阅读说明：本技术 半导体制造方法及多片式沉积设备 (Semiconductor manufacturing method and multi-sheet type deposition apparatus ) 是由 曾祥栋 段贤坤 任若晨 于 2020-04-13 设计创作，主要内容包括：本发明实施方式提供了一种半导体制造方法及多片式沉积设备,半导体制造方法包括：对多片式沉积设备内的衬底进行第一轮沉积工艺；完成第一轮沉积工艺后取出衬底；向多片式沉积设备中通入辅助气体,并以辅助气体形成等离子体；向多片式沉积设备中放入待沉积的衬底；对多片式沉积设备内的衬底进行第二轮沉积工艺。通过在第一轮沉积工艺和第二轮沉积工艺的等待时间的时间间隔内,通入辅助气体使其转换成等离子体,从而增加多片式沉积设备内残留电荷的数量,在第二轮沉积工艺开始时,多片式沉积设备内残留电荷数量较多,能很快产生沉积工艺所需的射频,极大地加快了射频的产生时间,从而提高了衬底的生产效率。(The embodiment of the invention provides a semiconductor manufacturing method and multi-piece type deposition equipment, wherein the semiconductor manufacturing method comprises the following steps: carrying out a first round of deposition process on a substrate in the multi-piece type deposition equipment; taking out the substrate after the first round of deposition process is finished; introducing auxiliary gas into the multi-piece deposition equipment, and forming plasma by using the auxiliary gas; putting a substrate to be deposited into the multi-piece deposition equipment; and carrying out a second round of deposition process on the substrate in the multi-piece type deposition equipment. The auxiliary gas is introduced into the time interval of the waiting time of the first round of deposition process and the second round of deposition process to be converted into plasma, so that the number of residual charges in the multi-piece deposition equipment is increased, when the second round of deposition process starts, the number of residual charges in the multi-piece deposition equipment is large, radio frequency required by the deposition process can be generated quickly, the generation time of the radio frequency is greatly shortened, and the production efficiency of the substrate is improved.)

1. A semiconductor manufacturing method applied to a multi-sheet type deposition apparatus, comprising:

carrying out a first round of deposition process on the substrate in the multi-piece type deposition equipment;

taking out the substrate after the first round of deposition process is finished;

introducing auxiliary gas into the multi-piece deposition equipment, and forming plasma by using the auxiliary gas;

putting a substrate to be deposited into the multi-sheet type deposition equipment;

and carrying out a second round of deposition process on the substrate in the multi-piece type deposition equipment.

2. The semiconductor manufacturing method according to claim 1, wherein the first round deposition process comprises:

in a second preset time, introducing a first precursor into the multi-chip deposition equipment, and starting a radio frequency power supply to ionize the first precursor to form plasma;

and introducing a purging gas into the multi-piece deposition equipment for purging.

3. The semiconductor manufacturing method according to claim 1, wherein the second round deposition process comprises:

in a third preset time, introducing a second precursor into the multi-chip deposition equipment, and starting a radio frequency power supply to ionize the second precursor to form plasma;

And introducing a purging gas into the multi-piece deposition equipment for purging.

4. The semiconductor manufacturing method according to claim 1, wherein the introducing an auxiliary gas into the multi-sheet type deposition apparatus and forming a plasma with the auxiliary gas comprises:

introducing auxiliary gas into the multi-piece deposition equipment;

and starting the radio frequency power supply within a first preset time to ionize the auxiliary gas to form plasma.

5. The semiconductor manufacturing method of claim 4, wherein after the second round of deposition processing is performed on the substrate, further comprising:

the multi-piece deposition apparatus is further configured to perform multiple rounds of deposition processes;

and introducing auxiliary gas into the multi-sheet type deposition equipment within the first preset time between any two deposition processes of the multi-sheet type deposition equipment, and forming plasma by using the auxiliary gas.

6. The semiconductor manufacturing method according to any one of claims 1 to 5, wherein the assist gas includes at least one of the following gases: oxygen, ozone.

7. The semiconductor manufacturing method according to claim 1, further comprising, after the introducing an auxiliary gas into the multi-sheet deposition apparatus and forming a plasma with the auxiliary gas, and before the performing a second round of deposition process on the substrate in the multi-sheet deposition apparatus: and introducing a purging gas for purging.

8. The semiconductor manufacturing method according to claim 2, 3 or 7, wherein the time of the purge treatment is more than 5 seconds and less than 1 minute.

9. A multi-sheet deposition apparatus applied to the semiconductor manufacturing method of claims 1 to 8, comprising:

the gas inlet pipeline is used for introducing gas into the multi-piece deposition equipment, wherein the gas comprises purge gas, auxiliary gas or precursor;

an exhaust duct for exhausting the gas in the multi-sheet deposition apparatus;

the radio frequency power supply is used for providing radio frequency for the multi-piece deposition equipment;

and the controller is used for controlling the gas inlet pipeline to introduce the auxiliary gas into the multi-piece deposition equipment and starting the radio frequency power supply within a first preset time after the multi-piece deposition equipment completes a first round of deposition process and before a second round of deposition process starts.

10. The multi-sheet deposition apparatus of claim 9, wherein the controller further comprises:

and the purging module is used for introducing purging gas into the multi-piece deposition equipment for purging after the first preset time and before the second round of deposition process starts.

11. The multi-sheet deposition apparatus according to claim 9, wherein the gas inlet duct comprises at least:

a first air intake duct, a second air intake duct, and a third air intake duct;

the first gas inlet pipeline is used for introducing the auxiliary gas into the multi-sheet type deposition equipment; the second gas inlet pipeline is used for introducing the precursor into the multi-sheet type deposition equipment; and the third gas inlet pipeline is used for introducing purge gas into the multi-sheet type deposition equipment.

12. The multi-sheet deposition apparatus of claim 9, further comprising: the detection device is used for detecting the pressure intensity in the multi-piece type deposition equipment; and the pressure adjusting device is used for adjusting the pressure in the multi-piece type deposition equipment.

Technical Field

The invention relates to the field of semiconductor manufacturing methods, in particular to a semiconductor manufacturing method and multi-piece deposition equipment.

Background

At present, the volume of equipment applied to substrate deposition is gradually enlarged, and large-volume deposition equipment, namely multi-piece deposition equipment can perform deposition process on a large number of substrates at one time, so that the deposition efficiency is higher. In the prior art, the radio frequency compensation function is usually adopted to shorten the generation time of radio frequency in the multi-piece deposition equipment.

However, the inventors of the present invention have found that, for a multi-wafer type deposition apparatus, even if deposition processes are continuously performed for each batch of substrates, the time interval between deposition processes for each batch of substrates is much longer than that of a single wafer type deposition apparatus, which results in a significant reduction in the amount of residual charges in the deposition apparatus, and even if the rf generation time is shortened by using the rf compensation function, the rf generation time is still long, which seriously affects the deposition efficiency of the multi-wafer type deposition apparatus, thereby reducing the substrate production efficiency.

Disclosure of Invention

The embodiment of the invention provides a semiconductor manufacturing method and a multi-piece deposition device, wherein the number of residual charges in the multi-piece deposition device is increased by introducing auxiliary gas into the time interval between the first round of deposition process and the second round of deposition process of the multi-piece deposition device and converting the auxiliary gas into plasma, so that the radio frequency generation time required by the deposition process is shortened, and the production efficiency of a substrate is improved.

In order to solve the above technical problem, an embodiment of the present invention provides a semiconductor manufacturing method applied to a multi-sheet type deposition apparatus, including: carrying out a first round of deposition process on a substrate in the multi-piece type deposition equipment; taking out the substrate after the first round of deposition process is finished; introducing auxiliary gas into the multi-piece deposition equipment, and forming plasma by using the auxiliary gas; putting a substrate to be deposited into the multi-piece deposition equipment; and carrying out a second round of deposition process on the substrate in the multi-piece type deposition equipment.

Because the volume of the multi-piece deposition equipment is large, the multi-piece deposition equipment performs one round of deposition process, the number of substrates to be conveyed is large, even if two adjacent rounds of deposition processes are continuously performed, the waiting time (such as silicon wafer conveying time, pressure change time and gas purging processing time) is still long, namely, the residual charge quantity in the multi-piece deposition equipment after the radio frequency power supply is turned off in the first round of deposition process is small, and the radio frequency can be generated in the second round of deposition process only after the radio frequency power supply is turned off in the second round of deposition process (due to the fact that the waiting time is too long, the residual charge quantity in the multi-piece deposition equipment is too small, even though the radio frequency compensation function is adopted, the radio frequency generation time is long). In the embodiment of the invention, the auxiliary gas is introduced into the time interval of the waiting time to convert the auxiliary gas into the plasma, so that the residual charge quantity in the multi-piece deposition equipment is increased, when the second round of deposition process is started, the residual charge quantity in the multi-piece deposition equipment is more, the radio frequency required by the deposition process can be quickly generated, the radio frequency generation time is greatly accelerated, and the production efficiency of the substrate is improved.

In addition, the first round of deposition process includes: in a second preset time, introducing a first precursor into the multi-chip deposition equipment, and starting a radio frequency power supply to ionize the first precursor to form plasma; and introducing a purging gas into the multi-piece deposition equipment for purging treatment.

In addition, the second round of deposition process includes: in a third preset time, introducing a second precursor into the multi-chip deposition equipment, and starting a radio frequency power supply to ionize the second precursor to form plasma; and introducing a purging gas into the multi-piece deposition equipment for purging treatment.

In addition, the method for introducing auxiliary gas into the multi-sheet type deposition equipment and forming plasma by the auxiliary gas comprises the following steps: introducing auxiliary gas into the multi-piece deposition equipment; and starting the radio frequency power supply within a first preset time to ionize the auxiliary gas to form plasma.

In addition, after the second round of deposition process is carried out on the substrate, the method further comprises the following steps: the multi-piece deposition equipment is also used for executing multi-round deposition processes; and introducing auxiliary gas into the multi-sheet type deposition equipment within the first preset time between two times of deposition processes of the multi-sheet type deposition equipment, and forming plasma by using the auxiliary gas.

In addition, the auxiliary gas includes at least one of the following gases: oxygen, ozone.

In addition, after the auxiliary gas is introduced into the multi-sheet type deposition equipment and plasma is formed by the auxiliary gas, and before the second round of deposition process is carried out on the substrate in the multi-sheet type deposition equipment, the method further comprises the following steps: and introducing a purging gas for purging. In order to prevent the residual auxiliary gas from affecting the production of the substrate, the multi-piece deposition apparatus is purged before the second round of deposition process.

In addition, the time of the purge treatment is more than 5 seconds and less than 1 minute. By reasonably planning the purging time, the auxiliary gas in the multi-piece deposition equipment is ensured to be purged completely, and the efficiency of the deposition process is not influenced.

In addition, when the substrate is subjected to a deposition process in the multi-chip deposition equipment, the pressure of the multi-chip deposition equipment is less than 1 torr; when the substrate is put into or taken out of the multi-sheet type deposition apparatus, the pressure inside the multi-sheet type deposition apparatus is larger than 760 torr.

The embodiment of the invention also provides multi-piece type deposition equipment which is applied to the semiconductor manufacturing method and comprises the following steps: the gas inlet pipeline is used for introducing gas into the deposition equipment in a multi-piece mode, wherein the gas comprises purge gas, auxiliary gas or precursor; an exhaust duct for exhausting gas in the multi-sheet type deposition apparatus; the radio frequency power supply is used for providing radio frequency for the multi-piece deposition equipment; and the controller is used for controlling the gas inlet pipeline to introduce auxiliary gas into the multi-piece deposition equipment and starting the radio frequency power supply within a first preset time after the multi-piece deposition equipment completes the first round of deposition process and before the second round of deposition process starts.

Compared with the prior art, the auxiliary gas is introduced into the time interval of the waiting time of the two-round deposition process to be converted into the plasma, so that the residual charge quantity in the multi-piece deposition equipment is increased, when the second round deposition process is started, the residual charge quantity in the multi-piece deposition equipment is large, the radio frequency required by the deposition process can be generated quickly, the radio frequency generation time is greatly shortened, and the production efficiency of the substrate is improved.

In addition, the controller further includes: and the purging module is used for introducing purging gas into the multi-piece deposition equipment for purging after the first preset time and before the second round of deposition process starts.

In addition, the intake duct specifically includes: a first air intake duct, a third air intake duct, and a fourth air intake duct; the first gas inlet pipeline is used for introducing auxiliary gas into the multi-piece deposition equipment; the second gas inlet pipeline is used for introducing a precursor into the multi-sheet type deposition equipment; and the third gas inlet pipeline is used for introducing purge gas into the multi-piece deposition equipment.

In addition, the multi-sheet type deposition apparatus further includes: the detection device is used for detecting the pressure intensity of the multi-piece type deposition equipment; and the pressure adjusting device is used for adjusting the pressure of the multi-piece type deposition equipment.

The embodiment of the invention improves the process flow of the deposition process of the multi-piece deposition equipment, and increases the number of residual charges in the multi-piece deposition equipment by introducing auxiliary gas into the time interval between the first round of deposition process and the second round of deposition process in the multi-piece deposition equipment and converting the auxiliary gas into plasma, thereby shortening the generation time of radio frequency required by the deposition process and further improving the production efficiency of the substrate.

Drawings

One or more embodiments are illustrated by the accompanying figures in the drawings, corresponding to like reference numerals indicate similar elements, and in which the drawings are not to scale unless otherwise specified.

Fig. 1 is a flowchart of a semiconductor manufacturing method according to a first embodiment of the present invention;

fig. 2 is a schematic view of a multi-sheet type deposition apparatus according to a first embodiment of the present invention;

FIG. 3 is a schematic diagram of the shortening of the RF generation time according to the first embodiment of the present invention;

FIG. 4 is a schematic view of a substrate incorporating a multi-sheet deposition apparatus according to a first embodiment of the present invention;

FIG. 5 is a schematic view showing a state of a multi-wafer type deposition apparatus according to the first embodiment of the present invention, in which no pretreatment step is performed;

FIG. 6 is a schematic view showing a state of a multi-wafer type deposition apparatus for performing a pretreatment step in a semiconductor manufacturing method according to a first embodiment of the present invention;

fig. 7 is a flowchart of a semiconductor manufacturing method according to a second embodiment of the present invention;

wherein, the corresponding relation of the reference signs is as follows: 100-multi-plate deposition apparatus, 101-reaction chamber, 102-gas inlet pipe, 103-gas outlet pipe, 112-first gas inlet pipe, 122-fourth gas inlet pipe, 132-second gas inlet pipe, 142-third gas inlet pipe, 201-radio frequency generation time curve when initial charge amount of reaction chamber is 0, 202-radio frequency generation time curve when reaction chamber has initial charge amount e1, 110-substrate, 120-carrying device, 301-precursor in plasma state, 302-electrode, 303-residual charge, 304-small amount of charge, 305-oxygen plasma.

Detailed Description

At present, apparatuses applied to substrate deposition are divided into single-wafer deposition apparatuses and multi-wafer deposition apparatuses, and compared with the single-wafer deposition apparatuses, the multi-wafer deposition apparatuses can perform deposition processes on a large number of substrates at a time, and deposition efficiency is higher. In the prior art, the radio frequency compensation function is usually adopted to shorten the generation time of radio frequency in the multi-piece deposition equipment.

However, the inventors have found that the reaction space of the multi-sheet type deposition apparatus is much larger than that of a general single-sheet type deposition apparatus, and thus, the multi-sheet type deposition apparatus is a large-volume deposition apparatus compared to the single-sheet type deposition apparatus. And for a multi-wafer deposition apparatus, even if the deposition process for each batch of substrates is continuously performed, the interval time between the deposition processes for each batch of substrates is far longer than that of a single wafer deposition apparatus, and particularly, because of the design of the multi-wafer deposition apparatus (the deposition process needs to be carried out for >100 substrates each time), even if the deposition process for each batch is continuously performed, the interval time (substrate transfer + non-process main step pressure change + process main step post-gas purging treatment) is more than 60 minutes, and the interval time of the single wafer deposition apparatus is generally less than 7 minutes. The residual charge quantity in the multi-piece type deposition equipment is greatly reduced, even if the radio frequency generation time is shortened by adopting a radio frequency compensation function, the radio frequency generation time is still long, the deposition efficiency of the multi-piece type deposition equipment is seriously influenced, and the production efficiency of the substrate is reduced.

In order to solve the above problems, an embodiment of the present invention provides a semiconductor manufacturing method applied to a multi-sheet type deposition apparatus, including: carrying out a first round of deposition process on a substrate in the multi-piece type deposition equipment; taking out the substrate after the first round of deposition process is finished; introducing auxiliary gas into the multi-piece deposition equipment, and forming plasma by using the auxiliary gas; putting a substrate to be deposited into the multi-piece deposition equipment; and carrying out a second round of deposition process on the substrate in the multi-piece type deposition equipment.

In order to make the objects, technical solutions and advantages of the embodiments of the present invention more apparent, embodiments of the present invention will be described in detail below with reference to the accompanying drawings. However, it will be appreciated by those of ordinary skill in the art that numerous technical details are set forth in order to provide a better understanding of the present application in various embodiments of the present invention. However, the technical solution claimed in the present application can be implemented without these technical details and various changes and modifications based on the following embodiments. The following embodiments are divided for convenience of description, and should not constitute any limitation to the specific implementation manner of the present invention, and the embodiments may be combined with each other and referred to each other without contradiction.

The details of the semiconductor manufacturing method according to the present embodiment will be described below.

A semiconductor manufacturing method according to this embodiment has a specific flowchart shown in fig. 1, and an apparatus diagram of a multi-wafer deposition apparatus shown in fig. 2, and the flowchart includes:

step a01, providing a multi-sheet deposition apparatus for a deposition process, the multi-sheet deposition apparatus 100 comprising:

and a reaction chamber 101 for placing the substrate loaded into the multi-sheet deposition apparatus and performing a deposition process on the plurality of substrates in the multi-sheet deposition apparatus. Since the substrate is subjected to the deposition process in the reaction chamber 101, it is clear to those skilled in the art that the gas subsequently introduced into the multi-piece deposition apparatus 100 is actually introduced into the reaction chamber 101. The substrate includes: wafers, silicon wafers, etc. are used as raw materials for performing the deposition process. Specifically, after the substrate is positioned in the reaction chamber 101 and the rf power is turned on, the substrate positioned in the reaction chamber 101 is subjected to a deposition process.

It should be noted that the multi-piece deposition apparatus 100 has a larger container volume and the reaction chamber 101 can hold more substrates than a single-piece deposition apparatus. The multi-piece deposition apparatus disclosed in this embodiment may not only be applied to depositing a plurality of substrates, but also be applied to depositing a single substrate, as will be apparent to those skilled in the art, that is, the multi-piece deposition apparatus disclosed in this embodiment is not limited to the number of substrates applied thereto.

And a gas inlet duct 102 for introducing gas into the multi-sheet deposition apparatus 100.

The gas introduced through the gas inlet pipe 102 comprises precursors required by the deposition process (including a first precursor required by the first deposition process and a second precursor required by the second deposition process), auxiliary gas introduced between the first deposition process and the second deposition process, and purge gas for purging; wherein the purge gas comprises at least N₂Or an inert gas; the precursor is a gaseous material to be deposited on the substrate; the secondary gas includes at least one of oxygen or ozone.

Specifically, the intake duct 102 includes: a first air intake duct 112, a second air intake duct 132, and a third air intake duct 142.

When the multi-sheet deposition apparatus 100 performs a first round deposition process and a second round deposition process, the first gas inlet pipe 112 is used for introducing an auxiliary gas into the multi-sheet deposition apparatus 100; when the multi-sheet deposition apparatus 100 performs a deposition process, the second gas inlet pipe 132 is used for introducing a precursor into the multi-sheet deposition apparatus 100; the third gas inlet line 142 is used to introduce purge gas into the multi-sheet deposition apparatus 100.

It should be noted that, in the present embodiment, the intake duct 102 may further includeA fourth gas inlet pipe 122 is included, the fourth gas inlet pipe 122 is used for introducing a protective gas for maintaining the multi-plate deposition apparatus 100, in the embodiment, the protective gas is N₂Or an inert gas; in other embodiments, the shielding gas may also be a cleaning gas, such as hydrogen fluoride, that cleans the multi-piece deposition apparatus.

And an exhaust duct 103 for exhausting gas in the multi-sheet type deposition apparatus 100.

An rf power supply (not shown) for supplying rf to the multi-sheet deposition apparatus 100.

And a controller (not shown) for controlling the gas inlet pipe 102 to introduce the auxiliary gas into the multi-sheet deposition apparatus 100 and turn on the rf power for a first preset time after the multi-sheet deposition apparatus 100 completes the first deposition process and before the second deposition process starts. In the first preset time, the auxiliary gas is converted into plasma, so that the residual charge of the reaction chamber 101 is increased, and the time spent on the subsequent radio frequency generation is shortened.

Principle of shortening the radio frequency generation time by the amount of residual charge, refer to fig. 3:

in FIG. 3, the X-axis represents the ON time of the RF power source and the Y-axis represents the amount of charge in the chamber. It is assumed that when the amount of charge in the reaction chamber reaches e0, the radio frequency required for the deposition process is generated and ionizes the precursors to form a plasma for deposition on the substrate.

The curve 201 shows that when the initial charge amount of the reaction chamber is 0 (i.e., the initial point of the curve is O), the charge amount in the reaction chamber reaches e0 after the time t2 (abscissa of point a in the curve 201) elapses after the rf power is turned on, and the time t2 elapses after the rf power is turned on. The curve 202 shows that when the initial charge amount of the reaction chamber is e1 (i.e., the initial point of the curve is C), the charge amount in the reaction chamber reaches e0 after the time t1 (abscissa of the point B in the curve 202) elapses after the RF power is turned on, and the time t1 elapses after the RF power is turned on until the RF power is generated. Comparing the curve 201 and the curve 202, it can be seen that the higher the charge amount of the initial charge in the reaction chamber, the shorter the generation time from turning on the radio frequency power to the radio frequency.

With continued reference to fig. 1, step a02 is a deposition process step, and step a02 specifically includes: the steps of a12, a22 and a32 are as follows:

Step a12, the substrate is placed in a multi-sheet deposition apparatus.

Referring to fig. 4, a plurality of substrates 110 are stacked in a carrier 120, and the substrates 110 are loaded into the multi-sheet deposition apparatus 100 through the carrier 120. The multi-wafer deposition apparatus 100 deposits a plurality of substrates 110 in one deposition process, which results in that it takes a lot of time to transfer and stack the substrates 110 even though two deposition processes are continuously performed, resulting in a loss of residual charges in the reaction chamber of the multi-wafer deposition apparatus 100, i.e., when the next deposition process starts, the initial charge amount in the reaction chamber of the multi-wafer deposition apparatus 100 is small, delaying the time of rf generation, thereby affecting the output of substrate products.

It should be noted that, when the substrate 110 is loaded into or unloaded from the multi-sheet deposition apparatus 100, the pressure inside the multi-sheet deposition apparatus 100 is greater than or equal to 760 torr.

Step a22, a deposition process is performed on the substrate.

Specifically, a first round of deposition process is performed on the substrate. It should be noted that the first round of deposition process performed on the substrate 110 by the multi-sheet deposition apparatus 100 is not specific to the first round of deposition process after the substrate 110 is placed into the multi-sheet deposition apparatus 100, but any round of deposition process performed on the substrate 110 by the multi-sheet deposition apparatus 100 may be regarded as the first round of deposition process.

A first precursor is introduced into the reaction chamber 101, and the rf power supply is turned on to ionize the first precursor in the reaction chamber 101 to form a plasma. When the amount of the plasma reaches a certain level, a radio frequency required for a deposition process is generated in the reaction chamber 101. After a second preset time, the radio frequency power supply is turned off, the substrate after deposition is taken out, and a purge gas is introduced into the reaction chamber 101 for purging. The second predetermined time is the time from turning on the rf to the completion of the first deposition process in the chamber 101.

It should be noted that, when the deposition process is performed on the substrate in the reaction chamber 101, the pressure of the reaction chamber 101 is less than 1 torr.

Step a32, purge treatment.

Specifically, a purge gas is introduced into the reaction chamber 101 to perform a purge process. The purge gas is introduced into the reaction chamber 101 to replace the gas generated in the reaction chamber 101 due to the deposition process, thereby preventing the residual gas from affecting the next deposition process.

After the step a32 is completed, that is, the step a02 is completed, the multi-sheet type deposition apparatus 100 completes the first round of deposition process; before the multi-piece deposition apparatus 100 performs the second round of deposition process steps, that is, between the two rounds of deposition process steps performed by the multi-piece deposition apparatus 100, the method further includes:

And a03, introducing auxiliary gas into the multi-plate type deposition equipment, and forming plasma by using the auxiliary gas.

It should be noted that the purpose of forming the plasma by the ionization auxiliary gas is to increase the amount of residual charges in the multi-wafer deposition apparatus, and it can be understood by those skilled in the art that, since the plasma is formed in the multi-wafer deposition apparatus, the residual charges are also correspondingly generated, and by increasing the total amount of residual charges in the multi-wafer deposition apparatus, the generation rate of the radio frequency in the multi-wafer deposition apparatus can be increased.

If step a03 is not executed, the corresponding status of each step in the reaction chamber 101 is as follows with reference to the flowchart in fig. 5:

the diagram (a1) shows the multi-wafer deposition apparatus not yet beginning the deposition process, the chamber 101 without residual charge and plasma, the rf power supply turned off, and the electrodes 302 in the non-operating state.

Fig. a2 shows the multi-wafer deposition apparatus being in a deposition process, wherein the rf power is applied to the reaction chamber 101 through the electrodes 302, and the reaction chamber 101 is filled with the precursor 301 in a plasma state.

Since there is no residual charge in the reaction chamber 101 in graph (a1), the generation time of the first round of RF is long from graph (a1) to graph (a 2).

After the deposition process is completed, the rf power is turned off to purge the remaining plasma in the reaction chamber 101, and there is a residual charge 303 generated by the plasma generated on the sidewall of the reaction chamber 101 near the electrode 302, which is shown in (a 3).

Since the multi-sheet type deposition apparatus performs one deposition process, the number of substrates to be transferred is large, and even if two adjacent deposition processes are continuously performed, the waiting time (silicon wafer transfer time, pressure change time and gas purge processing time) is long, that is, the number of residual charges remaining in the reaction chamber 101 of the multi-sheet type deposition apparatus after the rf power is turned off in the first deposition process is small. That is, during the process from the turning-off of the rf power source illustrated in fig. a3 to the turning-on of the rf power source illustrated in fig. a2, the intermediate process from fig. a3 to fig. a4 to fig. a2 may be caused due to the excessive size of the multi-sheet type deposition apparatus. Specifically, since the waiting time is longer, the amount of the residual charge in the reaction chamber 101 gradually decreases, and the amount of the residual charge becomes a small amount of charge 304 as shown in fig. (a4), and at this time, the process from fig. (a4) to fig. (a2) is equivalent to the process from fig. (a1) to fig. (a2) since the initial amount of charge is smaller, that is, the generation time of the radio frequency in the subsequent process is still long.

If step a03 is executed, the corresponding status of each step in the reaction chamber 101 is as follows with reference to the flowchart of fig. 6:

during the two deposition steps, i.e., from (b3) to (b2), an auxiliary gas, such as oxygen, is introduced into the multi-piece deposition apparatus.

Figure (b4) shows the oxygen gas being introduced into the chamber 101 and the rf power is turned on to ionize the oxygen gas to form the oxygen plasma 305. After the predetermined time, the rf power is turned off, and the residual charges 303 in the reaction chamber 101 are not reduced, so that the state of the reaction chamber 101 is similar to the diagram (b5) of the diagram (b3), and when the next deposition process is performed, the rf can be easily generated because the amount of the residual charges 303 in the reaction chamber 101 is large.

After the step a03 is completed, the step a02 is continuously performed, and the introduced precursor is the second precursor, and the second round of deposition process is performed on the substrate in the multi-plate deposition apparatus 100, wherein the third predetermined time is the time taken for the substrate to complete the first round of deposition process in the reaction chamber 101 after the radio frequency is turned on.

It should be noted that the first precursor and the second precursor may be the same or different, and if the first precursor and the second precursor are the same, it means that the first deposition process and the second deposition process deposit the same material on the substrate; if the first precursor is different from the second precursor, the first deposition process and the second deposition process are different from each other. In addition, the relationship between the second preset time (for performing the first round of deposition process) and the third preset time (for performing the second round of deposition process) is not limited in this embodiment, and it should be clear to those skilled in the art that the second preset time and the third preset time are specifically set according to different deposition precursors. It should be noted that the first deposition process and the second deposition process may be a plurality of deposition processes performed on the same batch of substrates or deposition processes performed on different batches of substrates.

It should be noted that, in this embodiment, after performing the second round of deposition process on the substrate in the multi-sheet deposition apparatus 100, the method further includes: the multi-sheet deposition apparatus 100 is also used to perform multiple deposition runs; introducing auxiliary gas into a reaction chamber 101 of the multi-chip deposition equipment 100 and starting a radio frequency power supply to ionize the auxiliary gas to form plasma between two deposition processes of the multi-chip deposition equipment 100; and after the first preset time, turning off the radio frequency power supply.

It should be noted that the first round deposition process and the second round deposition process described in the present embodiment are not meant to refer to the first round deposition process and the second round deposition process; it should be clear to those skilled in the art that any one deposition process of the multi-wafer deposition apparatus 100 may be used as the first deposition process and the next deposition process as the second deposition process during the deposition process, and it is within the scope of the present patent to include a pretreatment step between the two deposition processes.

The above steps are divided for clarity, and the implementation may be combined into one step or split some steps, and the steps are divided into multiple steps, so long as the steps include the same logical relationship, which is within the protection scope of the present patent; it is within the scope of the patent to add insignificant modifications to the flow or to introduce insignificant design, but not to change the core design of the flow.

In the embodiment, the number of residual charges in the multi-piece deposition equipment is increased by introducing the auxiliary gas into the interval time of plasma deposition of the multi-piece deposition equipment and converting the auxiliary gas into the plasma, so that the generation time of radio frequency required by a deposition process is shortened, and the production efficiency of the substrate is improved.

A second embodiment of the present invention relates to a semiconductor manufacturing method, and is substantially the same as the first embodiment except that: the flow of the mode of the embodiment is further optimized.

The details of the semiconductor manufacturing method according to the present embodiment will be described below. The same or corresponding parts as in the previous embodiment will not be described in detail below.

Step a01, a multi-piece deposition apparatus for a deposition process is provided.

Step a02, the deposition process comprises the following steps: step a12, step a22, and step a 32. Specifically, step a12, the substrate is placed in a multi-sheet deposition apparatus; step a22, performing a deposition process on the substrate; step a32, purge treatment.

Step a03, a preprocessing step is carried out, and after the preprocessing step, the radio frequency power supply is closed.

Unlike the first embodiment, the first embodiment continues to perform step a02 after step a01 is performed, and in the present embodiment, after step a01 is performed, step a03 is performed first, and then step a02 is performed.

Namely before the first round of deposition process steps of the multi-piece type deposition equipment, the method further comprises the following steps: a pretreatment step is carried out, auxiliary gas is introduced into the reaction chamber 101, and a radio frequency power supply is started to ionize the auxiliary gas to form plasma; after the pre-processing step, the radio frequency power supply is turned off.

The generation time of radio frequency required by the first round of deposition process is shortened by increasing the residual charge quantity in the reaction chamber 101 of the multi-piece type deposition equipment, and the production efficiency of the substrate is further improved.

The embodiment further includes a step b04 after the step a03 is executed and before the step a02 is executed in each round.

Step b04, purge treatment.

Specifically, a purge gas is introduced into the reaction chamber 101 to perform a purge process. The process is similar to the process of the step a32, but the step b04 has specific requirements on the purging time, and the purging time is more than 5 seconds and less than 1 minute. By reasonably planning the purging time, the auxiliary gas in the multi-piece deposition equipment is purged completely without affecting the overall efficiency of the deposition process.

The above steps are divided for clarity, and the implementation may be combined into one step or split some steps, and the steps are divided into multiple steps, so long as the steps include the same logical relationship, which is within the protection scope of the present patent; it is within the scope of the patent to add insignificant modifications to the flow or to introduce insignificant design, but not to change the core design of the flow.

In the embodiment, before the multi-piece deposition equipment performs the first round of deposition process, the auxiliary gas is introduced and converted into the plasma, so that the number of residual charges in the reaction chamber 101 of the multi-piece deposition equipment is increased, the generation time of radio frequency required by the first round of deposition process is shortened, and the production efficiency of the substrate is improved. Meanwhile, in order to prevent the residual auxiliary gas from affecting the production of the substrate, the reaction chamber 101 of the multi-piece deposition apparatus is purged before the deposition process is performed.

In the present embodiment, the multi-plate deposition apparatus is described by taking a furnace tube apparatus as an example, and details of implementation of the multi-plate deposition apparatus of the present embodiment are specifically described below.

Referring to fig. 2, the multi-sheet type deposition apparatus 100 includes: a reaction chamber 101 for a substrate to perform a deposition process, and:

a gas inlet pipe 102 for introducing gas into the multi-sheet deposition apparatus 100, wherein the gas includes purge gas, auxiliary gas or precursor; an exhaust duct 103 for exhausting gas in the multi-sheet type deposition apparatus 100; a radio frequency power source (not shown) applied to the multi-sheet deposition apparatus 100 for supplying a radio frequency to the multi-sheet deposition apparatus 100; and a controller (not shown) for controlling the gas inlet pipe 102 to introduce the auxiliary gas into the multi-sheet deposition apparatus 100 and turn on the rf power for a first preset time after the multi-sheet deposition apparatus 100 completes the first deposition process and before the second deposition process starts.

In this embodiment, the gases include precursors required for the deposition process, assist gases introduced between deposition process steps, and purge gases used for purging. Wherein the precursor comprises a gaseous material to be deposited on the substrate; the secondary gas includes at least one of oxygen or ozone.

Specifically, the intake duct 102 includes: a first air intake duct 112, a second air intake duct 132, and a third air intake duct 142.

When the multi-sheet deposition apparatus 100 performs a first round deposition process and a second round deposition process, the first gas inlet pipe 112 is used for introducing an auxiliary gas into the multi-sheet deposition apparatus 100; the second gas inlet conduit 132 is used to introduce precursors into the multi-piece deposition apparatus 100 when the multi-piece deposition apparatus 100 is performing a deposition process. The third gas inlet line 142 is used to introduce purge gas into the multi-sheet deposition apparatus 100.

In this embodiment, the gas inlet pipe 102 may further include a fourth gas inlet pipe 122, the fourth gas inlet pipe 122 is used for introducing a shielding gas for maintaining the multi-plate deposition apparatus 100, and in this embodiment, the shielding gas is N₂Or an inert gas; in other embodiments, the shielding gas may also be a cleaning gas, such as hydrogen fluoride, that cleans the multi-piece deposition apparatus 100.

Specifically, the radio frequency power supply passes through electrodes attached to the reaction chamber 101; during the deposition process, when the rf power is turned on, the precursor in the reaction chamber 101 is gradually ionized and converted into plasma. In the two deposition processes, when the rf power is turned on, the auxiliary gas in the reaction chamber 101 is converted into plasma, and after the rf power is turned off, a large amount of residual charges are left in the reaction chamber 101, thereby reducing the generation time of the rf required for the deposition process during the deposition process, and thus improving the deposition efficiency of the substrate.

In this embodiment, the controller further comprises: purge module (not shown). The purge module (not shown) is used for purging the reaction chamber 101 with a purge gas after a first predetermined time before the deposition process is started. Specifically, the time of the purge treatment is more than 5 seconds and less than 1 minute. By reasonably planning the purging time, the auxiliary gas in the multi-piece deposition equipment 100 is ensured to be purged completely, and the working efficiency of the deposition process is not influenced.

It should be noted that, in other embodiments, the multi-sheet deposition apparatus further includes: and the detection device is used for detecting the pressure of the reaction chamber. And the pressure adjusting device is used for adjusting the pressure of the reaction chamber. Specifically, when the substrate is subjected to a deposition process in the reaction chamber, the pressure of the reaction chamber is adjusted to be less than 1 torr; and adjusting the pressure of the multi-piece deposition device to be higher than 760torr when the substrate is added into or taken out of the multi-piece deposition device.

The embodiment of the invention provides an installation mode of the following detection device and pressure regulating device, which comprises the following specific steps:

the first method is as follows: the pressure of the multi-sheet deposition apparatus 100 is adjusted manually: in this manner, an additional display panel needs to be installed, the detection device is connected to the display panel, the detection device displays a specific value of the pressure inside the deposition apparatus 100 through the display panel after detecting the pressure inside the multi-piece deposition apparatus 100, and the worker refers to the value, and controls the pressure adjustment device to adjust the pressure inside the multi-piece deposition apparatus 100 if the pressure inside the multi-piece deposition apparatus 100 needs to be adjusted.

The second method comprises the following steps: the adjustment is automatically performed by the multi-sheet deposition apparatus 100: the mode detection device and the pressure regulation device are connected to a controller, the detection device detects the pressure in the multi-piece deposition device 100 in real time, the detection device sends a control signal to the controller after detecting that the pressure in the multi-piece deposition device 100 exceeds or is lower than a preset value, and the controller controls the pressure regulation device to regulate the pressure in the multi-piece deposition device 100 after receiving the control signal.

It should be noted that each module referred to in this embodiment is a logical module, and in practical applications, one logical unit may be one physical unit, may be a part of one physical unit, and may be implemented by a combination of multiple physical units. In addition, in order to highlight the innovative part of the present invention, elements that are not so closely related to solving the technical problems proposed by the present invention are not introduced in the present embodiment, but this does not indicate that other elements are not present in the present embodiment.

Since the first and second embodiments correspond to the present embodiment, the present embodiment can be implemented in cooperation with the first and second embodiments. The related technical details mentioned in the first and second embodiments are still valid in the present embodiment, and the technical effects that can be achieved in the first and second embodiments can also be achieved in the present embodiment, and are not described herein again in order to reduce repetition. Accordingly, the related-art details mentioned in the present embodiment can also be applied to the first and second embodiments.

In the embodiment, the auxiliary gas is introduced into the reaction chamber to be converted into the plasma in the time interval of the waiting time, so that the number of residual charges in the reaction chamber is increased, when the next round of deposition process is started, the number of residual charges in the reaction chamber is large, the radio frequency required by the deposition process can be generated quickly, the radio frequency generation time is greatly shortened, and the production efficiency of the substrate is improved.

It will be understood by those of ordinary skill in the art that the foregoing embodiments are specific examples for carrying out the invention, and that various changes in form and details may be made therein without departing from the spirit and scope of the invention in practice.