阅读说明：本技术 一种运动台控制装置 (Motion platform controlling means ) 是由 杜文豪 于 2021-08-20 设计创作，主要内容包括：本发明公开了一种运动台控制装置,功放机柜与每个信号转接板之间进行无线通信；每个传感器采集与运动台运动相关的信息数据；信号转接板将信息数据发送至功放机柜；功放机柜接收信息数据并将部分信息数据发送至运动控制卡；运动控制卡接收部分信息数据和上位机下发的指令,并根据部分信息数据和上位机下发的指令计算出执行指令,并将执行指令发送至功放机柜中的驱动器；驱动器产生驱动信号通过信号转接板下发至执行器,执行器受驱动信号驱动带动运动台运动；其中,无线通信的通信延迟时间小于或等于运动控制卡的计算周期,信号转接板的个数与运动台的自由度个数相对应。以提升装置对运动台的工件进行加工时的精度。(The invention discloses a motion platform control device.A power amplifier cabinet is in wireless communication with each signal adapter plate; each sensor collects information data related to the motion of the motion platform; the signal adapter plate sends the information data to the power amplifier cabinet; the power amplifier cabinet receives the information data and sends part of the information data to the motion control card; the motion control card receives part of the information data and the instruction sent by the upper computer, calculates an execution instruction according to the part of the information data and the instruction sent by the upper computer, and sends the execution instruction to a driver in the power amplifier cabinet; the driver generates a driving signal and transmits the driving signal to the actuator through the signal adapter plate, and the actuator is driven by the driving signal to drive the motion platform to move; the communication delay time of the wireless communication is less than or equal to the calculation period of the motion control card, and the number of the signal adapter plates corresponds to the number of the degrees of freedom of the motion station. The precision of the device for processing the workpiece of the motion table is improved.)

1. A motion stage control apparatus, comprising:

the device comprises an upper computer, a motion control card, a power amplifier cabinet, at least one signal adapter plate, an actuator and a plurality of sensors, wherein the actuator and the sensors are connected with the signal adapter plate;

the power amplifier cabinet is in wireless communication with the signal adapter plate; the sensor is used for collecting information data related to the motion of the motion platform; the signal adapter plate is used for sending the information data to the power amplifier cabinet; the power amplifier cabinet is used for receiving the information data and sending part of the information data to the motion control card; the motion control card is used for receiving partial information data and an instruction issued by the upper computer, calculating an execution instruction of the actuator according to the partial information data and the instruction issued by the upper computer, and sending the execution instruction to a driver in the power amplifier cabinet; the driver generates a driving signal and transmits the driving signal to the actuator through the signal adapter plate, and the actuator is driven by the driving signal to drive the motion table to move; the communication delay time of wireless communication is less than or equal to the calculation period of the motion control card, and the number of the signal adapter plates corresponds to the number of the degrees of freedom of the motion table.

2. The motion table control device according to claim 1, wherein the communication mode between the power amplifier cabinet and each signal adapter board is a radio frequency communication mode, the frequency band of a communication carrier is 100MHz-2.4GHz, and the communication delay time is 1-10 microseconds.

3. The motion table control device according to claim 1, wherein the power amplifier cabinet and each signal adapter board comprise a wireless transceiver module and an antenna, and the wireless transceiver module comprises a wireless transmitting unit and a wireless receiving unit;

the wireless transmitting unit comprises a data input subunit, a channel coding subunit, a signal modulation subunit, a digital-to-analog conversion subunit and a transmitting radio frequency front terminal unit which are electrically connected in sequence;

the wireless receiving unit comprises a receiving radio frequency front terminal unit, an analog-to-digital conversion subunit, a signal demodulation subunit, a channel decoding subunit and a data output subunit which are electrically connected in sequence.

4. The motion stage control apparatus of claim 3, wherein the signal patch panel further comprises: the device comprises an analog-to-digital conversion module, a data processing module, a first serial port communication module, a second serial port communication module and a power supply module; the wireless transceiver module is connected with the second serial port communication module;

the analog-to-digital conversion module is respectively electrically connected with the plurality of sensors, the actuator and the data processing module, and the data processing module is used for receiving information data acquired by the sensors after conversion by the analog-to-digital conversion module, sending the information data to the wireless transceiver module through the first serial port communication module and the second serial port communication module, and transmitting the information data to the power amplifier cabinet through the antenna;

the data processing module is further configured to receive a driving signal output by a driver in the power amplifier cabinet, where the driving signal is input to the data processing module through the antenna, the wireless transceiver module, the second serial port communication module, and the first serial port communication module in sequence, processed by the data processing module, sent to the analog-to-digital conversion module, and converted by the analog-to-digital conversion module and then output to the actuator;

the power supply module is used for supplying power to the analog-to-digital conversion module, the data processing module, the first serial port communication module, the second serial port communication module, the wireless transceiver module, the antenna, the sensors and the actuator.

5. The motion stage control apparatus of claim 4, wherein the data processing module is an FGPA chip.

6. The motion stage control apparatus of claim 3, wherein the power amplifier cabinet further comprises: the wireless transceiver module is connected with the industrial bus communication module;

an execution instruction issued by the motion control card is input to the driver through the industrial bus communication module;

and information data output by the signal adapter plate is sequentially transmitted to the motion control card through the antenna, the wireless transceiver module and the industrial bus communication module.

7. The motion stage control apparatus of claim 1, wherein the plurality of sensors comprises: the device comprises a temperature sensor, a limit sensor, a coding sensor and a Hall sensor; the actuator is a motor; the temperature sensor is used for collecting temperature data of the motor, the limit sensor is used for triggering limit when the displacement of the motor is in a preset stroke, the coding sensor is used for collecting displacement data of the motor, and the Hall sensor is used for collecting direction data of a stator in the motor.

8. The motion table control device according to claim 1, wherein the communication mode between the motion control card and the power amplifier cabinet is a high-speed communication protocol mode, and the communication delay time is 1-4 μ sec.

9. The motion stage control apparatus of claim 8, wherein the high speed communication protocol mode comprises an SRIO communication protocol mode.

10. The motion table control device according to claim 1, wherein the motion control card includes a DSP chip and an FPGA data transceiver card, and the FPGA data transceiver card is configured to obtain the partial information data and forward the execution instruction to the power amplifier cabinet.

Technical Field

The embodiment of the invention relates to the technical field of semiconductor processing, in particular to a semiconductor motion table control device.

Background

With the continuous development of IC products, the processing of workpieces in the semiconductor industry is very important, and a common requirement for workpiece processing is to place a workpiece on a motion table, move the workpiece from a current field to a next field, and ensure rapidness and accuracy, and ensure both control performance and high speed and low stability time, so as to improve the competitiveness of the product.

Because the electric devices on the motion platform are complex and various, and various protocols and hard-wire connections are needed for various sensors and actuators, various flat cables, various adapters and a plurality of disc cards exist, the existence of a large number of dense flat cables not only increases the difficulty of mechanical design and electromagnetic interference, but also enables the cable force to be used as aperiodic interference force in the motion process, so that the control difficulty of the motion platform is increased.

Disclosure of Invention

The invention provides a motion platform control device, which is used for reducing the number of cables through wireless communication, reducing the interference force of the cables to the motion platform in the motion process, improving the motion control precision and further improving the precision of the device in processing a workpiece of the motion platform.

In order to achieve the above object, an embodiment of the present invention provides a motion stage control apparatus, including:

the device comprises an upper computer, a motion control card, a power amplifier cabinet, at least one signal adapter plate, an actuator and a plurality of sensors, wherein the actuator and the sensors are connected with the signal adapter plate;

the power amplifier cabinet is in wireless communication with the signal adapter plate; the sensor is used for collecting information data related to the motion of the motion platform; the signal adapter plate is used for sending the information data to the power amplifier cabinet; the power amplifier cabinet is used for receiving the information data and sending part of the information data to the motion control card; the motion control card is used for receiving partial information data and an instruction issued by the upper computer, calculating an execution instruction of the actuator according to the partial information data and the instruction issued by the upper computer, and sending the execution instruction to a driver in the power amplifier cabinet; the driver generates a driving signal and transmits the driving signal to the actuator through the signal adapter plate, and the actuator is driven by the driving signal to drive the motion table to move; the communication delay time of wireless communication is less than or equal to the calculation period of the motion control card, and the number of the signal adapter plates corresponds to the number of the degrees of freedom of the motion table.

According to one embodiment of the invention, the communication mode between the power amplifier cabinet and each signal adapter plate is a radio frequency communication mode, the frequency band of a communication carrier is 100MHz-2.4GHz, and the communication delay time is 1-10 microseconds.

According to one embodiment of the invention, the power amplifier cabinet and each signal adapter plate comprise a wireless transceiving module and an antenna, wherein the wireless transceiving module comprises a wireless transmitting unit and a wireless receiving unit;

the wireless transmitting unit comprises a data input subunit, a channel coding subunit, a signal modulation subunit, a digital-to-analog conversion subunit and a transmitting radio frequency front terminal unit which are electrically connected in sequence;

the wireless receiving unit comprises a receiving radio frequency front terminal unit, an analog-to-digital conversion subunit, a signal demodulation subunit, a channel decoding subunit and a data output subunit which are electrically connected in sequence.

According to an embodiment of the present invention, the signal patch panel further comprises: the device comprises an analog-to-digital conversion module, a data processing module, a first serial port communication module, a second serial port communication module and a power supply module; the wireless transceiver module is connected with the second serial port communication module;

the analog-to-digital conversion module is respectively electrically connected with the plurality of sensors, the actuator and the data processing module, and the data processing module is used for receiving information data acquired by the sensors after conversion by the analog-to-digital conversion module, sending the information data to the wireless transceiver module through the first serial port communication module and the second serial port communication module, and transmitting the information data to the power amplifier cabinet through the antenna;

the data processing module is further configured to receive a driving signal output by a driver in the power amplifier cabinet, where the driving signal is input to the data processing module through the antenna, the wireless transceiver module, the second serial port communication module, and the first serial port communication module in sequence, processed by the data processing module, sent to the analog-to-digital conversion module, and converted by the analog-to-digital conversion module and then output to the actuator;

the power supply module is used for supplying power to the analog-to-digital conversion module, the data processing module, the first serial port communication module, the second serial port communication module, the wireless transceiver module, the antenna, the sensors and the actuator.

According to one embodiment of the invention, the data processing module is a FGPA chip.

According to an embodiment of the present invention, the power amplifier cabinet further includes: the wireless transceiver module is connected with the industrial bus communication module;

an execution instruction issued by the motion control card is input to the driver through the industrial bus communication module;

and information data output by the signal adapter plate is sequentially transmitted to the motion control card through the antenna, the wireless transceiver module and the industrial bus communication module.

According to one embodiment of the invention, the plurality of sensors comprises: the device comprises a temperature sensor, a limit sensor, a coding sensor and a Hall sensor; the actuator is a motor; the temperature sensor is used for collecting temperature data of the motor, the limit sensor is used for triggering limit when the displacement of the motor is in a preset stroke, the coding sensor is used for collecting displacement data of the motor, and the Hall sensor is used for collecting direction data of a stator in the motor.

According to an embodiment of the invention, the communication mode of the motion control card and the power amplifier cabinet is a high-speed communication protocol mode, and the communication delay time is 1-4 microseconds.

According to an embodiment of the present invention, the high-speed communication protocol mode includes an SRIO communication protocol mode.

According to an embodiment of the present invention, the motion control card includes a DSP chip and an FPGA data transceiver card, and the FPGA data transceiver card is configured to obtain the partial information data and forward the execution instruction to the power amplifier cabinet.

According to the motion platform control device provided by the embodiment of the invention, wireless communication is carried out between the power amplifier cabinet and each signal adapter plate; each sensor is used for collecting information data related to the motion of the motion platform; the signal adapter plate is used for sending the information data to the power amplifier cabinet; the power amplifier cabinet is used for receiving the information data and sending part of the information data to the motion control card; the motion control card is used for receiving part of information data and an instruction issued by the upper computer, calculating an execution instruction of the actuator according to the part of information data and the instruction issued by the upper computer, and sending the execution instruction to a driver in the power amplifier cabinet; the driver generates a driving signal and transmits the driving signal to the actuator through the signal adapter plate, and the actuator is driven by the driving signal to drive the motion platform to move; the communication delay time of the wireless communication is less than or equal to the calculation period of the motion control card, and the number of the signal adapter plates corresponds to the number of the degrees of freedom of the motion station. The number of cables is reduced through wireless communication, interference force of the cables in the motion process of the motion table to the cables is reduced, motion control precision is improved, and then precision of the lifting device in machining the workpiece of the motion table is improved.

Drawings

Fig. 1 is a block diagram schematically illustrating a motion stage control apparatus according to an embodiment of the present invention;

FIG. 2 is a block diagram of a motion stage control apparatus according to one embodiment of the present invention;

fig. 3 is a schematic block diagram illustrating interaction between a signal adapter board and a power amplifier cabinet in the motion stage control device according to an embodiment of the present invention;

fig. 4 is a block diagram of a first wtru in the motion stage control apparatus according to an embodiment of the present invention;

fig. 5 is a block diagram of a second wtru in the motion stage control apparatus according to an embodiment of the present invention;

fig. 6 is a block diagram of a signal adapter board in a motion stage control apparatus according to an embodiment of the present invention;

fig. 7 is a schematic block diagram of a power amplifier cabinet in a motion stage control device according to an embodiment of the present invention;

fig. 8 is a block diagram schematically illustrating a motion stage control apparatus according to another embodiment of the present invention.

Detailed Description

The present invention will be described in further detail with reference to the accompanying drawings and examples. It is to be understood that the specific embodiments described herein are merely illustrative of the invention and are not limiting of the invention. It should be further noted that, for the convenience of description, only some of the structures related to the present invention are shown in the drawings, not all of the structures.

Fig. 1 is a block diagram schematically illustrating a motion stage control apparatus according to an embodiment of the present invention. As shown in fig. 1 and 2, the apparatus 100 includes:

the system comprises an upper computer 1, a motion control card 2, a power amplifier cabinet 3, at least one signal adapter plate 4, an actuator 5 connected with the signal adapter plate 4 and a plurality of sensors 6;

the power amplifier cabinet 3 is in wireless communication with each signal adapter plate 4; the sensor 6 is used for collecting information data related to the motion of the motion platform; the signal adapter plate 4 is used for sending the information data to the power amplifier cabinet 3; the power amplifier cabinet 3 is used for receiving the information data and sending part of the information data to the motion control card 2; the motion control card 2 is used for receiving part of information data and an instruction issued by the upper computer 1, calculating an execution instruction of the actuator 5 according to the part of information data and the instruction issued by the upper computer 1, and sending the execution instruction to a driver 7 connected with the actuator 5 in the power amplifier cabinet 3; the driver 7 generates a driving signal and transmits the driving signal to the actuator 5 through the signal adapter plate 4, and the actuator 5 is driven by the driving signal to drive the motion table 8 to move; the communication delay time of the wireless communication is less than or equal to the calculation period of the motion control card 2, and the number of the signal adapter plates 4 corresponds to the number of the degrees of freedom of the motion station 8.

It can be understood that the degree of freedom of the motion stage 8 can be 1-2, when the degree of freedom is 1, the motion stage can move along the X direction or the Y direction, when the degree of freedom is 2, the motion stage can move along the X direction and the Y direction, and when the degree of freedom of the motion stage 8 is several, the signal adapting board 4 is provided with several. For example, the motion stage 8 has 2 degrees of freedom, and the signal adapter plate 4 has 2 signal adapters, and an X-direction actuator and a plurality of X-direction sensors are connected to the X-direction signal adapter plate, and a Y-direction actuator and a plurality of Y-direction sensors are connected to the Y-direction signal adapter plate.

The motion stage control apparatus 100 will be described below by taking an example in which the motion stage 8 includes 1 degree of freedom (X direction), and the communication method in one degree of freedom (X direction) can be referred to as the communication method in the remaining motion stages 8 (Y direction).

It should be noted that the motion table 8 bears the workpiece, and performs stepping motion or scanning motion in the X direction according to the instruction of the upper computer 1, so as to complete the functional requirements of exposure or handover. The upper computer 1 receives an instruction (such as an instruction that the motion table moves 1mm along the X direction) input by a user and transmits the instruction to the motion control card 2;

the sensors 6 in the X direction collect information data related to the motion of the motion table (for example, the motion table moves 0.1mm along the X direction), and the information data are transmitted to the power amplifier cabinet 3 through the signal adapter plate 4 in the X direction in a wireless communication manner, and the power amplifier cabinet 3 is transmitted to the motion control card 2 through optical fiber communication;

the motion control card 2 calculates an execution instruction of the actuator 5 (for example, the motion table is required to move 0.9mm along the X direction) according to the information data and the instruction issued by the upper computer 1, the motion control card 2 sends the calculated execution instruction to the driver 7 in the power amplifier cabinet 3 through optical fiber communication, the driver 7 outputs a driving signal according to the execution instruction, the driving signal is transmitted to the signal adapter plate 4 in the X direction through wireless communication, the signal adapter plate 4 in the X direction transmits the driving signal to the actuator 5 connected with the signal adapter plate, and the actuator 5 is driven by the driving signal to drive the motion table 8 to move along the X direction. And further, the functions such as exposure or transfer of the workpiece on the moving stage 8 are required.

The movement of the motion stage 8 in the Y direction is the same as in the X direction and will not be described in detail here.

Based on this, the power amplifier cabinet 3 and each signal adapter plate 4 are in wireless communication; the device 100 processes the workpiece of the motion table, the motion table 8 drives the workpiece to move along one direction or a plurality of directions, the workpiece moves to a fixed position or in the motion process to complete processing operations such as exposure, measurement and the like, the device 100 not only obviously reduces the number of cables through wireless communication, reduces cable interference force in the motion process and improves motion control precision, but also reduces the complexity of mechanical design and pipe arrangement and wiring of the motion table 8 due to the reduction of the cables.

It should be noted that the communication mode between the upper computer 1 and the motion control card 2 is TCP/IP communication, and may be other communication modes, which is not specifically limited in the present invention. Wherein, motion control card 2 can be the lower computer, and the specific communication flow of both is as follows:

1) the upper computer 1 packages commands and data and sends the data package to the lower computer, wherein the commands can be used for starting movement, and the data are movement displacement data;

2) the lower computer receives the data packet and analyzes the data packet;

3) the lower computer runs a control algorithm, packs the response and the data and sends a data packet to the upper computer;

4) the upper computer receives the data packet and analyzes the data packet. The data packet can be feedback whether the lower computer successfully processes the command, and if the lower computer fails, a fault code is returned.

In addition, the communication delay time of the wireless communication is less than or equal to the calculation cycle of the motion control card 2, which means that the calculation cycle of the motion control card 2 needs to be greater than the communication delay time of the wireless communication, because the motion control card 2 first acquires the information data of the plurality of sensors 6 and the instruction of the upper computer 1 before each calculation to perform the calculation, the communication delay time of the wireless communication is less than or equal to the calculation cycle of the motion control card 2.

According to one embodiment of the invention, the communication mode between the power amplifier cabinet 3 and each signal adapter plate 4 is a radio frequency communication mode, the frequency band of a communication carrier is 100MHz-2.4GHz, and the communication delay time is 1-10 microseconds.

Because the real-time motion control algorithm on the motion stage 8 runs at 5KHz or 4KHz, the communication delay time is kept in the microsecond level to meet the requirement.

According to one embodiment of the invention, the power amplifier cabinet 3 and each signal adapter plate 4 comprise a wireless transceiver module and an antenna, wherein the wireless transceiver module comprises a wireless transmitting unit and a wireless receiving unit;

the wireless transmitting unit comprises a data input subunit, a channel coding subunit, a signal modulation subunit, a digital-to-analog conversion subunit and a transmitting radio frequency front terminal unit which are electrically connected in sequence;

the wireless receiving unit comprises a receiving radio frequency front terminal unit, an analog-to-digital conversion subunit, a signal demodulation subunit, a channel decoding subunit and a data output subunit which are electrically connected in sequence.

As shown in fig. 3 and 4, the signal adapting board 4 includes a first wireless transceiver module 45 and a first antenna 46, and the first wireless transceiver module 45 includes a first wireless transmitting unit 451 and a first wireless receiving unit 452;

the first wireless transmitting unit 451 comprises a first data input subunit 4511, a first channel coding subunit 4512, a first signal modulation subunit 4513, a first digital-to-analog conversion subunit 4514 and a first transmitting radio frequency front terminal unit 4515 which are electrically connected in sequence;

the first wireless receiving unit 452 includes a first receiving rf front terminal unit 4521, a first analog-to-digital conversion subunit 4522, a first signal demodulation subunit 4523, a first channel decoding subunit 4524 and a first data output subunit 4525, which are electrically connected in sequence.

The first data input subunit 4511 is configured to store the received related information data, and provide the stored related information data to the first channel coding subunit 4512; the first channel coding subunit 4512 is configured to add redundant information to source data at a sending end, where the redundant information is related to the source data, improve interference resistance in a transmission process, and send the coded data to the first signal modulation subunit 4513; the first signal modulation subunit 4513 is configured to perform frequency modulation (also called bandpass modulation or carrier modulation) on the encoded signal, and shift the low-frequency signal to a high-frequency band for transmission in a channel; the first digital-to-analog conversion subunit 4514 is mainly configured to convert the binary signal into a high-frequency current signal; the first transmitting rf front terminal unit 4515 is configured to power-amplify and filter the current signal converted by the first digital-to-analog conversion subunit 4514, so as to excite an electromagnetic wave and transmit the electromagnetic wave to a space in a certain direction;

the first receiving rf front terminal unit 4521 is responsible for receiving electromagnetic wave energy propagating in space and transmitting the electromagnetic wave energy to the first analog-to-digital conversion subunit 4522; the first analog-to-digital conversion subunit 4522 mainly converts the high-frequency current signal into a binary signal; the first signal demodulation subunit 4523 is responsible for demodulating the high-frequency signal transmitted in the channel into a low-frequency signal, that is, separating the effective signal from the carrier; the first channel decoding subunit 4524 is responsible for separating the data to which the redundant information has been added into source data; the first data output subunit 4525 is responsible for outputting source data.

The power amplifier cabinet 3 includes a second wireless transceiver module 32 and a second antenna 33, and according to an embodiment of the present invention, as shown in fig. 3 and fig. 5, the second wireless transceiver module 32 includes a second wireless transmitting unit 321 and a second wireless receiving unit 322;

the second wireless transmitting unit 321 includes a second data input subunit 3211, a second channel coding subunit 3212, a second signal modulation subunit 3213, a second digital-to-analog converting subunit 3214, and a second transmitting rf front terminal unit 3215, which are electrically connected in sequence;

the second wireless receiving unit 322 includes a second receiving rf front terminal unit 3221, a second analog-to-digital converting subunit 3222, a second signal demodulating subunit 3223, a second channel decoding subunit 3224, and a second data outputting subunit 3225 electrically connected in sequence.

The principle of the second wireless transceiver module 32 is the same as that of the first wireless transceiver module 45, and is not described herein again.

It should be noted that the first wireless transmitter 451 in the first wireless transceiver module 45 operates corresponding to the second wireless receiver 322 in the second wireless transceiver module 32, and the first wireless receiver 452 in the first wireless transceiver module 45 operates corresponding to the second wireless transmitter 321 in the second wireless transceiver module 32.

According to an embodiment of the present invention, as shown in fig. 6, the signal transfer board 4 further includes: the device comprises an analog-to-digital conversion module 41, a data processing module 42, a first serial port communication module 43, a second serial port communication module 44 and a power supply module 47; the first wireless transceiver module 45 is connected with the second serial port communication module 44;

the analog-to-digital conversion module 41 is electrically connected with the plurality of sensors 6, the actuator 5 and the data processing module 42, and the data processing module 42 is configured to receive information data acquired by each sensor 6 after being converted by the analog-to-digital conversion module 41, send the information data to the first wireless transceiving module 45 through the first serial port communication module 43 and the second serial port communication module 44, and transmit the information data to the power amplifier cabinet through the first antenna 46;

the data processing module 42 is further configured to receive a driving signal output by the driver 7 in the power amplifier cabinet 3, where the driving signal is input to the data processing module 42 through the first antenna 46, the first wireless transceiving module 45, the second serial communication module 44, and the first serial communication module 43 in sequence, processed by the data processing module 42, sent to the analog-to-digital conversion module 41, and output to the actuator 5 after being converted by the analog-to-digital conversion module 41;

the power supply module 47 is used for supplying power to the analog-to-digital conversion module 41, the data processing module 42, the first serial port communication module 43, the second serial port communication module 44, the first wireless transceiver module 45, the first antenna 46, each sensor 6, and the actuator 5.

It should be noted that the data processing module 42 may be an FGPA chip. The first serial communication module 43 and the second serial communication module 44 each include a serial transmission buffer and a serial reception buffer, and the buffers are used for storing data of a fixed size. The serial port sending buffer area of the first serial port communication module 43 and the serial port receiving buffer area of the second serial port communication module 44 can store information data collected by the sensor 6; the serial port receiving buffer of the first serial port communication module 43 and the serial port sending buffer of the second serial port communication module 44 may store the driving signal. Further, the signal patch panel 4 can temporarily store information data to be transmitted.

That is to say, the signal adapter plate 4 can process the data collected by the sensor 6, and then transmit the processed data to the power amplifier cabinet 3 through serial port communication and wireless communication; and the data issued by the power amplifier cabinet 3 can be processed and transmitted to the actuator 5. Wherein, signal keysets 4 sets up a plurality of port connection sensor and executor 5 through setting up, then the mode through the bus sends the data packing of sensor collection to power amplifier rack 3, gather by power amplifier rack 3 again and send to motion control card 2, thereby, avoided because motion control card 2 itself lacks the problem that a plurality of sensors can not be connected to the port, also avoided directly being connected to motion control card 2 with the cable, cause the very long winding problem of easily knoing of cable, thus, not only can connect the sensor more, and the cable is very short, can hardly influence the motion of motion platform 8.

It should be noted that the wireless receiving communication and the wireless transmitting communication flow in the signal patch panel 4 are as follows:

1) when the power is first turned on, the data processing module 42 configures the first wireless receiving unit 452 and the first wireless transmitting unit 451 respectively, configures the first wireless receiving unit 452 and the first wireless transmitting unit 451 as a receiving mode and a transmitting mode, and after configuration, the first wireless receiving unit 451 and the second wireless receiving unit 452 are in a sleep mode;

2) when in the dormant state, polling is carried out according to microsecond level periods (1-3us) to check whether an activation event exists;

3) if an activation event occurs, sending a flag bit and a receiving flag position 0, and at this time, for the first wireless receiving unit 452, entering a receiving mode to wait for packet reception, and for the first wireless sending unit 451, entering a sending mode to determine whether the data buffer area has data, if so, sending the data, and if not, waiting;

4) for the first wireless receiving unit 452, receiving the data packet, receiving the flag position 1, entering the sleep state, for the first wireless transmitting unit 451, after the data packet is transmitted, transmitting the flag position 1, entering the sleep state, and continuing polling to check whether there is an activation event;

the data processing module 42 configures the transceiving frequency (100M-2.4Gb/s), the transmitting power, the data transmission rate (500M-1Gb/s), the wireless transceiving mode, the modulation mode, and the data length of the first wireless transceiving module 45, and for the first wireless transmitting unit 451, the activation event is that the data in the receiving buffer of the second serial communication module 44 is ready, and for the first wireless receiving unit 452, the activation event is that the data in the transmitting buffer of the second serial communication module 44 is cleared.

According to an embodiment of the present invention, as shown in fig. 7, the power amplifier cabinet 3 includes: a driver 7 for driving the actuator 5, an industrial bus communication module 31, a second wireless transceiver module 32 and a second antenna 33;

the execution instruction issued by the motion control card 2 is input to the driver 7 through the industrial bus communication module 31;

the information data output by the signal adapting board 4 is sequentially transmitted to the motion control card 2 through the second antenna 33, the second wireless transceiver module 32 and the industrial bus communication module 31.

The first wireless transceiver module 45 and the second wireless transceiver module 32 communicate with each other through the first antenna 46 and the second antenna 33.

The information data is communicated with the second antenna 33 through the first wireless transceiving module 45 of the signal adapting board 4 and the first antenna 46, and the information data is sent to the second wireless transceiving module 32 of the power amplifier cabinet 3. The power amplifier cabinet 3 and the motion control card 2 are in optical fiber communication, and the power amplifier cabinet 3 sends information data to the motion control card 2 through the industrial bus communication module 31;

the motion control card 2 generates an execution instruction according to the information data and the instruction calculation issued by the upper computer 1, issues the execution instruction to the industrial bus communication module 31 of the power amplifier cabinet 3 through optical fiber communication, inputs the execution instruction to the driver 7 through the industrial bus communication module 31, and the driver 7 generates a driving signal according to the execution instruction.

The driving signal is transmitted to the space through the industrial bus communication module 31, the second wireless transceiver module 32 and the second antenna 33, and the first wireless transceiver module 45 of the signal adapting board 4 receives the driving signal through the first antenna 46 and transmits the driving signal to the actuator 5 through the data processing module 42 in the signal adapting board 4. The power amplifier cabinet 3 and the signal adapter plate 4 are in wireless communication, and the space distance is 1-4 m. The driver 7 is a commercial driver and is responsible for running the current loop algorithm.

According to one embodiment of the present invention, as shown in fig. 8, the plurality of sensors 6 includes: a temperature sensor 61, a limit sensor 62, a coding sensor 63 and a Hall sensor 64; the actuator 5 is a motor; the temperature sensor 61 is used for collecting temperature data of the motor, the limit sensor 62 is used for triggering limit when the displacement of the motor is in a preset stroke, the coding sensor 63 is used for collecting displacement data of the motor, and the Hall sensor 64 is used for collecting direction data of a stator in the motor.

Wherein, temperature sensor 61 is used for gathering the temperature data of motor, temperature data can be transmitted to power amplifier rack 3 through 4 wireless communication of signal keysets, power amplifier rack 3 transmits to motion control card 2 through optical fiber communication, and then, motion control card 2 sends relevant instruction down according to temperature data, for example when temperature data is higher than the temperature data threshold value of motor, motion control card 2 can send the command of scram down, and send driver 7 in power amplifier rack 3 through optical fiber communication, driver 7 exports drive signal according to this instruction of scram, this drive signal passes through wireless communication transmission to signal keysets 4, signal keysets 4 transmits this drive signal to the executor 5 rather than being connected, executor 5 receives the drive signal drive, the removal of motion platform 8 stops.

The coding sensor 63 is used for collecting the displacement data of the motor, the limiting sensor 62 is used for triggering limiting when the displacement of the motor is in a preset stroke, that is, the displacement data is transmitted to the power amplifier cabinet 3 through the signal adapter plate 4 in a wireless communication mode, and then transmitted to the motion control card 2 through the power amplifier cabinet 3 in an optical fiber communication mode, the motion control card 2 calculates the stroke of the motor according to the displacement data, when the stroke of the motor is equal to the preset stroke, the motion control card 2 sends a trigger instruction to the limiting sensor 62, the trigger instruction sequentially passes through the power amplifier cabinet 3, the signal adapter plate 4 is input to the limiting sensor 62, and the limiting sensor 62 is triggered, so that the motor is suddenly stopped.

The hall sensor 64 is used for collecting direction data of a stator in the motor, the direction data is transmitted to the power amplifier cabinet 3 through the signal adapter plate 4, and the driver 7 in the power amplifier cabinet 3 changes an output driving signal according to the direction data of the stator so as to drive the motor to normally work.

According to one embodiment of the invention, the communication mode of the motion control card 2 and the power amplifier cabinet 3 is a high-speed communication protocol mode, and the communication delay time is 1-4 microseconds. The high-speed communication protocol mode comprises an SRIO communication protocol mode.

The motion control card 2 adopts a DSP chip and a data transceiving card, wherein the data transceiving card adopts an FPGA chip, acquires other signals such as information data from the FPGA of the data transceiving card, and forwards the signal of the data calculated by the algorithm to the power amplifier cabinet 3 through the FPGA of the data transceiving card.

The control principle of the motion control apparatus 100 will be described below.

Specifically, taking the motor temperature data collected by the temperature sensor as an example, the uplink data transmission principle is as follows: the temperature data is converted by the analog-to-digital conversion module 41, sent to the data processing module 42, processed by the data processing module 42, sent to the serial port sending buffer of the first serial port communication module 43, communicated between the first serial port communication module 43 and the second serial port communication module 44, sent to the serial port receiving buffer of the second serial port communication module 44 for storage, and then input to the first data input subunit 4511 and the first data input subunit 4511 in the first wireless transceiving module 45, where the first data input subunit 4511 is used to store the received temperature data and provide the temperature data to the first channel coding subunit 4512; the first channel coding subunit 4512 is configured to add redundant information to the temperature data at the sending end, where the redundant information is related to the temperature data, so as to improve interference resistance in the transmission process, and send the coded temperature data to the first signal modulation subunit 4513; the first signal modulation subunit 4513 is configured to perform frequency modulation (also called bandpass modulation or carrier modulation) on the encoded temperature data, and shift a low-frequency signal to a high-frequency band for transmission in a channel; the first digital-to-analog conversion subunit 4514 is mainly configured to convert the binary temperature data signal into a high-frequency current signal corresponding to the temperature data; the first transmitting rf front terminal unit 4515 is configured to power-amplify and filter the current signal converted by the first digital-to-analog conversion subunit 4514, so as to excite an electromagnetic wave and transmit the electromagnetic wave to a space in a certain direction; the second receiving rf front terminal unit 3221 is responsible for receiving electromagnetic wave energy propagating in space and transmitting the electromagnetic wave energy to the second analog-to-digital conversion subunit 3222; the second analog-to-digital conversion subunit 3222 mainly converts the high-frequency current signal into a binary temperature data signal; the second signal demodulating subunit 3223 is responsible for demodulating the high-frequency signal transmitted in the channel into a low-frequency signal, that is, separating the effective temperature data signal from the carrier; the second channel decoding subunit 3224 is responsible for separating the data to which the redundant information has been added into temperature data; the second data output subunit 3225 is responsible for outputting temperature data. The power amplifier cabinet 3 and the motion control card 2 are in optical fiber communication, and temperature data are transmitted to the motion control card 2;

the principle of downlink data transmission is as follows: the motion control card 2 issues an execution instruction according to the temperature data, the execution instruction is output to the driver 7 through the industrial bus communication module 31, and the driver 7 generates a driving signal according to the execution instruction.

The driving signal is sequentially output to the second data input subunit 3211, the second channel coding subunit 3212, the second signal modulation subunit 3213, the second digital-to-analog conversion subunit 3214, the second rf transmitting front terminal unit 3215 through the industrial bus communication module 31, processed, and then transmitted to the space, and then through the first antenna 46 and the second antenna communication 33, the driving signal is received and output to the serial port transmitting buffer of the second serial port communication module 44 by the first rf receiving front terminal unit 4521, the first analog-to-digital conversion subunit 4522, the first signal demodulation subunit 4523, the first channel decoding subunit 4524, and the first data output subunit 4525 through the first antenna 46 and the second antenna communication 33, and then through the second serial port communication module 44 and the first serial port communication module 43 for serial port communication, the driving signal is stored in the serial port receiving buffer of the first serial port communication module 43, and then transmitted to the analog-to-digital conversion module 41 through the data processing module 42, and then inputted to the actuator 5, and the actuator 5 operates in accordance with the drive signal.

The device is used for processing a workpiece of the motion platform, the motion platform drives the workpiece to move along one direction or a plurality of directions, the workpiece moves to a fixed position or completes processing operations such as exposure and the like in the motion process, the device remarkably reduces the number of cables through wireless communication, reduces cable interference force in the motion process, improves motion control precision, reduces complexity of mechanical design and pipe arrangement and wiring of the motion platform due to reduction of the cables, and meets requirements of microsecond-level real-time communication by using a radio frequency chip with a frequency range of 100MHz to 2.4GHz and designing wireless communication sending and receiving logic and a flow.

In summary, according to the motion stage control device provided in the embodiment of the present invention, the motion control card and the power amplifier cabinet perform wireless communication; wireless communication is carried out between the power amplifier cabinet and each signal adapter plate; each sensor is used for collecting information data related to the motion of the motion platform; the signal adapter plate is used for transmitting the information data to the power amplifier cabinet; the power amplifier cabinet is used for receiving the information data and sending the information data to the motion control card; the motion control card is used for receiving the information data and the instruction sent by the upper computer, calculating an execution instruction of the actuator according to the information data and the instruction sent by the upper computer, and sending the execution instruction to a driver connected with the actuator in the power amplifier cabinet; the driver generates a driving signal and transmits the driving signal to the actuator through the signal adapter plate, and the actuator is driven by the driving signal to drive the motion platform to move; the communication delay time of the wireless communication is less than or equal to the calculation period of the motion control card, and the number of the signal adapter plates corresponds to the number of the degrees of freedom of the motion station. The number of cables is reduced through wireless communication, interference force of the cables in the motion process of the motion table to the cables is reduced, motion control precision is improved, and then precision of the lifting device in machining the workpiece of the motion table is improved.

It is to be noted that the foregoing is only illustrative of the preferred embodiments of the present invention and the technical principles employed. It will be understood by those skilled in the art that the present invention is not limited to the particular embodiments described herein, but is capable of various obvious changes, rearrangements and substitutions as will now become apparent to those skilled in the art without departing from the scope of the invention. Therefore, although the present invention has been described in greater detail by the above embodiments, the present invention is not limited to the above embodiments, and may include other equivalent embodiments without departing from the spirit of the present invention, and the scope of the present invention is determined by the scope of the appended claims.