阅读说明：本技术 基于激光化学气相沉积的微纳三维打印方法及装置 (Micro-nano 3 D-printing method and device based on laser chemical vapor deposition ) 是由 朱国栋 龚大卫 蒋玉龙 于 2019-09-11 设计创作，主要内容包括：本发明提供了基于激光化学气相沉积的微纳三维打印方法,将激光化学沉积与基于微管的定域气体喷射技术相结合,实现广泛材料体系的微纳3D打印,且提高了打印精度。激光器发射出来的激光束经由光学元件组后汇聚到试样表面待加工微区；反应气体和缓冲气体经混合注入到气体腔内；气体腔经转接头与微管连通；反应气和缓冲气的混合气体经微管尖端喷射到试样表面待加工微区,并经激光汇聚光束辐照；在激光热解效应和/或光解效应作用下,反应气体解离,分解产物沉积在试样表面形成镀层,其中微管尖端具有纳米、或微米尺寸的内径,根据预设图案,协同调控电控平移台运动,实现微管和试样表面的三维相对移动,进而产生三维微纳尺度图案。(The present invention provides the micro-nano 3 D-printing methods based on laser chemical vapor deposition, and Laser chemical deposition is combined with the localization gas-jet technique based on micro-pipe, realizes the micro-nano 3D printing of extensive material system, and improve printing precision.The laser beam that laser emits is via converging to specimen surface microcell to be processed after optical element group；Reaction gas and buffer gas are through in mixed injection to air chamber；Air chamber is connected to through adapter with micro-pipe；The mixed gas of the gentle qi of chong channel ascending adversely of reaction gas is ejected into specimen surface microcell to be processed through micro-pipe tip, and irradiates through laser converging beam；Under laser pyrolysis effect and/or the effect of photodissociation effect, reaction gas dissociation, decomposition product is deposited on specimen surface and forms coating, wherein micro-pipe tip has the internal diameter of nanometer or micron-scale, according to predetermined pattern, the movement of coordinated regulation electronic control translation stage, realizes the three-dimensional relative movement of micro-pipe and specimen surface, and then generates three-D micro-nano scale pattern.)

1. the micro-nano 3 D-printing method based on laser chemical vapor deposition, it is characterised in that: the laser that laser emits Beam is via converging to specimen surface microcell to be processed after optical element group；Reaction gas and buffer gas are through mixed injection to gas It is intracavitary；Air chamber is connected to through adapter with micro-pipe；The mixed gas of the gentle qi of chong channel ascending adversely of reaction gas is ejected into sample table through micro-pipe tip Face microcell to be processed, and irradiated through laser converging beam；Under laser pyrolysis effect and/or the effect of photodissociation effect, reaction gas Dissociation, decomposition product are deposited on specimen surface and form coating, and wherein micro-pipe tip has the internal diameter of nanometer or micron-scale, root According to predetermined pattern, the three-dimensional relative movement of micro-pipe and specimen surface is realized in the movement of coordinated regulation electronic control translation stage, and then generates three Tie up micro/nano-scale pattern.

2. the micro-nano 3 D-printing method based on laser chemical vapor deposition as described in claim 1, it is characterised in that: air-flow After ejecting via micro-pipe tip, air-flow beam diameter increases with the increase for leaving micro-pipe distance between two tips, when micro-pipe tip When being closer with sample, air flow stream diffusion is weaker when air flow stream is ejected into specimen surface, and air flow stream retains micron even Nano-precision；Since laser beam spot irradiation is in the air flow stream between micro-pipe tip and specimen surface, reaction gas is decomposed, point It solves product deposition and forms the micron even coating of nano-precision size in specimen surface.

3. the micro-nano 3 D-printing method based on laser chemical vapor deposition as claimed in claim 2, it is characterised in that: laser It is sprayed by micro-pipe tip to specimen surface after reaction gas mixes according to a certain percentage with buffering gas in chemical vapor deposition processes, it is micro- The operating distance of tip end and specimen surface is between 10nm to 1mm.

4. the micro-nano 3 D-printing method based on laser chemical vapor deposition as described in claim 1, it is characterised in that: pass through Translation stage accurately controls the specimen surface spacing at micro-pipe tip and lower part and ensures that the irradiation of laser converging beam is sprayed to micro-pipe tip In the air flow stream of injection, and then realize the 3 D-printing of micro-nano precision.

5. the micro-nano 3 D-printing method based on laser chemical vapor deposition as described in claim 1, it is characterised in that: described The position that the position of laser irradiation is exported relative to air flow stream keeps opposing stationary, when micro-pipe is mobile, the position of laser irradiation with Capillary synchronizing moving.

6. the micro-nano 3 D-printing method based on laser chemical vapor deposition as described in claim 1, it is characterised in that: in order to Laser chemical vapor deposition rate is improved, sample is done and is heated.

7. the micro-nano 3 D-printing method based on laser chemical vapor deposition as described in claim 1, it is characterised in that: according to Environmental selection is placed under atmospheric environment or works in seal chamber.

8. the micro-nano 3 D-printing device based on laser chemical vapor deposition, it is characterised in that: it includes electronic control translation stage and position Shift controller, computer, laser, micro-pipe, sample mounting table, air chamber, the exit portion of the air chamber are connected with described micro- The bigger diameter end of pipe, the bottom tip of the micro-pipe are located at top or the side arrangement of the sample mounting table, the laser hair Laser beam out generates the region to be processed that converging beam is incident on sample by optical element group, and the electronic control translation stage connects Connect the displacement controller, the sample that the electronic control translation stage and displacement controller control micro-pipe and be placed on sample mounting table Relative position movement is carried out, external computer control connects the displacement controller.

9. the micro-nano 3 D-printing device based on laser chemical vapor deposition as claimed in claim 8, it is characterised in that: described The entrance of air chamber has the outlet of first flow regulating valve by piping connection, and the entrance of the first flow regulating valve passes through three Logical and pipeline is connected separately with the outlet of the outlet of second flow regulating valve, third flow control valve, and the second flow is adjusted The entrance of valve is specially to buffer gas entrance, and the entrance of the third flow control valve is specially reaction gas entrance.

10. the micro-nano 3 D-printing device based on laser chemical vapor deposition as claimed in claim 8, it is characterised in that: institute Stating electronic control translation stage is specially one-dimensional translation stage, two-dimension translational platform or D translation platform, and the electronic control translation stage is for regulating and controlling examination The movement of sample or the movement for regulating and controlling micro-pipe, when the electronic control translation stage adopts a split structure, part translation platform is connected with micro-pipe, Part translation platform is connected with sample, micro-pipe and sample relative motion when work.

11. the micro-nano 3 D-printing device based on laser chemical vapor deposition as claimed in claim 8, it is characterised in that: when It further include having manual translation platform, thermal station, the manual translation platform is supported on institute when electronic control translation stage is moved for Control Assay It states on the top platform of electronic control translation stage, the thermal station is supported on the top platform of the manual translation platform, and the thermal station is For the sample mounting table.

12. the micro-nano 3 D-printing device based on laser chemical vapor deposition as claimed in claim 8, it is characterised in that: institute State micro-pipe bottom tip be located at the sample mounting table top arrangement when, the laser is located at the electronic control translation stage Side location arrangements, the laser is laterally slanted converging beam in sample by the optical element group under working condition In the air flow stream that the irradiation of the converging beam of region to be processed and laser is ejected to micro-pipe tip.

13. the micro-nano 3 D-printing device based on laser chemical vapor deposition as claimed in claim 8, it is characterised in that: institute When stating the bottom tip of micro-pipe and being located at the side of sample mounting table upper surface, the laser is located at the electronic control translation stage Top position arrangement, under working condition the laser it is vertical to laser beam by the optical element group by converged light The region to be processed in sample is penetrated in beam orthographic projection and the converging beam of laser irradiates in the air flow stream ejected to micro-pipe tip.

14. the micro-nano 3 D-printing device based on laser chemical vapor deposition as claimed in claim 8, it is characterised in that: institute Stating micro-pipe is specially the capillary that a variety of materials are made, and the liquid outlet of the capillary forms micro-pipe point by hot-stretch End.

15. the micro-nano 3 D-printing device based on laser chemical vapor deposition as claimed in claim 8, it is characterised in that: institute Stating micro-pipe is specially the silicon-base plane micro tube array comprising multiple micro-pipes for using MEMS technology to process.

16. the micro-nano 3 D-printing device based on laser chemical vapor deposition as described in claim 1, it is characterised in that: when When device is placed in seal chamber, the seal chamber includes optical window, and the seal chamber covers micro-pipe tip, sample mounting table, The converging beam of the laser formed by the optical element group by optical window penetrate region to be processed in sample, And the converging beam of laser irradiates in the air flow stream ejected to micro-pipe tip.

17. the micro-nano 3 D-printing device based on laser chemical vapor deposition as claimed in claim 16, it is characterised in that: institute It states seal chamber and is also connected with pressure gage, charge valve, vacuum pump.

Technical field

The present invention relates to the technical fields of chemical vapor deposition, and the micro-nano specially based on laser chemical vapor deposition is three-dimensional Method of printing, the present invention also provides the devices using this method.

Background technique

Chemical vapor deposition (CVD) forms film and chemical reaction by occurring in specimen surface.It usually must be at high temperature It carries out, and is difficult to realize constituency film forming.Laser chemical vapor deposition (LCVD) technique developed in recent years has deposition temperature It spends low, localization film forming, without advantages such as reticle pattern printings, is widely used in fields such as microelectronics.LCVD working principle master To include two classes: (1) be pyrolyzed effect: causing specimen surface local temperature to increase under the irradiation of laser focus on light beam, at local positions Reactant gas molecules thermally decomposed, decomposition product be gathered in specimen surface film forming.(2) photodissociation effect: reactant gas molecules are inhaled The laser of specific wavelength is received to generate decomposition, decomposition product is deposited on specimen surface.No matter however which kind of principle, decision processing The principal element of pattern resolution is laser beam spot diameter, and the resolution ratio of LCVD print pattern only has tens micron dimensions at present, It is not able to satisfy the demand of higher precision.

Summary of the invention

In view of the above-mentioned problems, will swash the present invention provides the micro-nano 3 D-printing method based on laser chemical vapor deposition Photochemical precipitation is combined with the localization gas-jet technique based on micro-pipe, realizes the micro-nano 3D printing of extensive material system, and Improve printing precision.

Micro-nano 3 D-printing method based on laser chemical vapor deposition, it is characterised in that: what laser emitted swashs Light beam is via converging to specimen surface microcell to be processed after optical element group；Reaction gas and buffer gas are through mixed injection to gas In body cavity；Air chamber is connected to through adapter with micro-pipe；The mixed gas of the gentle qi of chong channel ascending adversely of reaction gas is ejected into sample through micro-pipe tip Surface microcell to be processed, and irradiated through laser converging beam；Under laser pyrolysis effect and/or the effect of photodissociation effect, reaction gas Body dissociation, decomposition product are deposited on specimen surface and form coating, and wherein micro-pipe tip has the internal diameter of nanometer or micron-scale, According to predetermined pattern, the three-dimensional relative movement of micro-pipe and specimen surface is realized in the movement of coordinated regulation electronic control translation stage, and then is generated Three-D micro-nano scale pattern.

It is further characterized by: after air-flow is ejected via micro-pipe tip, air-flow beam diameter is sharp with micro-pipe is left It holds the increase of distance and increases, when micro-pipe tip is closer with sample, air flow stream expands when air flow stream is ejected into specimen surface Scattered degree is weaker, and air flow stream retains micron even nano-precision；Due to laser beam spot irradiation micro-pipe tip and specimen surface it Between air flow stream on, reaction gas decomposes, and decomposition product is deposited on specimen surface and forms micron even nano-precision size Coating；

It is sprayed after reaction gas mixes according to a certain percentage with buffering gas during laser chemical vapor deposition by micro-pipe tip To specimen surface, the operating distance of micro-pipe tip and specimen surface is between 10nm to 1mm；

The specimen surface spacing at micro-pipe tip and lower part is accurately controlled by translation stage and ensures that laser converging beam irradiates In the air flow stream ejected to micro-pipe tip, and then realize the 3 D-printing of micro-nano precision；

The position that the position of the laser irradiation is exported relative to air flow stream keeps opposing stationary, when micro-pipe is mobile, laser The position of irradiation is with capillary synchronizing moving；

In order to improve laser chemical vapor deposition rate, sample is done and is heated, any heat treatment work applicatory Skill can be applied；

Angle between the converging beam of incident laser, micro-pipe and sample plane needs to adjust according to real work；

When the bottom tip of the micro-pipe is located at the top arrangement of the sample, the laser is located at the automatically controlled translation The side location arrangements of platform, the laser is laterally slanted converging beam in examination by the optical element group under working condition In the air flow stream that the region to be processed of sample and the converging beam irradiation of laser are ejected to micro-pipe tip；

When the bottom tip of the micro-pipe is located at the side of the sample upper surface, the laser is located at described automatically controlled flat The top position of moving stage arranges that the vertical of the laser will converge to laser beam by the optical element group under working condition The region to be processed in sample is penetrated in focal beam orthographic projection and the converging beam of laser irradiates the air flow stream ejected to micro-pipe tip On；

The micro-pipe is specially the capillary that a variety of materials are made, and the liquid outlet of the capillary passes through hot-stretch shape At micro-pipe tip；

The micro-pipe is specially the silicon-base plane micro-pipe battle array comprising multiple micro-pipes for using MEMS technology to process Column；

It is placed under atmospheric environment according to environmental selection or is worked in seal chamber；

When being placed in seal chamber, the seal chamber covers micro-pipe tip, sample mounting table, and passing through for the laser is described The converging beam that optical element group is formed penetrates the converging beam irradiation in region to be processed and laser in sample by optical window In the air flow stream ejected to micro-pipe tip.

A kind of micro-nano 3 D-printing device based on laser chemical vapor deposition, it is characterised in that: it includes automatically controlled translation Platform and displacement controller, computer, laser, micro-pipe, sample mounting table, air chamber, the exit portion of the air chamber are connected with The bigger diameter end of the micro-pipe, the bottom tip of the micro-pipe is located at top or the side arrangement of the sample mounting table, described to swash The laser beam that light device issues generates the region to be processed that converging beam is incident on sample by optical element group, described automatically controlled flat Moving stage connects the displacement controller, the electronic control translation stage and displacement controller control micro-pipe and is placed on sample mounting table Sample carry out that relative position is mobile, external computer control connects the displacement controller.

It is further characterized by:

The entrance of the air chamber has the outlet of first flow regulating valve, the first flow regulating valve by piping connection Entrance the outlet of second flow regulating valve, the outlet of third flow control valve are connected separately with by threeway and pipeline, it is described The entrance of second flow regulating valve is specially to buffer gas entrance, and the entrance of the third flow control valve is specially that reaction gas enters Mouthful；

The electronic control translation stage is specially one-dimensional translation stage, two-dimension translational platform or D translation platform, the electronic control translation stage For regulating and controlling the movement of sample or regulating and controlling the movement of micro-pipe, when the electronic control translation stage adopts a split structure, part translation platform It is connected with micro-pipe, part translation platform is connected with sample, micro-pipe and sample relative motion when work；

It further include having manual translation platform, thermal station when electronic control translation stage is moved for Control Assay, the manual translation Platform is supported on the top platform of the electronic control translation stage, and the thermal station is supported on the top platform of the manual translation platform, The thermal station is the sample mounting table；

When the bottom tip of the micro-pipe is located at the top arrangement of the sample mounting table, the laser is located at the electricity The side location arrangements of translation stage are controlled, the laser is laterally oblique by converging beam by the optical element group under working condition The converging beam for penetrating region to be processed and laser in sample irradiates in the air flow stream ejected to micro-pipe tip；

When the bottom tip of the micro-pipe is located at the side of sample mounting table upper surface, the laser is located at described The top position of electronic control translation stage arranges that the vertical of the laser passes through the optical element to laser beam under working condition What the converging beam irradiation that the region to be processed and laser in sample are penetrated in converging beam orthographic projection by group was ejected to micro-pipe tip In air flow stream；

It is sprayed after reaction gas mixes according to a certain percentage with buffering gas during laser chemical vapor deposition by micro-pipe tip To specimen surface, the operating distance of micro-pipe tip and specimen surface is between 10nm to 1mm；

The micro-pipe is specially the capillary that a variety of materials are made, and the liquid outlet of the capillary passes through hot-stretch shape At micro-pipe tip；

The micro-pipe is specially the silicon-base plane micro-pipe battle array comprising multiple micro-pipes for using MEMS technology to process Column；

Device is placed under atmospheric environment according to environmental selection or works in seal chamber；

When device is placed in seal chamber, the seal chamber includes optical window, seal chamber covering micro-pipe tip, examination Sample mounting table, the converging beam formed by the optical element group of the laser by optical window penetrate in sample to In the air flow stream that the irradiation of the converging beam of machining area and laser is ejected to micro-pipe tip；

The seal chamber is also connected with pressure gage, charge valve, vacuum pump.

After adopting the above technical scheme, the laser beam that emits of laser is via converging to sample table after optical element group Face microcell to be processed；Reaction gas and buffer gas are through in mixed injection to air chamber；Air chamber is connected to through adapter with micro-pipe； The mixed gas of the gentle qi of chong channel ascending adversely of reaction gas is ejected into specimen surface microcell to be processed through micro-pipe tip, and through laser converging beam spoke According to；Under laser pyrolysis effect and/or the effect of photodissociation effect, reaction gas dissociation, decomposition product is deposited on specimen surface and is formed Coating, wherein micro-pipe tip has the internal diameter of nanometer or micron-scale, according to predetermined pattern, coordinated regulation electronic control translation stage fortune It is dynamic, the three-dimensional relative movement of micro-pipe and specimen surface is realized, and then generate three-D micro-nano scale pattern, by Laser chemical deposition It is combined with the localization gas-jet technique based on micro-pipe, realizes the micro-nano 3D printing of extensive material system, and due to micro-pipe point The mixed gas jet port at end has the internal diameter of nanometer or micron-scale, when micro-pipe tip and sample are closer, it is ensured that gas Diffusion is weaker, and which raises printing precision.

Detailed description of the invention

Fig. 1 is one structural schematic diagram of specific embodiment of the device applied to atmospheric environment of the invention；

Fig. 2 is two structural schematic diagram of specific embodiment of the device applied to atmospheric environment of the invention；

Fig. 3 is three structural schematic diagram of specific embodiment of the device for being applied to sealing transluminal operation of the invention；

Fig. 4 is four structural schematic diagram of specific embodiment of the device for being applied to sealing transluminal operation of the invention；

Title corresponding to serial number is as follows in figure:

First flow regulating valve 1, second flow regulating valve 2, third flow control valve 3, air valve 4, air valve 5, automatically controlled translation Platform 6, displacement controller 7, computer 8, laser 9, micro-pipe 10, air chamber 11, optical element group 12, converging beam 13, sample 14, Manual translation platform 15, thermal station 16, seal chamber 17, optical window 18, charge valve 19, vacuum pump 20, pressure gage 21, sedimentary 22.

Specific embodiment

Micro-nano 3 D-printing method based on laser chemical vapor deposition: the laser beam that laser emits is via optics Specimen surface microcell to be processed is converged to after element group；Reaction gas and buffer gas are through in mixed injection to air chamber；Gas Chamber is connected to through adapter with micro-pipe；Reaction gas eases up, and through micro-pipe tip to be ejected into specimen surface to be processed micro- for the mixed gas of qi of chong channel ascending adversely Area, and irradiated through laser converging beam；Under laser pyrolysis effect and/or the effect of photodissociation effect, reaction gas dissociation is decomposed and is produced Object is deposited on specimen surface and forms coating, and wherein micro-pipe tip has the internal diameter of nanometer or micron-scale, according to predetermined pattern, The movement of coordinated regulation electronic control translation stage, realizes the three-dimensional relative movement of micro-pipe and specimen surface, and then generates three-D micro-nano scale Pattern.

After air-flow is ejected via micro-pipe tip, air-flow beam diameter increases with the increase for leaving micro-pipe distance between two tips Add, when micro-pipe tip is closer with sample, air flow stream diffusion is weaker when air flow stream is ejected into specimen surface, air flow stream Retain micron even nano-precision；Since laser beam spot irradiation is in the air flow stream between micro-pipe tip and specimen surface, reaction Gas decomposes, and decomposition product is deposited on specimen surface and forms the micron even coating of nano-precision size；

It is sprayed after reaction gas mixes according to a certain percentage with buffering gas during laser chemical vapor deposition by micro-pipe tip To specimen surface, the operating distance of micro-pipe tip and specimen surface is between 5mm to 100nm；

The specimen surface spacing at micro-pipe tip and lower part is accurately controlled by translation stage and ensures that laser converging beam irradiates In the air flow stream ejected to micro-pipe tip, and then realize the 3 D-printing of micro-nano precision；

The position that the position of laser irradiation is exported relative to air flow stream keeps opposing stationary, when micro-pipe is mobile, laser irradiation Position with capillary synchronizing moving；

In order to improve laser chemical vapor deposition rate, sample can be done and be heated, any heat treatment applicatory Technique can be applied；

Angle between the converging beam of incident laser, micro-pipe and sample plane needs to adjust according to real work；

When the bottom tip of the micro-pipe is located at the top arrangement of the sample, the laser is located at the automatically controlled translation The side location arrangements of platform, the laser is laterally slanted converging beam in examination by the optical element group under working condition In the air flow stream that the region to be processed of sample and the converging beam irradiation of laser are ejected to micro-pipe tip；

When the bottom tip of the micro-pipe is located at the side of the sample upper surface, the laser is located at described automatically controlled flat The top position of moving stage arranges that the vertical of the laser will converge to laser beam by the optical element group under working condition The region to be processed in sample is penetrated in focal beam orthographic projection and the converging beam of laser irradiates the air flow stream ejected to micro-pipe tip On；

The micro-pipe is specially the capillary that a variety of materials are made, and the liquid outlet of the capillary passes through hot-stretch shape At micro-pipe tip；

The micro-pipe is specially the silicon-base plane micro-pipe battle array comprising multiple micro-pipes for using MEMS technology to process Column；

It is placed under atmospheric environment according to environmental selection or is worked in seal chamber；

When being placed in seal chamber, the seal chamber covers micro-pipe tip, sample mounting table, and passing through for the laser is described The converging beam that optical element group is formed penetrates the converging beam irradiation in region to be processed and laser in sample by optical window In the air flow stream ejected to micro-pipe tip.

A kind of micro-nano 3 D-printing device based on laser chemical vapor deposition, see Fig. 1-Fig. 4: it includes electronic control translation stage 6 and displacement controller 7, computer 8, laser 9, micro-pipe 10, sample mounting table, air chamber 11, the exit portion of air chamber 11 connects It is connected to the bigger diameter end of micro-pipe 10, the bottom tip of micro-pipe 10 is located at the top of sample mounting table or side arrangement, laser 9 issue Laser beam converging beam 13 generated by optical element group 12 be incident on the region to be processed of sample, electronic control translation stage 6 connects Connect displacement controller 7, electronic control translation stage 6 and displacement controller control 7 micro-pipes 10 and the sample 14 that is placed on sample mounting table Carry out relative position movement, the external control connection displacement controller 7 of computer 8.

Optical element group 12 includes but is not limited to for plane mirror, lens；

The entrance of air chamber 11 has the outlet of first flow regulating valve 1 by piping connection, and first flow regulating valve 1 enters Mouth is connected separately with the outlet of second flow regulating valve 2, the outlet of third flow control valve 3, second by threeway and pipeline The entrance of adjustable valve 2 is specially to buffer gas entrance, and the entrance of third flow control valve 3 is specially reaction gas entrance；

Electronic control translation stage 6 is specially one-dimensional translation stage, two-dimension translational platform or D translation platform, and electronic control translation stage 6 is for adjusting It controls the movement of sample 14 or regulates and controls the movement of micro-pipe 10, when electronic control translation stage 6 adopts a split structure, part translation platform and micro-pipe Connection, part translation platform connects with sample, micro-pipe and sample relative motion when work；

It further include having manual translation platform 15, thermal station 16, manually when electronic control translation stage 6 is moved for Control Assay 14 Translation stage 15 is supported on the top platform of electronic control translation stage 6, and thermal station 16 is supported on the top platform of manual translation platform 15, heat Platform 16 is sample mounting table；

When the bottom tip of micro-pipe 10 is located at the top arrangement of sample mounting table, laser 9 is located at the one of electronic control translation stage 6 Side position arrangement, under working condition laser 9 by optical element group 12 by 13 side of converging beam to oblique fire in sample 14 to In the air flow stream that the irradiation of the converging beam 13 of machining area and laser is ejected to 10 tip of micro-pipe；

When the bottom tip of micro-pipe 10 is located at the side of sample mounting table upper surface, laser 9 is located at electronic control translation stage 6 Top position arrangement, under working condition laser 9 it is vertical to laser beam by optical element group 12 by converging beam 13 just The converging beam 13 that region to be processed and laser in sample 14 are penetrated in projection irradiates the air flow stream ejected to 10 tip of micro-pipe On；

Micro-pipe 10 is specially the capillary that a variety of materials are made, and the liquid outlet of capillary forms micro-pipe by hot-stretch Tip；

Micro-pipe 10 is specially the silicon-base plane micro tube array comprising multiple micro-pipes processed with MEMS technology；

It is sprayed after reaction gas mixes according to a certain percentage with buffering gas during laser chemical vapor deposition by 10 tip of micro-pipe It is incident upon 14 surface of sample, the operating distance on 14 surface of 10 tip of micro-pipe and sample is between 10nm to 1mm；

Device is placed under atmospheric environment according to environmental selection or works in seal chamber；

When device is placed in seal chamber 17, seal chamber 17 includes optical window 18, seal chamber 17 cover 10 tip of micro-pipe, Sample mounting table, sample 14, laser 9 by optical element group 12 formed converging beam 13 by optical window 18 penetrate in In the air flow stream that the region to be processed of sample 14 and the irradiation of converging beam 12 of laser are ejected to 10 tip of micro-pipe；

Seal chamber 17 is also connected with pressure gage 21, charge valve 19, vacuum pump 20, the ventilation connection sealing of air valve 5 of charge valve 19 Chamber 17, vacuum pump 20 connect Ei seal chamber 17 by air valve 4.

When device is used for atmospheric environment, including laser 9, optical element group 12 (including plane mirror, lens etc.), micro-pipe 10, air chamber 11, first flow regulating valve 1, second flow regulating valve 2, third flow control valve 3, sample 14, thermal station 16, hand The components such as dynamic translation stage 15, electronic control translation stage 6, computer 8, optical microscopy (not marking in fig. 1).Thermal station 16 is as auxiliary Component, for being heated to sample 14.15 auxiliary electric control translation stage 6 of manual translation platform adjusts micro-pipe 10 and 14 relative position of sample.