阅读说明：本技术 一种平面楔块超声表面波探头性能参数测定方法及装置 (Method and device for measuring performance parameters of planar wedge ultrasonic surface wave probe ) 是由 侯召堂 殷尊 孟永乐 孙璞杰 林琳 朱婷 吕一楠 高延忠 高磊 郑坊平 于 2021-07-12 设计创作，主要内容包括：本发明公开了一种平面楔块超声表面波探头性能参数测定方法及系统,属于超声检测技术领域。通过第一夹具和第二夹具将平面楔块超声表面波探头固定后,通过平移机构就能实现平面楔块超声表面波探头的相对水平移动,当位置调整好后,再通过锁紧装置就能将两者锁定,进行后续相关操作,避免位置的改变影响测定结果。本发明在不需要试块条件下,采用两个性能参数相同的平面楔块超声表面波探头就能够获得探头的相关参数。该方法操作简便,不依赖于操作者的经验和技能水平,具有良好的适用性；且测定结果精确,不需要根据探头的型号准备相应的试块,减少了试块的购置成本,且适应性好。(The invention discloses a method and a system for measuring performance parameters of a planar wedge ultrasonic surface wave probe, and belongs to the technical field of ultrasonic detection. After the planar wedge ultrasonic surface wave probe is fixed through the first clamp and the second clamp, the relative horizontal movement of the planar wedge ultrasonic surface wave probe can be realized through the translation mechanism, after the position is adjusted, the planar wedge ultrasonic surface wave probe and the locking device can be locked through the locking device, subsequent related operations are carried out, and the influence of the change of the position on a measurement result is avoided. According to the invention, under the condition of no test block, the related parameters of the probe can be obtained by adopting two planar wedge ultrasonic surface wave probes with the same performance parameters. The method is simple and convenient to operate, does not depend on the experience and skill level of an operator, and has good applicability; and the measuring result is accurate, a corresponding test block does not need to be prepared according to the type of the probe, the purchase cost of the test block is reduced, and the adaptability is good.)

1. A method for measuring performance parameters of a planar wedge ultrasonic surface wave probe is characterized by comprising the following steps:

the method comprises the following steps that two planar wedge ultrasonic surface wave probes (1) with the same performance parameters are placed and coupled in a central symmetry mode, the two planar wedge ultrasonic surface wave probes (1) are respectively connected with a transmitting interface and a receiving interface of an ultrasonic detection instrument (2), the ultrasonic detection instrument (2) is set to be in a double-crystal mode, direct-emitting wave signals of the two planar wedge ultrasonic surface wave probes are obtained through the ultrasonic detection instrument (2), and the relative positions of the two planar wedge ultrasonic surface wave probes (1) are adjusted horizontally until the amplitude of the direct-emitting wave signals reaches the maximum;

the length of an overlapping area of the plane wedges of the two plane wedge ultrasonic surface wave probes (1) is measured, an incidence point is located at the middle point of the length of the overlapping area, the length of a front edge is half of the length of the overlapping area, and a zero position is half of the propagation time of a direct wave signal.

2. The method of claim 1 wherein the performance parameters comprise center frequency, bandwidth, electrical impedance, relative pulse echo sensitivity, wafer material, wafer size, wafer shape, planar wedge material, planar wedge size, planar wedge shape, and probe housing size.

3. A performance parameter measuring device for a planar wedge ultrasonic surface wave probe is characterized by comprising a support (4-1), a first fixed support (4-2-1) and a second fixed support (4-2-2); the first fixed support (4-2-1) and the second fixed support (4-2-2) are respectively connected with the support (4-1) through a translation mechanism and can horizontally move on the support (4-1); locking devices are respectively arranged between the first fixed support (4-2-1) and the support (4-1) and between the second fixed support (4-2-2) and the support (4-1); the first fixing support (4-2-1) is connected with a first clamp (4-5-1), and the second fixing support (4-2-2) is connected with a second clamp (4-5-2).

4. The apparatus for determining the performance parameters of a planar wedge surface acoustic wave probe according to claim 3, wherein the first fixed support (4-2-1) comprises a telescopic rod, the telescopic rod is connected with the translation mechanism, and the end of the telescopic rod is hinged with the first clamp (4-5-1); the second fixing support (4-2-2) comprises a telescopic rod, the telescopic rod is connected with the translation mechanism, and the end part of the telescopic rod is hinged with the second clamp (4-5-2).

5. The apparatus for measuring the performance parameters of a planar wedge saw probe according to claim 4, wherein the extension rod is provided with a length mark, and the first clamp (4-5-1) and the second clamp (4-5-2) are provided with an angle mark.

6. The apparatus for measuring performance parameters of a planar wedge saw probe according to claim 3, wherein the translation mechanism is a slide-and-slide mechanism, the slide is fixedly connected to the support (4-1), the first fixed bracket (4-2-1) and the second fixed bracket (4-2-2) are respectively connected to two slides, and the two slides are connected to the slide.

7. The apparatus for measuring performance parameters of a planar wedge saw probe according to claim 3, wherein the translation mechanism is a ball screw mechanism, the screw pair is fixedly connected to the support (4-1), the first fixing bracket (4-2-1) and the second fixing bracket (4-2-2) are respectively connected to two nut pairs, and the two nut pairs are connected to the screw pair.

8. The apparatus for determining the performance parameters of a planar wedge saw probe as claimed in claim 3 wherein the first clamp (4-5-1) and the second clamp (4-5-2) are each provided with a resilient spacer.

9. The apparatus for measuring the performance parameters of a planar wedge surface acoustic wave probe as set forth in claim 3, wherein the holder (4-1) is connected at its upper portion with a handle (4-3).

10. The apparatus for measuring performance parameters of a planar wedge saw probe according to claim 3 wherein the bottom of the support (4-1) is provided with a plurality of pulleys (4-4), and the pulleys (4-4) are connected with a locking device.

Technical Field

The invention belongs to the technical field of ultrasonic detection, and particularly relates to a method and a device for measuring performance parameters of a planar wedge ultrasonic surface wave probe.

Background

When the surface of a medium is subjected to an alternating stress, a wave propagating along the surface of the medium, called an ultrasonic surface wave, is generated. The composite vibration trajectory generated by the solid surface particles by the ultrasonic surface wave is an ellipse around the equilibrium position, the major axis of the ellipse is perpendicular to the wave propagation direction, and the minor axis is parallel to the wave propagation direction. The magnitude of the particle amplitude is related to the elasticity of the material and the penetration depth of the surface acoustic wave, with the vibration energy rapidly decreasing with increasing depth. When the depth of penetration of the surface acoustic wave is near a wavelength, the amplitude of the particle is already small. When the ultrasonic surface wave hits an edge in the process of propagation, if the curvature radius R of the edge is more than 5 times of the wavelength, the ultrasonic surface wave can completely pass through without being blocked. When R becomes gradually smaller, part of the surface acoustic wave energy is reflected by the edge. When R is equal to or less than the wavelength, the reflected energy is large. This reflective characteristic is used in ultrasonic inspection to detect defects on the surface and near-surface of the workpiece. Based on this principle, ultrasonic surface waves can be used to detect surface defects of a workpiece. For example, flat workpieces, springs, cylindrical workpieces, turbine rotor R arcs, surface defect detection of blades.

In metal surface defect detection, ultrasonic surface waves are mostly generated from longitudinal wave mode conversion. The longitudinal wave obliquely incident on the interface when the incidence angle in the wedge is larger than the second critical angle alpha_ⅡWhen there is no longitudinal wave or transverse wave in the workpiece to be detected, but there is an ultrasonic surface wave on the interface between the wedge and the workpiece, and the incidence angle α should satisfy the following formula

Wherein, C_L1Representing the longitudinal wave speed of the wedge. C_S2Representing the shear wave sound velocity of the workpiece.

In the ultrasonic detection of the conventional ultrasonic oblique probe, in order to accurately position the defect, the incidence point, the K value, the zero position and the front edge of the oblique probe must be accurately measured by using a standard test block or a reference test block. However, surface wave probes are of a special type of angled probe, characterized by a K value of ∞. Different from the conventional inclined probe, the sound wave excited by the conventional ultrasonic inclined probe is transmitted in the workpiece, and the incidence point, the zero position and the front edge of the sound wave can be measured by the test block. However, the surface wave excited by the ultrasonic surface wave probe propagates on the surface of the workpiece, and the theoretical incident point, the zero position and the front edge of the surface wave probe cannot be measured through the test block at present.

Disclosure of Invention

In order to solve the problems, the invention provides a method and a device for measuring performance parameters of a planar wedge ultrasonic surface wave probe, which are simple and convenient to operate, and can obtain related parameters of the probe by adopting two planar wedge ultrasonic surface wave probes with the same performance parameters under the condition of not needing a test block.

The invention is realized by the following technical scheme:

the invention discloses a method for measuring performance parameters of a planar wedge ultrasonic surface wave probe, which comprises the following steps:

the method comprises the following steps of placing and coupling two planar wedge ultrasonic surface wave probes with the same performance parameters in a central symmetry manner, wherein the two planar wedge ultrasonic surface wave probes are respectively connected with a transmitting interface and a receiving interface of an ultrasonic detection instrument, the ultrasonic detection instrument is set to be in a twin-crystal mode, direct wave signals of the two planar wedge ultrasonic surface wave probes are obtained through the ultrasonic detection instrument, and the relative positions of the two planar wedge ultrasonic surface wave probes are horizontally adjusted until the amplitude of the direct wave signals reaches the highest;

and measuring the length of an overlapping area of the two plane wedge ultrasonic surface wave probes, wherein an incident point is positioned at the middle point of the length of the overlapping area, the length of a leading edge is half of the length of the overlapping area, and a zero point is half of the propagation time of a direct wave signal.

Preferably, the performance parameters include center frequency, bandwidth, electrical impedance, relative pulse echo sensitivity, wafer material, wafer size, wafer shape, planar wedge material, planar wedge size, planar wedge shape, and probe housing size.

The invention discloses a performance parameter measuring device for a planar wedge ultrasonic surface wave probe, which comprises a support, a first fixed bracket and a second fixed bracket, wherein the support is fixedly connected with the first fixed bracket; the first fixing support and the second fixing support are respectively connected with the support through a translation mechanism and can horizontally move on the support; locking devices are respectively arranged between the first fixed support and the support and between the second fixed support and the support; the first fixing support is connected with a first clamp, and the second fixing support is connected with a second clamp.

Preferably, the first fixing bracket comprises a telescopic rod, the telescopic rod is connected with the translation mechanism, and the end part of the telescopic rod is hinged with the first clamp; the second fixed bolster includes the telescopic link, and the telescopic link is connected with translation mechanism to the tip and the second anchor clamps of telescopic link are articulated.

Further preferably, the telescopic rod is provided with a length mark, and the first clamp and the second clamp are provided with angle marks.

Preferably, the translation mechanism is a slide block and slide rail mechanism, the slide rail is fixedly connected with the support, the first fixing support and the second fixing support are respectively connected with the two slide blocks, and the two slide blocks are connected with the slide rail.

Preferably, the translation mechanism is a ball screw mechanism, the screw pair is fixedly connected with the support, the first fixing support and the second fixing support are respectively connected with the two nut pairs, and the two nut pairs are connected with the screw pair.

Preferably, the first clamp and the second clamp are both provided with elastic interlayers.

Preferably, a handle is connected to the upper part of the support.

Preferably, the bottom of the support is provided with a plurality of pulleys, and the pulleys are connected with a locking device.

Compared with the prior art, the invention has the following beneficial technical effects:

the invention discloses a method for measuring performance parameters of a planar wedge ultrasonic surface wave probe, which is characterized in that under the condition of no test block, two planar wedge ultrasonic surface wave probes with the same performance parameters are adopted, direct wave signals of the two planar wedge ultrasonic surface wave probes are obtained through an ultrasonic detection instrument, the relative positions of the two planar wedge ultrasonic surface wave probes are horizontally adjusted, and the related parameters of the probes can be obtained until the amplitude of the direct wave signals reaches the maximum. The method is simple and convenient to operate, accurate in measurement result, free of preparing corresponding test blocks according to the types of the probes, low in purchase cost of the test blocks and good in adaptability.

The invention discloses a performance parameter measuring device of a planar wedge ultrasonic surface wave probe, which can realize the relative horizontal movement of the planar wedge ultrasonic surface wave probe through a translation mechanism after the planar wedge ultrasonic surface wave probe is fixed through a first clamp and a second clamp, and can lock the planar wedge ultrasonic surface wave probe and the planar wedge ultrasonic surface wave probe through a locking device after the position of the planar wedge ultrasonic surface wave probe is adjusted, so that the planar wedge ultrasonic surface wave probe and the planar wedge ultrasonic surface wave probe can be subjected to subsequent related operation, and the influence of the change of the position on a measuring result is avoided. The device has reasonable structural design and simple and convenient operation, can accurately measure the relevant parameters of the plane wedge ultrasonic surface wave probe, does not depend on the experience and skill level of an operator, and has good applicability.

Furthermore, the positions of the two plane wedge ultrasonic surface wave probes in the vertical direction can be conveniently adjusted through the telescopic rod, the first clamp and the second clamp are hinged to the telescopic rod respectively, the angles of the two plane wedge ultrasonic surface wave probes are conveniently adjusted, the positions of the two plane wedge ultrasonic surface wave probes are quickly adjusted, and the operation efficiency is improved.

Furthermore, the length mark of the telescopic rod and the angle marks of the first clamp and the second clamp can further improve the operation efficiency.

Furthermore, the translation mechanism adopts a slide block and slide rail mechanism, so that the structure is simple and the operation is simple and convenient.

Furthermore, the translation mechanism adopts a ball screw mechanism, the horizontal displacement adjustment precision is high, and the operation is simple and convenient.

Furthermore, elastic interlayers are arranged on the first clamp and the second clamp, so that the probe clamp can adapt to probes with different shapes and has a good fixing effect; on the other hand, the damage to the probe can be avoided.

Further, the upper part of the support is connected with a handle, so that the device can be stabilized during operation.

Furthermore, the bottom of the support is provided with the pulley, so that the support can be conveniently moved, and can be locked through the locking device after being moved in place, and the influence of sliding on operation is avoided.

Drawings

FIG. 1 is a general schematic diagram of the method for determining performance parameters of a planar wedge ultrasonic surface wave probe according to the present invention;

FIG. 2 is a schematic view of the overall structure of the apparatus for measuring performance parameters of a planar wedge SAW probe according to the present invention;

fig. 3 is a schematic diagram of a direct wave of a two-plane wedge saw probe.

In the figure, 1 is a plane wedge ultrasonic surface wave probe, 2 is an ultrasonic detection instrument, 3 is a signal line, and 4 is a performance parameter measuring device of the plane wedge ultrasonic surface wave probe; 4-1 is a support, 4-2-1 is a first fixing support, 4-2-2 is a second fixing support, 4-3 is a handle, 4-4 is a pulley, 4-5-1 is a first clamp, and 4-5-2 is a second clamp.

Detailed Description

The present invention will now be described in further detail with reference to the following figures and specific examples, which are intended to be illustrative, but not limiting, of the invention.

Fig. 2 is a schematic diagram of the overall structure of the system for measuring performance parameters of a planar wedge ultrasonic surface wave probe according to the present invention, which includes a support 4-1, a first fixed support 4-2-1 and a second fixed support 4-2-2; the first fixed support 4-2-1 and the second fixed support 4-2-2 are respectively connected with the support 4-1 through a translation mechanism and can horizontally move on the support 4-1; locking devices are respectively arranged between the first fixed support 4-2-1 and the support 4-1 and between the second fixed support 4-2-2 and the support 4-1; the first fixing support 4-2-1 is connected with a first clamp 4-5-1, and the second fixing support 4-2-2 is connected with a second clamp 4-5-2.

In a preferred embodiment of the invention, the upper part of the support 4-1 is connected with a handle 4-3, and the handle 4-3 is provided with an anti-skid gripping part; the bottom of the support 4-1 is provided with a plurality of pulleys 4-4, and the pulleys 4-4 are connected with a locking device.

In a preferred embodiment of the present invention, the first fixing support 4-2-1 comprises a telescopic rod, the telescopic rod is connected with the translation mechanism, and the end part of the telescopic rod is hinged with the first clamp 4-5-1; the second fixing support 4-2-2 comprises a telescopic rod, the telescopic rod is connected with the translation mechanism, the end part of the telescopic rod is hinged with the second clamp 4-5-2, and the hinge mechanism is provided with a locking device. Preferably, the telescopic rod is provided with a length mark, and the first clamp 4-5-1 and the second clamp 4-5-2 are provided with angle marks.

In one embodiment of the invention, the translation mechanism adopts a slide block and slide rail mechanism, the slide rail is fixedly connected with the support 4-1, the first fixed support 4-2-1 and the second fixed support 4-2-2 are respectively connected with two slide blocks, and the two slide blocks are connected with the slide rail.

In one embodiment of the invention, the translation mechanism is a ball screw mechanism, the screw pair is fixedly connected with the support 4-1, the first fixed bracket 4-2-1 and the second fixed bracket 4-2-2 are respectively connected with two nut pairs, and the two nut pairs are connected with the screw pair.

In a preferred embodiment of the invention, the first clamp 4-5-1 and the second clamp 4-5-2 are both provided with elastic interlayers, the materials of the elastic interlayers can adopt nylon, rubber and the like, and the elastic interlayers can be made into a detachable structure and can be replaced in time when the abrasion is large.

When the performance parameter measurement system of the planar wedge ultrasonic surface wave probe is adopted to measure the performance parameters of the planar wedge ultrasonic surface wave probe:

two planar wedge ultrasonic surface wave probes 1 with the same parameters are assembled on a performance parameter measuring device 4 of the planar wedge ultrasonic surface wave probe, when the two probes are arranged on the bottom surface in a central symmetry mode and are well acoustically coupled, the highest-amplitude direct wave displayed on an ultrasonic detection instrument 2 passes through an incident point on a longitudinal wave path. Based on this, referring to fig. 1, the assay method comprises the following steps:

the performance parameters of the planar wedge ultrasonic surface wave probe 1 comprise center frequency, bandwidth, electrical impedance, relative pulse echo sensitivity, wafer material, wafer size, wafer shape, planar wedge material, planar wedge size, planar wedge shape and probe shell size, and the parameters of the two planar wedge ultrasonic surface wave probes 1 are the same.

The ultrasonic detection instrument 2 is set to be in a double-crystal mode, one planar wedge ultrasonic surface wave probe 1 is connected with a transmitting interface of the ultrasonic detection instrument 2 through a signal line 3, and the other planar wedge ultrasonic surface wave probe 1 is connected with a receiving interface of the ultrasonic detection instrument 2 through the signal line 3.

Two planar wedge ultrasonic surface wave probes 1 with the same parameters are assembled on a planar wedge ultrasonic surface wave probe performance parameter measuring device 4, specifically, the two planar wedge ultrasonic surface wave probes 1 are fixed through a first clamp 4-5-1 and a second clamp 4-5-2 respectively, the horizontal position is adjusted through a translation mechanism, the vertical position is adjusted through a telescopic rod, and the angle is adjusted through the first clamp 4-5-1 and the second clamp 4-5-2. The two probes are adjusted to be arranged on the bottom surface in a central symmetry mode and have good acoustic coupling, as shown in fig. 1 and fig. 3, the ultrasonic detecting instrument 2 is set to be in a double-crystal mode, the wafer A excites the longitudinal wave to pass through a coincidence region BB 'of the bottom surface of the probe, and the incident wafer A' receives the longitudinal wave, so that a direct wave signal T is displayed on the ultrasonic detecting instrument 2. Then, the position of the probe is adjusted to ensure that the direct wave signal T has a high amplitude and the direct wave must pass through the incident point.

Based on the method, the length of an overlapping region BB 'of the plane wedges of the two probes is measured in the direction from the front end to the rear end of the probe through a measuring scale, and the midpoint O of the overlapping region BB' is marked on a probe shell respectively, namely the marked position is an incidence point of the plane wedge ultrasonic surface wave probe.

The distance of the overlapping area BB' of the plane wedge blocks of the two probes is measured in the direction from the front end to the rear end of the probe by a measuring scale, namely the length of the front edge is half of the length of the overlapping area of the two probes.

The time t corresponding to the direct wave signals of the two plane wedge ultrasonic surface wave probes 1 is measured by the ultrasonic detection instrument 2, namely the zero position of the plane wedge ultrasonic surface wave probe 1 is half of the time t corresponding to the direct wave signals.

The foregoing is directed to embodiments of the present invention, and it is understood that various modifications and improvements can be made by those skilled in the art without departing from the spirit of the invention.