阅读说明：本技术 用于热处理设备的冷却装置及热处理设备 (Cooling device and Equipment for Heating Processing for Equipment for Heating Processing ) 是由 邱江虹 刘红丽 于 2018-06-08 设计创作，主要内容包括：一种用于热处理设备的冷却装置及包括该冷却装置的热处理设备,冷却装置包括通过管道依次连接的风门、热交换器、风机和进气阀,风门用于连接至热处理设备的排气口,进气阀用于连接至热处理设备的进气口。冷却装置可以实现空气循环利用,不使用净化间内的空气,因此不会造成净化间内压力下降,避免影响本机台和其他机台的工艺,有效保证了产品质量,也不会造成净化间内空气浪费,降低制造成本。(A kind of cooling device for Equipment for Heating Processing and the Equipment for Heating Processing including the cooling device, cooling device includes passing through the sequentially connected air door of pipeline, heat exchanger, blower and intake valve, air door is used to be connected to the exhaust outlet of Equipment for Heating Processing, and intake valve is used to be connected to the air inlet of Equipment for Heating Processing.Air circulation utilization may be implemented in cooling device, without using the air in Clean room, therefore not will cause pressure in Clean room and declines, the technique for avoiding influencing this board He other boards, product quality has been effectively ensured, wasted air in Clean room will not be caused, has reduced manufacturing cost.)

1. a kind of cooling device for Equipment for Heating Processing, which is characterized in that including being handed over by the sequentially connected air door of pipeline, heat Parallel operation, blower and intake valve, the air door are used to be connected to the exhaust outlet of the Equipment for Heating Processing, and the intake valve is for connecting To the air inlet of the Equipment for Heating Processing.

2. the cooling device according to claim 1 for Equipment for Heating Processing, which is characterized in that further include being set to the wind Pressure relief pipe between machine and the intake valve is equipped with relief valve in the pressure relief pipe.

3. the cooling device according to claim 1 for Equipment for Heating Processing, which is characterized in that further include for controlling State the frequency converter of the revolving speed of blower.

4. the cooling device according to claim 1 for Equipment for Heating Processing, which is characterized in that the air door passes through exhaust Pipeline is connected to the exhaust outlet of the Equipment for Heating Processing, and the intake valve is connected to the Equipment for Heating Processing by admission line Air inlet.

5. a kind of Equipment for Heating Processing, which is characterized in that including cooling device described according to claim 1 any one of -4.

6. Equipment for Heating Processing according to claim 5, which is characterized in that further include furnace body, isolation is equipped in the furnace body The furnace interior is divided into longitudinal inlet channel and heating chamber by wall, the divider wall, and the longitudinal direction inlet channel passes through institute It states air inlet to be connected to the intake valve, and the sealing of hole by being set on the divider wall is connected to the heating chamber.

7. Equipment for Heating Processing according to claim 6, which is characterized in that the side wall of the furnace body is equipped with and the heating The pressure tap of chamber connection.

8. Equipment for Heating Processing according to claim 7, which is characterized in that further include differential pressure pickup, the pressure tap is logical Pressure guiding pipe is crossed to connect with the differential pressure pickup.

9. Equipment for Heating Processing according to claim 6, which is characterized in that the divider wall is set as cylindric, and surround The intracorporal process container setting of furnace, forms longitudinal inlet channel between the divider wall and the side wall of the furnace body； The heating chamber is formed between the divider wall and the process container.

10. Equipment for Heating Processing according to claim 9, which is characterized in that lateral exhaust passage is equipped at the top of the furnace body, The transverse direction exhaust passage is connected to the heating chamber and the exhaust outlet.

Technical field

It is the present invention relates to heat treatment equipment field, in particular to a kind of for the cooling device of Equipment for Heating Processing and including being somebody's turn to do The Equipment for Heating Processing of cooling device.

Background technique

When manufacturing semiconductor integrated circuit, chemical vapor deposition is implemented to semiconductor crystal wafer using Equipment for Heating Processing (CVD), the processing such as diffusion, oxidation, annealing.Vertical heat processing apparatus can be processed in batches wafer, but at traditional Vertical Heat It is slow to manage equipment Temperature fall rate, does not have the ability of fast cooling, and the process time is long.

Rapid temperature rise and drop annealing device can make annealing device and process container and semiconductor die at the end of technique Cooling air-flow, is imported the space of annealing device and process container, forces hot gas therein from row by circle Quick uniform cooling The discharge of gas system, carries out pressure cooling, achievees the purpose that fast cooling, improves production efficiency.

In the existing fast cooling furnace body with fast cooling ability and system, in order to realize furnace body fast cooling, It needs to import a large amount of air into furnace body from interior, then after furnace body is cooled down, is then exhausted from outdoor.It is quick in equipment It will cause indoor pressure reduction in temperature-fall period, the pressure balance that may cause indoor other equipment is out of control, to influence it The technique of his indoor equipment, causes product quality to decline.And it is connected in the exhaust system of furnace body and Clean room room, particle can It can enter inside equipment from line entry, pollute.

Fig. 1 a and Fig. 1 b respectively illustrate patent US20120006506, and (denomination of invention: substrate processing device and heat treatment are set Standby, SUBSTRATE PROCESSING APPARATUS AND HEATING EQUIPMENT) substrate processing device axial direction The cross-sectional view of cross-sectional view and A-A section, wherein the air in Clean room enters annealing device by air supply pipe 47, through piping 40 Afterwards, cooling air stream enters cooled gas path space 33 straight down, then cooling air-flow is blown into heat treatment dress by nozzle 35 The space 14 between process container is set, cooling air-flow takes away the heat in this space at this time, via gas vent 48, exhaust pipe 50 discharge annealing devices, then pass through air door 54 and heat exchanger 58, then gas is discharged to outdoor by blower 60, realize Fast cooling.

The shortcomings that cooling means, is to need to import a large amount of air from Clean room, by being discharged to outdoor again after equipment, Air loss is more in Clean room, may cause the pressure reduction of Clean room, causes the control of other equipment pressure bad, thus shadow Ring the quality of product；In addition, a large amount of clean air, which is discharged, from Clean room will cause waste, increase the negative of Clean room dynamical system Load；It is connected to additionally, due to cooling line with Clean room, the particle that furnace interior generates is possible to disperse to Clean room, has pollution net Risk between change.

Summary of the invention

The invention proposes a kind of cooling device for Equipment for Heating Processing and the Equipment for Heating Processing including the cooling device, With the defect for overcoming existing cooling means loss Clean room air, influencing board technique.

One aspect of the present invention provides a kind of cooling device for Equipment for Heating Processing, including passes through the sequentially connected wind of pipeline Door, heat exchanger, blower and intake valve, the air door are used to be connected to the exhaust outlet of the Equipment for Heating Processing, the intake valve For being connected to the air inlet of the Equipment for Heating Processing.

Preferably, cooling device further includes set on the pressure relief pipe between the blower and the intake valve, the pressure release Relief valve is equipped in pipeline.

Preferably, cooling device further includes the frequency converter for controlling the revolving speed of the blower.

Preferably, the air door is connected to the exhaust outlet of the Equipment for Heating Processing by exhaust pipe, and the intake valve is logical Cross the air inlet that admission line is connected to the Equipment for Heating Processing.

Another aspect of the present invention provides a kind of Equipment for Heating Processing, including the cooling device.

Preferably, the Equipment for Heating Processing further includes furnace body, and divider wall is equipped in the furnace body, and the divider wall will be described Furnace interior is divided into longitudinal inlet channel and heating chamber, and the longitudinal direction inlet channel passes through the air inlet and the intake valve Connection, and the sealing of hole by being set on the divider wall is connected to the heating chamber.

Preferably, the side wall of the furnace body is equipped with the pressure tap being connected to the heating chamber.

Preferably, the Equipment for Heating Processing further includes differential pressure pickup, and the pressure tap passes through pressure guiding pipe and the pressure difference Sensor connection.

Preferably, the divider wall is set as cylindric, and around the intracorporal process container setting of the furnace, the isolation Longitudinal inlet channel is formed between wall and the side wall of the furnace body；Institute is formed between the divider wall and the process container State heating chamber.

Preferably, lateral exhaust passage, the transverse direction exhaust passage and the heating chamber and institute are equipped at the top of the furnace body State exhaust outlet connection.

The beneficial effects of the present invention are:

1, air circulation utilization may be implemented in cooling device, without using the air in Clean room, therefore not will cause purification Interior pressure decline, the technique for avoiding influencing this board He other boards have been effectively ensured product quality, will not cause to purify Interior wasted air reduces manufacturing cost.

2, pressure monitoring can be carried out to the Equipment for Heating Processing using the cooling device, realizes overvoltage protection, avoids interior external pressure The excessive overheated gas for leading to leakage of difference causes cause thermal damage to the component around Equipment for Heating Processing.

The device of the invention has other characteristics and advantages, these characteristics and advantages from the attached drawing being incorporated herein and with It will be apparent in specific embodiment afterwards, or will be in the attached drawing and subsequent specific embodiment being incorporated herein Middle to be stated in detail, the drawings and the detailed description together serve to explain specific principles of the invention.

Detailed description of the invention

Exemplary embodiment of the present is described in more detail in conjunction with the accompanying drawings, of the invention is above-mentioned and other Purpose, feature and advantage will be apparent, wherein in exemplary embodiments of the present invention, identical appended drawing reference is usual Represent same parts.

Fig. 1 a and Fig. 1 b show cuing open for the axial sectional view of substrate processing device according to prior art and A-A section respectively View；

Fig. 2 shows the scheme of installation of the cooling device according to an exemplary embodiment of the present invention for Equipment for Heating Processing.

Description of symbols:

12- Equipment for Heating Processing, the space 14-, 16- suction pipe, 18- reaction tube, 20- substrate, 22- cassette, 24- cassette lid, 26- Air entraining pipe, 28- exhaust pipe, 30- heating element, 32- heat insulating member, 33- cooled gas path space, 34- upper plate, 35- nozzle, 36- thermal insulator, 38- heater wire, 40- pipeline, heat shield under 44-, the upper heat shield of 46-, 47- air supply pipe, 48- gas vent, 50- row Feed channel, 51- cold air outlet, 52- cold air release portion, 54- air door, 56- heat-dissipating pipe, 58- heat exchanger, 60- blower；

101- Equipment for Heating Processing, 102- processing chamber, 103- heating chamber, 104- exhaust pipe, 105- air door, 106- heat are handed over Parallel operation, 107- admission line, 108- intake valve, 109- relief valve, 110- blower, the longitudinal direction 111- inlet channel, 112- sealing of hole, 113- divider wall, 114- pressure tap, 115- sealing flange, 116- pressure guiding pipe, 117- differential pressure pickup.

Specific embodiment

The present invention will be described in more detail below with reference to accompanying drawings.Although showing the preferred embodiment of the present invention in attached drawing, However, it is to be appreciated that may be realized in various forms the present invention and should not be limited by the embodiments set forth herein.On the contrary, providing These embodiments are of the invention more thorough and complete in order to make, and can will fully convey the scope of the invention to ability The technical staff in domain.

Cooling device according to an exemplary embodiment of the present invention for Equipment for Heating Processing includes being sequentially connected by pipeline Air door, heat exchanger, blower and intake valve, air door is used to be connected to the exhaust outlet of Equipment for Heating Processing, and intake valve is for connecting To the air inlet of Equipment for Heating Processing.

When work, air door is connected to the exhaust outlet of Equipment for Heating Processing by exhaust pipe, and intake valve is connected by admission line It is connected to the air inlet of Equipment for Heating Processing, starts blower, is acted on by the power of blower, the hot gas in Equipment for Heating Processing is taken out Out, after over-heat-exchanger is cooling, then in cooling gas feeding Equipment for Heating Processing, the processing chamber of its inside is carried out cold But.Cooling gas can be air, be also possible to the inert gases such as nitrogen and argon gas.

Air circulation utilization may be implemented in cooling device according to the embodiment, without using the air in Clean room, therefore not It will cause pressure in Clean room to decline, product quality has been effectively ensured, also not in the technique for avoiding influencing this board He other boards It will cause wasted air in Clean room, reduce manufacturing cost.

In one example, cooling device further includes in the pressure relief pipe between blower and intake valve, pressure relief pipe Equipped with relief valve.It when Equipment for Heating Processing internal and external pressure difference is more than predetermined value, opens relief valve and carries out pressure release, realize that over-voltage is protected Shield.When Equipment for Heating Processing internal and external pressure difference is restored in preset range, relief valve is closed.

In one example, cooling device further includes the frequency converter for controlling the revolving speed of blower, is turned by control blower Velocity modulation section wind-force size.

In one example, air door is connected to the exhaust outlet of Equipment for Heating Processing by exhaust pipe, and intake valve passes through air inlet Pipeline is connected to the air inlet of Equipment for Heating Processing.

The embodiment of the present invention is also provided to a kind of Equipment for Heating Processing, including above-mentioned cooling device.

In one example, Equipment for Heating Processing further includes furnace body, and divider wall is equipped in furnace body, and divider wall divides furnace interior It is divided into longitudinal inlet channel and heating chamber, longitudinal inlet channel is connected to by air inlet with intake valve, and by being set to divider wall On sealing of hole be connected to heating chamber.

Processing chamber is set in the heating chamber of furnace body, and process container, cassette etc. are set in processing chamber, is held by processing Device carries out various processing to the wafer in cassette.In Equipment for Heating Processing work, start cooling device, what Equipment for Heating Processing generated Hot gas enters cooling device through exhaust outlet, returns to Equipment for Heating Processing through air inlet after cooling, and pass through longitudinal inlet channel, envelope Hole enters in heating chamber, cools down to processing chamber.The hole wall of sealing of hole can avoid the particulate matter on hole wall with gas by processing Stream enters in heating chamber.

In one example, the side wall of furnace body is equipped with the pressure tap being connected to heating chamber, and pressure tap can pass through pressure guiding pipe It is connect with differential pressure pickup.Although furnace body is sealed, but there will still likely be gas leakage.Therefore, the intracorporal pressure of furnace Too many not above ambient pressure, the overheated gas otherwise leaked may cause heat waste to the component around Equipment for Heating Processing It is bad.In order to avoid this problem, the pressure tap being connected to heating chamber is equipped on the side wall of furnace body, pressure tap can pass through pressure guiding pipe It is connect with differential pressure pickup, real-time monitoring is carried out to furnace interior pressure.Pressure tap can be set to the top of furnace body, middle part or under Portion.Pressure guiding pipe can be sealed by sealing flange and is fixed on the side wall of furnace body.Preferably, pressure guiding pipe is made of stainless steel.Pressure difference The installation environment of sensor needs to meet the requirement of its heatproof.

In one example, divider wall is set as cylindric, and around the intracorporal process container setting of furnace, divider wall and furnace Longitudinal inlet channel is formed between the side wall of body；Heating chamber is formed between divider wall and process container.

In one example, it is equipped with lateral exhaust passage, lateral exhaust passage and heating chamber at the top of furnace body and exhaust outlet connects Logical, the hot gas in heating chamber passes through lateral exhaust passage, exhaust outlet discharge.

In one example, exhaust outlet and/or air inlet are set to the top of furnace body, to improve heat exchanger effectiveness.