阅读说明：本技术 控制系统、控制方法以及基板处理装置 (Control system, control method, and substrate processing apparatus ) 是由 高桥秀树 小泉真 富田尚宏 加茂信一 女部田雄总 小川纯一 于 2021-03-19 设计创作，主要内容包括：本发明提供一种控制系统、控制方法以及基板处理装置,能够恰当地对装置进行操作。控制对基板进行处理的基板处理装置的控制系统具有：第一终端和第二终端,所述第一终端和所述第二终端配置于与所述基板处理装置相同的场所,从用户处接受针对所述基板处理装置进行的控制的指示；第三终端,其配置于与所述基板处理装置不同的场所,从用户处接受针对所述基板处理装置进行的控制的指示；以及控制装置,其在探测到所述基板处理装置的异常的情况下,将所述第三终端对所述基板处理装置进行的控制设为无效。(The invention provides a control system, a control method and a substrate processing apparatus, which can properly operate the apparatus. A control system for controlling a substrate processing apparatus for processing a substrate includes: a first terminal and a second terminal which are disposed in the same place as the substrate processing apparatus and which receive an instruction for controlling the substrate processing apparatus from a user; a third terminal which is disposed at a location different from the substrate processing apparatus and receives an instruction for controlling the substrate processing apparatus from a user; and a control device that invalidates control of the substrate processing apparatus by the third terminal when an abnormality of the substrate processing apparatus is detected.)

1. A control system for controlling a substrate processing apparatus that processes a substrate, the control system comprising:

a first terminal and a second terminal which are disposed in the same place as the substrate processing apparatus and which receive an instruction for controlling the substrate processing apparatus from a user;

a third terminal which is disposed at a location different from the substrate processing apparatus and receives an instruction for controlling the substrate processing apparatus from a user; and

and a control device configured to disable control of the substrate processing apparatus by the third terminal when an abnormality of the substrate processing apparatus is detected.

2. The control system of claim 1,

the control device is configured to enable control of the substrate processing apparatus by either the first terminal or the second terminal when an abnormality of the substrate processing apparatus is detected.

3. The control system according to claim 1 or 2,

the control device causes the third terminal to display information indicating a result of control of the substrate processing apparatus by at least one of the first terminal and the second terminal.

4. The control system according to any one of claims 1 to 3, characterized by further having:

a first switch for invalidating control of the substrate processing apparatus by the second terminal and the third terminal; and

a second switch for invalidating control of the substrate processing apparatus by the first terminal and the third terminal,

when the first switch is operated prior to the second switch, the control device enables control of the substrate processing apparatus by the first terminal and disables control of the substrate processing apparatus by the second terminal, and notifies a user of information indicating that the first switch has been operated first when the second switch is operated.

5. The control system according to any one of claims 1 to 4, characterized by further having:

a third switch for invalidating control of the substrate processing apparatus by the first terminal and the second terminal; and

a notification device corresponding to the third switch,

the control device sets the operation of the third switch to be invalid when the abnormality of the substrate processing apparatus is detected, and notifies a user that the operation of the third switch becomes valid when the abnormality of the substrate processing apparatus is recovered by the notification device.

6. The control system of claim 5,

when the abnormality of the substrate processing apparatus is recovered, the control device notifies a user that the operation of the third switch becomes valid by the notification device, and when the third switch is operated by the user, the control device stops the notification device from notifying.

7. The control system according to any one of claims 1 to 6,

the control system further includes a fourth terminal connected to the substrate processing apparatus by at least one of wired and short-range wireless, for receiving an instruction to control the substrate processing apparatus from a user,

the control device is configured to, when the fourth terminal is connected to a first port provided outside a first chamber included in the substrate processing apparatus, enable control of only the fourth terminal for each of the parts of the substrate processing apparatus corresponding to the first port,

when the fourth terminal is connected to a second port provided outside a second chamber included in the substrate processing apparatus, the control device enables control of only the fourth terminal for each of the parts of the substrate processing apparatus corresponding to the second port.

8. The control system of claim 7,

when the fourth terminal is connected to the first port, the control device causes the first terminal, the second terminal, and the third terminal to display information indicating each of the parts of the substrate processing apparatus corresponding to the first port, the control of which is enabled only by the fourth terminal.

9. A control method of a control system for controlling a substrate processing apparatus based on information input from any one of first and second terminals that are disposed in the same place as the substrate processing apparatus that processes a substrate and that receive an instruction from a user to control the substrate processing apparatus, and a third terminal that is disposed in a place different from the substrate processing apparatus and that receives an instruction from a user to control the substrate processing apparatus, the control method comprising the steps of,

the control system invalidates control of the substrate processing apparatus by the third terminal when an abnormality of the substrate processing apparatus is detected.

10. A substrate processing apparatus for processing a substrate,

controlling each part of the substrate processing apparatus based on information input from any one of a first terminal and a second terminal which are arranged at the same place as the substrate processing apparatus and receive an instruction for controlling the substrate processing apparatus from a user, and a third terminal which is arranged at a place different from the substrate processing apparatus and receive an instruction for controlling the substrate processing apparatus from a user,

and when an abnormality of the substrate processing apparatus is detected, invalidating control of the substrate processing apparatus by the third terminal.

Technical Field

The present disclosure relates to a control system, a control method, and a substrate processing apparatus.

Background

Patent document 1 discloses a system configured to set a proprietary state in which a semiconductor manufacturing apparatus accepts operation control of only one terminal that has transmitted an exclusive request, among a plurality of terminals that perform operation control on the semiconductor manufacturing apparatus. According to patent document 1, operational confusion of an operator can be reduced.

Documents of the prior art

Patent document

Patent document 1: japanese patent laid-open publication No. 2003-037048

Disclosure of Invention

Problems to be solved by the invention

The present disclosure provides a technique capable of appropriately performing an operation for a device.

Means for solving the problems

A control system according to an aspect of the present disclosure is a control system for controlling a substrate processing apparatus that processes a substrate, the control system including: a first terminal and a second terminal which are disposed in the same place as the substrate processing apparatus and which receive an instruction for controlling the substrate processing apparatus from a user; a third terminal which is disposed at a location different from the substrate processing apparatus and receives an instruction for controlling the substrate processing apparatus from a user; and a control device that invalidates control of the substrate processing apparatus by the third terminal when an abnormality of the substrate processing apparatus is detected.

ADVANTAGEOUS EFFECTS OF INVENTION

According to the present disclosure, the device can be operated appropriately.

Drawings

Fig. 1 is a diagram showing a configuration example of a control system according to an embodiment.

Fig. 2A is a diagram showing an example of a hardware configuration of the control device according to the embodiment.

Fig. 2B is a diagram illustrating an example of the substrate processing apparatus according to the embodiment.

Fig. 3 is a diagram showing an example of a functional configuration of the control device according to the embodiment.

Fig. 4 is a sequence diagram showing an example of processing of the control system according to the embodiment.

Fig. 5A is a diagram illustrating an example of display screens of the main terminal, the sub terminal, and the remote terminal according to the embodiment.

Fig. 5B is a diagram illustrating an example of a display screen of the handheld terminal according to the embodiment.

Description of the reference numerals

1: a control system; 10A: a master terminal; 10B: a sub-terminal; 10C: a handheld terminal; 10D: a remote terminal; 20: a control device; 21: an abnormality detection unit; 22: an abnormal time switching unit; 23: a receiving section; 24: a switching unit; 25: a control unit; 30: a substrate processing apparatus; 31: a transfer module; 32: loading an interlocked vacuum module; 33A: a process module; 33B: a process module; 33C: a process module; 40A: a first switch; 40B: a second switch; 40C: a third switch; 301A: a port; 301B: a port; 301C: a port; 301D: a port.

Detailed Description

Embodiments of the present disclosure are described below with reference to the drawings. In the present specification and the drawings, the same reference numerals are used for substantially the same components, and overlapping description may be omitted.

< System Structure >

Fig. 1 is a diagram showing a configuration example of a control system 1 according to an embodiment. According to the control system 1 of the embodiment, the device can be appropriately operated. Next, an example in which the control system 1 controls a substrate processing apparatus that processes a substrate for a Flat Panel Display (FPD) will be described. Further, the disclosed control system 1 is capable of controlling various devices.

In fig. 1, the control system 1 includes a main terminal 10A (an example of a "first terminal"), a sub-terminal 10B (an example of a "second terminal"), a hand-held terminal 10C (an example of a "fourth terminal"), a remote terminal 10D (an example of a "third terminal"), a control device 20, and a substrate processing device 30. In addition, hereinafter, the main terminal 10A, the sub-terminal 10B, the hand-held terminal 10C, and the remote terminal 10D are simply referred to as "terminals 10" without distinguishing the terminals.

The control system 1 further includes a first switch 40A, a second switch 40B, and a third switch 40C (hereinafter, simply referred to as "switches 40" when no distinction is made). The terminal 10 and the control device 20 may be connected via a network N, and the control device 20 and the switch 40 may be connected via the network N. The number of the main terminal 10A, the sub-terminal 10B, the hand-held terminal 10C, and the remote terminal 10D is not limited to the example of fig. 1.

The terminal 10 is a device that receives an operation for controlling the substrate processing apparatus 30 from a user (a serviceman, an engineer, or the like). The terminal 10 may have a computer.

In addition, the terminal 10 may not have a computer. In this case, the terminal 10 may have a monitor or a touch panel display that displays information of the display screen received from the control device 20. In addition, the terminal 10 may have a keyboard and a mouse for accepting an operation from a user, or a touch panel display.

(with respect to the master terminal 10A)

The main terminal 10A and the sub-terminal 10B may be installed (disposed) at the same place (on-site or local) as the substrate processing apparatus 30, for example. In this case, the main terminal 10A and the sub-terminal 10B may be set in the same place as the substrate processing apparatus 30, for example, in a facility such as a factory in which the substrate processing apparatus 30 is installed. The main terminal 10A and the sub-terminal 10B may be set in a clean room where the substrate processing apparatus 30 is installed, for example, as the same place as the substrate processing apparatus 30.

The master terminal 10A may be provided in the vicinity of the control device 20, for example. The host terminal 10A may have no computer, a keyboard, a mouse, and a touch panel display. In this case, the keyboard and the mouse of the host terminal 10A may be connected to the control device 20 through a USB (Universal Serial Bus) cable. The touch panel display of the main terminal 10A displays information on a display screen received from the control device 20 via a display cable such as a DVI (Digital Visual Interface) cable or a VGA cable that transmits analog RGB component video signals, and transmits information input from a user to the control device 20 via an RS-232C cable.

(sub-terminal 10B)

The child terminal 10B may be installed in a place separated from the main terminal 10A in the facility, for example. The child terminal 10B may have no computer and a touch panel display. In this case, the touch panel display and the control device 20 of the sub-terminal 10B may be connected to each other via, for example, a VGA cable that transmits analog RGB component video signals, an RS-232C cable that transmits information (input signal) input from the user, a device that transmits the video signals and the input signal to an IP Network, a LAN (Local Area Network), or the like.

(for hand-held terminal 10C)

The handheld terminal 10C may be, for example, a portable terminal that can be used in a facility such as a factory where the substrate processing apparatus 30 is installed. The handheld terminal 10C is connected to the substrate processing apparatus 30 via a cable (wired Line), such as a LAN cable, a PLC (Power Line Communications) cable, or an RS-232C cable, and communicates with the control apparatus 20 via the substrate processing apparatus 30. The handheld terminal 10C can be connected to the substrate processing apparatus 30 by short-range wireless communication such as wireless LAN, BLE (Bluetooth Low Energy), and NFC (Near field communication), and communicates with the control apparatus 20 via the substrate processing apparatus 30.

(for remote terminal 10D)

The remote terminal 10D may be installed at a different location (remote location) from the substrate processing apparatus 30, for example. In this case, the remote terminal 10D may be set outside a facility such as a factory where the substrate processing apparatus 30 is installed, for example, as a place different from the substrate processing apparatus 30. In this case, the remote terminal 10D may be installed in, for example, the user's office or the like. The remote terminal 10D may be an information processing apparatus such as a notebook PC (Personal Computer). In this case, the remote terminal 10D and the control device 20 may be connected by, for example, a VGA cable that transmits analog RGB component video signals, a USB cable that transmits information (input signals) input by a user through a keyboard and a mouse, a device that transmits the corresponding video signals and the corresponding input signals to an IP Network, a LAN (Local Area Network), and the like.

(about switch 40)

The first switch 40A is a switch for disabling the control of the substrate processing apparatus 30 by the sub-terminal 10B and the remote terminal 10D. When the first switch 40A is set to on, the substrate processing apparatus 30 can be controlled only from the main terminal 10A. Even when the first switch 40A is turned on, if the hand-held terminal 10C is connected to the substrate processing apparatus 30, at least a part of the control of the substrate processing apparatus 30 by the main terminal 10A becomes ineffective, and the hand-held terminal 10C can control only the at least a part of the substrate processing apparatus 30. When the first switch 40A is turned off, the second switch 40B or the third switch 40C is turned on, whereby the control of the substrate processing apparatus 30 by the sub-terminal 10B or the remote terminal 10D can be made effective.

The first switch 40A may be provided in the vicinity of the master terminal 10A, for example. When the user presses the first switch 40A to set the first switch 40A to on, a signal (main switching signal) indicating that is transmitted to the control device 20. Upon receiving the signal, the switching unit 24 of the control device 20 invalidates the input from the child terminal 10B and the remote terminal 10D. The first switch 40A may be a button or the like displayed on a display screen of the host terminal 10A or the like. However, from the viewpoint of safety, it is desirable that the button be a hardware switch rather than a button controlled by software displayed on the display screen. In this case, when the user sets the button on, the master terminal 10A may transmit information indicating the button and identification information of the master terminal 10A to the control device 20.

The second switch 40B is a switch for disabling the control of the substrate processing apparatus 30 by the master terminal 10A and the remote terminal 10D. When the second switch 40B is set to be on, the substrate processing apparatus 30 can be controlled only by the sub-terminal 10B. Even when the second switch 40B is turned on, if the hand-held terminal 10C is connected to the substrate processing apparatus 30, at least a part of the control of the substrate processing apparatus 30 by the sub-terminal 10B can be invalidated, and only the hand-held terminal 10C can control the at least a part of the substrate processing apparatus 30. When the second switch 40B is turned off, the control of the substrate processing apparatus 30 by the main terminal 10A or the remote terminal 10D can be enabled by turning on the first switch 40A or the third switch 40C.

The second switch 40B may be disposed in the vicinity of the sub-terminal 10B, for example. When the user sets the second switch 40B to on, a signal (sub-switching signal) indicating that is transmitted to the control device 20. Upon receiving the signal, the switching unit 24 of the control device 20 disables the input from the main terminal 10A and the remote terminal 10D. The second switch 40B may be a button displayed on a display screen of the child terminal 10B or the like. However, from the viewpoint of safety, it is desirable that the button be a hardware switch rather than a button controlled by software displayed on the display screen. In this case, when the user sets the button on, the child terminal 10B may transmit information indicating the button and identification information of the child terminal 10B to the control device 20.

The third switch 40C is a switch for invalidating the control of the main terminal 10A and the sub terminal 10B to the substrate processing apparatus 30. Even if the hand-held terminal 10C is connected to the substrate processing apparatus 30, the third switch 40C disables the control of the hand-held terminal 10C on the substrate processing apparatus 30. When the third switch 40C is set to on, the substrate processing apparatus 30 can be controlled only from the remote terminal 10D. When the third switch 40C is turned off, the first switch 40A or the second switch 40B is turned on, whereby the control of the main terminal 10A or the sub-terminal 10B on the substrate processing apparatus 30 can be enabled.

The third switch 40C may be installed in a facility such as a factory where the substrate processing apparatus 30 is installed. In this way, the terminal 10 capable of controlling the substrate processing apparatus 30 can be switched to the remote terminal 10D by performing the operation on site. In this case, the third switch 40C may be provided in the vicinity of the master terminal 10A, for example. In this case, the third switch 40C may be provided on the housing of the main terminal 10A. When the user sets the third switch 40C to on, a signal indicating that is sent to the control device 20. The third switch 40C may be a button or the like displayed on the display screen of the host terminal 10A or the like. However, from the viewpoint of safety, it is desirable that the button be a hardware switch rather than a button controlled by software displayed on the display screen. In this case, when the user sets the button or the like on, the master terminal 10A transmits information indicating the button or the like and identification information of the master terminal 10A to the control device 20.

When the plurality of switches 40 are turned on (for example, pressed), the control device 20 may turn on only the switch 40 that was turned on first among the plurality of switches 40 and forcibly turn off the other switches 40. In addition, when the switch 40 that is forcibly set to off is operated, the control device 20 may notify the user of information indicating that another switch 40 has been operated first. In this case, for example, when the first switch 40A is pressed first to set the first switch 40A on and then the second switch 40B is pressed, the user is notified that the first switch 40A has been operated first.

In this case, for example, when the second switch 40B is set to on, the control device 20 may turn on the lamp corresponding to the second switch 40B to green. When the second switch 40B is forcibly turned off by the first switch 40A being turned on and the substrate processing apparatus 30 is not abnormal, the lamp corresponding to the second switch 40B is turned on in yellow for a predetermined period of time when the second switch 40B is pressed.

When the second switch 40B is forcibly turned off by the first switch 40A being turned on and an abnormality occurs in the substrate processing apparatus 30, the lamp corresponding to the second switch 40B is turned on and off in yellow for a predetermined period (repeatedly turned on and off at a fixed cycle) when the second switch 40B is pressed. This enables the user to understand the reason why the pressing of the second switch 40B is disabled, for example.

The third switch 40C may be configured as a local/remote changeover switch for switching between control by the main terminal 10A or the sub-terminal 10B, which is a local terminal, and control by the remote terminal 10D, which is a remote terminal, or the first switch 40A and the second switch 40B may be collectively configured as a main/sub changeover switch for switching between control by the main terminal 10A and control by the sub-terminal 10B. In this case, the local/remote changeover switch is not used to select between the on setting and the off setting, but is used to select between the control by the local terminal and the control by the remote terminal, and the main/sub changeover switch is also used to select the control by the main terminal 10A and the control by the sub terminal 10B in the same manner. When the local terminal is selected by the local/remote changeover switch, the control of the master terminal 10A or the slave terminal 10B selected by the master/slave changeover switch is performed.

(control device 20)

The control device 20 controls the substrate processing apparatus 30 based on information (signal) received from the terminal 10. In addition, information measured by various sensors of the substrate processing apparatus 30 and the like are displayed on the respective terminals 10. Thus, the user of the substrate processing apparatus 30 can monitor various states of the substrate processing apparatus 30, such as a processing state of the substrate and the presence or absence of an abnormality in each part of the substrate processing apparatus 30, from an office or the like through the remote terminal 10D.

When an abnormality occurs in the substrate processing apparatus 30, the control apparatus 20 restricts the terminals 10 that can control the substrate processing apparatus 30 to only the terminals 10 (any one of the main terminal 10A, the sub-terminal 10B, and the handy terminal 10C) that are provided locally. Thus, when the substrate processing apparatus 30 is operating normally, the user can monitor and operate the substrate processing apparatus 30 from the field, office, or the like. In addition, when an abnormality occurs in the substrate processing apparatus 30, it is possible to restrict the user to be able to operate the substrate processing apparatus 30 only on site, and to monitor the substrate processing apparatus 30 from the site, office, or the like. Therefore, for example, it is possible to reduce the possibility that a user performing a recovery operation on site is disturbed by a remote operation by another user. In addition, it is possible to prevent remote operation without confirming the situation of the site.

The control device 20 may cause the main terminal 10A, the sub-terminal 10B, and the remote terminal 10D to display the same display screen. In this case, the control device 20 may transmit the same video signal to the master terminal 10A, the sub-terminal 10B, and the remote terminal 10D.

The control device 20 may display a display screen for controlling each device operable by the handy terminal 10C and a display screen for notifying information on each device measured by each sensor.

(substrate processing apparatus 30)

The substrate processing apparatus 30 is an apparatus for performing various processes on a substrate for an FPD. In addition, the FPD may include, for example, a Liquid Crystal Display (LCD), Electro Luminescence (EL), a Plasma Display Panel (PDP), and the like. FPDs can be used for televisions, monitors, smart phones, and tablet terminals, for example. As a material of the substrate for the FPD, glass, synthetic resin, or the like can be used.

The substrate processing apparatus 30 can perform etching processing, Film formation processing by a CVD (Chemical Vapor Deposition) method, or the like on a substrate to form a Thin Film Transistor (TFT) or the like on the substrate. In this case, the substrate processing apparatus 30 can form a TFT by sequentially laminating gate electrodes, gate insulating films, semiconductor layers, and the like on the substrate G while patterning the same, for example. Further, the substrate processing apparatus 30 may be provided in a clean room in which air cleanliness is ensured.

< hardware Structure >

Control device 20

Fig. 2A is a diagram showing an example of the hardware configuration of the control device 20 according to the embodiment. In addition, in the case where the terminal 10 has a computer, the hardware configuration of the computer may be the same as that of the control device 20 of fig. 2A.

The control device 20 of fig. 2A includes a drive device 200, an auxiliary storage device 202, a storage device 203, a CPU 204, an interface device 205, and the like, which are connected to each other via a bus B.

A program for realizing the processing by the control device 20 may be provided by the recording medium 201. In this case, when the recording medium 201 in which the program is recorded is set in the drive device 200, the program is installed from the recording medium 201 to the auxiliary storage device 202 via the drive device 200. The program does not necessarily need to be installed on the recording medium 201, and may be downloaded from another computer via a network and installed. The auxiliary storage device 202 saves the installed program and saves necessary files, data, and the like.

When there is a program start instruction, the storage device 203 reads out the program from the auxiliary storage device 202 and stores the program. The CPU 204 realizes the functions of the control device 20 according to the programs stored in the storage device 203. The interface device 205 is used as an interface for connecting a network.

Further, as an example of the recording medium 201, a portable recording medium such as a CD-ROM, a DVD disk, or a USB memory can be cited. Examples of the auxiliary storage device 202 include an HDD (Hard Disk Drive) and a flash memory. The recording medium 201 and the secondary storage device 202 each correspond to a computer-readable recording medium.

Substrate processing apparatus 30

Fig. 2B is a diagram showing an example of the substrate processing apparatus 30 according to the embodiment. The substrate processing apparatus 30 according to the embodiment may be a cluster tool in which a plurality of process modules (process chambers ) for performing various processes on each substrate are combined. In the example of fig. 2B, the substrate processing apparatus 30 is a multi-chamber type having a plurality of process chambers.

In the example of fig. 2B, the substrate processing apparatus 30 has, as each chamber, a transfer module (transfer chamber) 31, a load-lock vacuum module (load-lock vacuum chamber) 32, a process module 33A, a process module 33B, and a process module 33C (hereinafter, simply referred to as "process module 33" without distinction). (As an example, any one of these chambers can be referred to as a first chamber, and any other chamber can be referred to as a second chamber.)

The load-lock vacuum module 32 and each process module 33 are connected to the transfer module 31 via gate valves, respectively.

The load-lock vacuum module 32 is a device that supplies the substrate to the transfer module 31. The load-lock vacuum module 32 is, for example, stacked in two layers, and a holder for holding a substrate, a positioner for performing position adjustment of the substrate, and the like are provided in each layer. The load-lock vacuum module 32 may be configured to be capable of switching the internal pressure between normal pressure and vacuum, and to transfer substrates to and from carriers (transfer devices) for transferring a large number of substrates G placed thereon. In this case, after the load-lock vacuum module 32 is controlled to be vacuum, the gate valve with the transfer module 31 also controlled to be vacuum may be opened to supply the substrate from the load-lock vacuum module 32 to the transfer module 31.

The transfer module 31 is a device for supplying substrates to the process modules 33. The transfer module 31 may be provided with, for example, a rotatable transfer mechanism 311 (arm or robot) that can slide toward each process module 33. The conveyance mechanism supplies the substrate supplied from the load-lock vacuum module 32 to a desired process module 33.

The process module 33 is a device for performing various processes on a substrate. The process module 33 may generate plasma, for example, and perform dry etching using a halogen-based etching gas (e.g., a chlorine-based etching gas).

The transfer module 31 may cause each process module 33 to sequentially perform film formation processing such as CVD (Chemical vapor Deposition) processing, PVD (Physical vapor Deposition) processing, and etching processing, for example. In this case, the transfer module 31 may first supply a substrate to the process module 33A and perform the first process on the substrate, for example. Then, the transfer module 31 may supply the substrate to the process module 33B, and perform a second process on the substrate. Then, the transfer module 31 may supply the substrate to the process module 33C, and perform a third process on the substrate.

In addition, as shown in fig. 2B, a port 301A ("an example of a first port"), a port 301B ("an example of a second port"), a port 301C, and a port 301D (hereinafter, simply referred to as "port 301" without distinction) for connecting the handy terminal 10C are provided on the exterior (outside) of the process module 33A, the process module 33B, the process module 33C, and the load-lock vacuum module 32, respectively. Each port 301 is connected to the control device 20 through a LAN or the like, for example. Further, examples of the first port and the second port are not limited thereto, and any one of the ports 301 may be used as the first port and as the second port. In addition, a port for connecting the hand-held terminal 10C may be provided in the transfer module 31.

< functional Structure >

The functional configuration of the control device 20 according to the embodiment will be described with reference to fig. 3. Fig. 3 is a diagram showing an example of a functional configuration of the control device 20 according to the embodiment.

The control device 20 includes an abnormality detection unit 21, an abnormality switching unit 22, a reception unit 23, a switching unit 24, and a control unit 25. These respective units can be realized by cooperation of one or more programs installed in the control device 20 and hardware such as the CPU 204 of the control device 20. These units can be realized by one or more circuits. Here, the Circuit can be realized by a Circuit including, for example, an ASIC (Application Specific Integrated Circuit), a DSP (digital signal processor), an FPGA (field programmable gate array), and a relay. For example, some of the respective units (for example, the control unit 25) may be realized by one or more programs installed in the control device 20 in cooperation with hardware such as the CPU 204 of the control device 20, and the other units (for example, the abnormality detection unit 21, the abnormality switching unit 22, the reception unit 23, and the switching unit 24) may be realized by circuits such as an ASIC.

The abnormality detection unit 21 detects various abnormalities of the substrate processing apparatus 30 based on information measured by various sensors of the substrate processing apparatus 30 and the like.

When the abnormality is detected by the abnormality detection unit 21, the abnormality switching unit 22 restricts the terminals 10 that can control the substrate processing apparatus 30 to only the terminals 10 (any one of the main terminal 10A, the sub-terminal 10B, and the handy terminal 10C) that are provided locally.

The receiving unit 23 receives operations such as turning on and off of the switch 40 from the user.

The switching unit 24 can be configured to be able to control the substrate processing apparatus 30 only by the terminal 10 designated by the user in response to the user operation received by the receiving unit 23.

The control unit 25 causes the terminal 10 to display a display screen based on information measured by various sensors of the substrate processing apparatus 30. The control unit 25 controls each unit of the substrate processing apparatus 30 in response to an instruction from the terminal 10 determined by the abnormal-time switching unit 22 or the switching unit 24.

< treatment >

An example of the processing of the control system 1 according to the embodiment will be described with reference to fig. 4 to 5B. Fig. 4 is a sequence diagram showing an example of processing of the control system 1 according to the embodiment. Fig. 5A is a diagram illustrating an example of display screens of the main terminal 10A, the sub-terminal 10B, and the remote terminal 10D according to the embodiment. Fig. 5B is a diagram illustrating an example of a display screen of the handheld terminal 10C according to the embodiment.

In step S1, the switching unit 24 of the control device 20 enables (can input) only the operation performed from the remote terminal 10D in accordance with the instruction of the user. Here, for example, when the user sets the first switch 40A and the second switch 40B to be turned off and the third switch 40C to be turned on, the control device 20 may only enable the operation from the remote terminal 10D. This enables the substrate processing apparatus 30 to be controlled only from the remote terminal 10D. Therefore, for example, it is possible to reduce the occurrence of confusion caused by a plurality of users who are located in different places controlling the substrate processing apparatuses 30 simultaneously by the terminals 10.

The control device 20 may cause the main terminal 10A, the sub-terminal 10B, and the remote terminal 10D to display a display screen 501 as shown in fig. 5A. In the example of fig. 5A, buttons 502A to 502D for controlling each part of the substrate processing apparatus 30 and the like are displayed on the display screen 501. When only the operation performed from the remote terminal 10D is set to be effective, the control device 20 causes the substrate processing device 30 to execute control corresponding to the pressed button only when the buttons 502A to 502D and the like are operated by the remote terminal 10D.

If the operation performed only from the remote terminal 10D is set to be valid, the control device 20 invalidates the operation when the buttons 502A to 502D and the like are operated from either the master terminal 10A or the slave terminal 10B by the remote terminal 10D.

Next, the abnormality detection unit 21 of the control device 20 detects an abnormality of the substrate processing apparatus 30 (step S2). Here, the abnormality detection unit 21 of the control device 20 detects various abnormalities of the substrate processing apparatus 30 based on information measured by various sensors of the substrate processing apparatus 30 and the like. The abnormality detector 21 of the control device 20 can detect, for example, a failure of a pump for maintaining a vacuum state in the process module 33. The abnormality detector 21 of the control device 20 may detect that the door for entering the transfer module 31 is open, for example, during the operation of the conveyance mechanism 311 in the transfer module 31.

The abnormality detector 21 of the control device 20 may stop each of the driving units of the substrate processing apparatus 30 when detecting an abnormality. When an abnormality is detected, the abnormality detection unit 21 of the control device 20 may stop only the driving units related to the portion where the abnormality has occurred among the driving units of the substrate processing apparatus 30.

In addition, when the abnormality is detected by the abnormality detection unit 21, the control unit 25 of the control device 20 may notify the main terminal 10A, the sub-terminal 10B, and the remote terminal 10D of a display screen and a sound of an alarm (warning). Thus, the user can move from an office or the like to the field to perform recovery of the substrate processing apparatus 30. Further, the alarm may include information indicating the content of the abnormality detected by the abnormality detecting section 21.

Next, the abnormal-state switching unit 22 of the control device 20 disables (disables) the input from the remote terminal 10D (step S3), and enables only the operation performed from the local terminal 10 (any one of the main terminal 10A, the sub terminal 10B, and the handy terminal 10C) (step S4). This can reduce the possibility of the substrate processing apparatus 30 operating by remote operation from an office or the like when an abnormality occurs in the substrate processing apparatus 30, for example, and hindering the recovery operation.

Here, while the abnormality of the substrate processing apparatus 30 is detected, the control apparatus 20 may invalidate the operation for the third switch 40C by forcibly setting the third switch 40C to off, and perform control so that the user cannot set the third switch 40C to on. Thus, for example, when the user sets the first switch 40A to on, the substrate processing apparatus 30 can be controlled only from the main terminal 10A. When the user sets the second switch 40B to on, the substrate processing apparatus 30 can be controlled only from the sub-terminal 10B.

Here, the control device 20 may cause the remote terminal 10D to display information indicating a result of control of the substrate processing apparatus 30 by the local terminal 10, for example. Thus, even when the user cannot operate the substrate processing apparatus 30 from the remote terminal 10D, the operation result of either one of the main terminal 10A and the sub-terminal 10B can be monitored from the remote terminal 10D. In this case, the control device 20 may cause the remote terminal 10D to display the same display screen as that of the main terminal 10A and the sub-terminal 10B, for example, thereby causing the remote terminal 10D to display the operation result of the local terminal 10. Further, the operation result of the handy terminal 10C may be monitored from the remote terminal 10D.

Next, the substrate processing apparatus 30 is connected to the handy terminal 10C (step S5). Here, the port 301 of the substrate processing apparatus 30 is connected to a cable to which the handy terminal 10C is connected.

For example, when the main terminal 10A and the sub-terminal 10B are disposed at positions where the user cannot operate while looking into the process module 33, the user moves the hand-held terminal 10C to the vicinity of the process module 33. Then, the user connects the hand-held terminal 10C to the port 301 provided on the outside of the process module 33.

Next, the substrate processing apparatus 30 transmits a notification (connection notification) indicating that the connection with the handy terminal 10C is made to the control apparatus 20 (step S6). Here, the port 301 of the substrate processing apparatus 30 to which the hand-held terminal 10C is connected may transmit a connection notification including identification information (port ID) of the port 301 and information indicating that connection with the hand-held terminal 10C is made to the control apparatus 20.

Next, the switching unit 24 of the control device 20 enables only the operation performed from the handy terminal 10C for each of the units of the substrate processing apparatus 30 corresponding to the port 301 to which the handy terminal 10C is connected (step S7). This can reduce, for example, the possibility that a user performing the recovery operation near the process module 33 is disturbed by operations performed by other users located away from the process module 33. Further, by this means, the user can operate the respective parts in the process module 33, the respective parts in the transfer module 31 relating to the process module 33, and the like, for example, by using the hand-held terminal 10C while looking at the inside of the process module 33. Therefore, the user can perform the operation while visually checking, for example, the failure state of the pump in the process module 33 and the open state of the access door in the transfer module 31.

Here, in the control device 20, for example, when the hand-held terminal 10C is connected to the port 301A provided outside the process module 33A, the control device 20 may, for example, make effective only the operation performed from the hand-held terminal 10C for each part in the process module 33A and the transfer module 31. When the handy terminal 10C is connected to the port 301A, the control device 20 may, for example, only activate the operation performed from the handy terminal 10C for each part in the load-lock vacuum module 32. The same applies to the process module 33B, the process module 33C, and the like.

In addition, in the control device 20, for example, when the hand-held terminal 10C is connected to the port 301D provided on the outer side of the load-lock vacuum module 32, the control device 20 may, for example, only make the operation from the hand-held terminal 10C effective for each part in the load-lock vacuum module 32 and the transfer module 31.

Here, the control device 20 may cause the handy terminal 10C to display a display screen 511 as shown in fig. 5B. In the example of fig. 5B, buttons 512A to 512F for controlling each unit corresponding to the port 301 to which the handy terminal 10C is connected, among the units of the substrate processing apparatus 30, are displayed on the display screen 511. Fig. 5B shows that the module corresponding to the button 512E indicated by oblique lines and the module corresponding to the button 512F are inoperable. For example, in the case where "P/C-1" corresponding to the button 512D of FIG. 5B is the process module 33A, FIG. 5B shows a state where the hand-held terminal 10C is connected to the port 301A of the process module 33A, meaning that "P/C-1" is controllable, but the other process modules, i.e., "P/C-2" and "P/C-3" are not controllable. Here, by pressing the button 512D corresponding to "P/C-1", transition is made to the menu screen at the lower level for controlling each part of "P/C-1", and various operations relating to "P/C-1" can be performed.

The control device 20 may cause the main terminal 10A, the sub-terminal 10B, and the remote terminal 10D to display information indicating the port 301 to which the handy terminal 10C is connected. The control device 20 may cause the main terminal 10A, the sub-terminal 10B, and the remote terminal 10D to display information indicating each section of the substrate processing apparatus 30, which is set to be effective only for the operation performed from the hand-held terminal 10C, corresponding to the port 301 to which the hand-held terminal 10C is connected. This allows the user to grasp the location to which the handheld terminal 10C is connected and the portions that cannot be operated from the main terminal 10A and the like from the terminals 10 other than the handheld terminal 10C.

Next, the switching unit 24 of the control device 20 activates only the operation performed from either one of the main terminal 10A and the sub-terminal 10B, for each of the parts of the substrate processing apparatus 30 other than the part corresponding to the port 301 to which the handy terminal 10C is connected, for example, the buttons "P/C-2" and "P/C-3" hatched in fig. 5B (step S8).

(in the case where the hand-held terminal 10C is cut off)

When the hand-held terminal 10C is disconnected, the switching unit 24 of the control device 20 returns the control performed from each terminal 10 to the state before the hand-held terminal 10C is connected. In this case, when the connection between the handy terminal 10C and the substrate processing apparatus 30 is released (cut) by pulling out a cable or the like of the handy terminal 10C from the port 301, a notification (cut notification) that the port 301 and the handy terminal 10C are cut is transmitted to the control apparatus 20. Here, the disconnection notification may include identification information (port ID) of the port 301 and information indicating that the handheld terminal 10C is disconnected from the port. The control device 20 also enables operations performed from the local terminal 10, that is, either the master terminal 10A or the slave terminal 10B, to each unit corresponding to the port 301.

(case of recovery of the substrate processing apparatus 30)

When the substrate processing apparatus 30 is recovered, the control performed from each terminal 10 may be recovered to the state before the occurrence of the abnormality. In this case, when the abnormality is not detected by the abnormality detection unit 21, the abnormal-state switching unit 22 of the control device 20 may stop (release) the function of forcibly turning off the third switch 40C. Thus, when the user turns off the first switch 40A and the second switch 40B and turns on the third switch 40C when the substrate processing apparatus 30 is recovered, only the operation performed from the remote terminal 10D can be enabled (input).

When the abnormality is not detected by the abnormality detection unit 21, the control device 20 may stop the function of forcibly setting the third switch 40C to off, and notify the user that the third switch 40C can be set to on (operation enabled) by operating a notification device (for example, a rotary lamp) corresponding to the third switch 40C, or the like. When the user sets the third switch 40C to on, the control device 20 may stop the operation of the notification device. This can reduce the possibility that the user leaves the clean room on site without forgetting to turn on the third switch 40C after recovery, for example. In this case, the notification device may be provided on the housing of the main terminal 10A, for example.

< modification example >

The respective functional units of the terminal 10 and the control device 20 may be realized by, for example, cloud computing provided by one or more computers. Further, a plurality of the terminal 10, the control device 20, and the substrate processing apparatus 30 may be integrated. In this case, for example, the control device 20 and the substrate processing apparatus 30 may be configured as an integrated device. For example, the master terminal 10A or the slave terminal 10B (hereinafter also referred to as "master terminal 10A or the like") may be integrated with the control device 20. For example, the main terminal 10A and the like, the control device 20, and the substrate processing apparatus 30 may be configured as an integrated device.

Each of the terminal 10, the control device 20, and the substrate processing apparatus 30 may be implemented by a plurality of devices. In this case, for example, the abnormality detection unit 21 and the abnormality switching unit 22 among the functional units of the control device 20 may be separate units from the other functional units.

The present disclosure may be other embodiments obtained by combining other components and the like with the structures and the like listed in the above embodiments, and the present disclosure is not limited to any of the structures shown here. This point can be changed within a range not departing from the gist of the present disclosure, and can be appropriately determined according to the application form thereof.