阅读说明：本技术 环烯烃组合物及应用其的半导体容器 (Cycloolefin composition and semiconductor container using the same ) 是由 江俊彥 邱铭乾 于 2019-03-12 设计创作，主要内容包括：本发明公开一种环烯烃组合物,其包括添加石墨烯材料之环烯烃共聚物或添加石墨烯材料的环烯烃聚合物,其中石墨烯材料所占的重量百分比为0.6％～1.8％。本发明提供一种环烯烃半导体容器,其由该环烯烃组合物所制成。(The invention discloses a cycloolefin composition, which comprises cycloolefin copolymer added with graphene materials or cycloolefin polymer added with the graphene materials, wherein the weight percentage of the graphene materials is 0.6-1.8%. The invention provides a cycloolefin semiconductor container which is prepared from the cycloolefin composition.)

1. A cycloolefine semiconductor container is prepared from a cycloolefine composition, and is characterized in that the cycloolefine composition comprises a cycloolefine copolymer added with a graphene material or a cycloolefine polymer added with the graphene material, and the weight percentage of the graphene material is 0.6-1.8%;

the graphene material is graphene nanoplatelets, graphene oxide or a combination thereof.

2. The cyclic olefin semiconductor container according to claim 1, wherein the cyclic olefin semiconductor container is a mask carrier or a substrate carrier.

3. The cyclic olefin semiconductor container according to claim 2, wherein the specific gravity of the cyclic olefin semiconductor container is in the range of 1 to 1.2.

4. The cyclic olefin semiconductor container according to claim 2, wherein the water content of the cyclic olefin semiconductor container is in the range of 0.0001% to 0.01%.

5. The cyclic olefin semiconductor container according to claim 2, wherein the shrinkage ratio of the cyclic olefin semiconductor container is in the range of 0.1% to 0.5%.

6. The cyclic olefin semiconductor container according to claim 5, wherein the cyclic olefin semiconductor container has an impact strength in the range of 30J/m to 50J/m.

7. A cycloolefin composition is characterized by comprising a cycloolefin copolymer added with a graphene material or a cycloolefin polymer added with the graphene material, wherein the graphene material accounts for 0.6-1.8% of the weight percentage;

the graphene material is graphene nanoplatelets, graphene oxide or a combination thereof.

Technical Field

The invention relates to the technical field of material compositions and application thereof, in particular to a cycloolefin composition added with a graphene material and a semiconductor container applying the cycloolefin composition.

Background

In the semiconductor industry, containers commonly used for transportation include both transportation boxes and storage boxes, and the main materials of the semiconductor containers include Polypropylene (PP), Polycarbonate (PC), liquid Crystal Polymer (L liquid Crystal Polymer, L CP), and so on.

The early conveying box is mostly made of polypropylene, but the early conveying box is less used due to low manufacturing yield; the polycarbonate is used as the main material, but because the water absorption rate of the material is more than 0.25%, the low-humidity maintaining time is short, and the requirement for maintaining dryness is higher in comparison with the processing process, the manufacturing cost is increased, and the polycarbonate is less used. As for the liquid crystal polymer as the host material, it is considered that it has the advantages of high hardness, high heat distortion temperature, high yield and long humidity maintaining time. There still remain other problems such as high material cost, weak strength in the direction perpendicular to the fluid flow and easy breakage.

Therefore, in the face of stringent process standards and cost considerations in the semiconductor industry, the choice of host material is critical without changing the structure of the container body. The present invention is to achieve the requirements of light weight, high dimensional stability, impact resistance, long humidity maintaining time, low harmful gas release and low organic gas volatilization by improving the material.

In the following development and application, for example, the invention disclosed in taiwan patent No. TWI560798, a technique of using a cyclic olefin composition to add Carbon Nanotubes (CNTs) to adjust a semiconductor container to an antistatic (Anti-static) grade is proposed. However, taiwan patent No. TWI560798 requires the addition of up to 2.0-2.8% by weight of carbon nanotubes when the container is to be adjusted to an Anti-static grade. Carbon Nanotubes (CNTs), which are expensive Carbon materials, contribute to the improvement of various characteristics of CNTs by a high weight percentage, but greatly increase the cost of semiconductor containers. In addition, the use of an excessive amount of Carbon Nanotubes (CNTs) in a semiconductor container may also cause environmental pollution.

Disclosure of Invention

In view of the problems of commercial difficulties and possible environmental pollution caused by the greatly increased manufacturing costs mentioned in the prior art, the present invention provides a cycloolefin composition that can greatly reduce the problems of use and contamination of carbon nanotubes and simultaneously achieve a technique for exhibiting Anti-static properties.

As described above, the present invention discloses a cycloolefin composition, which comprises a cycloolefin compound, and further comprises a graphene material, wherein the graphene material is 0.6-1.8% by weight. Wherein the Cycloolefin compound can be a Cycloolefin copolymer (COC) or a Cycloolefin polymer (COP); the graphene material may be graphene nanoplatelets (graphene nanoplatelets), graphene oxide (graphene oxide), or a combination thereof.

Cyclic olefins are produced by Ring-opening metathesis polymerization (ROMP), a thermosetting copolymer obtained by reaction injection molding, and a thermoplastic copolymer whose molecular weight is controlled by a hydrogenation step, i.e., a Cyclic Olefin Copolymer (COC). In addition, the polymerization reaction is carried out in the presence of a catalyst, so that a bicyclic structure, namely a Cyclic Olefin Polymer (COP), is retained on the main chain. The invention further adds 0.6 to 1.8 weight percent of graphene material into the cycloolefin compound.

The cycloolefin semiconductor container of the present invention is made of the cycloolefin composition, so that the cycloolefin semiconductor container has the characteristics of light weight, high dimensional stability, impact resistance, long humidity maintaining time, low harmful gas release, high yield, etc.

The foregoing summary of the invention is provided to introduce a basic description of various aspects and features of the invention. This summary is not an extensive overview of the invention, and is intended to neither identify key or critical elements of the invention nor delineate the scope of the invention, but to present some concepts of the invention in a simplified form.

Drawings

In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, it is obvious that the drawings in the following description are only some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to the structures shown in the drawings without creative efforts.

FIG. 1 is a graph comparing the weight percentage of carbon material added in examples of the present invention and comparative examples.

The implementation, functional features and advantages of the objects of the present invention will be further described with reference to the accompanying drawings.

Detailed Description

The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.

It should be noted that all the directional indicators (such as upper, lower, left, right, front and rear … …) in the embodiment of the present invention are only used to explain the relative position relationship between the components, the motion situation, etc. in a specific posture (as shown in the drawing), and if the specific posture is changed, the directional indicator is changed accordingly.

In the present invention, unless otherwise expressly specified or limited, the terms "connected," "secured," and the like are to be construed broadly, e.g., "secured" may be fixedly connected, releasably connected, or integral; can be mechanically or electrically connected; they may be directly connected or indirectly connected through intervening media, or they may be connected through the use of an interconnecting member or members, or they may be interconnected through a network or network, unless expressly specified otherwise. Those skilled in the art can understand the specific meaning of the above terms in the present invention according to specific situations.

In addition, the descriptions related to "first", "second", etc. in the present invention are only for descriptive purposes and are not to be construed as indicating or implying relative importance or implying any number of indicated technical features. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one such feature. In addition, the technical solutions in the embodiments may be combined with each other, but must be based on the realization of those skilled in the art, and when the technical solutions are contradictory or cannot be realized, such a combination should not be considered to exist, and is not within the protection scope of the present invention.

The invention relates to a Cycloolefin composition, which is a composition formed by taking a Cycloolefin compound such as a Cycloolefin copolymer (COC) or a Cycloolefin polymer (COP) as a main material and adding 0.6-1.8 wt% of a graphene material, and a Cycloolefin semiconductor container prepared by applying the material composition. The cyclic olefin semiconductor container may be a mask carrier or a substrate carrier, and the Graphene material may be Graphene nanoplatelets (Graphene nanoplatelets), Graphene oxide (Graphene oxide), or a combination thereof.

The mask carrier may be a mask Pod (Reticle Pod). The Reticle Pod (Reticle Pod) comprises a Reticle storage Pod, a Reticle Pod (including a Standard Mechanical Interface (SMIF) Reticle Pod), or an Extreme Ultraviolet (EUV) Reticle Pod; the Substrate carrier may be a Front Opening Unified Pod (FOUP), a wafer cassette, or any other transport or storage container for carrying substrates (substrates) used in semiconductor manufacturing, but the invention is not limited thereto.

The Substrate (Substrate) used in the semiconductor process may be a silicon Substrate, a glass Substrate, a ceramic Substrate, a flexible plastic Substrate, a sapphire Substrate, or the like. And the silicon substrate may be a wafer.

In this embodiment, the Surface resistance is set at (Surface resistance) 10⁹～10¹²(units: ohm/unit area; Ω/sq.) comparative tests were carried out on Reticle boxes (Reticle Pod) which reached an antistatic (Anti-static) rating.