Ultrasonic imaging system
阅读说明:本技术 超声波影像系统 (Ultrasonic imaging system ) 是由 富田隆 北见薰 菅谷夏树 伊藤正一 于 2019-07-02 设计创作,主要内容包括:提供即使在探测器的移动速度是高速时也能够抑制波动的超声波影像系统。超声波影像系统具备超声波影像装置和水槽(10),在水槽(10)的端部,配设有使在超声波影像装置的超声波探测器(20)扫描时产生的作为超声波的传播介质的液状物质的波的端部处的反射波衰减的反射波衰减单元(30)。反射波衰减单元(30)具有多个突起(32),在超声波影像装置的超声波探测器(20)在X轴方向上扫描时,在X轴方向的水槽(10)的两端部配设有反射波衰减单元(30)。(Provided is an ultrasonic imaging system capable of suppressing fluctuation even when the moving speed of a probe is high. An ultrasonic imaging system is provided with an ultrasonic imaging device and a water tank (10), and a reflected wave attenuation means (30) for attenuating a reflected wave generated at an end of a wave of a liquid substance as a propagation medium of an ultrasonic wave generated when an ultrasonic probe (20) of the ultrasonic imaging device scans is disposed at the end of the water tank (10). The reflected wave attenuation unit (30) has a plurality of protrusions (32), and the reflected wave attenuation unit (30) is disposed at both ends of the water tank (10) in the X-axis direction when the ultrasonic probe (20) of the ultrasonic imaging apparatus scans in the X-axis direction.)
1. An ultrasonic imaging system is characterized in that,
comprises an ultrasonic imaging device and a water tank,
a reflected wave attenuation means is disposed at an end portion of the water tank in the X-axis direction, the reflected wave attenuation means being capable of changing a position of a gap with inner wall surfaces on both sides in the X-axis direction, and attenuating a reflected wave of a liquid substance as a propagation medium of an ultrasonic wave generated when a probe of the ultrasonic imaging apparatus scans the end portion,
the reflected wave attenuation unit includes a rectangular and plate-shaped base and a plurality of projections arranged on one surface of the base, the projections being arranged toward the probe,
a gap position changing means having an insertion groove in which the reflected wave attenuation means is arranged so as to change the gap position with respect to the inner wall surfaces on both sides in the X-axis direction is arranged at an end of the water tank.
2. An ultrasonic imaging system is characterized in that,
comprises an ultrasonic imaging device and a water tank,
a reflected wave attenuation means is disposed at an end portion of the water tank in the X-axis direction, the reflected wave attenuation means being capable of changing a position of a gap with inner wall surfaces on both sides in the X-axis direction, and attenuating a reflected wave of a liquid substance as a propagation medium of an ultrasonic wave generated when a probe of the ultrasonic imaging apparatus scans the end portion,
the reflected wave attenuation means includes a rectangular plate-shaped base body having a plurality of openings serving as flow paths and a plurality of projections arranged on one surface of the base body,
the protrusion is disposed toward the end of the water tank,
a gap position changing means having an insertion groove in which the reflected wave attenuation means is arranged so as to change the gap position with respect to the inner wall surfaces on both sides in the X-axis direction is arranged at an end of the water tank.
3. The ultrasonic imaging system according to claim 1 or 2,
in the reflected wave attenuation unit, when the probe scans at the scanning position in the Y-axis direction after scanning by an amount of 1 row line in the X-axis direction, at least one of the projections is located further outside than a start point position in the Y-axis direction of a subject as an image acquisition target, and at least one of the projections is located further outside than an end point position in the Y-axis direction of the subject.
4. The ultrasonic imaging system of claim 3,
in the reflected wave attenuation unit, at least one of the projections is located at a height position above a surface of the liquid substance in the water tank in a vertical direction.
5. The ultrasonic imaging system of claim 3,
in the reflected wave attenuation unit,
when the measurement mode of the ultrasonic imaging apparatus is a reflection method, at least one of the projections is located at a height position lower than a lower surface of the mounting table of the subject in a vertical direction,
when the measurement mode of the ultrasonic imaging apparatus is a transmission method, at least one of the protrusions is located at a height position lower than a lower end of the lower probe unit in a vertical direction.
6. The ultrasound imaging system of claim 4,
in the reflected wave attenuation unit,
when the measurement mode of the ultrasonic imaging apparatus is a reflection method, at least one of the projections is located at a height position lower than a lower surface of the mounting table of the subject in a vertical direction,
when the measurement mode of the ultrasonic imaging apparatus is a transmission method, at least one of the protrusions is located at a height position lower than a lower end of the lower probe unit in a vertical direction.
7. The ultrasonic imaging system according to claim 1 or 2,
the ultrasonic imaging system has a scanner that scans the probe in the X-axis direction by 1 line and then in the Y-axis direction at a scanning position,
one end side of the reflected wave attenuation means is located further outside than at least a start point position in the Y axis direction of a subject to be an image acquisition target, and the other end side is located further outside than at least an end point position in the Y axis direction of the subject.
8. The ultrasonic imaging system according to claim 1 or 2,
in the reflected wave attenuation unit, an upper end edge is located at a height position at least above a surface of the liquid substance in the water tank in a vertical direction.
9. The ultrasound imaging system of claim 7,
in the reflected wave attenuation unit, an upper end edge is located at a height position at least above a surface of the liquid substance in the water tank in a vertical direction.
10. The ultrasonic imaging system according to claim 1 or 2,
in the reflected wave attenuation unit,
when the measurement mode of the ultrasonic imaging apparatus is a reflection method, the lower end side is located at a height position lower than at least the lower surface of the mounting table of the subject in the vertical direction,
when the measurement mode of the ultrasonic imaging apparatus is a transmission method, the lower end side is located at a height position lower than at least the lower end of the probe in the vertical direction.
11. The ultrasound imaging system of claim 7,
in the reflected wave attenuation unit,
when the measurement mode of the ultrasonic imaging apparatus is a reflection method, the lower end side is located at a height position lower than at least the lower surface of the mounting table of the subject in the vertical direction,
when the measurement mode of the ultrasonic imaging apparatus is a transmission method, the lower end side is located at a height position lower than at least the lower end of the probe in the vertical direction.
12. The ultrasound imaging system of claim 8,
in the reflected wave attenuation unit,
when the measurement mode of the ultrasonic imaging apparatus is a reflection method, the lower end side is located at a height position lower than at least the lower surface of the mounting table of the subject in the vertical direction,
when the measurement mode of the ultrasonic imaging apparatus is a transmission method, the lower end side is located at a height position lower than at least the lower end of the probe in the vertical direction.
13. The ultrasonic imaging system of claim 9,
in the reflected wave attenuation unit,
when the measurement mode of the ultrasonic imaging apparatus is a reflection method, the lower end side is located at a height position lower than at least the lower surface of the mounting table of the subject in the vertical direction,
when the measurement mode of the ultrasonic imaging apparatus is a transmission method, the lower end side is located at a height position lower than at least the lower end of the probe in the vertical direction.
14. The ultrasonic imaging system according to claim 1 or 2,
the insertion groove has a width into which the reflected wave attenuation unit is inserted,
the space position changing unit has a plurality of the insertion grooves.
15. An ultrasonic imaging system is characterized in that,
comprises an ultrasonic imaging device and a water tank,
a reflected wave attenuation means is disposed at an end portion of the water tank in the X-axis direction, the reflected wave attenuation means being capable of changing a position of a gap with inner wall surfaces on both sides in the X-axis direction, and attenuating a reflected wave of a liquid substance as a propagation medium of an ultrasonic wave generated when a probe of the ultrasonic imaging apparatus scans the end portion,
the reflected wave attenuation means is formed by joining a 1 st base and a 2 nd base each having a square shape and a plate shape,
the 1 st substrate has a plurality of 1 st openings which are flow paths,
the 2 nd substrate has a plurality of 2 nd openings which become flow paths,
the opening ratio of the 2 nd opening is smaller than that of the 1 st opening,
the 2 nd base body side is arranged toward the end part side of the water tank,
a gap position changing means having an insertion groove in which the reflected wave attenuation means is arranged so as to change the gap position with respect to the inner wall surfaces on both sides in the X-axis direction is arranged at an end of the water tank.
Technical Field
The present invention relates to an ultrasonic imaging system.
Background
An ultrasonic imaging system uses an ultrasonic imaging device, and places a test object such as a semiconductor having a multilayer structure on a sample placement table, dips the test object into a liquid material, which is a propagation medium of ultrasonic waves, stored in a liquid storage tank such as a water tank, irradiates the test object with ultrasonic waves from a probe provided in the ultrasonic imaging device, and receives reflected waves or transmitted waves of the ultrasonic waves to image an object interface. The probe scans the subject from a start point (one end point) to an end point (the other end point) of the subject in the X-axis direction at a predetermined speed while irradiating the subject with ultrasonic waves. After the detector reaches the end point, the detector is moved by a predetermined amount in the Y-axis direction, and is scanned in the opposite direction from the start point to the end point at a predetermined speed in the X-axis direction. When the probe is scanned, bubbles are generated and fluctuation is generated.
Patent document 1 discloses "an ultrasonic inspection apparatus including: an ultrasonic probe that radiates an ultrasonic wave to a subject via water and receives a reflected wave thereof; and a scanner for performing ultrasonic scanning by moving the ultrasonic probe in a predetermined axial direction, the ultrasonic scanner comprising: a water level detector detecting a water level; an arithmetic unit for calculating the submergence amount of the probe based on the detection value of the water level detector and the position of the ultrasonic probe; a storage unit for storing a relationship between a moving speed of the scanner and a flooding amount; and a water level adjustment means for adjusting the water level so that the flooding amount obtained by the calculation means matches the flooding amount obtained from the storage unit when the moving speed is determined.
Disclosure of Invention
In patent document 1, although the moving speed of the probe is effective at a low speed, a further countermeasure against the hunting is required as the moving speed becomes higher.
When the probe scans in the X-axis direction, the moving speed thereof reaches 2000 mm/sec (based on the applicant's product), although it is also based on the size of the subject. Since the probe moves in the liquid material accumulated in the water tank, it is needless to say that a wave (traveling wave) is generated on the surface of the liquid material in the direction in which the probe unit advances due to the movement. The traveling wave collides with the wall of the water tank in the X-axis direction to generate a reflected wave. The reflected wave is combined with the traveling wave. By repeating this process, a standing wave having a larger amplitude is formed. As a result, when the X-axis position of the detector portion coincides with a position (or a position near thereto) at which the displacement of the standing wave becomes minimum, there is a concern that the detector portion is exposed to the outside from the liquid substance. When the ultrasonic wave irradiation portion of the probe portion is exposed from the liquid substance, there is a problem that an image of the target interface cannot be acquired.
The present invention has been made in view of the above problems, and an object thereof is to provide an ultrasonic imaging system capable of suppressing fluctuation even when the probe moving speed is high.
In order to achieve the above object, an ultrasonic imaging system according to the present invention includes an ultrasonic imaging apparatus and a water tank, wherein a reflected wave attenuation means is disposed at an end portion of the water tank in an X-axis direction so as to be able to change a position of a gap between the ultrasonic imaging apparatus and an inner wall surface on both sides in the X-axis direction, and attenuates a reflected wave of a liquid substance as a propagation medium of an ultrasonic wave generated when a probe of the ultrasonic imaging apparatus scans the end portion, the reflected wave attenuation means includes a rectangular plate-shaped base and a plurality of projections disposed on one surface of the base, the projections are disposed toward the probe side, and a gap position changing means having an insertion groove in which the reflected wave attenuation means is disposed so as to change a position of a gap between the ultrasonic imaging apparatus and an inner wall surface on both sides in the X-axis direction is disposed at the end. Other aspects of the present invention will be described in the embodiments described below.
According to the present invention, the fluctuation can be suppressed even when the moving speed of the probe is high.
Drawings
Fig. 1 is an external view showing a configuration of an ultrasonic imaging system having a reflected wave attenuation unit.
Fig. 2 is an explanatory view showing a configuration of the air gap position changing means, (a) is a view showing a method of arranging the reflected wave attenuation means, and (b) is a side view of the air gap position changing means.
Fig. 3 is a plan view showing the arrangement position of the reflected wave attenuation unit in the water tank.
Fig. 4 is a block diagram showing the configuration of a control system and a signal processing system of the ultrasonic imaging system.
Fig. 5 is a schematic structural view showing a reflected wave attenuation unit according to example 1, where (a) is a side view when the reflected wave attenuation unit is disposed in a water tank, and (b) is a perspective view of the reflected wave attenuation unit.
Fig. 6 is a schematic structural view showing a reflected wave attenuation unit according to example 2, wherein (a) is a side view when the reflected wave attenuation unit is disposed in a water tank, and (b) is an exploded perspective view of the reflected wave attenuation unit.
Fig. 7 is a schematic structural view showing a reflected wave attenuation unit according to example 3, wherein (a) is a side view when the reflected wave attenuation unit is disposed in a water tank, and (b) is a perspective view of the reflected wave attenuation unit.
Fig. 8 is a schematic structural view showing a reflected wave attenuation unit according to example 4, wherein (a) is a side view when the reflected wave attenuation unit is disposed in a water tank, and (b) is a perspective view of the reflected wave attenuation unit.
Fig. 9 is a schematic structural view showing a reflected wave attenuation unit according to example 5, wherein (a) is a side view when the reflected wave attenuation unit is disposed in a water tank, and (b) is a perspective view of the reflected wave attenuation unit.
Fig. 10 is a schematic structural view showing a reflected wave attenuation unit according to example 6, wherein (a) is a side view when the reflected wave attenuation unit is disposed in a water tank, and (b) is a perspective view of the reflected wave attenuation unit.
Fig. 11 is a schematic structural view showing a reflected wave attenuation unit according to example 7, wherein (a) is a side view when the reflected wave attenuation unit is disposed in a water tank, and (b) is a perspective view of the reflected wave attenuation unit.
Fig. 12 is a schematic structural view showing a tank side wall top return unit according to example 8, wherein (a) is a side view when the unit is disposed in a tank, and (b) is a perspective view of the tank side wall top return unit.
Fig. 13 is a diagram showing a configuration of an ultrasonic imaging apparatus of the transmission method.
Fig. 14 is an explanatory diagram illustrating a case where the reflected wave attenuation unit according to example 1 is applied to an ultrasonic imaging apparatus of the transmission method.
(symbol description)
1: a coordinate system; 10: a water tank; 11: water; 11A: a liquid substance; 12: a sample stage; 15: a subject; 17: an inspection object holder; 20: an ultrasonic detector; 30. 30A, 30B, 30C, 30D, 30E, 30F, 30G: a reflected wave attenuation unit; 31: a substrate; 32: a protrusion (protuberance); 37: a sink sidewall top return unit; 40: a gap position changing unit; 41: inserting the groove; 50: an image display device; 70: a scanner device; 71: an X-axis scanner; 72: a Y-axis scanner; 81: 1 st ultrasonic probe (upper probe); 82: a 2 nd ultrasonic probe (lower probe); 90: an ultrasonic imaging device; 100: an ultrasonic imaging system.
Detailed Description
Embodiments for carrying out the present invention will be described in detail with reference to the accompanying drawings as appropriate.
Fig. 1 is an external view showing the configuration of an ultrasonic imaging system 100 having a reflected
The
The
The arm-
The ultrasonic imaging system 100 according to the present embodiment is characterized in that the reflected wave attenuation means 30 for attenuating the reflected wave of the water 11 (liquid substance) reflected at the end of the
The present inventors investigated a
Fig. 2 is an explanatory view showing the structure of the air gap position changing means 40, where (a) is a view showing a method of arranging the reflected wave attenuation means, and (b) is a side view of the air gap position changing means. The reflected
In the example shown in fig. 2, the reflected
To summarize the point of fig. 2, a gap position changing means 40 is disposed at an end of the
Fig. 3 is a plan view showing the arrangement position of the reflected
When the ultrasonic probe 20 (see fig. 1) scans the X-axis direction by 1 row line and then scans the scanning position in the Y-axis direction, in the reflected
In the reflected
Fig. 4 is a block diagram showing the configuration of a control system and a signal processing system of the ultrasonic imaging system. The
The
The transmission/
The
The output side of the
The
The
The
The
The
(operation of ultrasonic imaging apparatus)
Referring to fig. 4, a series of operations of the
The
The
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Hereinafter, the various reflected
(example 1)
Fig. 5 is a schematic diagram showing the structure of the reflected
When the sample mounting table 12 is provided in the
Therefore, in the present embodiment, by providing the reflected wave attenuation means 30A on the side wall of the
In the reflected
In the reflected
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