阅读说明：本技术 拉伸弯曲柔性传感器及其制备方法 (Stretch bending flexible sensor and preparation method thereof ) 是由 段升顺 肖煜坤 吴俊� 于 2019-08-06 设计创作，主要内容包括：本发明公开的一种拉伸弯曲柔性传感器及其制备方法,其中拉伸弯曲柔性传感器包括功能电容层,基底支撑层,表面封装层和导电层。柔性基底层通过采用细菌纤维素纸/硅胶复合有机聚合物材料制备而成的矩形波弯曲形状结构使得拉伸弯曲柔性传感器具有高耐久度和稳定性；电极层引出Top+,Top-,Bottom+,Bottom-两对电接口,通过选择不同的电接口组合,可以实现对拉伸/压缩和弯曲的感知。本发明在基底支撑层的支撑下,柔性拉伸弯曲角度传感器具有固有的高拉伸性,高稳定性和高耐久度,本发明的柔性拉伸弯曲角度传感器由两种感知拉伸和弯曲两种功能感知模式；本发明制备简单,无污染,成本低,易于大规模生产制备。(A kind of stretch bending flexible sensor disclosed by the invention and preparation method thereof, wherein stretch bending flexible sensor includes function capacitor layers, base support layer, surface encapsulation layer and conductive layer.Flexible base layer makes stretch bending flexible sensor have high durability degree and stability by using the rectangular wave curved shape structure that bacteria cellulose paper/compound organic polymer material of silica gel is prepared；Electrode layer draws Top+, Top-, Bottom+, and electrical interface may be implemented to stretching/compressing and curved perception by selecting different electrical interfaces to combine by Bottom- two.For the present invention under the support of base support layer, soft stretch bending angle sensor has intrinsic high stretch, high stability and high durability degree, and soft stretch bending angle sensor of the invention stretches and be bent two kinds of function perceptual models by two kinds of perception；Present invention preparation is simple, pollution-free, at low cost, is easy to be mass produced preparation.)

1. a kind of stretch bending flexible sensor, which is characterized in that including base support layer (1), be provided on the basal layer Several inner groovies, the inner groovy are embedded with capacitor (2), are connected between the capacitor (2) by conductive layer (5), the substrate Supporting layer, conductive layer and capacitive surface are all covered with surface encapsulation layer (3).

2. stretch bending flexible sensor according to claim 1, which is characterized in that the base support layer is with square The compound organic polymer frame of bacteria cellulose paper/silica gel of shape wave curved shape.

3. stretch bending flexible sensor according to claim 1, which is characterized in that the conductive layer is using conductive copper gold Belong to thin layer, draws two pairs of electrodes interface Top+, Top-, Bottom+, Bottom- altogether.

4. stretch bending flexible sensor according to claim 1, which is characterized in that several capacitors, which are divided into two lines, to be set It sets on the base support layer.

5. stretch bending flexible sensor according to claim 1, which is characterized in that the capacitor is parallel plate capacitor, Including upper electrode layer (22), dielectric layer (21) and lower electrode layer (23), the dielectric layer (21) is arranged in upper electrode layer (22) between lower electrode layer (23).

6. stretch bending flexible sensor according to claim 5, which is characterized in that, the upper electrode layer and lower electrode Layer uses conductive copper adhesive tape, and the dielectric layer uses the two-sided foam tape of VHB polyacrylate.

7. according to stretch bending flexible sensor described in claim 1, which is characterized in that the surface encapsulation layer uses polyethylene Pyrrolidones is made.

8. as the described in any item stretch bending flexible sensors of claim 1-7 preparation method, which is characterized in that including with Lower step:

(1) commercial bacterial fibers suspension mix with silica gel 1:10 in mass ratio, magnetic stirring so that the two is uniformly mixed, it For after-pouring into rectangular wave curved shape mold, vacuum constant temperature is dry, and base support layer is prepared；

(2) it is bonded one layer of single-sided conductive viscosity copper strips in the two sides of the inner groovy of the base support layer of preparation, as function capacitor Upper/lower electrode layer in layer；Unify the copper strips conduct of layer single-sided conductive viscosity in the outer patch of the base support layer indent trench bottom of preparation Conductive layer is bonded conductive adhesive copper strips in the base support layer leftmost side of preparation and the turning of the rightmost side, respectively as upper layer Top electrode the interface Top+, Top- of concatenation function capacitor layers and the lower electrode interface Bottom of lower layer's concatenation function capacitor layers, Bottom-；

(3) the two-sided foam tape cuboid of the consistent VHB polyacrylate of the inner groovy of size and base support layer is placed in In the step (2) between upper/lower electrode layer, adhesive glue is applied to VHB dielectric layer surrounding, pressing make VHB dielectric layer and Upper/lower electrode layer is in close contact, and after drying at room temperature, is prepared into single capacitor, capacitor is together in series by the conductive layer in step (2), shape At function capacitor layers；

(4) polyvinylpyrrolidone and water 3:7 in mass ratio are mixed, is sprayed on the step (1)-(3) system after mixing evenly It is standby to obtain in each structure to get stretch bending flexible sensor.

Technical field

The present invention relates to flexible electronic sensors, and in particular to a kind of stretch bending flexible sensor and preparation method thereof.

Background technique

Current flexible sensor includes piezoelectric type, pressure resistance type, pressure/capacitance type and friction electric-type flexible sensor.Wherein, it presses Capacity sensor has many advantages, such as that structure is simple, dynamic response characteristic is good, depends on polar plate area in deformation process and changes, Distance between polar plate changes, and dielectric constant of the dielectric material, which changes, between pole plate realizes perception for pressure or deformation.

Most of current sensor depends on above-mentioned four kinds of working principles to realize for pressure/deformation perception, and Is still within for the perception of bending or the unconventional deformation of tensile layer, there is no perfect solutions at present the exploratory stage.And And the problem of due to sensing principle or flexible material itself, current soft stretch/bending angle sensor stability and resistance to It spends long poor, constrains the actual use of flexible sensor.

Summary of the invention

Goal of the invention: the object of the present invention is to provide a kind of stretch bending flexible sensor and preparation methods, solve existing The problem of sensor stability and durability difference.

Technical solution: stretch bending flexible sensor of the present invention, including base support layer, the base support layer On be provided with conductive layer and several capacitors, the base support layer, conductive layer and capacitive surface are all covered with surface encapsulation layer.

The base support layer is the compound organic polymeric frame of bacterial fibers resin/silica gel with rectangular wave curved shape Frame.

The conductive layer uses conductive copper thin metal layer, draws two pairs of electrodes interface Top+, Top-, Bottom+ altogether, Bottom-。

Several capacitors, which are divided into two lines, to be arranged on the base support layer

The capacitor is parallel plate capacitor, including upper electrode layer-dielectric layer-lower electrode layer.

The upper electrode layer and lower electrode layer use conductive copper adhesive tape, and the dielectric layer is double using VHB polyacrylate Face foam tape.

The surface encapsulation layer is made of polyvinylpyrrolidone.

The preparation method of stretch bending flexible sensor of the present invention, comprising the following steps:

1) commercial bacterial fibers suspension is mixed with silica gel 1:10 in mass ratio, magnetic stirs so that the two mixing is equal It is even, it is poured into rectangular wave curved shape mold later, vacuum constant temperature is dry, and base support layer is prepared；

(2) it is bonded one layer of single-sided conductive viscosity copper strips in the two sides of the inner groovy of the base support layer of preparation, as function Upper/lower electrode layer in capacitor layers；Unify layer single-sided conductive viscosity copper strips in the outer patch of the base support layer indent trench bottom of preparation As conductive layer, it is bonded conductive adhesive copper strips in the base support layer leftmost side of preparation and the turning of the rightmost side, respectively as Top electrode the interface Top+, Top- of upper layer concatenation function capacitor layers and the lower electrode interface of lower layer's concatenation function capacitor layers Bottom, Bottom-；

(3) the two-sided foam tape cuboid of the consistent VHB polyacrylate of the inner groovy of size and base support layer is put It is placed in the step (2) between upper/lower electrode layer, adhesive glue is applied to VHB dielectric layer surrounding, pressing makes VHB electricity be situated between Matter layer and upper/lower electrode layer are in close contact, and after drying at room temperature, are prepared into single capacitor, the conductive layer in step (2) connects capacitor Get up, forms function capacitor layers；

(4) polyvinylpyrrolidone and water 3:7 in mass ratio are mixed, is sprayed on the step (1)-after mixing evenly (3) it is prepared into each structure to get stretch bending flexible sensor.

The utility model has the advantages that the present invention, under the support of base support layer, soft stretch bending angle sensor has intrinsic High stretch, high stability and high durability degree, soft stretch bending angle sensor of the invention are stretched and curved by two kinds of perception Bent two kinds of function perceptual models；Present invention preparation is simple, pollution-free, at low cost, is easy to be mass produced preparation.

Detailed description of the invention

Fig. 1 is the structural diagram of the present invention；

Fig. 2 is circuit theory schematic diagram of the invention；

Fig. 3 is the structural schematic diagram of capacitor；

The back-end circuit design drawing of the position Fig. 4 present example.

Specific embodiment

Invention is further explained with reference to the accompanying drawing.

As shown in Figure 1-3, stretch bending flexible sensor, including function capacitor layers, base support layer 1, surface encapsulation layer 3 And conductive layer.The capacitor 2 that function capacitor layers are arranged by two row intervals forms, and conductive layer 5 and capacitor are arranged on base support layer, Base support layer, conductive layer and capacitive surface are all covered with surface encapsulation layer.

Wherein, base support layer is the organic polymer frame with inner groovy 4, and inner groovy is rectangular wave curved shape, Base support layer is prepared using mold pouring technique, and material is bacteria cellulose paper/material silica gel composite, and mold shape is Rectangular wave curved shape, this material and planform improve the stability and durability degree of stretch bending sensor.

Conductive layer 5 selects conductive copper one-faced tapes, on the organic polymer frame surface of bonded substrate supporting layer, and is formed Two pairs of electrodes interface Top+, Top-, Bottom+, Bottom-.

Two row capacitors are respectively placed in the upper recess rectangle and lower recess rectangle part of base support layer, wherein each row it is more A capacitor series system, each capacitor use parallel plate capacitor, including upper electrode layer 22- dielectric layer 21- lower electrode layer 23, In, upper electrode layer and lower electrode layer use conductive copper adhesive tape, and dielectric layer uses the two-sided foam tape of VHB polyacrylate, lead to The variation for crossing capacitor is realized to bending and the perception stretched.

Insulating layer material uses polyvinylpyrrolidone (PVP), is sprayed on device surface using spraying process, plays protection With the effect of electrical isolation.

When the preparation present invention, comprising the following steps:

(1) preparation of base support layer

Commercial bacterial fibers suspension is mixed with silica gel by certain mass ratio 1:10, magnetic, which stirs, makes the two for 10 minutes It is uniformly mixed, is poured into previously prepared rectangular wave curved shape mold later, vacuum constant temperature is 1 hour dry later, preparation Obtain base support layer；The addition of bacterial fibers degree increases the rigidity and Young's modulus of base support layer.

(2) preparation of electrode layer

It is bonded one layer of single-sided conductive viscosity copper strips in the two sides of the inner groovy 4 of the base support layer 1 of preparation, as function electricity Hold the upper/lower electrode layer in layer；Make in the outer patch unification layer single-sided conductive viscosity copper strips of the base support layer indent trench bottom of preparation For conductive layer, capacitor is together in series by conductive layer, function capacitor layers is formed, in the base support layer leftmost side of preparation and the rightmost side Turning be bonded conductive adhesive copper strips, respectively as upper layer concatenation function capacitor layers top electrode interface Top+, Top- and under Lower the electrode interface Bottom, Bottom- of layer concatenation function capacitor layers.

(3) preparation of function capacitor layers

The small cuboid of the two-sided foam tape of VHB polyacrylate is placed in step (2) between upper/lower electrode layer.To add Gu adhesive glue is applied to VHB electricity for each capacitor cell by the bonding strength of VHB dielectric layer and upper and lower copper electrode layer Dielectric layer surrounding presses lightly on the upper/lower electrode layer of side later, is in close contact VHB dielectric layer and upper and lower copper electrode layer, Drying at room temperature 1-1.5 hours, it is prepared into function capacitor layers.

(4) preparation of surface encapsulation layer

Polyvinylpyrrolidone (PVP) and water are mixed according to mass ratio 3:7, stirs evenly, is sprayed on step later (1)-(3) are prepared into structure, cover exposed function capacitor layers and conductive layer, realize the electricity to function capacitor layers and conductive layer Insulation protection is dried at room temperature for a period of time, is prepared into stretch bending flexible sensor.

When using the present invention, back-end hardware circuit design principle as shown in figure 3, by select it is different close the switch, can To select different operating modes, specifically operating mode and it is corresponding close the switch it is as follows:

(1) S1 and S6 closure

At this point, stretch bending flexible sensor is under Compression and Expansion perceptual model, upper and lower layer capacitor is in and gang mould Formula, total capacitance output

When stretch bending flexible sensor stress is in tensional state, between each plane-parallel capacitor bipolar electrode layer Distance increases, and causes the capacitor of each plane-parallel capacitor of upper and lower level to reduce, and then lead to layer capacitance C1 and lower layer capacitance C2 It reduces, total output capacitance of stretch bending flexible sensor reduces, and reduced degree increases with the length of stretching and increased.

When stretch bending flexible sensor stress is when in a compressed state, between each plane-parallel capacitor bipolar electrode layer Distance reduces, and causes the capacitor of each plane-parallel capacitor of upper and lower level to increase, and then lead to layer capacitance C1 and lower layer capacitance C2 Increase, total output capacitance of stretch bending flexible sensor increases, and increased degree increases with the increase of compression degree.

Thus, the change rate that micro- integrated chip passes through the total output capacitance of analysisTo characterize stretching/pressure Contracting degree, wherein C_{out_0}For initial capacitance.The absolute value of the change rate of the total output capacitance of stretch bending flexible sensor is with stretching Or compression degree increase and become larger.

(2) S2, S3, S4, and S5 are closed

At this point, stretch bending flexible sensor is under bending perceptual model, upper and lower layer capacitor works in difference modes, Total output capacitance of stretch bending flexible sensor is

When stretch bending flexible sensor stress is bent upwards, upper layer plane-parallel capacitor makes bipolar electrode because of compression The distance between layer reduces, and the capacitor of plane-parallel capacitor increases, and upper layer capacitance C1 increases, and lower layer's plane-parallel capacitor is because drawing It the distance between stretches and makes bipolar electrode layer and increase, the capacitor of plane-parallel capacitor reduces, and upper layer capacitance C2 is reduced, and total capacitance is defeated C out_outOutput is positive value and gradually increases with the increase for being bent upwards angle.

When stretch bending flexible sensor stress is bent downwardly, upper layer plane-parallel capacitor makes bipolar electrode because of stretching The distance between layer increases, and the capacitor of plane-parallel capacitor reduces, and upper layer capacitance C1 is reduced, and lower layer's plane-parallel capacitor is because drawing The distance between stretching and make bipolar electrode layer reduces, and the capacitor of plane-parallel capacitor increases, and upper layer capacitance C2 increases, and total capacitance is defeated C out_outOutput is for negative value and gradually with the increase for being bent downwardly angle, C_outAbsolute value increase.

Thus, the change rate that micro- integrated chip passes through the total output capacitance of analysisIt is curved to characterize Qu Fangxiang and angle, wherein positive value is is bent upwards, negative value is to be bent downwardly, and with the increase of bending angle, always export Capacitor C_relaAbsolute value gradually increase.