阅读说明：本技术 卡匣堆垛系统及其卡匣堆垛机 (Cartridge stacking system and cartridge stacker thereof ) 是由 刘明 杨斌 李东亮 于 2021-08-09 设计创作，主要内容包括：一种卡匣堆垛系统及其卡匣堆垛机,所述卡匣堆垛系统包括：行走单元轨道以及卡匣堆垛机；其中,所述卡匣堆垛机包括：多个行走单元,设置于所述行走单元轨道之上且可沿着所述行走单元轨道移动；主体框架,设置于所述多个行走单元之上；升降台,设置于所述主体框架之内；伸缩臂,设置于所述升降台之上；其中,所述主体框架包括覆盖所述多个行走单元的保护壳,所述保护壳之一表面设置有吸尘器,所述吸尘器包括集尘盒、设置在所述集尘盒内部的风扇元件、以及与所述集尘盒相连接的多个吸管。(A cassette stacking system and a cassette stacker therefor, the cassette stacking system comprising: a walking unit track and a cassette stacker; wherein, cassette stacker includes: a plurality of traveling units disposed on the traveling unit rails and movable along the traveling unit rails; a main body frame disposed above the plurality of traveling units; the lifting platform is arranged in the main body frame; the telescopic arm is arranged above the lifting platform; the main body frame comprises a protective shell covering the plurality of walking units, a dust collector is arranged on one surface of the protective shell, and the dust collector comprises a dust collection box, a fan element arranged in the dust collection box and a plurality of suction pipes connected with the dust collection box.)

1. A cassette stacking system is characterized by comprising a traveling unit track and a cassette stacker;

wherein, cassette stacker includes:

a plurality of traveling units disposed on the traveling unit rails and movable along the traveling unit rails;

a main body frame disposed above the plurality of traveling units;

the lifting platform is arranged in the main body frame;

the telescopic arm is arranged above the lifting platform;

the main body frame comprises a protective shell covering the plurality of walking units, a dust collector is arranged on one surface of the protective shell, and the dust collector comprises a dust collection box, a fan element arranged in the dust collection box and a plurality of suction pipes connected with the dust collection box.

2. The cassette stacking system of claim 1, wherein the dust collector is disposed at a side of the protective housing, and the plurality of suction pipes comprise a first suction pipe disposed at a distal end of a lower surface of the dust box, a second suction pipe disposed at another distal end of the lower surface of the dust box, and a plurality of third suction pipes disposed at other positions of the lower surface of the dust box;

the first suction pipe, the second suction pipe and the third suction pipes all extend downwards, and the distance between the first suction pipe and the second suction pipe is larger than the width of the walking unit track.

3. The cassette stacking system of claim 2, wherein one end of the dust collection box lower surface comprises a first extension portion, the other end of the dust collection box lower surface comprises a second extension portion, the first suction tube is disposed in the first extension portion, and the second suction tube is disposed in the second extension portion.

4. The cassette stacking system of claim 2, wherein the length of the first straw and the length of the second straw are greater than the length of the plurality of third straws.

5. The cassette stacking system of claim 4, wherein the bottom end of the first suction tube and the bottom end of the second suction tube are at a level lower than a level of the upper surface of the travel unit rail.

6. The cassette stacking system of claim 1, wherein the dust collection box further comprises a brush disposed on a lower surface thereof, wherein the brush is in contact with the travel unit rail.

7. The cassette stacking system of claim 3, wherein the first and second extensions further comprise brushes disposed on sides thereof.

8. A cartridge stacker, comprising:

a plurality of traveling units that move along the traveling unit rails;

a main body frame disposed above the plurality of traveling units;

the lifting platform is arranged in the main body frame;

the telescopic arm is arranged above the lifting platform;

the main body frame comprises a protective shell covering the plurality of walking units, a dust collector is arranged on one surface of the protective shell, and the dust collector comprises a dust collection box, a fan element arranged in the dust collection box and a plurality of suction pipes connected with the dust collection box.

9. The cassette stacker as claimed in claim 8, wherein the suction cleaner is disposed at a side of the protective housing, and the plurality of suction pipes includes a first suction pipe disposed at a distal end of a lower surface of the dust collecting box, a second suction pipe disposed at another distal end of the lower surface of the dust collecting box, and a plurality of third suction pipes disposed at other positions of the lower surface of the dust collecting box;

the first suction pipe, the second suction pipe and the third suction pipe all extend downwards, and the length of the first suction pipe and the length of the second suction pipe are greater than the length of the plurality of third suction pipes.

10. The cassette stacker of claim 8, wherein the dust box further comprises a brush provided on a lower surface thereof.

[ technical field ] A method for producing a semiconductor device

The present application relates to the field of cassette handling and storage, and more particularly to a cassette stacking system and a cassette stacker thereof.

[ background of the invention ]

In a panel manufacturing plant, a cassette stacker (stocker) is used as a storage warehouse and a transfer and carrying facility for cassettes, and the requirement for cleanliness level inside the stocker is very high, so that it is very important to ensure and maintain cleanliness inside the stocker.

However, the stopper structure in the panel factory is highly loaded, the walking unit is highly loaded and has a large friction force with the rail, which causes the material of the walking unit to be severely worn, and the worn objects generated by the wear will be accumulated on the surface and the side surface of the rail, which affects the yield rate and the product quality in the panel factory to a certain extent, so it is urgently needed to improve the above phenomenon.

[ summary of the invention ]

In order to solve the above technical problem, the present application provides a cassette stacking system, including a traveling unit rail and a cassette stacker; wherein, cassette stacker includes: a plurality of traveling units disposed on the traveling unit rails and movable along the traveling unit rails; a main body frame disposed above the plurality of traveling units; the lifting platform is arranged in the main body frame; the telescopic arm is arranged above the lifting platform; the main body frame comprises a protective shell covering the plurality of walking units, a dust collector is arranged on one surface of the protective shell, and the dust collector comprises a dust collection box, a fan element arranged in the dust collection box and a plurality of suction pipes connected with the dust collection box.

Furthermore, the dust collector is arranged on the side surface of the protective shell, and the suction pipes comprise a first suction pipe arranged at the leftmost side of the lower surface of the dust collection box, a second suction pipe arranged at the other tail end of the lower surface of the dust collection box, and a plurality of third suction pipes arranged at other positions of the lower surface of the dust collection box; the first suction pipe, the second suction pipe and the third suction pipes all extend downwards, and the distance between the first suction pipe and the second suction pipe is larger than the width of the walking unit track.

Furthermore, the end of the lower surface of the dust collecting box comprises a first extending part, the other end of the lower surface of the dust collecting box comprises a second extending part, the first suction pipe is arranged in the first extending part, and the second suction pipe is arranged in the second extending part.

Further, the length of the first straw and the length of the second straw are greater than the length of the plurality of third straws.

Furthermore, the horizontal plane of the bottom end of the first suction pipe and the horizontal plane of the bottom end of the second suction pipe are lower than the horizontal plane of the upper surface of the track of the traveling unit.

Furthermore, the dust collecting box also comprises a brush arranged on the lower surface of the dust collecting box, wherein the brush is in contact with the track of the traveling unit.

Furthermore, the first extension part and the second extension part also comprise brushes arranged on the side surfaces of the first extension part and the second extension part.

In order to solve the above problem, the present application also provides a cartridge stacker, including: a plurality of traveling units that move along the traveling unit rails; a main body frame disposed above the plurality of traveling units; the lifting platform is arranged in the main body frame; the telescopic arm is arranged above the lifting platform; the main body frame comprises a protective shell covering the plurality of walking units, a dust collector is arranged on one surface of the protective shell, and the dust collector comprises a dust collection box, a fan element arranged in the dust collection box and a plurality of suction pipes connected with the dust collection box.

Furthermore, the dust collector is arranged on the side surface of the protective shell, and the suction pipes comprise a first suction pipe arranged at the tail end of the lower surface of the dust collection box, a second suction pipe arranged at the other tail end of the lower surface of the dust collection box, and a plurality of third suction pipes arranged at other positions of the lower surface of the dust collection box; the first suction pipe, the second suction pipe and the third suction pipe all extend downwards, and the length of the first suction pipe and the length of the second suction pipe are greater than the length of the plurality of third suction pipes.

Furthermore, the dust collecting box also comprises a hairbrush arranged on the lower surface of the dust collecting box.

The beneficial effects of the application are that in the cassette stacking system provided by the application, a dust collector is arranged on the side surface of the protective shell of the walking unit, and through the design, in the process that the cassette stacker runs on the track of the walking unit, the dust collector positioned on the side surface of the protective shell can absorb the abrasion substances generated by the walking unit due to too large friction force, so that the abrasion substances are prevented from being accumulated on the upper surface and the side surface of the track of the walking unit to influence the product quality, and in addition, the dust collector has a structure corresponding to the shape of the track of the walking unit, so that the cleanness of the upper surface and the side surface of the track of the walking unit is further ensured.

In order to make the aforementioned and other objects of the present application more comprehensible, preferred embodiments accompanied with figures are described in detail below.

[ description of the drawings ]

Fig. 1 is a schematic structural diagram of a cassette stacking system according to an embodiment of the present disclosure.

Fig. 2 is a schematic structural diagram of a vacuum cleaner in a cassette stacking system according to an embodiment of the present disclosure.

Fig. 3 is an electrical control circuit diagram between a dust collector and a cassette stacker in the cassette stacking system provided by the embodiment of the application.

[ detailed description ] embodiments

In order to make the aforementioned and other objects, features and advantages of the present disclosure comprehensible, preferred embodiments accompanied with figures are described in detail below. Furthermore, directional phrases used in this disclosure, such as, for example, upper, lower, top, bottom, front, rear, left, right, inner, outer, lateral, peripheral, central, horizontal, lateral, vertical, longitudinal, axial, radial, uppermost or lowermost, etc., refer only to the orientation of the attached drawings. Accordingly, the directional terms used are used for the purpose of illustration and understanding of the present disclosure, and are not used to limit the present disclosure.

In order to solve the technical problem that the friction between a walking unit and a walking unit rail is large due to too large bearing weight of the conventional cassette stacker (stacker), and further, the product quality is affected by abrasion substances generated by the large friction, an embodiment of the present application provides a cassette stacking system 1, please refer to fig. 1-2, wherein the cassette stacking system 1 includes a walking unit rail 10 and a cassette stacker 20; wherein the cassette stacker 20 includes: a plurality of traveling units 200, a main body frame 201, an elevating platform 202, and a telescopic arm 203. The plurality of traveling units 200 are disposed on the traveling unit rails 10 and can move along the traveling unit rails 10, the main body frame 201 is disposed on the plurality of traveling units 200, and the lifting platform 202 is disposed in the main body frame 201; the telescopic arm 203 is disposed above the lifting platform 202. The main body frame 201 includes a protective casing 2010 covering the plurality of traveling units 200, a dust collector 30 is disposed on a side surface of the protective casing 2010, and the dust collector 30 includes a dust collecting box 300, a fan 301 disposed inside the dust collecting box 300, a plurality of suction pipes 302 connected to the dust collecting box 300, a brush 303 disposed on a lower surface of the dust collecting box 300, and an indicator 304 disposed on the dust collecting box 300.

Referring to fig. 1, in the embodiment, when the plurality of traveling units 200 of the cassette stacker 20 move along the traveling unit rails 10, the dust collector 30 disposed on the side of the protective housing 2010 can suck the abraded objects generated by the friction force between the plurality of traveling units 200 and the traveling unit rails 10 into the dust collecting box 300 through the plurality of suction pipes 302, so as to ensure the cleanliness of the upper surface and the side surface of the traveling unit rails 10 and prevent the quality of the product from being affected.

Referring to fig. 1 and 2, in the present embodiment, the suction pipes 302 include a first suction pipe 3020 disposed at a distal end of a lower surface of the dust box 300, a second suction pipe 3021 disposed at another distal end of the lower surface of the dust box 300, and a plurality of third suction pipes 3022 disposed at other positions of the lower surface of the dust box 300; the first suction pipe 3020, the second suction pipe 3021, and the third suction pipes 3022 extend downward, the distance between the first suction pipe 3020 and the second suction pipe 3021 is greater than the width of the travel unit rail 10, and the length of the first suction pipe 3020 and the length of the second suction pipe 3021 are greater than the length of the third suction pipes 3022, so that the horizontal plane of the bottom end of the first suction pipe 3020 and the horizontal plane of the bottom end of the second suction pipe 3021 are lower than the horizontal plane of the upper surface of the travel unit rail 10, thereby ensuring that the abrasion materials scattered on the side surface of the unit rail 10 can be sucked.

In another embodiment, the suction pipes 302 can be disposed on the side of the dust collecting box or other positions, as long as the suction effect of the suction pipes 302 on the abraded objects can be ensured.

Referring to fig. 2, in the present embodiment, the end of the lower surface of the dust collecting box 300 includes a first extending portion 3000, the other end of the lower surface of the dust collecting box 300 includes a second extending portion 3001, the first suction pipe 3020 is disposed in the first extending portion 3000, and the second suction pipe 3021 is disposed in the second extending portion 3001, so that the protection of the first suction pipe 3020 and the second suction pipe 3021 is enhanced, and the service lives of the first suction pipe 3020 and the second suction pipe 3021 can be increased to some extent.

It should be noted that, in fig. 2, the fan element 301, the first suction pipe 3020, the second suction pipe 3021 and the third suction pipes 3022, which are indicated by dotted lines, are partially disposed inside the dust box 300, the first extension part 3000 or the second extension part 3001, and thus cannot be seen in actual situations.

Referring to fig. 2, in this embodiment, the dust collecting box 300 further includes the brush 303 disposed on a lower surface thereof, wherein the brush 303 is in contact with the traveling unit rail 10, so that when the traveling unit 200 of the cassette stacker 20 moves along the traveling unit rail 10, the brush 303 can sweep away the abraded objects deposited on the upper surface of the traveling unit rail 10, and then suck the abraded objects through the suction pipes 302 of the dust collector 30, it should be noted that the brush 303 may also be disposed on the first extension portion 3000 and the second extension portion 3001, so as to sweep away the abraded objects deposited on the side surface of the traveling unit rail 10, and then suck the abraded objects through the first suction pipe 3020 and the second suction pipe 3021, the material of the brush 303 may be nylon, and the brush 303 and the suction pipes 302 together form a plurality of suction nozzle structures, thereby enhancing the cleaning effect of the cleaner 30.

In this embodiment, the vacuum cleaner 30 is fixed to a side surface or other surface of the protective case 2010 by screws, so that when the vacuum cleaner 30 needs to be cleaned, the vacuum cleaner 30 can be removed by simply removing the screws.

Referring to fig. 3, fig. 3 is a diagram illustrating an electrical circuit between the vacuum cleaner 30 and the cassette stacker 20, wherein the vacuum cleaner 30 is an FAN21 having a main circuit for connecting the FAN element 301 and a control circuit OLR for controlling the indicator lamp 304, the cassette stacker is CN-FFUOP, the vacuum cleaner FAN21 is connected to the cassette stacker CN-FFUOP via a first line J-640, a first interface CN-FAN, a second line J-630, a second interface CN-FAN21 and a third line J-650, a return circuit F6 is connected from the third line J-650, the third interface CN-FFU21 is located on a filter (not shown) of the main body frame 201, and referring to fig. 2, a worker can know an operating state of the vacuum cleaner 30 through a flashing condition of the indicator lamp 304, for example: the indicator light 304 is green when the vacuum cleaner 30 is operating; when the dust collector 30 is in a standby state, the indicator lamp 304 is red, in addition, a worker can also know whether the dust collection box 300 needs to be cleaned or not from the flashing condition of the indicator lamp 304, the meaning represented by the specific lamp number color can be determined by a person skilled in the art, the dust collector is connected with the cartridge stacker through a simple electric control loop, only a main circuit and a control circuit in the dust collector are connected with the cartridge stacker, great change of the circuit structure of the cartridge stacker is not needed, and the cartridge stacking system provided by the application can be favorably applied to a panel factory on a large scale.

In the present embodiment, the dust collector 30 is disposed on the side surface of the protective case 2010 covering the traveling unit 200, so that the abrasion materials formed by the traveling unit 200 and the traveling unit rails 10 due to too large friction force can be absorbed, thereby ensuring the cleanness of the upper surface and the side surface of the traveling unit rails 10 and further ensuring the cleanness of the cassette stacking system 1, and in addition, the dust collector 30 has a structure corresponding to the shape of the traveling unit rails 10, the first suction pipe 3020 and the second suction pipe 3021 can absorb the abrasion materials scattered to the side surface of the traveling unit rails 10, and further, the design of the brush 303 is matched, thereby preventing the abrasion materials from being accumulated on the surface and the side surface of the traveling unit rails 10 and further affecting the product quality.

Another embodiment of the present application further provides a cassette stacker, which includes all the technical features of the cassette stacker 20 provided in the above embodiments, and the details are not repeated herein.

The foregoing is merely a preferred embodiment of the present disclosure, and it should be noted that modifications and refinements may be made by those skilled in the art without departing from the principle of the present disclosure, and these modifications and refinements should also be construed as the protection scope of the present disclosure.