阅读说明：本技术 平面电容传感器及其制作方法 (Planar capacitive sensor and manufacturing method thereof ) 是由 张帅 田宏伟 左岳平 孟秋华 刘明 王晶 于 2019-09-11 设计创作，主要内容包括：本发明公开了一种平面电容传感器及其制作方法,包括第一平面电极、第二平面电极和介电层,所述第一平面电极与所述第二平面电极相对设置,且所述介电层位于所述第一平面电极与所述第二平面电极之间；其中,所述介电层在朝向所述第一平面电极的表面设置有凸起部,所述第一平面电极在朝向所述介电层的表面设置有凹陷部,所述凸起部嵌入所述凹陷部内。本发明通过改变平面电容传感器一侧电极的结构,使得该平面电极的一侧由平面结构改变为立体结构,当平面传电容传感器发生内弯或者外弯时,其电容值随弯折角度的变化曲线不再相同,因此通过两条不同的变化曲线就可以直接判断出平面电容传感器发生了内弯或者外弯。(The invention discloses a planar capacitive sensor and a manufacturing method thereof, wherein the planar capacitive sensor comprises a first planar electrode, a second planar electrode and a dielectric layer, wherein the first planar electrode and the second planar electrode are oppositely arranged, and the dielectric layer is positioned between the first planar electrode and the second planar electrode; the dielectric layer is provided with a convex part on the surface facing the first planar electrode, the first planar electrode is provided with a concave part on the surface facing the dielectric layer, and the convex part is embedded into the concave part. According to the invention, the structure of the electrode on one side of the planar capacitive sensor is changed, so that one side of the planar electrode is changed into a three-dimensional structure from a planar structure, and when the planar capacitive sensor is bent inwards or outwards, the change curves of the capacitance value along with the bending angle are not the same any more, so that the planar capacitive sensor can be directly judged to be bent inwards or outwards through two different change curves.)

1. a planar capacitive sensor comprising a first planar electrode, a second planar electrode and a dielectric layer, wherein the first planar electrode is disposed opposite to the second planar electrode, and the dielectric layer is disposed between the first planar electrode and the second planar electrode;

the dielectric layer is provided with a convex part on the surface facing the first planar electrode, the first planar electrode is provided with a concave part on the surface facing the dielectric layer, and the convex part is embedded into the concave part.

2. The planar capacitive sensor of claim 1 wherein the raised portion is the same shape as the recessed portion.

3. The planar capacitive sensor of claim 2 wherein the shape of the raised portion is at least one of cylindrical, spherical and conical.

4. the planar capacitive sensor of claim 3 wherein the shape of each of the raised portions is the same and the height of each of the raised portions is the same.

5. the planar capacitive sensor of claim 1 wherein the number of raised portions is the same as the number of recessed portions, each raised portion being embedded within its corresponding recessed portion.

6. The planar capacitive sensor of claim 5 wherein the number of the protrusions is plural, and the plural protrusions are distributed on the surface of the dielectric layer in an array.

7. The planar capacitive sensor of claim 6 wherein the spacing between adjacent two of the projections is the same.

8. the planar capacitive sensor of claim 1 wherein the first planar electrode and the second planar electrode are parallel to each other.

9. A method of making a planar capacitive sensor as claimed in any one of claims 1 to 8, comprising the steps of:

Manufacturing a second planar electrode;

Manufacturing a dielectric layer and a convex part on the second planar electrode;

And manufacturing a concave part and a first plane electrode on the dielectric layer and the convex part.

10. a method of making a planar capacitive sensor as claimed in any one of claims 1 to 8, comprising the steps of:

manufacturing a first planar electrode and a concave part;

Manufacturing a convex part and a dielectric layer on the first plane electrode and the concave part;

and manufacturing a second planar electrode on the dielectric layer.

Technical Field

The invention relates to the technical field of sensors, in particular to a planar capacitive sensor and a manufacturing method thereof.

Background

The sensor is a detection device which can sense the measured information and convert the sensed information into an electric signal or other information in a required form according to a certain rule to output so as to meet the requirements of information transmission, processing, storage, display, recording, control and the like.

Among the existing sensors, the planar capacitive sensor is a type with a large proportion, and is widely applied to electronic screens, mobile phones and other types of products. The future trend of these products is to display a large amount of information on a flexible body, that is, to display on a flexible display, thereby realizing a flexible display. The official definition of a flexible display is a display device whose display screen and module can be mechanically bent in any one of the steps of substrate packaging, production, storage, use, operation, process joining, handling, transportation, etc.

As shown in fig. 1, which is a cross-section of a prior art planar capacitive sensor. As can be seen from the figure, the two planar electrodes are symmetrically disposed on both sides of the dielectric layer, so that the capacitance change rate is the same as the bending angle is changed no matter whether the planar capacitive sensor is bent inward or outward, as shown in fig. 2.

Therefore, the existing sensor cannot directly detect the outward bending or the inward bending, and needs to obtain information matching through the reference sensor arranged in the non-bending area, so that the sensor arranged in the bending area is judged to be in the inward bending or the outward bending, and the sensor is inconvenient to use.

Disclosure of Invention

in view of the above, the present invention is directed to a planar capacitive sensor and a method for manufacturing the same, so as to solve the technical problems in the prior art.

according to a first aspect of the present invention, there is provided a planar capacitive sensor comprising a first planar electrode, a second planar electrode and a dielectric layer, the first planar electrode being disposed opposite to the second planar electrode, and the dielectric layer being located between the first planar electrode and the second planar electrode;

The dielectric layer is provided with a convex part on the surface facing the first planar electrode, the first planar electrode is provided with a concave part on the surface facing the dielectric layer, and the convex part is embedded into the concave part.

In some embodiments of the invention, the protrusion is the same shape as the recess.

In some embodiments of the present invention, the shape of the convex portion is at least one of a columnar shape, a spherical shape, and a conical shape.

in some embodiments of the present invention, each of the protrusions has the same shape, and each of the protrusions has the same height.

In some embodiments of the present invention, the number of the convex portions is the same as the number of the concave portions, and each convex portion is embedded in the concave portion corresponding to the convex portion.

In some embodiments of the present invention, the number of the protrusions is plural, and the plural protrusions are distributed on the surface of the dielectric layer in an array manner.

In some embodiments of the invention, the distance between two adjacent protrusions is the same.

In some embodiments of the present invention, the first planar electrode and the second planar electrode are parallel to each other.

According to a second aspect of the present invention, there is provided a method of manufacturing a planar capacitive sensor, comprising the steps of:

Manufacturing a second planar electrode;

Manufacturing a dielectric layer and a convex part on the second planar electrode;

and manufacturing a concave part and a first plane electrode on the dielectric layer and the convex part.

According to a third aspect of the present invention, there is provided a method of manufacturing a planar capacitive sensor, comprising the steps of:

manufacturing a first planar electrode and a concave part;

Manufacturing a convex part and a dielectric layer on the first plane electrode and the concave part;

And manufacturing a second planar electrode on the dielectric layer.

According to the planar capacitive sensor and the manufacturing method thereof provided by the embodiment of the invention, the structure of the electrode at one side of the planar capacitive sensor is changed, so that one side of the planar electrode is changed into a three-dimensional structure from a planar structure, and when the planar capacitive sensor is bent inwards or outwards, the change curves of the capacitance value along with the bending angle are not the same any more. Therefore, the planar capacitive sensor can be directly judged to be bent inwards or outwards through two different change curves, and the display is judged to be bent inwards or outwards.

drawings

in order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, it is obvious that the drawings in the following description are only some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to the drawings without creative efforts.

FIG. 1 is a schematic cross-sectional view of a prior art planar capacitive sensor;

FIG. 2 is a schematic diagram of capacitance change of a planar capacitive sensor after bending inward or outward in the prior art;

FIG. 3 is a schematic cross-sectional view of a planar capacitive sensor in accordance with an embodiment of the invention;

FIG. 4 is a schematic cross-sectional view of a planar capacitive sensor in accordance with another embodiment of the invention;

FIG. 5 is a schematic cross-sectional view of a planar capacitive sensor in accordance with yet another embodiment of the invention

FIG. 6 is a schematic cross-sectional view of a planar capacitive sensor in accordance with yet another embodiment of the invention

FIG. 7 is a schematic diagram illustrating the capacitance change of a planar capacitive sensor after bending inward or outward according to an embodiment of the present invention;

FIG. 8 is a flow chart of a method of fabricating a planar capacitive sensor in accordance with one embodiment of the present invention;

Fig. 9 is a flow chart of a method of fabricating a planar capacitive sensor in accordance with another embodiment of the present invention.

Detailed Description

In order to make the technical solutions of the present invention better understood, the technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.

Unless defined otherwise, technical or scientific terms used herein shall have the ordinary meaning as understood by one of ordinary skill in the art to which this invention belongs. The use of "first," "second," and similar terms in the present application do not denote any order, quantity, or importance, but rather the terms are used to distinguish one element from another. Also, the use of the terms "a," "an," or "the" and similar referents do not denote a limitation of quantity, but rather denote the presence of at least one. The word "comprising" or "comprises", and the like, means that the element or item listed before the word covers the element or item listed after the word and its equivalents, but does not exclude other elements or items. The terms "connected" or "coupled" and the like are not restricted to physical or mechanical connections, but may include electrical connections, whether direct or indirect. "upper", "lower", "left", "right", and the like are used merely to indicate relative positional relationships, and when the absolute position of the object being described is changed, the relative positional relationships may also be changed accordingly.

in order to solve the problems in the prior art, embodiments of the present invention provide a planar capacitive sensor capable of self-judging whether the sensor is bent inward or outward. Fig. 3 is a schematic cross-sectional view of a planar capacitive sensor according to an embodiment of the present invention. As an embodiment of the invention, the planar capacitive sensor comprises a first planar electrode 1, a second planar electrode 2 and a dielectric layer 3, wherein the first planar electrode 1 is arranged opposite to the second planar electrode 2, and the dielectric layer 3 is arranged between the first planar electrode 1 and the second planar electrode 2. The dielectric layer 3 is provided with a convex portion 31 on the surface facing the first planar electrode 1, the first planar electrode 1 is provided with a concave portion 11 on the surface facing the dielectric layer 3, and the convex portion 31 is embedded in the concave portion 11.

according to the planar capacitive sensor provided by the embodiment of the invention, the structure of the electrode on one side of the planar capacitive sensor is changed, so that one side of the planar electrode is changed into a three-dimensional structure from a planar structure, and when the planar capacitive sensor is bent inwards or outwards, the change curves of the capacitance value along with the bending angle are not the same any more, as shown in fig. 7. Therefore, the planar capacitive sensor can be directly judged to be bent inwards or outwards through two different change curves, and the display is judged to be bent inwards or outwards.

It should be noted that in fig. 7, the two curves are only exemplarily shown in the embodiment of the present invention, and only for the purpose of indicating that the two curves are no longer coincident. In fact, the shape of the curve is related to the structure of the convex portion 31 and the concave portion 11, and is not limited to the shape shown in fig. 7.

in the embodiment of the present invention, as shown in fig. 3 to 6, the first planar electrode 1 and the second planar electrode 2 are parallel to each other, so that the planar capacitive sensor can be used to detect the bending condition of the display, thereby determining whether the display is bent inward or outward. Alternatively, the shape of the protruding portion 31 is the same as that of the recessed portion 11, so that the protruding portion 31 can be completely embedded into the recessed portion 11, thereby keeping the planes of the first planar electrode 1 and the second planar electrode 2 parallel.

it should be noted that the shape of the protruding portion 31 may be any shape as long as the structures of the first planar electrode 1 and the second planar electrode 2 are asymmetric, and then the change curves of the capacitance values along with the bending angles during inward bending and outward bending are not the same, so that it can be directly determined that the planar capacitive sensor is inward bent or outward bent. Alternatively, as shown in fig. 3 to 6, the shape of the convex portion 31 may be at least one of a columnar shape, a spherical shape, and a conical shape to facilitate the fabrication of the convex portion 31 and the concave portion 11.

In still another embodiment of the present invention, each of the protrusions 31 has the same shape, and each of the protrusions 31 has the same height, so that the protrusions 31 and the depressions 11 can be easily formed. Accordingly, the shape of each recess 11 is the same, and the depth of each recess 11 is the same. Alternatively, the number of the convex portions 31 is the same as the number of the concave portions 11, and each convex portion 31 is embedded in the concave portion 11 corresponding thereto. Therefore, each of the recesses 11 is embedded with a protrusion 31, so that the first planar electrode 1 is parallel to the second planar electrode 2 for easy installation on the display.

In another embodiment of the present invention, the number of the protrusions 31 is plural, and the plural protrusions 31 are distributed on the surface of the dielectric layer 3 in an array manner to significantly improve the degree of distinction between the inflected line and the outbound line, and to separate the inflected line and the outbound line as much as possible, thereby facilitating the quick determination of the inflexion or the outbound. In still another embodiment of the present invention, the distance between two adjacent protrusions 31 is the same, and the protrusions 31 and the depressions 11 are made in a square shape.

an embodiment of the present invention further provides a manufacturing method of a planar capacitive sensor, as shown in fig. 8, which is a flowchart of the manufacturing method of the planar capacitive sensor according to an embodiment of the present invention. Optionally, the manufacturing method of the planar capacitive sensor includes the following steps:

step 801, manufacturing a second planar electrode;

Step 802, manufacturing a dielectric layer and a convex part on the second planar electrode;

Step 803, a recess and a first planar electrode are formed on the dielectric layer and the protrusion.

In this embodiment, the second planar electrode 2 is first fabricated, then the dielectric layer 3 and the protrusion 31 are fabricated on the second planar electrode 2, and finally the recess 11 and the first planar electrode 1 are fabricated on the dielectric layer 3 and the protrusion 31. The dielectric layer 3 and the protruding part 31 can be manufactured at the same time, or the dielectric layer 3 can be manufactured first, and then the protruding part 31 is manufactured on the dielectric layer 3; the recess 11 and the first planar electrode 1 may be fabricated at the same time, or the recess 11 may be fabricated first and then the first planar electrode 1 may be fabricated.

alternatively, the dielectric layer 3 may be exposed by a Half-tone exposure process, so that the convex portion 31 is formed on the dielectric layer 3. The dielectric layer 3 may be an organic dielectric layer or an inorganic dielectric layer. Alternatively, the concave portion 11 and the first planar electrode 1 may be simultaneously formed by sputtering or coating, so as to finally obtain the planar capacitive sensor, and then different capacitance change values are presented when the planar capacitive sensor is bent inward and bent outward, that is, the inward bending or the outward bending can be directly distinguished. The manufacturing method has the advantages of simple manufacturing and low process cost.

An embodiment of the present invention further provides a manufacturing method of a planar capacitive sensor, as shown in fig. 9, which is a flowchart of a manufacturing method of a planar capacitive sensor according to another embodiment of the present invention. Optionally, the manufacturing method of the planar capacitive sensor includes the following steps:

Step 901, manufacturing a first planar electrode and a concave part;

Step 902, forming a protrusion and a dielectric layer on the first planar electrode and the recess;

step 903, fabricating a second planar electrode on the dielectric layer.

In this embodiment, the first planar electrode 1 and the recess 11 are first fabricated, then the protrusion 31 and the dielectric layer 3 are fabricated on the first planar electrode 1 and the recess 11, and finally the second planar electrode 2 is fabricated on the dielectric layer 3. The first planar electrode 1 and the concave part 11 can be manufactured at the same time, or the first planar electrode 1 can be manufactured first, and then the concave part 11 is manufactured on the first planar electrode 1; the protrusion 31 and the dielectric layer 3 may be formed simultaneously, or the protrusion 31 may be formed first and then the dielectric layer 3 may be formed.

alternatively, the first planar electrode 1 may be exposed by a Half-tone exposure process, so as to form the recess 11 on the first planar electrode 1. The dielectric layer 3 may be an organic dielectric layer or an inorganic dielectric layer. Alternatively, the protrusion 31 and the dielectric layer 3 may be formed simultaneously by coating or chemical vapor deposition. And finally, manufacturing a second planar electrode 2 on the dielectric layer 3 by adopting a sputtering or coating method, thereby finally obtaining the planar capacitance sensor, and further presenting different capacitance change values when the planar capacitance sensor is bent inwards and outwards, namely directly distinguishing the inward bending or the outward bending. The manufacturing method has the advantages of simple manufacturing and low process cost.

Those of ordinary skill in the art will understand that: the discussion of any embodiment above is meant to be exemplary only, and is not intended to intimate that the scope of the disclosure, including the claims, is limited to these examples; within the idea of the invention, also technical features in the above embodiments or in different embodiments may be combined and there are many other variations of the different aspects of the invention as described above, which are not provided in detail for the sake of brevity. Therefore, any omissions, modifications, substitutions, improvements and the like that may be made without departing from the spirit and principles of the invention are intended to be included within the scope of the invention.