阅读说明：本技术 一种加速度计封装结构、密封性检测系统及方法 (Accelerometer packaging structure, and sealing detection system and method ) 是由 于湘涛 吴楠 张菁华 张吉 徐国栋 付秀娟 韩旭 杨杏敏 彭振新 潘天鹏 于 2018-09-13 设计创作，主要内容包括：本发明提供了一种加速度计封装结构、密封检测系统及方法,其中方法包括：将加速度计表芯与所述壳体进行装配；将卡箍与所述检漏设备进行连接；将装配好的加速度计放置于卡箍的顶部,使得壳体底部的通孔与所述卡箍的通道相对；启动喷气设备,对加速度计外部喷惰性气体；启动检漏设备,检测加速度计装配的漏率；选择漏率小于预设漏率的加速度计置于所述充气设备内；启动充气设备对加速度计内填充示踪气体；对通孔进行铅锡焊锡封；检测方法简单可靠,能够对加速度计封装的密封性进行有效检测。(The invention provides an accelerometer packaging structure, a sealing detection system and a method, wherein the method comprises the following steps: assembling an accelerometer core with the housing; connecting a hoop with the leakage detection equipment; placing the assembled accelerometer on the top of the hoop so that the through hole in the bottom of the shell is opposite to the channel of the hoop; starting gas injection equipment, and injecting inert gas to the outside of the accelerometer; starting leak detection equipment, and detecting the leak rate of the accelerometer assembly; selecting an accelerometer with a leakage rate smaller than a preset leakage rate to be arranged in the inflating equipment; starting the inflation equipment to fill trace gas in the accelerometer; carrying out lead-tin soldering tin sealing on the through hole; the detection method is simple and reliable, and can effectively detect the sealing performance of the accelerometer package.)

1. The accelerometer packaging structure is characterized by comprising a shell used for packaging an accelerometer core, wherein an annular boss is arranged at the bottom of the shell, and a through hole is formed in the center of the bottom of the shell.

2. The accelerometer package of claim 1, wherein the annular boss has a height of 0.5mm to 1 mm.

3. The accelerometer package of claim 1, wherein the aperture of the via is 0.3mm-1.5 mm.

4. An accelerometer sealing detection system, which is characterized by comprising the accelerometer packaging structure of any one of claims 1-3, and further comprising an accelerometer core, a connecting tool, a leakage detection device, an air injection device and an inflation device;

the connecting tool comprises a hoop;

the longitudinal section of the hoop is I-shaped, and a channel is arranged inside the hoop;

one end face of the hoop is connected with the bottom of the shell, and the other end face of the hoop is connected with the leak detection equipment;

the channel is communicated with the through hole and the leak detection equipment;

a first sealing ring is arranged on the end face of the hoop connected with the shell, and a second sealing ring is arranged on the end face of the hoop connected with the leak detection equipment;

the gas injection equipment is used for injecting inert gas to the outside of the accelerometer, and the inflation equipment is used for filling trace gas in the accelerometer.

5. An accelerometer seal detection method, wherein detection is performed using the accelerometer seal detection system of claim 4, the method comprising:

assembling an accelerometer core with the housing;

connecting a hoop with the leakage detection equipment;

placing the assembled accelerometer on the top of the clamp, so that the through hole in the bottom of the shell is opposite to the channel of the clamp;

starting gas injection equipment, and injecting inert gas to the outside of the accelerometer;

starting leak detection equipment, and detecting the leak rate of the accelerometer assembly;

selecting an accelerometer with a leakage rate smaller than a preset leakage rate to be arranged in the inflating equipment;

starting the inflation equipment to fill trace gas in the accelerometer;

and carrying out lead-tin soldering sealing on the through hole.

6. The method of claim 5, wherein the assembled accelerometer is placed on top of the clamp in a 1g position.

7. The accelerometer seal detection method of claim 5, wherein the inert gas is helium.

8. The accelerometer seal detection method of claim 5, wherein the predetermined leak rate is 1 x 10^{- 9}Pa.m³/s。

9. The accelerometer seal detection method of claim 5, further comprising, after the lead-tin solder sealing the via hole:

and (4) placing the accelerometer into a vacuum chamber for leak detection.

Technical Field

The invention relates to the technical field of accelerometers, in particular to an accelerometer packaging structure, a sealing detection system and a sealing detection method.

Background

Quartz flexible accelerometer (short for accelerometer) is used as important instrument for inertial measurement, has the advantages of high precision, high reliability and suitability for acceleration measurement, has been widely applied in numerous fields such as aerospace, aviation, navigation, petroleum and the like, and many inertial measurement systems need to experience environments such as low pressure or high pressure, and the like, and the accelerometer parameters are changed due to the pressure difference existing inside and outside the accelerometer, so that the accelerometer packaging design and performance screening are carried out in order to meet the system requirements, and the accelerometer product with excellent air pressure environment adaptability is favorably screened out.

Currently, the defects of the accelerometer sealing design are as follows: the accelerometer is internally filled with normal-pressure gas, air squeeze film damping is generated to ensure normal work of an accelerometer closed-loop system, the accelerometer works in an abnormal environment for a long time, and due to the fact that air pressure difference exists outside the inside of the accelerometer, gas inside the accelerometer gradually leaks inwards or escapes outwards, so that accelerometer parameters are changed accordingly, and measurement accuracy of the accelerometer is affected.

Disclosure of Invention

The invention aims to provide an accelerometer packaging structure, a sealing detection system and a sealing detection method aiming at the requirement of accelerometer sealing detection in the prior art, which can effectively improve the sealing performance of accelerometer packaging and effectively detect the sealing performance.

The utility model provides an accelerometer packaging structure, is including the casing that is used for encapsulating the accelerometer movement, the casing bottom is provided with annular boss, the center of casing bottom is provided with the through-hole.

Further, the height of the annular boss is 0.5mm-1 mm.

Furthermore, the aperture of the through hole is 0.3mm-1.5 mm.

An accelerometer sealing detection system comprises the accelerometer packaging structure, and further comprises an accelerometer core, a connecting tool, a leakage detection device, an air injection device and an inflation device;

the connecting tool comprises a hoop;

the longitudinal section of the hoop is I-shaped, and a channel is arranged inside the hoop;

one end face of the hoop is connected with the bottom of the shell, and the other end face of the hoop is connected with the leak detection equipment;

the channel is communicated with the through hole and the leak detection equipment or the inflation equipment;

a first sealing ring is arranged on the end face of the hoop connected with the shell, and a second sealing ring is arranged on the end face of the hoop connected with the leak detection equipment;

the gas injection equipment is used for injecting inert gas to the outside of the accelerometer, and the inflation equipment is used for filling trace gas in the accelerometer.

An accelerometer sealing detection method adopts the accelerometer sealing detection system for detection, and the method comprises the following steps:

assembling an accelerometer core with the housing;

connecting a hoop with the leakage detection equipment;

placing the assembled accelerometer on the top of the clamp, so that the through hole in the bottom of the shell is opposite to the channel of the clamp;

starting gas injection equipment, and injecting inert gas to the outside of the accelerometer;

starting leak detection equipment, and detecting the leak rate of the accelerometer assembly;

selecting an accelerometer with a leakage rate smaller than a preset leakage rate to be arranged in the inflating equipment;

starting the inflation equipment to fill trace gas in the accelerometer;

and carrying out lead-tin soldering sealing on the through hole.

Further, the assembled accelerometer is placed on the top of the hoop and is placed in a 1g state.

Further, the inert gas is helium.

Further, the preset leakage rate is 1 × 10^-9Pa.m³/s。

Further, after the lead-tin solder sealing is performed on the through hole, the method further includes:

and (4) placing the accelerometer into a vacuum chamber for leak detection.

The accelerometer packaging structure, the sealing detection system and the method provided by the invention at least have the following beneficial effects:

(1) the packaging structure is simple and reliable;

(2) the sealing detection system has good sealing performance, and the sealing performance in the leak detection process is effectively ensured;

(3) the detection method is simple and reliable, and can effectively detect the sealing performance of the accelerometer package.

Drawings

Fig. 1 is a bottom view schematically illustrating an accelerometer package structure according to an embodiment of the present invention.

Fig. 2 is a schematic structural diagram of an embodiment of a clamp in an accelerometer seal detection system provided by the invention.

FIG. 3 is a flow chart of an embodiment of a method for accelerometer seal detection according to the present invention.

Detailed Description

In order to make the objects, technical solutions and effects of the present invention clearer and clearer, the present invention is further described in detail below with reference to the accompanying drawings and examples. It should be understood that the specific embodiments described herein are merely illustrative of the invention and are not intended to limit the invention.