is also provided a storage medium having a computer program stored therein, wherein the computer program is arranged to perform the steps of any of the above method embodiments when executed.

According to yet another embodiment of the present invention, there is also provided an electronic device, including a memory in which a computer program is stored and a processor configured to execute the computer program to perform the steps in any of the above method embodiments.

In the above-described embodiments, by converting the three-dimensional grid positions and the physical quantities on the grid points of the semiconductor device and the integrated circuit into a form suitable for virtual display in accordance with the type of data, the three-dimensional semiconductor device and the integrated circuit can be visually presented in a three-dimensional space, instead of being projected on a two-dimensional plane, and the three-dimensional operation space is not limited by the screen size.

Drawings

The accompanying drawings, which are included to provide a further understanding of the invention and are incorporated in and constitute a part of this application, illustrate embodiment(s) of the invention and together with the description serve to explain the invention without limiting the invention. In the drawings:

FIG. 1 is a schematic diagram of a 3D integrated circuit according to the prior art;

FIG. 2 is a block diagram of a visualization system according to an embodiment of the present invention;

FIG. 3 is a visualization system workflow diagram according to an embodiment of the invention;

FIG. 4 is a flow chart of a method for visualizing three-dimensional semiconductors and integrated circuits in accordance with an embodiment of the present invention;

FIG. 5 is a sequence diagram of a three-dimensional fin transistor pre-process according to an embodiment of the present invention;

FIG. 6 is a schematic structural diagram corresponding to process steps of a three-dimensional fin-shaped transistor according to an embodiment of the invention;

FIG. 7 is a graph of a 3nm node nanosheet transistor display effect according to an embodiment of the present invention;

FIG. 8 is a schematic diagram of a 3nm node nanosheet transistor charge density in accordance with an embodiment of the present invention;

FIG. 9 is a schematic diagram of a 3nm node nanosheet transistor current density in accordance with an embodiment of the present invention;

fig. 10 is a VR effect diagram of a three-dimensional energy band structure according to an embodiment of the present invention.

Detailed Description

The invention will be described in detail hereinafter with reference to the accompanying drawings in conjunction with embodiments. It should be noted that the embodiments and features of the embodiments in the present application may be combined with each other without conflict.

It should be noted that the terms "first," "second," and the like in the description and claims of the present invention and in the drawings described above are used for distinguishing between similar elements and not necessarily for describing a particular sequential or chronological order.

The present invention relates to Virtual Reality (VR), Augmented Reality (AR), or Mixed Reality (MR) systems, which are discussed in detail below. Although the term virtual reality is used throughout to describe the system, those skilled in the art will appreciate that virtual reality may include Virtual Reality (VR) and Augmented Reality (AR) as well as Mixed Reality (MR), in the general use of the term. In some cases, the term "VR/AR/MR" will be used for the visualization system. Thus, when the terms "virtual reality" or "VR/AR/MR" are used herein, it should be understood to include all types of visual reality, unless specifically distinguished.

As used in embodiments of the present invention, "virtual reality" may refer to a method of displaying and/or interacting with one or more elements representing computer-generated data. Typically, all elements visible within the field of view of the virtual reality display are computer-generated elements.

As used in embodiments of the present invention, "augmented reality" may refer to a method of displaying and/or interacting with one or more elements representing computer-generated data. Augmented reality is a mix of virtual reality and real life, where a typical augmented reality display includes one or more computer-generated elements overlaid on a real object visible to an operator. The term "augmented reality" as used herein may further include "mixed reality," which refers to an augmented reality display method that specifically includes the ability of a user or operator to interact with computer-generated elements.

Virtual display, as used in embodiments of the present invention, may refer to displaying and/or interacting with a virtual 3D object, where the virtual 3D object is dynamically updated to modify a view of an operator of the virtual 3D object in response to movement of the operator, or modification of a view of the virtual 3D object requested by the operator (e.g., a cross-sectional view of the virtual 3D object that is zoomed in/out, translated/rotated, etc.).