Grating encoder and device thereof
阅读说明:本技术 格栅编码器及其装置 (Grating encoder and device thereof ) 是由 徐志豪 萧恒昇 萧志茂 于 2018-09-03 设计创作,主要内容包括:一种格栅编码器适用于安装在线性轴上,包含由导磁材料构成的基体及格栅编码单元。格栅编码单元包括设置于基体上的格栅编码组,及与格栅编码组相邻设置而位于相同表面的位置格栅编码组,格栅编码组具有多个沿基体的轴线延伸并沿轴线的径向间隔排列的凹部,位置格栅编码组具有多个沿轴线的径向延伸并沿轴线间隔排列的凹部。本发明还提供一种适用于安装在旋转轴上的格栅编码装置,包含具有环形基体的格栅编码器及感测单元,感测单元与格栅编码器间隔设置。借此,能量测线性轴的直线度误差、平坦度、横向及垂直振动量,还可量测旋转轴的轴向与径向偏摆量,通过位置格栅编码组来量测线性轴的位移与速度及旋转轴的角度位置与角速度。(A trellis encoder adapted to be mounted on a linear shaft includes a base body formed of a magnetically conductive material and a trellis encoding unit. The grid coding unit comprises a grid coding group arranged on the base body and a position grid coding group which is arranged adjacent to the grid coding group and is positioned on the same surface, the grid coding group is provided with a plurality of concave parts which extend along the axis of the base body and are arranged at intervals along the radial direction of the axis, and the position grid coding group is provided with a plurality of concave parts which extend along the radial direction of the axis and are arranged at intervals along the axis. The invention also provides a grating encoder device suitable for being installed on the rotating shaft, which comprises a grating encoder with an annular base body and a sensing unit, wherein the sensing unit and the grating encoder are arranged at intervals. Therefore, the energy can measure the straightness error, flatness, transverse and vertical vibration quantity of the linear shaft, can also measure the axial and radial deflection quantity of the rotating shaft, and can measure the displacement and speed of the linear shaft and the angular position and angular speed of the rotating shaft through the position grid coding set.)
1. A grating encoder; the method is characterized in that:
the grid encoder comprises a base body and a grid encoding unit; the substrate is made of a magnetic conductive material; the grid coding unit is made of magnetic conductive materials and comprises a grid coding group arranged on the base body and a position grid coding group which is arranged adjacent to the grid coding group and is positioned on the same surface, the grid coding group is provided with a plurality of concave parts which extend along the axis of the base body and are arranged at intervals along the radial direction of the axis, and the position grid coding group is provided with a plurality of concave parts which extend along the radial direction of the axis and are arranged at intervals along the axis.
2. A grating encoder; the method is characterized in that:
the grating encoder comprises an annular base body and a grating encoding unit; the annular substrate is made of magnetic conductive materials and comprises a first surface and a second surface opposite to the first surface; the grid coding unit is made of magnetic conductive materials and comprises a grid coding group arranged on one of the first surface and the second surface of the annular base body, and the grid coding group is provided with a plurality of concave parts which are arranged at intervals by taking the central axis of the annular base body as a concentric circle.
3. A trellis encoder according to claim 2, characterized in that: the normal lines of the first surface and the second surface are parallel to the central axis, the grid coding group is arranged on the first surface, and the concave parts are concentrically arranged along the radial direction of the annular base body.
4. A trellis encoder according to claim 2, characterized in that: the normal lines of the first surface and the second surface are perpendicular to the central axis, the second surface is adjacent to the central axis, the grid code group is arranged on the first surface, and the concave parts are concentrically arranged along the axial direction of the annular base body.
5. A grating encoder; the method is characterized in that:
the grating encoder comprises an annular base body and a grating encoding unit; the annular substrate is made of magnetic conductive materials and comprises a first surface and a second surface opposite to the first surface; the grid coding unit is made of magnetic conductive material and comprises a grid coding group arranged on one of the first surface and the second surface of the annular base body and a position grid coding group arranged on the same surface and adjacent to the grid coding group, the grid coding group is provided with a plurality of concave parts which are arranged at intervals by taking the central axis of the annular base body as concentric circles, and the position grid coding group is provided with a plurality of concave parts which are arranged at intervals around the central axis.
6. The trellis encoder of claim 5, wherein: the normal lines of the first surface and the second surface are parallel to the central axis, the grid coding group and the position grid coding group are arranged on the first surface, the concave parts of the grid coding group are concentrically arranged along the radial direction of the annular base body, the concave parts of the position grid coding group extend along the radial direction of the annular base body, and the position grid coding group is positioned between the inner periphery of the annular base body and the grid coding group or between the outer periphery of the annular base body and the grid coding group.
7. The trellis encoder of claim 5, wherein: the normal lines of the first surface and the second surface are perpendicular to the central axis, the second surface is adjacent to the central axis, the grating code group and the position grating code group are arranged on the first surface, the concave parts of the grating code group are arranged along the axial direction of the annular base body in a concentric circle mode, and the concave parts of the position grating code group extend along the axial direction of the annular base body.
8. The trellis encoder of claim 5, wherein: the position trellis encoding group is one of an incremental trellis encoding and an absolute trellis encoding.
9. A grid coding device is suitable for being installed on a linear shaft to measure the vibration quantity and displacement of the linear shaft; the method is characterized in that:
the trellis encoding device includes the trellis encoder of claim 1, and a sensing unit; the grid encoder is arranged along the axial direction of the linear shaft; the sensing unit is arranged corresponding to the grid coding unit and spaced from the grid coder, and comprises a sensor for sensing the amplitude signal of the grid coding unit and an analog sensing element for sensing the magnetic field intensity of the grid coder.
10. A kind of grid coding device, is suitable for installing on the rotating shaft, in order to carry on the deflection and angular position measurement of the said rotating shaft; the method is characterized in that:
the trellis encoding device includes the trellis encoder according to claims 2 to 8, and a sensing unit; the grating encoder is disposed around the rotation shaft; the sensing unit is arranged corresponding to the grid coding unit and spaced from the grid coder, and comprises a sensor for sensing the signal of the grid coding unit and an analog sensing element for sensing the magnetic field intensity of the grid coder.
11. The trellis encoding device of claim 10, wherein: when the normals of the first surface and the second surface of the grating encoder are parallel to the central axis, the inner periphery of the annular base faces the rotating shaft.
12. The trellis encoding device of claim 10, wherein: the second surface of the annular base faces the rotary shaft when a normal line of the first surface and the second surface of the grating encoder is perpendicular to the central axis.
13. The trellis encoding device of claim 12, wherein: the grating encoder is attached to the surface of the rotating shaft with the second surface.
Technical Field
The present invention relates to an encoder, and more particularly, to a grating encoder and a device thereof for measuring the vibration amount, the deflection amount, the speed, and the angular position of a linear shaft and a rotary shaft by using energy.
Background
U.S. Pat. No. 8,836,324 (hereinafter referred to as "the preamble") discloses a ferromagnetic material (ferromagnetic material) device for measuring a linear or rotational axis, wherein the ferromagnetic material device has a tooth structure, and is configured to measure an analytic displacement physical quantity by juxtaposing a Giant Magnetoresistive (GMR) sensor with a permanent magnet and disposing the GMR sensor at a maximum magnetic field of the induced tooth structure.
Specifically, in the prior art, linear or annular magnetic conductive materials are used, a tooth-shaped structure is processed on the upper surface of the linear or annular magnetic conductive materials, and a giant magnetoresistance sensor is arranged in parallel with a permanent magnet.
However, the tooth-shaped structure of the prior art is arranged on the linear magnetic conductive material in a manner of extending along the width direction and being arranged along the length direction; the tooth-shaped structure on the annular magnetic conducting material is arranged on the inner surface of the annular magnetic conducting material, extends along the width direction of the annular magnetic conducting material, and is arranged along the length direction of the annular magnetic conducting material, in other words, the arrangement mode of the tooth-shaped structure in the prior art can only measure the displacement in a single direction. For example, when the tooth-shaped structures are axially arranged, only the energy measures the amount of axial displacement; in the case of radial image arrangement, only the radial displacement amount is measured.
Disclosure of Invention
The invention aims to provide a grating encoder for measuring linearity error, flatness, transverse and vertical vibration quantity, displacement and speed of a linear shaft by energy.
The grating encoder comprises a substrate and a grating encoding unit; the substrate is made of a magnetic conductive material; the grid coding unit is made of magnetic conductive materials and comprises a grid coding group arranged on the base body and a position grid coding group which is arranged adjacent to the grid coding group and is positioned on the same surface, the grid coding group is provided with a plurality of concave parts which extend along the axis of the base body and are arranged at intervals along the radial direction of the axis, and the position grid coding group is provided with a plurality of concave parts which extend along the radial direction of the axis and are arranged at intervals along the axis.
Another embodiment of the present invention relates to a grating encoder, comprising an annular base and a grating encoding unit; the annular substrate is made of magnetic conductive materials and comprises a first surface and a second surface opposite to the first surface; the grid coding unit is made of magnetic conductive materials and comprises a grid coding group arranged on one of the first surface and the second surface of the annular base body, and the grid coding group is provided with a plurality of concave parts which are arranged at intervals by taking the central axis of the annular base body as a concentric circle.
In the grating encoder of the present invention, normals to the first surface and the second surface are parallel to the central axis, the grating code group is disposed on the first surface, and the concave portions are arranged concentrically in a radial direction of the annular base body.
In the grating encoder of the present invention, normals of the first surface and the second surface are perpendicular to the central axis, and the second surface is adjacent to the central axis, the grating code group is disposed on the first surface, and the recesses are arranged concentrically along an axial direction of the annular base body.
Another embodiment of the present invention relates to a grating encoder, comprising an annular base and a grating encoding unit; the annular substrate is made of magnetic conductive materials and comprises a first surface and a second surface opposite to the first surface; the grid coding unit is made of magnetic conductive material and comprises a grid coding group arranged on one of the first surface and the second surface of the annular base body and a position grid coding group arranged on the same surface and adjacent to the grid coding group, the grid coding group is provided with a plurality of concave parts which are arranged at intervals by taking the central axis of the annular base body as concentric circles, and the position grid coding group is provided with a plurality of concave parts which are arranged at intervals around the central axis.
In the grating encoder of the present invention, normals to the first surface and the second surface are parallel to the central axis, the grating code group and the position grating code group are disposed on the first surface, the recesses of the grating code group are concentrically arranged in the radial direction of the annular base body, the recesses of the position grating code group extend in the radial direction of the annular base body, and the position grating code group is located between the inner circumferential edge of the annular base body and the grating code group, or between the outer circumferential edge of the annular base body and the grating code group.
In the grating encoder of the present invention, normals of the first surface and the second surface are perpendicular to the central axis, the second surface is adjacent to the central axis, the grating code group and the position grating code group are disposed on the first surface, the recesses of the grating code group are concentrically arranged in an axial direction of the annular base body, and the recesses of the position grating code group extend in the axial direction of the annular base body.
In the trellis encoder of the present invention, the position trellis encoding group is one of an incremental trellis encoding and an absolute trellis encoding.
The invention also provides a grid coding device.
The grid coding device is suitable for being installed on a linear shaft to measure the vibration quantity and displacement of the linear shaft. The grid coding device comprises the grid coder and a sensing unit; the grid encoder is arranged along the axial direction of the linear shaft; the sensing unit is arranged corresponding to the grid coding unit and spaced from the grid coder, and comprises a sensor for sensing the amplitude signal of the grid coding unit and an analog sensing element for sensing the magnetic field intensity of the grid coder.
Another embodiment of the trellis encoding device of the present invention comprises the trellis encoder as described above, and a sensing unit; the grating encoder is disposed around the rotation shaft; the sensing unit is arranged corresponding to the grid coding unit and spaced from the grid coder, and comprises a sensor for sensing the signal of the grid coding unit and an analog sensing element for sensing the magnetic field intensity of the grid coder.
In the grating encoder of the present invention, when the normals to the first surface and the second surface of the grating encoder are parallel to the central axis, the inner periphery of the annular base body faces the rotary shaft.
In the grating encoder of the present invention, when the first surface and the second surface of the grating encoder have normal lines perpendicular to the central axis, the second surface of the annular base faces the rotary shaft.
In the trellis encoding device of the present invention, the second surface of the trellis encoder is attached to the surface of the rotary shaft.
The invention has the beneficial effects that: the grating code set and the position grating code set with a plurality of concave parts which are arranged at intervals are arranged on the base body at the same time, the grating code set with a plurality of concave parts which are arranged at intervals by taking the central axis of the annular base body as a concentric circle is arranged on the annular base body, and the position grating code set with a plurality of concave parts which are arranged at intervals around the central axis can be further added, so that the linearity error, the flatness, the transverse vibration quantity and the vertical vibration quantity of a linear shaft can be measured, the axial deflection and the radial deflection of a rotating shaft can be measured, and the displacement and the speed of the linear shaft and the angular position and the angular speed of the rotating shaft can be measured through the position grating code set.
Drawings
FIG. 1 is a schematic perspective view illustrating a first embodiment of a trellis encoder of the present invention;
FIG. 2 is a partially enlarged view illustrating a trellis encoding set and a position trellis encoding set according to the first embodiment of the present invention;
FIG. 3 is a schematic perspective view illustrating a second embodiment of the trellis encoder of the present invention;
FIG. 4 is a partially enlarged view illustrating the trellis encoding set according to the second embodiment of the present invention;
FIG. 5 is a schematic perspective view illustrating a third embodiment of the trellis encoder of the present invention;
FIG. 6 is a cross-sectional side view illustrating the grating code set of the third embodiment taken along the line VI-VI in FIG. 5;
FIG. 7 is a schematic perspective view illustrating a fourth embodiment of the trellis encoder of the present invention;
FIG. 8 is a partially enlarged view illustrating the position trellis encoding set and the trellis encoding set according to the fourth embodiment of the present invention;
FIG. 9 is a schematic perspective view illustrating a fifth embodiment of the trellis encoder of the present invention;
FIG. 10 is a partially enlarged view illustrating the position trellis encoding set and the trellis encoding set according to the fifth embodiment of the present invention;
FIG. 11 is a schematic perspective view illustrating a sixth embodiment of the trellis encoder of the present invention;
FIG. 12 is a partially enlarged view illustrating the position trellis encoding set and the trellis encoding set according to the sixth embodiment of the present invention;
FIG. 13 is a schematic perspective view illustrating a seventh embodiment of the trellis encoder of the present invention;
FIG. 14 is a partially enlarged view illustrating the position trellis encoding set and the trellis encoding set according to the seventh embodiment of the present invention;
FIG. 15 is a perspective view illustrating the first embodiment of the present invention and a sensing unit mounted on a linear axis;
FIG. 16 is a perspective view illustrating the fourth embodiment of the present invention and the aspect of the sensing unit mounted on the rotating shaft;
FIG. 17 is a perspective view illustrating the sixth embodiment of the present invention and the aspect of the sensing unit mounted on the rotating shaft;
FIG. 18 is a perspective view illustrating another aspect of the seventh embodiment of the present invention and the sensing unit mounted on the rotating shaft;
FIG. 19 is a flowchart illustrating a process of measuring a physical quantity of a linear axis by the trellis encoding device having the trellis encoder of the first embodiment of the present invention;
FIG. 20 is a flowchart illustrating a process of measuring a physical quantity of a rotary shaft by the grating encoder device having the grating encoders according to the second and third embodiments of the present invention; and
fig. 21 is a flowchart illustrating a process of measuring a physical quantity of a rotary shaft by a grating encoder device having the grating encoder of the fourth to seventh embodiments according to the present invention.
Detailed Description
The present invention will be described in detail below with reference to the accompanying drawings and examples.
Referring to fig. 1 and 2, a first embodiment of a
Specifically, in the first embodiment, the
In detail, the
More specifically, in the first embodiment, the grating code sets 22 and the position
Referring to fig. 3 and 4, a second embodiment of the
Specifically, the
In detail, in the second embodiment, the
The
Referring to fig. 5 and 6, a third embodiment of the
Referring to fig. 7 and 8, a fourth embodiment of the
In detail, the
Referring to fig. 9 and 10, a fifth embodiment of the
In detail, the concave parts 231 (absolute type grating codes) of the position
Referring to fig. 11 and 12, a sixth embodiment of the
Referring to fig. 13 and 14, a seventh embodiment of the
It should be noted that the
In order to more clearly illustrate how the
Referring to fig. 15, the trellis encoding device is adapted to be mounted on a
In detail, since the
Referring to fig. 16, the second, fourth, and fifth embodiments of the
In detail, since the normals n of the
Referring to fig. 17 and 18, the
Referring to fig. 19 in conjunction with fig. 15, a calculation procedure for measuring the flatness error, the straightness error, the vertical vibration amount, the lateral vibration amount, the displacement, and the velocity of the
When the
In addition, when the
Furthermore, since the
Referring to fig. 20, a calculation process of measuring the axial runout and the radial runout of the
Then, when the
Referring to fig. 21, a calculation process for measuring the axial runout, the radial runout, the rotation angle, the angular velocity, and the angular acceleration of the
First, since the eccentricity greatly affects the rotational movement, the concentricity between the
First, the leftmost implementation flow of fig. 21 is described, and the measurement is performed by taking the grating encoder 2 (see fig. 7 and 9) of the fourth and fifth embodiments as an example. When the
Next, taking the middle implementation flow of fig. 21 as an example, the measurement is performed by taking the trellis encoder 2 (see fig. 7 and 9) of the fourth and fifth embodiments as an example. When the
It can be seen that the difference between the leftmost implementation flow of fig. 21 and the middle implementation flow of fig. 21 is that the analog sensing device is used to measure the magnetic field strength of the grid code set 22 (fig. 21 and the leftmost implementation flow), or the sensor is used to measure the magnetic field change of the grid code set 22 and convert the magnetic field change into a voltage signal (the middle implementation flow of fig. 21). That is, the leftmost implementation flow of fig. 21 measures the axial runout when the
Since the
In detail, with reference to fig. 21, the rightmost implementation flow of fig. 21 illustrates that when the
In summary, the grating encoder and the device thereof of the present invention can obtain the linearity error, the flatness, the lateral and vertical vibration amount, and the displacement and the speed of the
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