阅读说明：本技术 加热炉体和半导体设备 (Heating furnace body and semiconductor equipment ) 是由 郝晓明 郑建宇 赵福平 盛强 于 2019-08-29 设计创作，主要内容包括：本发明提供一种加热炉体和半导体设备,该加热炉体包括：环形保温体；以及相互独立的多个加热结构,沿环形保温体的轴向依次设置在环形保温体的内侧；并且,有至少一个加热结构包括多个加热分部,且与环形保温体的周向上划分的多个分区一一对应,其中至少两个加热分部在同一时间辐射出的热量不同。本发明提供的加热炉体,其能够在同等或较少的加热功率条件下,提高加热效率,缩短加热时间,同时又能够提高工艺均匀性。(It includes: annular thermal insulator that the present invention, which provides a kind of heating furnace body and semiconductor equipment, the heating furnace body,；And mutually independent multiple heating structures, the inside of annular thermal insulator is successively set on along the axial direction of annular thermal insulator；Also, having at least one heating structure includes multiple heating branches, and is corresponded with the multiple subregions divided in the circumferential direction of annular thermal insulator, and it is different that wherein at least two heats the heat that branch gives off in the same time.Heating furnace body provided by the invention can improve heating efficiency under the conditions of same or less heating power, shorten heating time, while can be improved process uniformity again.)

1. a kind of heating furnace body characterized by comprising

Annular thermal insulator；And

Mutually independent multiple heating structures, the axial direction along the annular thermal insulator are successively set in the annular thermal insulator Side；Also, having at least one described heating structure includes multiple heating branches, and with divided in the circumferential direction of the annular thermal insulator Multiple subregions correspond, the heat that heating branch described in wherein at least two gives off in the same time is different.

2. heating furnace body according to claim 1, which is characterized in that the subregion is four, and two two is opposite, and phase Pair two subregions in the heat that is given off in the same time of the heating branch it is identical, and described in adjacent two point The heat that the heating branch in area gives off in the same time is different.

3. heating furnace body according to claim 1 or 2, which is characterized in that the heating structure is heater strip, the heating Distribution density and/or diameter of the silk in wherein at least two subregions are different.

4. heating furnace body according to claim 3, which is characterized in that the heater strip is by the week along the annular thermal insulator It is formed to the wire body coiling of bending winding, and at least part of the wire body is coil spring shape wire body.

5. heating furnace body according to claim 4, which is characterized in that the wire body includes multiple first line segments and multiple Two line segments, wherein each first line segment is the coil spring shape wire body, and is set along the axial direction of the annular thermal insulator It sets；Multiple first line segments are provided at circumferentially spaced along the annular thermal insulator；

Each second line segment is for respectively concatenating the head and the tail both ends of each two adjacent first line segments.

6. heating furnace body according to claim 1, which is characterized in that the annular thermal insulator is to be made of hard material Rigid thermal insulator.

7. heating furnace body according to claim 6, which is characterized in that the hard material includes by polycrystalline mullite and silicon The composite fibre of sour aluminium composition.

8. heating furnace body according to claim 1, which is characterized in that the annular thermal insulator includes that multiple annulars are seperated, And continuous ring body is in turn connected to form along axial direction；Each annular point is arranged in each heating structure correspondingly The inside of body.

9. heating furnace body according to claim 8, which is characterized in that the inner space of the annular thermal insulator is axially Upper divide is main heating zone and fire door heating zone and furnace tail heating zone positioned at the main heating zone two sides, wherein

At least two annulars are seperated to correspond to the main heating zone；

At least one described corresponding described fire door heating zone of annular fission；

At least one described corresponding furnace tail heating zone of annular fission.

10. heating furnace body according to claim 8, which is characterized in that between each two adjacent annular fissions It is provided with fit structure, for limiting the seperated relative position of the annular of adjacent two.

11. heating furnace body according to claim 10, which is characterized in that the fit structure is adjacent including being separately positioned on Two it is described annular fission between recess portion and protrusion.

12. heating furnace body according to claim 1, which is characterized in that the heating furnace body further includes multiple deriving structures, The outside of the annular thermal insulator is arranged in each deriving structure, and sets correspondingly with each heating structure It sets, and each deriving structure includes the identical two sets of lead assemblies of structure, two sets of lead assemblies are respectively used to draw Enter and draw two wiring of the corresponding heating structure.

13. heating furnace body according to claim 12, which is characterized in that the heating furnace body further includes protective cover, described Protective cover is circumferentially positioned at the outside of each deriving structure.

14. a kind of semiconductor equipment, including process cavity, heating furnace body and graphite boat, which is characterized in that the heating furnace body uses Heating furnace body described in claim 1-10 any one.

15. semiconductor equipment according to claim 14, which is characterized in that the heating furnace body is horizontal, and the stone The multi-disc graphite flake of Mo Zhouzhong is arranged along a diametrical direction interval of the heating furnace body；

The subregion is four, and two two is opposite, wherein described in two opposite subregion difference outermost two panels of face Graphite flake；The both sides of the edge of graphite flake among remaining two opposite subregion difference face；Also, face is outermost The heat that the heating branch in two subregions of graphite flake described in two panels gives off in the same time is less than positive centering Between graphite flake both sides of the edge two subregions in the heat that is given off in the same time of the heating branch.

Technical field

The present invention relates to technical field of semiconductors, and in particular, to a kind of heating furnace body and semiconductor equipment.

Background technique

Existing plasma reinforced chemical vapour deposition (Plasma Enhanced Chemical Vapor Deposition, hereinafter referred to as PECVD) equipment, reaction chamber generallys use tubulose furnace body, and furnace body thermal field is using circumference side To uniformly heated design, specific heating structure is that after uniformly turning to type using resistance wire, heat-preservation cotton is wrapped up outside it. During process operation, graphite boat cold conditions enters tubulose furnace body first, then tubulose furnace body is waited integrally to rise again to process warm Start coating process after degree.

In practical applications, the graphite flake in graphite boat places (along the axially placed of tubulose furnace body) vertically, and multi-disc Graphite flake is spaced apart along a diametrical direction of tubulose furnace body, this makes when heated, and outermost two panels graphite flake is because most Close to furnace body heat absorption rate highest, heat up most fast, and intermediate graphite flake leads to heat absorption rate because of the blocking of the graphite flake in outside It is lower, it needs to make intermediate graphite flake reach temperature requirement by improving heating power and extending heating time, but mentions High heating power will cause process costs increase, and extends heating time and will lead to production capacity reduction.Further, since between graphite flake There are temperature differences, cause the thickness uniformity of film layer poor.

Therefore, heating efficiency can be improved under the conditions of same or less heating power by needing one kind at present, shortened and added The hot time, while can be improved the heating device of process uniformity again.

Summary of the invention

The present invention is directed at least solve one of the technical problems existing in the prior art, a kind of heating furnace body and half are proposed Conductor device can improve heating efficiency under the conditions of same or less heating power, shorten heating time, while again It can be improved process uniformity.

To achieve the above object, the present invention provides a kind of heating furnace bodies, comprising:

Annular thermal insulator；And

Mutually independent multiple heating structures are successively set on the annular thermal insulator along the axial direction of the annular thermal insulator Inside；Also, having at least one described heating structure includes multiple heating branches, and in the circumferential direction of the annular thermal insulator The multiple subregions divided correspond, and the heat that heating branch described in wherein at least two gives off in the same time is different.

Optionally, the subregion is four, and two two is opposite, and the heating in two opposite subregions point The heat that portion gives off in the same time is identical, and heating branch interradius when same in two adjacent subregions The heat of injection is different.

Optionally, the heating structure is heater strip, distribution of the heater strip in wherein at least two subregions Density and/or diameter are different.

Optionally, the heater strip is formed by the wire body coiling of the circumferential skewing winding along the annular thermal insulator, and At least part of the wire body is coil spring shape wire body.

Optionally, the wire body includes multiple first line segments and multiple second line segments, wherein each first line segment is The coil spring shape wire body, and along the axial setting of the annular thermal insulator；Multiple first line segments are protected along the annular Warm body is provided at circumferentially spaced；

Each second line segment is for respectively concatenating the head and the tail both ends of each two adjacent first line segments.

Optionally, the annular thermal insulator is the rigid thermal insulator made of hard material.

Optionally, the hard material includes the composite fibre being made of polycrystalline mullite and alumina silicate.

Optionally, the annular thermal insulator includes that multiple annulars are seperated, and are in turn connected to form continuous ring body along axial direction； The seperated inside of each annular is arranged in each heating structure correspondingly.

Optionally, the inner space of the annular thermal insulator divides in its axial direction as main heating zone and adds positioned at the master The fire door heating zone and furnace tail heating zone of hot-zone two sides, wherein

At least two annulars are seperated to correspond to the main heating zone；

At least one described corresponding described fire door heating zone of annular fission；

At least one described corresponding furnace tail heating zone of annular fission.

Optionally, it is provided with fit structure between each two adjacent annular fissions, for limiting adjacent two The seperated relative position of a annular.

Optionally, the fit structure includes the recess portion and convex being separately positioned between the annular fission of adjacent two Portion.

Optionally, the heating furnace body further includes multiple deriving structures, and each deriving structure is arranged in the annular The outside of thermal insulator, and be arranged correspondingly with each heating structure, and each deriving structure includes structure Identical two sets of lead assemblies, two sets of lead assemblies are respectively used to introduce and draw two of the corresponding heating structure Wiring.

Optionally, the heating furnace body further includes protective cover, and the protective cover is circumferentially positioned at each deriving structure Outside.

As another technical solution, the present invention also provides a kind of semiconductor equipments, including process cavity, heating furnace body and stone Mo Zhou, the heating furnace body use above-mentioned heating furnace body provided by the invention.

Optionally, the heating furnace body is horizontal, and the multi-disc graphite flake in the graphite boat is along the heating furnace body One diametrical direction interval setting；

The subregion is four, and two two is opposite, wherein two opposite subregions distinguish the outermost two panels of face The graphite flake；The both sides of the edge of graphite flake among remaining two opposite subregion difference face；Also, face is outermost The heat that the heating branch in two subregions of graphite flake described in the two panels of side gives off in the same time is less than just The heat that the heating branch in two subregions of the both sides of the edge of intermediate graphite flake is given off in the same time.

Beneficial effects of the present invention:

Heating furnace body provided by the invention is tied by the way that mutually independent multiple heating are arranged in the inside of annular thermal insulator The subregion independent control to temperature in furnace may be implemented in structure, so as to individually control each heating according to specific needs The heating time of structure and the rate of heat addition are shortened with that can improve heating efficiency under the conditions of same or less heating power Heating time.Meanwhile to have at least one heating structure include multiple heating branches, and with circumferentially dividing along annular thermal insulator Multiple subregions correspond, and the heat that the heating branch in wherein at least two subregion gives off in the same time is different, in this way, Can make heating structure is heterogeneous texture in the circumferential direction of annular thermal insulator, can form non-homogeneous thermal field, so as to The temperature difference of heated object is compensated, process uniformity is improved.

Semiconductor equipment provided by the invention can be same by using above-mentioned heating furnace body provided by the invention Or under the conditions of less heating power, heating efficiency is improved, shortens heating time, while can be improved process uniformity again.

Detailed description of the invention

Fig. 1 is the axial, cross-sectional view of heating furnace body provided in an embodiment of the present invention；

Fig. 2A is the longitudinal section view of heating furnace body provided in an embodiment of the present invention；

Fig. 2 B is the local structural graph of heating structure used in the embodiment of the present invention；

Fig. 3 is the axial, cross-sectional view of one of annular thermal insulator used in the embodiment of the present invention；

Fig. 4 is a side view of heating furnace body provided in an embodiment of the present invention；

Fig. 5 is the structure chart of deriving structure used in the embodiment of the present invention；

Fig. 6 is another side view of heating furnace body provided in an embodiment of the present invention.

Specific embodiment

To make those skilled in the art more fully understand technical solution of the present invention, the present invention is mentioned with reference to the accompanying drawing The heating furnace body and semiconductor equipment of confession are described in detail.

Also referring to Fig. 1 to Fig. 6, heating furnace body provided in an embodiment of the present invention comprising multiple annular 1 Hes of thermal insulator Multiple heating structures 2, wherein annular thermal insulator 1 includes that multiple annulars are seperated, and along its axial (that is, X-direction in Fig. 1) according to Secondary connection forms continuous ring body, for example, Fig. 1 shows 5 annular fissions (1a-1e).The quantity and annular point of heating structure 2 The quantity of body is identical, and the seperated inside of each annular is arranged in each heating structure 2 correspondingly.

Optionally, a part of heating structure 2 is built in the internal ring wall of annular fission, and another part is exposed to annular In seperated internal environment, with being capable of radiations heat energy.In practical applications, it can make heating structure 2 can be with according to specific needs , protrusion concordant relative to inner ring wall surface or recess, as long as the exposed area of heating structure 2 meets the needs of to heat.

Optionally, the groove of respective shapes is set on internal ring wall, and heating structure 2 is installed by the way of being embedded in using half In annular seperated internal ring wall, or heating can also be tied using cured mode during production annular is seperated In the seperated internal ring wall of the embedment annular of structure 2 half.

The inner space of annular thermal insulator 1 is state space, which is used to play heating structure 2 solid Fixed and insulation effect.Moreover, in the present embodiment, by using split type annular thermal insulator 1, that is, annular thermal insulator 1 is by more A annular fission is formed by connecting, convenient for corresponding heating structure 2 to be assembled to the inside of annular fission, so as to reduce processing Difficulty.Meanwhile split type annular thermal insulator 1 is easy to disassemble and maintenance, to reduce manpower and maintenance cost.

Optionally, annular thermal insulator 1 is the rigid thermal insulator made of hard material, this and soft heat-preservation cotton phase Than can either firmly fix heating structure 2 while heat preservation, and can be combined into annular thermal insulator 1 with heating structure 2 The modular organization of one, is easily installed and processes.Optionally, hard material includes being made of polycrystalline mullite and alumina silicate Composite fibre.The material is a kind of thermal insulation material, while having good rigidity again, thus with good heat insulation effect Meanwhile, it is capable to firm fixation heating structure 2.Preferably, the content of polycrystalline mullite and alumina silicate ratio is 7 in composite fibre: 3.The heat insulation effect and fixed effect of composite fibre with the content ratio are best.

Multiple heating structures 2 are mutually indepedent, in this way, the heating power that each heating structure 2 can be independently controlled open, Closing and power regulation etc., so as to realize the subregion (that is, the multiple regions divided in axial direction) to temperature in furnace Independent control, so as to individually control heating time and the rate of heat addition of each heating structure 2 according to specific needs, with can Under the conditions of same or less heating power, heating efficiency is improved, shortens heating time.

Also, have at least one heating structure 2 include multiple heating branches, and with divided in the circumferential direction of annular thermal insulator 1 Multiple subregions correspond, it is different that wherein at least two heats the heat that branch gave off in the same time.In this way, can make Heating structure 2 is heterogeneous texture in the circumferential direction of annular thermal insulator 1, non-homogeneous thermal field can be formed, so as to compensate The temperature difference of heated object improves process uniformity.

Optionally, each heating structure 2 is heater strip.And it is possible to by making heater strip at least two subregion wherein In distribution density and/or diameter it is different, the heat that Lai Shixian heater strip gives off in the same time is different.Certainly, in reality In, the heating element of any other structure can also be used, as long as being capable of radiations heat energy.

Optionally, heater strip is formed by the wire body coiling of the circumferential skewing winding along annular thermal insulator 1, and the wire body is at least A part is coil spring shape wire body.For example, as shown in Figure 2 B, wire body includes multiple first line segments 21 and multiple second line segments 22, wherein each first line segment 21 is coil spring shape wire body, and is set along the axial direction of annular thermal insulator 1 (X-direction in Fig. 2 B) It sets.Also, multiple being provided at circumferentially spaced along annular thermal insulator 1 of first line segment 21.Each second line segment 22 is used for respectively will be each The head and the tail both ends of a adjacent Liang Ge first part 21 concatenate, to constitute continuous wire body.Optionally, second line segment 22 is in straight It is linear.In this way, can by reducing the interval between each first line segment 21 and increasing the tightness degree of 21 coiling of the first line segment, To further increase the distribution density and distributing homogeneity of the heater strip being made from it, so as in same or less heating Under power condition, heating efficiency is further increased, shortens heating time.Certainly, in practical applications, according to specific needs, add Heated filament can also use any other canoe and heating wire structure.Certainly it is emphasized that the first line segment 21 and multiple Set-up mode between second line segment 22 is without being limited thereto.

Optionally, heater strip is made by High electric resistance aluminum alloy, and this heater strip can be effectively reduced furnace body and use The plastic deformation that itself is generated in journey, extends the service life of furnace body.

In the present embodiment, as shown in Figure 2 A, circumferentially the upper subregion divided is four, respectively subregion to annular thermal insulator A1, subregion A2, subregion B1 and subregion B2.Also, four subregions two two are opposite, that is, subregion A1 and subregion A2 are opposite, subregion B1 and Subregion B2 is opposite.Also, the heating branch in the corresponding subregion A1 and subregion A2 (or subregion B1 and subregion B2) of heating structure 2 exists The heat that the same time gives off is identical, and adding in subregion A1 (or subregion A2) and subregion B1 and subregion B2 adjacent thereto The heat that hot branch gives off in the same time is different.

When graphite boat is located in heating furnace body, it can make the graphite flake 7 on graphite boat is vertical to place (along the axis of furnace body To placement), and multi-disc graphite flake 7 is spaced apart along a diametrical direction of furnace body, in this case, by using above-mentioned point The distribution mode in area and thermal field can make outermost two panels graphite flake 7 distinguish face subregion B1 and subregion B2, and intermediate stone Face subregion A1 and subregion A2 is distinguished in the both sides of the edge of ink sheet 7, and the heating branch in subregion A1 and subregion A2 is in same a period of time Between the heat that gives off be greater than the heat that the heating branch in subregion B1 and subregion B2 gives off in the same time.Specifically, such as Shown in Fig. 2A, distribution density of the heater strip in subregion A1 and subregion A2 is larger, and the distribution in subregion B1 and subregion B2 is close It spends smaller.Intermediate graphite flake 7 can obtain more heat because of face subregion A1 and subregion A2 as a result, and outermost two Piece graphite flake 7 is because the heat that face subregion B1 and subregion B2 is obtained is less, so as to compensate existing temperature between graphite flake Difference, and then improve the thickness uniformity of film layer.

In practical applications, the temperature difference situation between graphite flake can be obtained by way of technological experiment, then According to the rate of heat delivery of technological experiment resulting estimate heater strip various pieces, heater strip of rationally arranging, with can it is same or compared with Under the conditions of few heating power, heating efficiency is improved, shortens heating time, while can be improved process uniformity again.

Optionally, four subregions are uniformly distributed in the circumferential direction of annular thermal insulator 1, certainly, in practical applications, can also be with It is designed as non-uniform Distribution according to specific needs.Moreover, the quantity of subregion is also not limited to four, it can be according to specific needs Freely set.In addition, the difference for the heat that the heating branch of the corresponding each subregion of heating structure 2 gave off in the same time can also Freely to set according to specific needs.

Optionally, the inner space of annular thermal insulator 1 divides in its axial direction as main heating zone and is located at the main heating zone The fire door heating zone and furnace tail heating zone of two sides, wherein the seperated corresponding main heating zone of at least two annulars；At least one annular point Body corresponds to fire door heating zone；The seperated corresponding furnace tail heating zone of at least one annular.For example, as shown in Figure 1, three intermediate annulars The inner space that seperated (1b, 1c, 1d) is collectively formed is main heating zone；The inside of two annulars seperated (1a, 1e) of two sides is empty Between be respectively fire door heating zone and furnace tail heating zone.

In practical applications, the heated object of such as graphite boat etc. can be placed in main heating zone and carries out technique, and And it is seperated by the way that at least two annulars are arranged in main heating zone, the subregion to temperature can be realized in the axial direction of main heating zone Control, for example, can by establish temp controlled meter come in main heating zone it is each annular fission on heating structure 2 heating when Between and/or the rate of heat addition carry out Discrete control so that temperature in the axial direction of main heating zone is in predetermined gradient distribution.

For fire door heating zone, due to needing to frequently switch on fire door, the thermal losses of fire door heating zone is larger, and fire door adds The axial dimension of hot-zone is larger, this just needs to increase the heating structure 2 on the annular fission in fire door heating zone in the same time The heat given off, such as increase the diameter and/or distribution density of heater strip.Conversely, as the thermal losses of furnace tail heating zone It is smaller, and axial dimension is smaller, the heating structure 2 on annular fission is not necessarily to too many in the heat that the same time gives off.

Optionally, it is provided with fit structure 8 between each two adjacent annular fissions, for limiting two adjacent rings The case where relative position of shape fission avoids the two from misplacing, and heat leaks.In the present embodiment, as shown in figure 3, cooperation Structure 8 includes that the recess portion 82 being separately positioned between two adjacent annular fissions and protrusion 81, the two pass through mating.When So, in practical applications, two seperated relative positions of annular can also be limited using other fit systems such as clamping.

In the present embodiment, as shown in figure 4, heating furnace body further includes multiple deriving structures 9, each deriving structure 9 is arranged It is arranged correspondingly in the outside of annular thermal insulator 1, and with each heating structure 2, and each deriving structure 9 includes structure Identical two sets of lead assemblies (91,92), two sets of lead assemblies (91,92) are respectively used to introduce and draw corresponding heating structure 2 two wiring (31,32).

Specifically, as shown in figure 5, heating furnace body further includes the furnace shell 10 being circumferentially positioned at around annular thermal insulator 1 and divides Two annular endplates 11 at the both ends of furnace shell 10 are not set, and optionally, furnace shell 10 and annular endplate 11 connect using rivet is fixed It connects.By taking lead assemblies 91 as an example comprising: insulating part 911, lead weld tabs 912, lead screw 914 and nut 913, wherein absolutely Edge part 911 is arranged on furnace shell 10, and the channel passed through for wiring (31 or 32) is provided in insulating part 911；Lead weldering The setting of piece 912 is electrically connected on insulating part 911, and with wiring；Lead screw 914 and nut 913 are for consolidating lead weld tabs 912 It is scheduled on insulating part 911, and lead screw 914 is conducted with lead weld tabs 912；Lead screw 914 is for being electrically connected to a power source. Thus, it is possible to realize the introducing and extraction of two wiring (31,32) of heating structure 2.

Optionally, as shown in Figure 5 and Figure 6, heating furnace body further includes protective cover 122, which is circumferentially positioned at respectively The outside of a deriving structure 9 is used for isolated power supply and operator, guarantees the personal safety of operator.Optionally, protective cover 122 is fixed by support plate 121.

Optionally, heating furnace body further includes multiple temperature detecting units 6, and each setting of temperature detecting unit 6 is protected in annular On warm body 1, and it is arranged correspondingly with each heating structure 2, to detect the seperated inside temperature of the corresponding annular of heating structure 2 Degree.Specifically, each temperature detecting unit 6 includes: temperature sensor 61 and mounting plate 131, wherein temperature sensor 61 is worn In the side wall of ring protection temperature body 1, as shown in Figure 2 A, optionally, temperature sensor 61 is thermocouple, and probe is protected along annular The inside for extending radially to ring protection temperature body 1 of temperature keeper 1.The outside of furnace shell 10 is arranged in mounting plate 131, and in mounting plate It is provided with sensor fixture 132 on 131, is used for fixed temperature sensor 6.

It should be noted that in the present embodiment, annular thermal insulator 1 adopts a split structure, that is, seperated by multiple annulars It is in turn connected to form continuous ring body along its axial direction, but the present invention is not limited thereto, in practical applications, annular thermal insulator 1 can also use integral structure.

In conclusion heating furnace body provided in an embodiment of the present invention, mutual by being arranged in the inside of annular thermal insulator The subregion independent control to temperature in furnace may be implemented, so as to according to specific needs in independent multiple heating structures Individually control heating time and the rate of heat addition of each heating structure, with can under the conditions of same or less heating power, Heating efficiency is improved, heating time is shortened.Meanwhile at least one heating structure includes being dispensed along annular heat preservation correspondingly Multiple heating branches in the multiple subregions of body circumferentially divided, the heating branch in wherein at least two subregion is in the same time The heat given off is different, in this way, heating structure can be made to be heterogeneous texture in the circumferential direction of annular thermal insulator, it can be with shape Process uniformity is improved at non-homogeneous thermal field so as to compensate the temperature difference of heated object.

As another technical solution, the embodiment of the present invention also provides a kind of semiconductor equipment comprising process cavity (such as Quartz cavity), heating furnace body and graphite boat, wherein process cavity is used to carry out technique to the graphite flake in graphite boat；Heating furnace body is used Graphite flake in heating graphite boat and by vacuumizing to form vacuum environment.The heating furnace body is mentioned using the embodiment of the present invention The above-mentioned heating furnace body supplied.

Optionally, which applies in PECVD device.

Optionally, heating furnace body is horizontal, that is, as shown in Figure 1, the axial direction of heating furnace body is horizontally disposed.Also, such as Fig. 2A Shown, multi-disc graphite flake 7 in graphite boat is arranged along a diametrical direction interval of heating furnace body, for example, in the horizontal direction on One diametrical direction interval setting.Each graphite flake 7 is vertical to be placed.

In this case, in the circumferential direction of annular thermal insulator 1, four subregions can be divided into and carry out independent temperature control, tool Body, as shown in Figure 2 A, four subregions are respectively subregion A1, subregion A2, subregion B1 and subregion B2, and two two is opposite, wherein phase Pair subregion B1 and subregion B2 distinguish the outermost two panels graphite flake 7 of face；Remaining opposite subregion A1 and subregion A2 difference is just To the both sides of the edge of intermediate graphite flake 7.Also, the heating branch of the corresponding subregion B1 and subregion B2 of heating structure 2 is in same a period of time Between the heat that gives off, the heat that the heating branch less than corresponding subregion A1 and subregion A2 gives off in the same time.In as a result, Between graphite flake 7 can obtain more heat because of face subregion A1 and subregion A2, and outermost two panels graphite flake 7 is because of face The heat that subregion B1 and subregion B2 is obtained is less, so as to compensate existing temperature difference between graphite flake, and then improves film The thickness uniformity of layer.

It optionally, can be by increasing distribution density of the heater strip in subregion A1 and subregion A2, and/or reduction subregion B1 Non-uniform thermal field is obtained with the distribution density in subregion B2.It is, of course, also possible to be obtained by the diameter for making heater strip difference Obtain non-uniform thermal field.

Semiconductor equipment provided in an embodiment of the present invention, by using above-mentioned heating furnace provided in an embodiment of the present invention Body can improve heating efficiency under the conditions of same or less heating power, shorten heating time, while can be improved again Process uniformity.

It is understood that the principle that embodiment of above is intended to be merely illustrative of the present and the exemplary implementation that uses Mode, however the present invention is not limited thereto.For those skilled in the art, essence of the invention is not being departed from In the case where mind and essence, various changes and modifications can be made therein, these variations and modifications are also considered as protection scope of the present invention.