阅读说明：本技术 外延生长装置 (Epitaxial growth device ) 是由 汪延成 程佳峰 沈文杰 梅德庆 郑丽霞 周建灿 张秋成 于 2021-07-30 设计创作，主要内容包括：本发明涉及半导体外延生长技术领域,特别是涉及一种外延生长装置,该外延生长装置包括至少一个托盘、加热体和至少一组线圈组件；加热体内具有工作空间,托盘位于工作空间内,线圈组件沿加热体周向围设在加热体外；每组线圈组件具有一基点,每组线圈组件包括多个独立的子线圈,多个子线圈以基点为中心由内向外扩散排布；且两两相邻的两个子线圈中,其中一个子线圈包裹另外一个子线圈。本申请中每个独立的子线圈将托盘上的区域划分为多个独立加热的子区域,每个独立的子线圈对托盘上对应的子区域进行单独加热,从而实现托盘表面温度分区可控；即可调整托盘上对应的子区域的温度,降低各个子区域之间的温度差值,以提高托盘上生长的外延层的质量。(The invention relates to the technical field of semiconductor epitaxial growth, in particular to an epitaxial growth device, which comprises at least one tray, a heating body and at least one group of coil assemblies; the heating body is internally provided with a working space, the tray is positioned in the working space, and the coil assembly is arranged outside the heating body in a surrounding manner along the circumferential direction of the heating body; each group of coil assemblies is provided with a base point, each group of coil assemblies comprises a plurality of independent sub-coils, and the plurality of sub-coils are distributed from inside to outside by taking the base point as a center; and one of the two adjacent sub-coils is wrapped by the other sub-coil. In the application, each independent sub-coil divides the area on the tray into a plurality of independently heated sub-areas, and each independent sub-coil independently heats the corresponding sub-area on the tray, so that the surface temperature of the tray is divided into the controllable sub-areas; the temperature of the corresponding sub-regions on the tray can be adjusted, and the temperature difference between the sub-regions is reduced, so that the quality of the epitaxial layer grown on the tray is improved.)

1. An epitaxial growth device, characterized in that it comprises at least one tray (30), a heating body (10) and at least one set of coil assemblies (20); the heating body (10) is internally provided with a working space (11), the tray (30) is positioned in the working space (11), and the coil assembly (20) is arranged outside the heating body (10) in a surrounding manner along the circumferential direction of the heating body (10);

wherein each group of coil assemblies (20) is provided with a base point (22), each group of coil assemblies (20) comprises a plurality of independent sub-coils (21), and the plurality of sub-coils (21) are distributed and distributed from inside to outside by taking the base point (22) as a center; and one sub-coil (21) wraps the other sub-coil (21) in two adjacent sub-coils (21).

2. Epitaxial growth apparatus according to claim 1, characterized in that the coil assemblies (20) are arranged in groups, the groups of coil assemblies (20) being arranged circumferentially along the heating body (10).

3. Epitaxial growth device according to claim 1 or 2, characterized in that the tray (30) has a support surface for supporting a substrate thereon;

the base point (22) and the center of the tray (30) are located on the same straight line, and a connecting line of the base point (22) and the center of the tray (30) is perpendicular to the bearing surface.

4. Epitaxial growth apparatus according to claim 1, characterized in that each set of coil assemblies (20) comprises two independent first (211) and second (212) sub-coils, the first sub-coil (211) being positioned in correspondence with a central region of the tray (30), the second sub-coil (212) being arranged around the first sub-coil (211).

5. Epitaxial growth apparatus according to claim 1, characterized in that a plurality of said working spaces (11) are provided in said heating body (10), said trays (30) are provided in a plurality, each of said working spaces (11) is provided with a corresponding tray (30), and each of said trays (30) rotates independently.

6. Epitaxial growth device according to claim 5, characterized in that a plurality of said trays (30) are arranged stacked in a first direction; wherein the first direction is perpendicular to the axis of the heating body (10).

7. Epitaxial growth device according to claim 1, characterized in that said heating body (10) comprises a plurality of heating seats (14), between two adjacent heating seats (14) said working space (11) is defined; the tray (30) is arranged on the heating seat (14).

8. Epitaxial growth device according to claim 1 or 2, characterized in that one or more groups of coil assemblies (20) arranged circumferentially along the heating body (10) form a group of coil modules; the coil modules are arranged in groups, and the groups of the coil modules are arranged along the axis direction of the heating body (10).

9. The epitaxial growth device according to claim 8, wherein an inlet (12) and an outlet (13) are respectively formed at two ends of the heating body (10) along the axial direction of the heating body (10), the inlet (12) is used for inputting a medium to be reacted into the working space (11), and the outlet (13) is used for outputting the reacted medium from the working space (11).

10. The epitaxial growth device according to claim 1, further comprising a heat-preserving cylinder (40), wherein the heating body (10) is arranged in the heat-preserving cylinder (40), and the coil assembly (20) is arranged around the heat-preserving cylinder (40).

Technical Field

The invention relates to the technical field of semiconductor epitaxial growth, in particular to an epitaxial growth device.

Background

Epitaxial growth is an important part of the semiconductor industry chain, the quality of an epitaxial film directly restricts the performance of subsequent devices, and as the demand for high-quality semiconductor devices in the industry is increasing, high-efficiency high-quality epitaxial equipment gets more and more attention.

Epitaxial growth mainly refers to growing a layer of film with higher quality on a substrate, and a plurality of methods are used for growing an epitaxial layer, but most methods are Chemical Vapor Deposition (CVD), which refers to a method for synthesizing a coating or a nano material by reacting chemical gas or steam on the surface of a substrate; two or more reaction media (usually gaseous) are introduced into the working space of the heating body, and then they chemically react with each other to form a new material to be deposited on the surface of the substrate. The temperature of the working space where the tray is located and the temperature distribution of the surface of the tray are one of the important factors influencing the deposition rate, and the uniformity of the temperature distribution of each area on the surface of the tray directly influences the thickness uniformity and the doping uniformity of the epitaxial thin film, thereby influencing the quality of the epitaxial thin film.

At present, a heating body is mainly inductively heated by a coil capable of generating electromagnetic induction, the coil is arranged around the heating body, so that the heating body is positioned in a magnetic field of the coil, and the heating body generates heat through the electromagnetic induction; however, the induction heating of the coil to the heating body is uneven, which causes uneven temperature of each region of the working space in the heating body, and further causes uneven temperature distribution of each region on the surface of the tray, thereby greatly affecting the quality of the epitaxial thin film.

Disclosure of Invention

In view of the above, it is desirable to provide an epitaxial growth apparatus with controllable temperature zones on each region of the tray surface.

The invention provides an epitaxial growth device, which comprises at least one tray, a heating body and at least one group of coil assemblies; the heating body is internally provided with a working space, the tray is positioned in the working space, and the coil assembly is arranged outside the heating body in a surrounding manner along the circumferential direction of the heating body; each group of coil assemblies is provided with a base point, each group of coil assemblies comprises a plurality of independent sub-coils, and the plurality of sub-coils are distributed from inside to outside by taking the base point as a center; and one of the two adjacent sub-coils is wrapped by the other sub-coil.

In one embodiment, the coil assemblies are arranged in multiple groups, and the multiple groups of coil assemblies are arranged along the circumferential direction of the heating body.

In one embodiment, the tray is provided with a bearing surface for bearing a substrate; the base point and the center of the tray are located on the same straight line, and a connecting line of the base point and the center of the tray is perpendicular to the bearing surface of the tray.

In one embodiment, each group of coil assemblies comprises two independent first sub-coils and two independent second sub-coils, the first sub-coils are arranged at positions corresponding to the middle area of the tray, and the second sub-coils surround the first sub-coils.

In one embodiment, the heating body has a plurality of working spaces, the number of the trays is multiple, each working space corresponds to one tray, and each tray rotates independently.

In one embodiment, a plurality of the trays are arranged in a stack in a first direction; wherein the first direction is perpendicular to an axis of the heating body.

In one embodiment, the heating body comprises a plurality of heating seats, and the working space is defined between two adjacent heating seats; the tray is arranged on the heating seat.

In one embodiment, one or more groups of coil assemblies arranged along the circumferential direction of the heating body form a group of coil modules; the coil modules are arranged in groups, and the groups of the coil modules are arranged along the axis direction of the heating body.

In one embodiment, an inlet and an outlet which are oppositely arranged are respectively formed at two ends of the heating body along the axial direction of the heating body, the inlet is used for inputting a medium to be reacted into the working space, and the outlet is used for outputting the reacted medium from the working space.

In one embodiment, the epitaxial growth device further comprises a heat-preserving cylinder, the heating body is arranged in the heat-preserving cylinder, and the coil assembly is arranged around the heat-preserving cylinder.

Compared with the prior art, the epitaxial growth device provided by the invention has the following beneficial effects:

the method comprises the steps that at least one group of coil assemblies is arranged, each group of coil assemblies comprises a plurality of independent sub-coils, the plurality of sub-coils are arranged in a diffused mode from inside to outside by taking a base point as a center, and one of the two adjacent sub-coils is wrapped by the other sub-coil; each independent sub-coil divides the area on the tray into a plurality of independently heated sub-areas, and each independent sub-coil independently heats the corresponding sub-area on the tray, so that the surface temperature of the tray can be controlled in a partitioned manner; the temperature of the corresponding sub-area on the tray can be adjusted by adjusting the input power of the sub-coil corresponding to the sub-area of the tray, and the temperature difference is reduced, so that the quality of the epitaxial layer grown on the tray is improved.

Drawings

Fig. 1 is a schematic structural diagram of an epitaxial growth apparatus in an embodiment of the present invention.

Fig. 2 is a sectional view of the epitaxial growth apparatus of fig. 1.

Fig. 3 is a sectional view of the epitaxial growth apparatus of fig. 1.

Fig. 4 is a side view of the epitaxial growth apparatus of fig. 1.

Fig. 5 is a schematic structural diagram of an epitaxial growth apparatus in another embodiment of the present invention.

Fig. 6 is a cross-sectional view of an epitaxial growth apparatus in another embodiment provided by the present invention.

Fig. 7 is a sectional view of the heating body in fig. 6.

In the figure, 100, an epitaxial growth apparatus; 10. a heating body; 11. a workspace; 12. an inlet; 13. an outlet; 14. a heating base; 141. a first heating base; 142. a second heating base; 143. a third heating base; 15. a support member; 20. a coil assembly; 21. a sub-coil; 211. a first sub-coil; 212. a second sub-coil; 22. a base point; 30. a tray; 40. a heat-preserving cylinder; 41. a barrel; 42. and (4) end covers.

Detailed Description

The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention, and it is apparent that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be obtained by a person skilled in the art without any inventive step based on the embodiments of the present invention, are within the scope of the present invention.

It will be understood that when an element is referred to as being "mounted on" another element, it can be directly mounted on the other element or intervening elements may also be present. When a component is referred to as being "disposed on" another component, it can be directly on the other component or intervening components may also be present. When an element is referred to as being "secured to" another element, it can be directly secured to the other element or intervening elements may also be present.

Unless defined otherwise, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention belongs. The terminology used herein in the description of the invention is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention. As used herein, the term "or/and" includes any and all combinations of one or more of the associated listed items.

Referring to fig. 1 to 7, the present invention provides an epitaxial growth apparatus 100, which includes at least one tray 30, a heating body 10, and at least one set of coil assemblies 20; the tray 30 is used for carrying substrates (not shown in the figure); the heating body 10 is internally provided with a working space 11, the tray 30 is positioned in the working space 11, and the coil assembly 20 is arranged outside the heating body 10 in a surrounding manner along the circumferential direction of the heating body 10; wherein each group of coil assemblies 20 comprises a plurality of independent sub-coils 21, and the plurality of sub-coils 21 are distributed from inside to outside by taking one base point 22 as a center; and one sub-coil 21 wraps the other sub-coil 21 in two adjacent coils.

It can be understood that each group of coil assemblies 20 includes a plurality of independent sub-coils 21, the plurality of sub-coils 21 are distributed from inside to outside by taking a base point 22 as a center, so that each independent sub-coil 21 divides the area on the tray 30 into a plurality of independently heated sub-areas, and each independent coil independently heats the corresponding sub-area on the tray 30, thereby realizing the zone control of the surface temperature of the tray 30; by adjusting the input power of the coils corresponding to the sub-regions of the tray 30, the temperature of the corresponding sub-regions on the tray 30 can be adjusted, and the temperature difference between the sub-regions can be reduced, so as to improve the quality of the epitaxial layer grown on the tray 30.

Preferably, referring to fig. 1-3, the tray 30 has a support surface thereon for supporting a substrate; the base point 22 of the initial diffusion of the sub-coil 21 and the center of the tray 30 are positioned on the same straight line, and the connecting line of the base point 22 and the center of the tray 30 is vertical to the bearing surface of the tray 30. Ensuring that the innermost sub-coil 21 in the coil assembly 20 corresponds to the central region of the tray 30, and the remaining sub-coils 21 respectively correspond to sub-regions from the center of the tray 30 to the edge of the tray 30 one by one from inside to outside, so that the plurality of sub-coils 21 divide the region on the tray 30 into a plurality of sub-regions; usually, the temperature difference between the center of the tray 30 and the edge of the tray 30 is large, and the sub-regions from the center to the edge of the tray 30 are heated by different sub-coils 21 from inside to outside; by controlling the power of each sub-coil 21, the temperature of each sub-area on the tray 30 can be correspondingly controlled, and the temperature of each sub-area on the tray 30 can be accurately adjusted. In other embodiments, the base point 22 of the initial spread of the sub-coil 21 is not necessarily located on the same straight line with the center of the tray 30, for example, the base point 22 is offset from the center of the tray 30.

In one embodiment, referring to fig. 1-3, each set of coil assemblies 20 includes two independent first sub-coils 211 and second sub-coils 212, the first sub-coils 211 are disposed at positions corresponding to a middle region of the tray 30, and the second sub-coils 212 are surrounded by the first sub-coils 211. In this way, by changing the powers of the first and second sub-coils 211 and 212, the middle region and the regions other than the middle region of the tray 30 can be correspondingly heated, thereby reducing the temperature difference between the middle region and the other regions. Of course, in other embodiments, the number of the sub-coils 21 included in each group of the coil assemblies 20 is not limited to the above, and the number of the sub-coils 21 arranged may be determined according to the accuracy of temperature adjustment between the respective sub-regions on the tray 30, and the larger the number of the sub-regions divided on the tray 30, the larger the number of the corresponding sub-coils 21 arranged.

In the present application, the coil blocks 20 are provided in at least one set.

When the coil assemblies 20 are arranged in one group, the sub-coils 21 in the coil assemblies 20 are arranged around the heating body 10 along the circumferential direction of the heating body 10, so that the sub-coils 21 are uniformly distributed outside the heating body 10; and the individual sub-coils 21 within the coil assembly 20 are helically spread with one base point 22.

When the number of the coil assemblies 20 is two, referring to fig. 1 to 3, the two coil assemblies 20 are arranged along the circumferential direction of the heating body 10, so that the two coil assemblies 20 are respectively wrapped around the heating body 10, and it is ensured that each region outside the heating body 10 corresponds to the sub-coil 21, and each region of the heating body 10 can be located in the magnetic field of the sub-coil 21.

When the number of the coil assemblies 20 is more than two, as described above, the plurality of groups of sub-coil assemblies 20 are arranged along the circumferential direction of the heating body 10 and surround the heating body 10 to wrap the heating body 10.

In addition, on the basis of the above-described embodiment, when the number of sets of the coil assemblies 20 is plural, plural sets of the coil assemblies 20 may be arranged in the axial direction of the heating body 10. In this way, the multiple sets of coil assemblies 20 further divide the tray 30 into a plurality of sub-areas in the axial direction of the heating body 10. With the above-described embodiment, the plurality of sets of coil assemblies 20 are divided into a plurality of sub-regions from the center of the tray 30 from the inside to the outside, while the tray 30 is divided into a plurality of sub-regions from the axial direction of the heating body 10, so that the number of sub-regions into which the tray 30 is divided is increased, and by varying the power of the coil assemblies 20 at the corresponding regions, it is possible to further precisely control the temperatures of the respective sub-regions, thereby equalizing the temperatures of the respective regions on the tray 30.

Further, referring to fig. 1 to 4, along the axial direction of the heating body 10, an inlet 12 and an outlet 13 are respectively formed at two ends of the heating body 10, wherein the inlet 12 is used for inputting a reaction medium into the working space 11, and the outlet 13 is used for outputting the reaction medium from the working space 11. So configured, the reaction medium is input to and output from the working space 11 along the axial direction of the heating body 10, and the direction of the flow of the reaction medium coincides with the direction in which the plurality of sets of coil assemblies 20 are arranged. I.e., sets of coil assemblies 20 are arranged in the direction of the flow of the reaction medium. It should be noted that, generally, the reaction medium is two or more mixed gases, the mixed gas flows in from one end of the heating body 10 and flows out from the other end along the axial direction of the heating body 10, and in the flowing process of the mixed gas, the mixed gas can absorb and take away certain heat, so that in the region into which the mixed gas is initially introduced, the mixed gas absorbs heat to reduce the temperature of the region; when the mixed gas flows to transfer heat to the other end of the heating body 10, the temperature of the place where the mixed gas is output increases, thereby further increasing the temperature difference between the area at the input place and the area at the output place of the mixed gas, resulting in uneven temperature distribution on the tray 30, affecting the growth quality of the epitaxial layer. This application is through the direction along reaction medium flow, arranges and sets up multiunit coil pack 20, and the corresponding region on heating body 10 is heated independently between every coil pack 20 of group, for example at the mist input end, increases the heating power of the coil pack 20 here to at the mist output end, reduce the heating power of the coil pack 20 of corresponding department, thereby the difference in temperature at balanced mist input end and output end.

In addition, referring to fig. 5, one or more sets of coil assemblies 20 arranged along the circumferential direction of the heating body 10 form a set of coil modules; in the present embodiment, the number of sets of coil modules is multiple, and the multiple sets of coil modules are arranged along the axial direction of the heating body 10, for example, in fig. 5, two sets of coil modules are provided, each set of coil module includes two sets of coil assemblies 20, so as to provide four sets of coil assemblies 20, and the four sets of coil assemblies 20 are respectively marked as coil assembly 20A, coil assembly 20B, coil assembly 20C, and coil assembly 20D; the two coil modules divide the tray 30 into two regions, and the two coil assemblies in each slave coil module divide the corresponding region into a central region and a peripheral region, so as to adjust the temperature difference between the peripheral region and the central region of the tray by adjusting the power of the four coil assemblies respectively. Of course, in other implementations; in the example, the number of sets of coil modules is not limited to that described above or shown in the drawings.

For another example, three coil modules are provided, which are respectively labeled as coil module S1, coil module S2 and coil module S3, when the tray 30 rotates, the coil module S2 correspondingly heats the central region of the tray 30, and the coil module S1 and coil module S3 correspondingly heats the edge region of the tray 30, and the power of each coil assembly 20 is controlled to control and adjust the temperature of the central region and the edge region of the tray 30, so as to reduce the temperature difference between the central region and the edge region of the tray 30 and improve the growth quality of the epitaxial layer.

Most of the traditional epitaxial growth devices only have a single working space, so that the heat utilization efficiency in the epitaxial growth devices is low, and when only one tray is arranged in the working space for production, the production efficiency is extremely low; in order to improve throughput, it is common to install a plurality of trays in a work space, however, there is a case where the temperatures of respective regions in one work space are unbalanced, so that the temperatures of the plurality of trays are unbalanced, and the temperature is one of important factors affecting the deposition rate. Also, at present, a plurality of trays are generally stacked in the direction of extension of the coil assembly. The applicant finds that the plurality of trays are stacked along the axial direction of the heating body, the coil assembly extends along the axial direction of the heating body, the strength of magnetic fields in the coil assembly is different, particularly the magnetic fields corresponding to two ends of the heating body are easily influenced by the environment, and therefore the temperature of the trays at two ends of the heating body is different from that of the tray in the middle of the heating body; thus, if the working spaces are stacked along the axial direction of the heating body, the magnetic fields where the plurality of trays are located are different, resulting in a large difference in the temperature of the surfaces of the plurality of trays.

In one embodiment of the present application, a plurality of working spaces 11 are provided in the heating body 10, a plurality of trays 30 are provided, each working space 11 corresponds to one tray 30, and each tray 30 can independently rotate relative to the heating body 10; this application can produce a plurality of epitaxial layers simultaneously through once production flow through setting up a plurality of trays 30 in order to produce the epitaxial layer product in an epitaxial growth device 100, improves work efficiency, effectively increases output. More importantly, each tray 30 in the present application is independently controlled to rotate, so that the rotation speed of each tray 30 meets the standard, and each tray 30 is provided with an independent working space 11, so that the environment of the working space 11 where the tray 30 is located can be correspondingly regulated, the temperature of the plurality of trays 30 is ensured to be uniform, the rotation speed can be adjusted to be uniform, and thus, high-quality epitaxial layers with uniform thickness and uniform doping of products are generated on the plurality of trays 30.

Preferably, the plurality of trays 30 are stacked in a first direction, wherein the first direction is perpendicular to the axis of the heating body 10. So that the plurality of trays 30 are located in the same magnetic field region and thus the temperatures of the corresponding regions on the plurality of trays 30 are equalized. In other words, each set of coil assemblies 20 heats the corresponding sub-areas of the plurality of trays 30 at the same time, so as to reduce the temperature difference between the plurality of trays 30, ensure the temperature balance between the corresponding sub-areas of the plurality of trays 30, and reduce the difference between products in the same batch. Of course, in other embodiments, the arrangement of the plurality of work spaces 11 and the plurality of trays 30 is not limited to the above, for example, the plurality of work spaces and the corresponding plurality of trays 30 are arranged on the same horizontal plane.

In the present application, the heating body 10 may be an integral structure or a split structure, for example, referring to fig. 6 and 7, the heating body 10 includes a plurality of heating seats 14, and a working space 11 is defined between two adjacent heating seats 14; the tray 30 is disposed on the heating base 14. In other words, two adjacent working spaces 11 share one heating base 14, so that the heat of the sub-heating base 14 shared between the two adjacent working spaces 11 can be more fully utilized, the heat energy utilization rate is improved, and the production cost is reduced.

Referring to fig. 6 and 7, the number of the heating bases 14 is three, and the three heating bases 14 are denoted as a first heating base 141, a second heating base 142, and a third heating base 143, so that a working space 11 is defined between the first heating base 141 and the second heating base 142, another working space 11 is defined between the second heating base 142 and the third heating base 143, and two adjacent working spaces 11 share the sub-heating base 14 therebetween, for example, share the second heating base 142, thereby improving the heat energy utilization rate. Of course, in other embodiments, the number of the heating bases 14 is not limited to the above or shown in the drawings, and for example, three or more heating bases 14 may be provided.

In the first direction, the heating seats 14 at the bottom and the top are the same in shape, and the two heating seats 14 are disposed in axial symmetry about the axis of the heating body 10, so that the heating body 10 is approximately symmetrically distributed up and down as a whole to reduce the temperature difference between the plurality of trays 30. Specifically, referring to fig. 6 and 7, the first heating seat 141 and the third heating seat 143 have similar shapes, for example, the first heating seat 141 and the third heating seat 143 are both crescent-shaped, and the second heating seat 142 is a flat plate structure, but in other embodiments, the shapes of the first heating seat 141 and the third heating seat 143 are not limited to the above.

The heating body 10 further includes a supporting member 15, the supporting member 15 is disposed between two adjacent heating seats 14 to form a sidewall of the working space 11, specifically, the supporting member 15 is disposed between the first heating seat 141 and the second heating seat 142, and the supporting member 15 forms a sidewall of the working space 11.

The epitaxial growth device 100 further comprises a heat-insulating cylinder 40, the heating body 10 is arranged in the heat-insulating cylinder 40, and the coil assembly 20 is arranged outside the heat-insulating cylinder 40 in a surrounding manner. Thus, the heat preservation cylinder 40 can preserve heat of a plurality of working spaces 11, and heat loss is avoided.

Specifically, referring to fig. 2, the heat-insulating cylinder 40 includes a cylinder body 41 and two end covers, the two end covers are respectively disposed at two ends of the cylinder body 41, and the two end covers and the cylinder body 41 are made of heat-insulating materials. Correspondingly, the inlet 12 and the outlet 13 are respectively and correspondingly arranged on the two end covers.

Further, referring to fig. 5, each working space 11 is provided with an inlet 12 and an outlet 13, so as to ensure that a medium to be reacted enters the working space 11 from the inlet 12 along the axial direction of the heating body 10, and the ring after the reaction is completed flows to the outlet 13 along the axial direction of the heating body 10 smoothly, so that the reaction medium is prevented from being blocked to generate turbulence and the like, and the uniform growth of the epitaxial layer is prevented from being influenced.

It should be noted that the terms "first", "second", and the like are used to define the components, and are only used for convenience of distinguishing the corresponding components, and the terms have no special meanings unless otherwise stated, and therefore, the scope of the present invention should not be construed as being limited.

The features of the above embodiments may be arbitrarily combined, and for the sake of brevity, all possible combinations of the features in the above embodiments are not described, but should be construed as being within the scope of the present specification as long as there is no contradiction between the combinations of the features.

It should be understood by those skilled in the art that the above embodiments are only for illustrating the present invention and are not to be used as a limitation of the present invention, and that suitable changes and modifications of the above embodiments are within the scope of the claimed invention as long as they are within the spirit and scope of the present invention.