阅读说明：本技术 一种对位检测装置及具有该装置的芯片分选装置 (Alignment detection device and chip sorting device with same ) 是由 黄新青 刘骏 刘轩 幸刚 谭艳娥 蔡建镁 张嘉鸿 于 2021-09-24 设计创作，主要内容包括：本申请涉及一种对位检测装置及具有该装置的芯片分选装置,包括固定架,所述固定架设有转角同轴光源、吸管和相机；其中吸管具有吸气道,吸气道的一端为吸气端,且吸气端设有吸嘴,吸气道的另一端设有透光密封件,吸气道的吸嘴用于对准蓝膜上的芯片,所述吸嘴的轴心的延长线经由转角同轴光源的反光面的反射线过所述相机的镜头。本申请具有提高分选准确度的效果。(The application relates to an alignment detection device and a chip sorting device with the same, comprising a fixed frame, wherein the fixed frame is provided with a corner coaxial light source, a suction pipe and a camera; the suction tube is provided with a suction channel, one end of the suction channel is a suction end, the suction end is provided with a suction nozzle, the other end of the suction channel is provided with a light-transmitting sealing piece, the suction nozzle of the suction channel is used for aligning to a chip on a blue film, and an extension line of the axis of the suction nozzle passes through a lens of the camera through a reflection line of a reflection surface of a corner coaxial light source. This application has the effect that improves the degree of accuracy of sorting.)

1. An alignment detection device, characterized in that: the device comprises a fixed frame (5), wherein the fixed frame (5) is provided with a corner coaxial light source (51), a suction pipe (3) and a camera (52); the suction tube (3) is provided with a suction channel (30), one end of the suction channel (30) is a suction end (301), the suction end (301) is provided with a suction nozzle (31), the other end of the suction channel (30) is provided with a light-transmitting sealing piece (4), the suction nozzle (31) of the suction channel (30) is used for aligning to a chip on a blue film, and an extension line of the axis of the suction nozzle (31) passes through a lens of the camera (52) through a reflection line of a reflection surface of the corner coaxial light source (51).

2. The alignment detection device according to claim 1, wherein: the fixing frame (5) is provided with a fixing seat (22), the fixing seat (22) is provided with a mounting cavity (221) for mounting the suction pipe (3), and one end of the suction pipe (3) far away from the air suction end (301) is an air outlet end (302); fixing base (22) are equipped with trachea (23), trachea (23) pass through installation cavity (221) with end (302) intercommunication of giving vent to anger, printing opacity sealing member (4) are used for sealing keeping away from of installation cavity (221) inhale the opening of end (301).

3. The alignment detection device according to claim 2, wherein: light transmission sealing member (4) are including light transmission piece (41) and first sealing washer (42), and first sealing washer (42) are located keeping away from of installation cavity (221) inhale the opening part of end (301), light transmission piece (41) shutoff the cavity of first sealing washer (42).

4. The alignment detection device according to claim 2, wherein: fixing base (22) are equipped with and dodge groove (222), dodge groove (222) with installation cavity (221) intercommunication, dodge and be equipped with second sealing washer (43) in groove (222), just second sealing washer (43) elastic sleeve is located the outer wall of straw (3).

5. The alignment detection device according to claim 1, wherein: the middle part of straw (3) is connected with trachea (23), printing opacity sealing member (4) are including printing opacity stopper (46) and third sealing washer (45), the one end of inhaling end (301) is kept away from in air suction duct (30) is equipped with step hole (224), third sealing washer (45) are located step hole (224), printing opacity stopper (46) with step hole (224) threaded connection, just the tip top pressure of printing opacity stopper (46) in on third sealing washer (45).

6. The alignment detection device according to any one of claims 1 to 5, wherein: the fixed frame (5) is provided with a transfer frame (2), the suction pipe (3) is fixedly provided with a supporting arm (21), and the lower end of the supporting arm (21) is movably connected with the transfer frame (2); the transfer frame (2) is in threaded connection with a first screw rod (61), and the end part of the first screw rod (61) is movably connected with the supporting arm (21).

7. The alignment detection device according to claim 6, wherein: the supporting arm (21) is provided with a first through hole (612) for the first screw rod (61) to pass through, a limiting block (611) is fixed at the end part of the first screw rod (61) passing through the first through hole (612), the limiting block (611) is larger than the first through hole (612), and the limiting block (611) abuts against one side surface of the supporting arm (21); the transfer frame (2) is further provided with a second rod (62), the second rod (62) is provided with a jacking spring (622), and the jacking spring (622) abuts against the side face, away from the limiting block (611), of the support arm (21).

8. The alignment detection device according to claim 1, wherein: the suction nozzle (31) is provided with a plurality of LED laser tube lamp beads (33), each LED laser tube lamp bead (33) takes the suction nozzle (31) as a center, the circumference is evenly distributed, the irradiation extension lines of the LED laser tube lamp beads (33) intersect at one point, and the point is positioned on the axis extension line of the suction nozzle (31).

9. The alignment detection device according to claim 2, wherein: the straw (3) is sleeved with a light-transmitting cylinder (34), and the light-transmitting cylinder (34) is fixedly arranged in the mounting cavity (221); the suction nozzle (31) is sleeved with an annular convergent lens (35), the thickness of the convergent lens (35) is gradually reduced from the axis to the edge, and the light-transmitting cylinder (34) is located on the convergent lens (35) along the projection of the axis of the suction pipe (3).

10. A chip sorting device is characterized in that: the alignment detection device comprises a rack (1), wherein the alignment detection device (10) as claimed in claim 1 is arranged on the rack (1).

Technical Field

The application relates to the field of special equipment for semiconductor production, in particular to an alignment detection device and a chip sorting device with the same.

Background

In the production process of the LED chips, different light color differences may occur, and in order to ensure a certain quality, the LED chips with different light color differences need to be screened by a chip sorting device.

The existing chip sorting device comprises a rack, a screening rack, a material receiving rack, a driving component and a transferring component, wherein a blue film to be processed is fixed on the screening rack, chips with different light color differences are sequentially arranged on the blue film to be processed in an adhering mode, a processed blue film is fixed on the material receiving rack, and chips with the same light color difference are adhered on the processed blue film; the driving assembly is used for driving the screening frame and the material receiving frame to move respectively, and the transfer assembly is used for transferring the chips on the blue film to be processed to the processed blue film, so that the chips with the same color difference are ensured to be located on the same processed blue film, and the chips are sorted.

With respect to the related art in the above, the inventors consider that when there is a deviation in the position of a chip on a blue film to be processed, it is difficult for the transfer unit to accurately transfer the chip, thereby affecting the subsequent chip sorting.

Disclosure of Invention

In order to ensure accurate transfer of chips, the application provides an alignment detection device and a chip sorting device with the same.

The application provides a counterpoint detection device adopts following technical scheme:

an alignment detection device comprises a fixed frame, wherein the fixed frame is provided with a corner coaxial light source, a suction tube and a camera; the suction tube is provided with a suction channel, one end of the suction channel is a suction end, the suction end is provided with a suction nozzle, the other end of the suction channel is provided with a light-transmitting sealing piece, the suction nozzle of the suction channel is used for aligning to a chip on a blue film, and an extension line of the axis of the suction nozzle passes through a lens of the camera through a reflection line of a reflection surface of a corner coaxial light source.

In order to achieve better suction effect and reduce damage to chips in the suction process, the existing suction nozzle is usually made of rubber, and after long-term use, the suction nozzle serving as an easily-worn part is usually damaged seriously, and the damaged suction nozzle is difficult to align with the chip to be sucked, so that the suction nozzle needs to be replaced in time; the suction nozzle made of rubber is difficult to ensure the accuracy of the position of the new suction nozzle relative to the blue film after each replacement, so that the position of the suction nozzle needs to be repeatedly corrected after each replacement of the suction nozzle, the correction period is long, and the correction is carried out by adopting repeated adjustment, suction and other repeated trial and error modes, and the efficiency is low.

Moreover, the more the correction times are, the shorter the service cycle of the suction nozzle is, namely the suction nozzle is easy to have inaccurate alignment in a short time, and a new suction nozzle needs to be replaced immediately; through many contrastive analysis, the suction nozzle is because machining error and the material of itself limit, at the calibration in-process (the suction nozzle actually bumps with blue membrane or bumps with the chip), under the eccentric condition of suction nozzle and straw, the suction nozzle receives foreign object effort and the suction nozzle is comparatively serious with the hookup location deformation of straw, and there is eccentric trend (because the condition of every time correction to the suction nozzle is analyzed and is reachd), for this even after finishing correcting, the suction nozzle has had irreversible or the difficult internal damage who discovers, therefore the life-span of suction nozzle then greatly reduced, cause the chip to select separately the effect poor, the low scheduling problem of efficiency.

By adopting the technical scheme, the alignment detection is carried out before the sorting chip, the new suction nozzle is arranged on the suction pipe, then the suction pipe is ensured to be positioned at the initial position (the suction nozzle is over against the blue film) over against the blue film, namely, the alignment of the alignment position of the suction nozzle and the blue film is completed, then the coaxial light emitted by the corner coaxial light source sequentially passes through the light-transmitting sealing element, the suction channel and the suction nozzle and is emitted to the chip to be sucked, the coaxial light reflected from the chip returns along the original path and is emitted to the lens of the camera through the reflection of the reflection surface of the corner coaxial light source, so that the image collected by the camera is the dot visual field of the center hole of the suction nozzle, at the moment, the position of the virtual cross line of the image visual field is adjusted on the image display equipment by taking the center of the dot visual field as the reference point, the center of the virtual cross line is aligned with the reference point, thereby completing the alignment of the suction nozzle position and the center of the collected image, the device comprises a suction nozzle, a blue film contraposition position and a center three-point one-line of a collected image, and is characterized in that distance conversion is carried out according to the collected image of a camera and the distance between a virtual cross line central point of the collected image and a chip to be sucked, the moving direction and the distance of the blue film to be processed are controlled according to conversion distance parameters, the chip to be sucked of the blue film to be processed is moved to the cross line central point of the collected image, namely, the chip to be sucked is moved to the position corresponding to the suction nozzle, and the suction nozzle is convenient for accurately sucking the chip.

The cross line of the collected image is corrected in a mode of changing the position of the relative suction nozzle, so that the damage of the structure of the suction nozzle in the correction process is avoided, the accuracy is improved, the service cycle of the suction nozzle is prolonged, and the sorting efficiency and effect are improved.

Secondly, the path and the range of coaxial light are limited by utilizing the characteristics of the suction pipe, so that an operator can quickly and simply judge the alignment condition of the suction pipe according to the characteristic that whether a chip exists in the middle of an acquired image; simultaneously, the structure of straw can also filter the influence of outside reflection light source to gathering the image, and the image of gathering promptly is more clear.

And after the chip was successfully absorbed through external negative pressure device (like the trachea) to the straw, the chip sheltered from the route of coaxial light, so the image that the camera was gathered can appear the black spot, promptly through this black spot, operating personnel can be fast to the state judgement behind the chip was absorbed to the straw to the condition emergence of the askew gas leakage of reduction hourglass suction or inhaling.

Optionally, the fixing frame is provided with a fixing seat, the fixing seat is provided with an installation cavity for installing the suction pipe, and one end of the suction pipe, which is far away from the air suction end, is an air outlet end; the fixing base is provided with an air pipe, the air pipe passes through the installation cavity and is communicated with the air outlet end, and the light-transmitting sealing piece is used for sealing the opening of the installation cavity far away from the air suction end.

By adopting the technical scheme, the air pipe generates negative pressure by acting on the carrier of the suction pipe through the fixed seat, and the air flow can pass through the air suction end, the air suction channel, the air outlet end and the mounting cavity, so that the chip is sucked; the sealing function of the light-transmitting sealing piece can ensure that the air pressure is stable, and meanwhile, the light-transmitting function of the light-transmitting sealing piece can ensure the irradiation of coaxial light.

Optionally, the light-transmitting sealing member includes a light-transmitting sheet and a first sealing ring, the first sealing ring is located at the opening of the installation cavity far away from the air suction end, and the light-transmitting sheet blocks the hollow part of the first sealing ring.

Through adopting above-mentioned technical scheme, first sealing washer can reduce the clearance in the printing opacity piece installation to play the effect of stabilizing atmospheric pressure, and the irradiation of coaxial light can also be ensured to the cavity department of first sealing washer.

Optionally, the fixing seat is provided with an avoiding groove, the avoiding groove is communicated with the mounting cavity, a second sealing ring is arranged in the avoiding groove, and the second sealing ring is elastically sleeved on the outer wall of the suction pipe.

Through adopting above-mentioned technical scheme, through setting up the second sealing washer, can carry out the shutoff to the clearance between straw and the installation cavity to ensure the stability of atmospheric pressure.

Optionally, the middle part of straw is equipped with the trachea, the printing opacity sealing member includes printing opacity stopper and third sealing washer, the one end that the end of breathing in was kept away from to the air suction duct is equipped with the step hole, the third sealing washer is located the step hole, the printing opacity stopper with step hole threaded connection, just the tip top of printing opacity stopper press in on the third sealing washer.

Through adopting above-mentioned technical scheme, retrench the structure, the installation of the printing opacity stopper of being convenient for of the form that utilizes threaded connection simultaneously to and can effectively compress the third sealing washer through the produced roof pressure effect of threaded connection, in order to reduce the air current and leak, ensure that atmospheric pressure is stable.

Optionally, the fixed frame is provided with a transfer frame, the suction tube is fixedly provided with a support arm, and the lower end of the support arm is movably connected with the transfer frame; the transfer frame is in threaded connection with a first screw, and the end of the first screw is movably connected with the support arm.

Through adopting above-mentioned technical scheme, through the first screw rod of rotating, can drive the support arm and carry out displacement around to the straightness that hangs down to the support arm is adjusted, adjusts with the axiality to straw and coaxial light, with the improvement precision of counterpointing, and improves and detect the precision.

Optionally, the support arm is provided with a first through hole through which the first screw rod passes, a limiting block is fixed at an end of the first screw rod passing through the first through hole, the limiting block is larger than the first through hole, and the limiting block abuts against one side surface of the support arm; the transfer frame is further provided with a second rod, the second rod is provided with a jacking spring, and the jacking spring abuts against the side face, deviating from the limiting block, of the supporting arm.

Through adopting above-mentioned technical scheme, through the first screw rod of forward rotating, utilize the butt of stopper to the support arm to realize the position control on the first direction, and through the first screw rod of reverse rotating, in order to remove the stopper, in order to dodge the spending bracer, the support arm receives the effort of roof pressure spring and removes to the second direction this moment, makes the support arm butt again on the stopper, realizes the ascending position control of second side promptly, synthesizes the regulation, can realize the straightness's that hangs down adjustment of support arm.

Optionally, the suction nozzle is provided with a plurality of LED laser tube lamp beads, each LED laser tube lamp bead is uniformly arranged around the suction nozzle as a center, and an irradiation extension line of each LED laser tube lamp bead intersects at a point, and the point is located on an axis extension line of the suction nozzle.

By adopting the technical scheme, light beams emitted by the LED laser tube lamp beads converge on the chip to be absorbed, and the number of light reflected by the chip is more than that of other chips, so that the brightness of the chip on an image acquired by the camera is more obvious, and an operator can clearly know the position and the alignment condition of the chip.

Optionally, the straw sleeve is provided with a light-transmitting cylinder, and the light-transmitting cylinder is fixedly installed in the installation cavity; the suction nozzle sleeve is provided with an annular convergent lens, the thickness of the convergent lens is gradually reduced from the axis to the edge, and the projection of the light-transmitting cylinder along the axis of the suction pipe is positioned on the convergent lens.

By adopting the technical scheme, the coaxial light emitted by the corner coaxial light source sequentially passes through the light-transmitting sealing element and the light-transmitting cylinder to the converging lens, the parallel coaxial light is converged on the chip to be absorbed through the converging lens, and the light reflected by the chip is more relative to other chips, so that the brightness of the chip on the image acquired by the camera is more obvious, and an operator can clearly understand the position and the alignment condition of the chip.

The application further provides a chip sorting device, which adopts the following technical scheme:

a chip sorting device comprises a rack, and an alignment detection device is arranged on the rack.

In summary, the present application includes at least one of the following beneficial technical effects:

the cross line of the collected image is corrected in a mode of changing the position of the relative suction nozzle, so that the damage of the structure in the suction nozzle correction process is avoided, the accuracy is improved, the service cycle of the suction nozzle is also improved, and the sorting efficiency and effect are improved;

by arranging the light transmitting sheet and the first sealing ring, the effects of sealing and stabilizing air pressure can be achieved, and normal irradiation of coaxial light can be ensured;

the support arm capable of adjusting the verticality is arranged to adjust the coaxiality of the suction pipe and the coaxial light, so that the alignment precision is improved, and the detection precision is improved;

through setting up the convergence structure, can treat to absorb the chip and concentrate and polish to make it obviously be different from other chips, so that operating personnel can clearly understand chip position and counterpoint the condition.

Drawings

Fig. 1 is a schematic view of the entire structure of embodiment 1.

Fig. 2 is a partially enlarged view of a portion a in fig. 1.

Fig. 3 is a schematic structural view of the transfer rack of embodiment 1.

FIG. 4 is a sectional view showing the fitting relationship between the suction pipe and the holder according to embodiment 1.

Fig. 5 is a schematic structural view of the ejector device of embodiment 1.

Fig. 6 is a schematic structural view of the alignment detection apparatus according to embodiment 1.

Fig. 7 is a schematic diagram for embodying an on-axis optical path of embodiment 1.

FIG. 8 is a schematic view showing the structure of the straw according to example 2.

FIG. 9 is a schematic structural view of a straw according to example 3.

Fig. 10 is a schematic structural view of a holder according to embodiment 4.

Fig. 11 is a sectional view of a holder according to embodiment 5.

Description of reference numerals: 1. a frame; 2. a transfer frame; 3. a straw; 4. a light transmissive seal; 5. a fixed mount; 10. an alignment detection device; 11. a screening rack; 12. a material receiving frame; 13. a first XZ axis moving platform; 14. a second XZ axis moving platform; 15. an ejection device; 151. a Y-axis moving platform; 152. ejecting the head; 21. a support arm; 22. a fixed seat; 221. a mounting cavity; 222. an avoidance groove; 223. a step groove; 224. a stepped bore; 23. an air tube; 30. an air intake duct; 301. a suction end; 302. an air outlet end; 31. a suction nozzle; 33. LED laser tube lamp beads; 34. a light-transmitting cylinder; 35. a converging optic; 41. a light transmitting sheet; 42. a first seal ring; 43. a second seal ring; 45. a third seal ring; 46. a light transmissive plug; 47. a fourth seal ring; 48. a fifth seal ring; 51. a corner coaxial light source; 52. a camera; 53. lighting a light bar; 61. a first screw; 611. a limiting block; 612. a first perforation; 62. a second lever; 621. a boss; 622. pressing the spring; 63. an elastic sheet.

Detailed Description

The present application is described in further detail below with reference to figures 1-11.

In order to achieve a better suction effect and reduce damage to chips in the suction process, the existing suction nozzle 31 is often made of rubber, and after long-term use, the suction nozzle 31 serving as an easily-worn part is often damaged severely, and the damaged suction nozzle 31 is difficult to align with the chip to be sucked, so that the suction nozzle 31 needs to be replaced in time; the rubber suction nozzle 31 is difficult to ensure the accuracy of the position of the new suction nozzle 31 relative to the blue film after each replacement, and therefore, after each replacement of the suction nozzle 31, the position of the suction nozzle 31 needs to be repeatedly corrected, the correction period is long, and the correction is performed by adopting a repeated adjustment, suction and other trial and error modes, and the efficiency is low. Moreover, it is found that the more the correction times are, the shorter the usage cycle of the suction nozzle 31 is, i.e. the suction nozzle 31 is prone to have inaccurate alignment in a short time, and a new suction nozzle 31 needs to be replaced immediately. Therefore, the service life of the suction nozzle 31 is greatly reduced, and the problems of poor chip sorting effect, low efficiency and the like are caused.

Therefore, embodiment 1 of the present application discloses a chip sorting apparatus to solve the above problems.

Referring to fig. 1 and 2, the automatic material collecting device comprises a frame 1, wherein a screening frame 11, a material collecting frame 12, a driving device, an ejection device 15 and an alignment detection device 10 are arranged on the frame 1; the screening frame 11 is fixed with blue films to be processed, the receiving frame 12 is fixed with processed blue films, the driving device is used for respectively driving the screening frame 11 and the receiving frame 12 to move along an XZ axis, and the ejection device 15 is used for applying point type top pressure on the blue films.

As shown in fig. 2, the frame 1 is provided with a transfer frame 2, the transfer frame 2 is located between the sieving frame 11 and the material receiving frame 12, the frame 1 is further provided with a servo motor (not shown), and an output shaft of the servo motor is fixedly connected with the transfer frame 2 to drive the transfer frame 2 to intermittently rotate.

As shown in fig. 3, fig. 4, the transfer frame 2 is equipped with the support arm 21 that two symmetries set up, the upper end of support arm 21 is fixed with fixing base 22, fixing base 22 sets up the installation cavity 221 that runs through the setting along the Y axle direction, it is fixed with straw 3 to peg graft in the installation cavity 221, wherein have the suction channel 30 of coaxial setting in the straw 3, and suction end 301 demountable installation of straw 3 has suction nozzle 31, the form of demountable connection can be for pegging graft, cup joint, the joint, form such as connection or bonding is inhaled to magnetism, the one end that suction channel 30 is located the installation cavity 221 is end 302 of giving vent to anger.

An opening of the installation cavity 221, which is far from the air suction end 301, is provided with a light-transmitting sealing member 4, the light-transmitting sealing member 4 is used for sealing the opening, the light-transmitting sealing member 4 includes a light-transmitting sheet 41 and a first sealing ring 42, wherein the light-transmitting sheet 41 is made of a material with a light-transmitting effect, such as a glass sheet, a transparent plastic sheet, and the like; step groove 223 has been seted up to the one end opening of installation cavity 221, and first sealing washer 42 is located step groove 223, and first sealing washer 42 and the coaxial setting of suction channel 30, and the laminating of printing opacity piece 41 is fixed in the terminal surface of fixing base 22, and printing opacity piece 41 has the squeezing action to first sealing washer 42 for first sealing washer 42 deformation and the reduction clearance of loosing air.

As shown in fig. 4, the fixing seat 22 is provided with an avoiding groove 222, the avoiding groove 222 is communicated with the mounting cavity 221, a second sealing ring 43 is installed in the avoiding groove 222, the second sealing ring 43 is elastically sleeved on the outer wall of the middle portion of the suction pipe 3, and the second sealing ring 43 can seal the gap between the suction pipe 3 and the mounting cavity 221.

As shown in fig. 3 and 4, the external air tube 23 is installed on the fixing seat 22, the air tube 23 is located between the first sealing ring 42 and the second sealing ring 43, the air tube 23 is communicated with the installation cavity 221, that is, the air tube 23 generates negative pressure, and the air flow can pass through the air suction end 301, the air suction channel 30, the air outlet end 302 and the installation cavity 221, so as to complete the suction of the chip.

In order to facilitate feedback reception of the suction result of the chip, an air pressure sensor can be installed at any position in the air pipe 23, the air suction channel 30 and the installation cavity 221, when the air pipe 23 sucks air to enable the chip to be sucked by the suction nozzle 31, the air pressure in the air pipe 23 is increased, the air pressure sensor is triggered, the air pressure sensor sends a suction success signal to a processing system of the whole equipment, and the processing system of the whole equipment records the suction condition of the chip according to the received suction success signal and counts and processes the suction success signal.

As shown in fig. 1, the driving device includes a first XZ axis moving platform 13 and a second XZ axis moving platform 14, where the first XZ axis moving platform 13 is used to drive the sieving frame 11 to move in the X axis and Z axis directions, and the second XZ axis moving platform 14 is used to drive the material receiving frame 12 to move in the X axis and Z axis directions.

As shown in fig. 5, two ejection devices 15 are provided for performing point-type ejection on the blue film to be processed and the processed blue film, respectively, the ejection device 15 includes a Y-axis moving platform 151 disposed on the frame 1, an ejection head 152 disposed along the Y-axis direction is disposed at an output end of the Y-axis moving platform 151, and the movement of the ejection head 152 can be controlled by the Y-axis moving platform 151.

During processing, the chip to be sucked on the blue film to be processed is moved to the position corresponding to the suction nozzle 31 of the suction pipe 3 through the first XZ axis moving platform 13, then the ejection head 152 is ejected to the back of the position corresponding to the chip to be sucked on the blue film to be processed, the deformation of the blue film is utilized to force the point to move close to the suction pipe 3 until the chip to be sucked is attached to the suction nozzle 31 of the suction pipe 3, then the air pipe 23 is started, the chip is sucked by the suction force of the suction pipe 3, and then the ejection head 152 is reset; the servo motor is started, the transfer frame 2 rotates to drive the suction pipe 3 to rotate so as to move the chip to a position aligned with the material receiving frame 12, then the ejection head 152 on the other side ejects movement to force the processed blue film to deform in the direction close to the suction nozzle 31, so that the processed blue film is stuck to the chip, the air pipe 23 stops sucking air, at the moment, the chip is only subjected to the adhesive force on the processed blue film, the ejection head 152 resets, the processed blue film recovers deformation, and the chip is transferred to the processed blue film, so that the chip is sorted.

The alignment detection device 10 can detect whether the chip to be sucked is accurately aligned with the suction tube 3, so that the occurrence of suction missing or suction skew is effectively reduced.

As shown in fig. 6 and 7, the alignment detection apparatus 10 includes a fixing frame 5, the fixing frame 5 is fixed on the rack 1, and the fixing frame 5 is fixed with a corner coaxial light source 51 and a camera 52, wherein the corner coaxial light source 51 is located on a side of the suction pipe 3 along the Y-axis direction away from the screening frame 11, and an extension line of the axis of the suction nozzle 31 passes through a lens of the camera 52 via a reflection line of a reflection surface of the corner coaxial light source 51.

Before the chip is sorted, the transfer frame 22 rotates to drive the suction pipe 3 to move to a position facing the blue film, so as to ensure that the suction pipe 3 is in an initial position facing the blue film (the suction nozzle 31 faces the blue film), namely, the alignment of the alignment position of the suction nozzle 31 and the blue film is completed, then the coaxial light emitted by the corner coaxial light source 51 sequentially passes through the transparent sealing part 4, the suction channel 30 and the suction nozzle 31 and is emitted onto the chip to be sucked, the coaxial light reflected from the chip returns in the original path and is emitted onto the lens of the camera 52 through the reflection of the reflection surface of the corner coaxial light source 51, so that the image collected by the camera 52 is the dot view of the central hole of the suction nozzle 31, at the moment, on the image display device, the center of the dot view is taken as the reference point, the position of the virtual cross line of the image view is adjusted, the center of the virtual cross line is aligned with the reference point, so as to complete the alignment of the position of the suction nozzle 31 and the center of the collected image, namely, the suction nozzle 31, the blue film alignment position, and the center of the collected image are in a line, then according to the collected image of the camera 52, the distance conversion is performed according to the distance between the virtual reticle center point of the collected image and the chip to be sucked, and the moving direction and distance of the blue film to be processed are controlled according to the conversion distance parameter, so that the chip to be sucked of the blue film to be processed is moved to the reticle center point of the collected image, namely, to the position corresponding to the suction nozzle 31, and further, the suction nozzle 31 is convenient for accurately sucking the chip.

Namely, the cross line of the collected image is corrected in a mode of changing the position of the suction nozzle 31, so that the damage of the structure of the suction nozzle 31 in the correction process is avoided, the accuracy is improved, the service cycle of the suction nozzle 31 is also improved, and the sorting efficiency and effect are improved.

Secondly, when the suction nozzle 31 is moved to the position opposite to the blue film by the transfer frame 2, the characteristics of the suction nozzle 31 are utilized to limit the path and the range of coaxial light, so that an operator can quickly and simply judge the alignment condition of the suction nozzle 3 according to the characteristic that whether a chip is arranged at the central point of the cross line of the collected image; meanwhile, the straw 3 can also filter the influence of an external light source on the collected image, namely, the definition of the collected image is ensured.

And after the chip is successfully and accurately sucked by the suction pipe 3, the chip shields the reflected coaxial light, so that a black spot appears in an image collected by the camera 52, namely, through the black spot, an operator can quickly judge the state of the suction pipe 3 after sucking the chip.

And, counterpoint detection device 10 still includes light strip 53, and light strip 53 is fixed mounting on mount 5, and light strip 53 is used for polishing blue membrane side, and it cooperatees with the polishing of coaxial light, can carry out comparatively comprehensive polishing to the chip of different models, size, shape to satisfy the image recognition and the defect detection etc. of all chips as far as possible.

The two alignment detection devices 10 are provided, wherein one alignment detection device 10 is used for detecting the alignment condition of the chip on the blue film to be processed, and the other alignment detection device 10 is used for scanning and identifying the position and the angle of the chip attached to the processed blue film, so as to judge whether the chip is successfully attached, and identify and feed back the XY theta position of the attached chip, so as to judge whether the attached chip is askew.

Whether the coaxiality of the axis of the suction duct 30 of the suction pipe 3 and the Y axis is good or not is also a factor that affects the alignment detection result, and therefore, in order to reduce this effect, it is set that the lower end of the support arm 21 is connected to the transfer rack 2 by the elastic piece 63, that is, the support arm 21 can be adjusted at a certain angle with respect to the transfer rack 2, as shown in fig. 3.

The transfer frame 2 is provided with a first screw 61 and a second rod 62 which are arranged along the Y axis, wherein the first screw 61 is in threaded connection with the transfer frame 2, and the first screw 61 is higher than the second rod 62; the support arm 21 is provided with a first through hole 612, one end of the first screw 61 passes through the first through hole 612, and the limiting block 611 is fixed at the end, the size of the limiting block 611 is larger than that of the first through hole 612, and the limiting block 611 abuts against one side surface of the support arm 21.

The second rod 62 is fixed with a boss 621, the second rod 62 is further sleeved with a top pressure spring 622, one end of the top pressure spring 622 can be welded and fixed with the second rod 62 and can also abut against the boss 621, the other end of the top pressure spring 622 abuts against the side face, deviating from the limiting block 611, of the supporting arm 21, the second rod 62 can be fixedly connected with the transfer frame 2, the second rod 62 can also be in threaded connection with the transfer frame 2, and by rotating the second rod 62, the top pressure spring 622 can be pressed or the elastic potential energy of the top pressure spring can be released, so that the top pressure prestress can be changed.

By rotating the first screw 61 forward, the limiting block 611 moves in the direction close to the transfer rack 2, and the supporting arm 21 is driven to shift in the direction away from the blue film by the abutment of the limiting block 611 to the supporting arm 21, so that the position adjustment in the first direction is realized; the first screw 61 is rotated reversely to move the limiting block 611 to avoid the supporting arm 21, so as to provide the supporting arm 21 with a deviation space along the direction close to the blue film, at this time, the supporting arm 21 is moved towards the second direction by the acting force of the jacking spring 622, so that the supporting arm 21 is abutted against the limiting block 611 again, and the position adjustment in the second direction is realized; through the comprehensive adjustment in the first direction and the second direction, the adjustment of the perpendicularity of the support arm 21 can be realized.

Embodiment 2 is different from embodiment 1 in that, as shown in fig. 8, the suction pipe 3 is inserted into the installation cavity 221, and the fourth sealing ring 47 is disposed between the outer wall of the suction pipe 3 and the installation cavity 221, at this time, the fourth sealing ring 47 can effectively reduce the gap between the suction pipe 3 and the installation cavity 221, so as to ensure stable air pressure.

The light-transmitting sealing member 4 includes a light-transmitting sheet 41, the light-transmitting sheet 41 is located in the step groove 223, a fifth sealing ring 48 is disposed between the light-transmitting sheet 41 and the step groove 223, and the light-transmitting sheet 41 is adhered to the step groove 223 through a sealing glue.

Embodiment 3 is different from embodiment 1 in that, as shown in fig. 9, the suction pipe 3 is directly fixedly connected with the upper end of the supporting arm 21 or integrally connected, and an external air pipe 23 is installed in the middle of the suction pipe 3.

The light-transmitting sealing member 4 comprises a third sealing ring 45 and a light-transmitting plug 46, wherein the light-transmitting plug 46 is a plug-shaped structure with a light-transmitting effect, such as a glass plug, a transparent plastic plug, and the like; the suction pipe 3 is provided with a step hole 224 at one end far away from the suction end 301, the step hole 224 is coaxially arranged with the suction channel 30, the third sealing ring 45 is positioned in the step hole 224, the light-transmitting plug 46 is in threaded connection with the step hole 224, and the end part of the light-transmitting plug 46 is pressed against the third sealing ring 45 in the screwing process.

Embodiment 4 is based on embodiment 1, and as shown in fig. 10, the suction nozzle 31 has a conical structure, the outer conical surface of the suction nozzle 31 is provided with a plurality of LED laser tube lamp beads 33, each LED laser tube lamp bead 33 is uniformly arranged around the suction nozzle 31 as a center, the irradiation extension lines of the LED laser tube lamp beads 33 intersect at a point, which is an imaginary point of a chip to be sucked, and the point is located on the axial extension line of the suction nozzle 310.

During alignment detection, light beams emitted by the LED laser tube light beads 33 converge on a chip to be absorbed, and light reflected by the chip is more relative to other chips, so that the brightness of the chip on an image acquired by the camera 52 is more obvious, and an operator can more clearly understand whether the position of the chip to be absorbed is accurate according to the phenomenon and can also obtain feedback information, that is, whether the chip to be absorbed is located in the center of the acquired image, and if the chip is not located in the center, the perpendicularity of the support arm 21 needs to be corrected.

Embodiment 5 is different from embodiment 1 in that, as shown in fig. 11, a light-transmitting tube 34 is fixed on the suction pipe 3 in a sleeved manner, the light-transmitting tube 34 is coaxially arranged with the suction channel 30, the light-transmitting tube 34 is a tubular structure having a light-transmitting effect, such as a glass tube, a transparent plastic tube, etc., and the light-transmitting tube 34 is inserted and fixed in the installation cavity 221.

The suction nozzle 31 is further fixed with an annular converging lens 35 in a sleeved mode, the thickness of the converging lens 35 is gradually reduced from the axis to the edge, and the projection of the light-transmitting cylinder 34 along the axis of the suction nozzle 31 is located on the converging lens 35.

Coaxial light emitted by the corner coaxial light source 51 sequentially passes through the light-transmitting sheet 41 and the light-transmitting cylinder 34 to the converging lens 35, and the parallel coaxial light is converged on a chip to be absorbed through the converging lens 35, and the light reflected by the chip is more relative to other chips, so that the brightness of the chip on an image acquired by the camera 52 is more obvious, and an operator can clearly understand the position and the alignment condition of the chip.

The above embodiments are preferred embodiments of the present application, and the protection scope of the present application is not limited by the above embodiments, so: all equivalent changes made according to the structure, shape and principle of the present application shall be covered by the protection scope of the present application.