阅读说明：本技术 用于降低氯硅烷中硼、磷杂质含量的吸附设备 (Adsorption equipment for reducing content of boron and phosphorus impurities in chlorosilane ) 是由 易军 唐东昌 简凤宁 赵小飞 于 2019-11-12 设计创作，主要内容包括：本发明公开了用于降低氯硅烷中硼、磷杂质含量的吸附设备,属于多晶硅制造技术领域,其主要通过设置多个吸附单元构成吸附柱,以使实施人员能依据氯硅烷的流量,而对其吸附柱筒身本体内的吸附单元的个数进行调整,优化吸附剂使用效率。(The invention discloses adsorption equipment for reducing the content of boron and phosphorus impurities in chlorosilane, which belongs to the technical field of polysilicon manufacturing and mainly comprises an adsorption column formed by arranging a plurality of adsorption units, so that an operator can adjust the number of the adsorption units in a cylinder body of the adsorption column according to the flow of the chlorosilane, and the use efficiency of an adsorbent is optimized.)

1. A adsorption equipment for reducing boron, phosphorus impurity content in chlorosilane, including the heat exchanger that concatenates in proper order along chlorosilane advancing direction, adsorption column and buffer tank, its characterized in that: the adsorption column mainly comprises a cylinder body and a plurality of adsorption units which are sequentially housed in an inner cavity of the cylinder body in a stacking manner along the direction from top to bottom, the adsorption units are communicated with the inner cavity of the cylinder body and can slide vertically relative to the cylinder body, each adsorption unit comprises an inner ring and an outer ring which are coaxially sleeved together, an annular gap is reserved between the inner ring and the outer ring, two ends of the annular gap are sealed by filter screens, so that a housing space is enclosed, a boron-phosphorus adsorbent is filled in the housing space, and the housing spaces of two adjacent adsorption units are communicated with each other; the top end of the inner cavity of the cylinder body is sealed by a top seat, and the bottom end of the inner cavity of the cylinder body is sealed by a base which is detachably connected with the cylinder body; a discharge channel for communicating the buffer tank with the inner cavity of the buffer tank is formed in the top seat, a feed channel for communicating the heat exchanger with the inner cavity of the buffer tank is formed in the base seat, and the discharge channel is communicated with the buffer tank through a flexible pipe; the adsorption column also comprises a heat exchange tube which extends vertically and passes through the inner hole of the inner ring of any adsorption unit, the periphery of the heat exchange tube is in slidable heat exchange contact with the inner periphery of the inner hole of any inner ring, and the adsorption column is communicated with the buffer tank through a flexible tube.

2. The adsorption equipment for reducing the content of boron and phosphorus impurities in chlorosilane according to claim 1, characterized in that: the adsorption unit is provided with an opening extending outwards from the inner periphery of the inner ring to the outer periphery of the outer ring in the radial direction, and the heat exchange tube can move in the opening in the radial direction relative to the adsorption unit so as to be separated from the adsorption unit.

3. The adsorption equipment for reducing the content of boron and phosphorus impurities in chlorosilane according to claim 2, characterized in that: and a heat exchange medium inlet for introducing a heat exchange medium into the inner cavity of the heat exchange pipe and a heat exchange medium outlet for discharging the heat exchange medium in the inner cavity of the heat exchange pipe are formed in the base.

4. An adsorption unit for reducing the content of boron and phosphorus impurities in chlorosilanes according to claim 3 wherein: the number of the adsorption units is 5.

5. An adsorption unit for reducing the content of boron and phosphorus impurities in chlorosilanes according to claim 3 wherein: the two ends of the adsorption units form a connecting structure which is mutually adaptive, and two adjacent adsorption units are connected together through the connecting structure.

6. The adsorption equipment for reducing the content of boron and phosphorus impurities in chlorosilane of claim 5, wherein the adsorption equipment comprises the following components in parts by weight: the connecting structure comprises a male spigot arranged at any one end of the top end or the bottom end of the outer ring of the adsorption unit and a female spigot arranged at the other end of the outer ring.

Technical Field

The invention relates to the technical field of polysilicon manufacturing, in particular to adsorption equipment for reducing the content of boron and phosphorus impurities in chlorosilane.

Background

With the increasing global clean energy demand, the utilization rate of solar energy resources is gradually improved. The purity of the polycrystalline silicon which is used as a key raw material of the solar power generation panel directly influences the conversion efficiency and the service life of the solar power generation panel. At present, the main impurities in the production of polysilicon are: B. p, C, O, Fe, Ni, Cu, Zn, Al, Ga, Cr, etc. Wherein, the difficulty of removing the impurities of boron and phosphorus is high and the cost is high. How to remove boron and phosphorus impurities in polysilicon becomes a technical problem to be solved urgently. The invention discloses a method and equipment for removing boron and phosphorus by a chlorosilane fixed bed chemical adsorption reaction method, which is published as 2016, 7, 6 and the application number of CN201610112604.4, and mainly utilizes an adsorbent carried on the fixed bed to remove boron and phosphorus impurities in chlorosilane.

Disclosure of Invention

In summary, the technical problems solved by the present invention are: the equipment capable of effectively improving the treatment efficiency of the adsorption equipment is provided.

The scheme adopted by the invention for solving the technical problems is as follows:

the adsorption equipment for reducing the content of boron and phosphorus impurities in chlorosilane comprises heat exchangers, adsorption columns and buffer tanks which are sequentially connected in series along the traveling direction of the chlorosilane, wherein each adsorption column mainly comprises a cylinder body and a plurality of adsorption units which are sequentially accommodated in the inner cavity of the cylinder body in a stacked mode from top to bottom, the adsorption units are communicated with the inner cavity of the cylinder body and can vertically slide relative to the cylinder body, any adsorption unit comprises an inner ring and an outer ring which are coaxially sleeved together, an annular gap is reserved between the inner ring and the outer ring, two ends of the annular gap are sealed by filter screens, so that an accommodating space is enclosed, a boron-phosphorus adsorbent is filled in the accommodating space, and the accommodating spaces of two adjacent adsorption units are mutually communicated; the top end of the inner cavity of the cylinder body is sealed by a top seat, and the bottom end of the inner cavity of the cylinder body is sealed by a base which is detachably connected with the cylinder body; a discharge channel for communicating the buffer tank with the inner cavity of the buffer tank is formed in the top seat, a feed channel for communicating the heat exchanger with the inner cavity of the buffer tank is formed in the base seat, and the discharge channel is communicated with the buffer tank through a flexible pipe; the adsorption column also comprises a heat exchange tube which extends vertically and passes through the inner hole of the inner ring of any adsorption unit, the periphery of the heat exchange tube is in slidable heat exchange contact with the inner periphery of the inner hole of any inner ring, and the adsorption column is communicated with the buffer tank through a flexible tube.

The adsorption unit is provided with an opening extending outwards from the inner periphery of the inner ring to the outer periphery of the outer ring in the radial direction, and the heat exchange tube can move in the opening in the radial direction relative to the adsorption unit so as to be separated from the adsorption unit.

Furthermore, a heat exchange medium inlet for introducing a heat exchange medium into the inner cavity of the heat exchange tube and a heat exchange medium outlet for discharging the heat exchange medium from the inner cavity of the heat exchange tube are formed in the base.

Further, the number of the adsorption units is 5.

Furthermore, the two ends of each adsorption unit form a connection structure which is matched with each other, and two adjacent adsorption units are connected together through the connection structures.

Furthermore, the connection structure comprises a male spigot arranged at any one end of the top end or the bottom end of the outer ring of the adsorption unit, and a female spigot arranged at the other end of the outer ring.

In summary, due to the adoption of the technical scheme, the invention has the beneficial effects that:

(1) according to the invention, the adsorption column is formed by arranging the plurality of adsorption units, so that the number of the adsorption units in the body of the adsorption column can be adjusted by an operator according to the flow of chlorosilane, and the use efficiency of the adsorbent is optimized.

(2) When adsorbent is activated, the operator can disassemble the connection between the cylinder body and the base and hoist the whole cylinder body. And then, the adsorption unit which is out of work slides out of the cylinder body along the lateral direction to perform activation, and a new adsorption unit is correspondingly filled to continue adsorption. The whole process can omit the time of waiting for the activation of the adsorbent in the adsorption equipment, thereby improving the treatment efficiency of the adsorption equipment.

Drawings

FIG. 1 is a schematic structural view of example 1 of the present invention;

FIG. 2 is a schematic view of the structure of an adsorption unit in example 1 of the present invention;

FIG. 3 is a cross-sectional view taken along line A-A of FIG. 2;

fig. 4 is a schematic diagram of the matching of two adjacent adsorption units in embodiment 1 of the present invention.

[ Specification of symbols ]

1-heat exchanger, 201-barrel body, 202-outer ring, 203-inner ring, 204-containing space, 205-filter screen, 206-top seat, 207-base, 208-heat exchange tube, 209-opening, 210-grating plate and 3-buffer tank.

Detailed Description

In order to make the objects, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are some, but not all, embodiments of the present invention. The components of embodiments of the present invention generally described and illustrated in the figures herein may be arranged and designed in a wide variety of different configurations.

Thus, the following detailed description of the embodiments of the present invention, presented in the figures, is not intended to limit the scope of the invention, as claimed, but is merely representative of selected embodiments of the invention. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.

It should be noted that: like reference numbers and letters refer to like items in the following figures, and thus, once an item is defined in one figure, it need not be further defined and explained in subsequent figures.

In the description of the present invention, it should be noted that, if the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings or the orientations or positional relationships that the products of the present invention are usually placed in when used, the terms are only used for convenience of describing the present invention and simplifying the description, and do not indicate or imply that the devices or elements indicated must have a specific orientation, be constructed in a specific orientation, and be operated, and thus, should not be construed as limiting the present invention. Furthermore, the appearances of the terms "first," "second," and the like in the description of the present invention are only used for distinguishing between the descriptions and are not intended to indicate or imply relative importance.

Furthermore, the terms "horizontal", "vertical" and the like when used in the description of the present invention do not require that the components be absolutely horizontal or overhanging, but may be slightly inclined. For example, "horizontal" merely means that the direction is more horizontal than "vertical" and does not mean that the structure must be perfectly horizontal, but may be slightly inclined.

In the description of the present invention, it should be further noted that unless otherwise explicitly stated or limited, the terms "disposed," "mounted," "connected," and "connected" should be interpreted broadly, and may be, for example, fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meanings of the above terms in the present invention can be understood in specific cases to those skilled in the art.