Sound wave sensor based on circular dichroism spectrum

文档序号:612750 发布日期:2021-05-07 浏览:7次 中文

阅读说明:本技术 一种基于圆二色谱的声波传感器 (Sound wave sensor based on circular dichroism spectrum ) 是由 不公告发明人 于 2020-12-16 设计创作,主要内容包括:本发明属于传感器技术领域,具体涉及一种基于圆二色谱的声波传感器,包括壳体、激光器、探测器、衬底和悬臂梁,所述壳体的一端安装有激光器,所述壳体的另一端安装有探测器,所述激光器和探测器对称分布在壳体的两端,所述壳体内设置有衬底,所述衬底靠近激光器的一端设置有悬臂梁,所述悬臂梁有多个,多个所述悬臂梁均匀分布在衬底上。本发明通过将悬臂梁形状设置成Y形状音叉,可以和声波产生共振,微型悬臂梁在发生振动时变为手性结构,光通过时会产生圆二色谱,圆二色谱受形状变化敏感,因此该传感器具有非常高的灵敏度。(The invention belongs to the technical field of sensors, and particularly relates to an acoustic wave sensor based on a circular dichroism spectrum, which comprises a shell, a laser, a detector, a substrate and cantilever beams, wherein the laser is installed at one end of the shell, the detector is installed at the other end of the shell, the laser and the detector are symmetrically distributed at two ends of the shell, the substrate is arranged in the shell, the cantilever beams are arranged at one ends, close to the laser, of the substrates, the number of the cantilever beams is multiple, and the multiple cantilever beams are uniformly distributed on the substrate. According to the invention, the cantilever beam is set to be a Y-shaped tuning fork, resonance can be generated with sound waves, the micro cantilever beam is changed into a chiral structure when vibration occurs, a circular dichroism spectrum can be generated when light passes through the micro cantilever beam, and the circular dichroism spectrum is sensitive to shape change, so that the sensor has very high sensitivity.)

1. An acoustic wave sensor based on circular dichroism comprises a shell (1), a laser (2), a detector (3), a substrate (4) and a cantilever beam (5), and is characterized in that: laser instrument (2) are installed to the one end of casing (1), detector (3) are installed to the other end of casing (1), laser instrument (2) and detector (3) symmetric distribution are at the both ends of casing (1), be provided with substrate (4) in casing (1), the one end that substrate (4) are close to laser instrument (2) is provided with cantilever beam (5), cantilever beam (5) have a plurality ofly, a plurality of cantilever beam (5) evenly distributed is on substrate (4).

2. The acoustic wave sensor based on circular dichroism according to claim 1, wherein: the cantilever beam (5) is of a Y-shaped structure.

3. The acoustic wave sensor based on circular dichroism according to claim 2, wherein: the cantilever beam (5) is made of a noble metal material.

4. The acoustic wave sensor based on circular dichroism according to claim 3, wherein: the size of the cantilever beam (5) is in a nanometer level.

5. The acoustic wave sensor based on circular dichroism according to claim 4, wherein: the substrate (4) is positioned in the middle of the shell (1).

6. The acoustic wave sensor based on circular dichroism according to claim 5, wherein: the substrate (4) is made of glass.

7. The acoustic wave sensor based on circular dichroism according to claim 6, wherein: the substrate (4) is made of flexible materials.

8. The acoustic wave sensor based on circular dichroism according to claim 7, wherein: and a cavity between the laser (2) and the substrate (4) is filled with optical gain gas.

Technical Field

The invention relates to the technical field of sensors, in particular to a circular dichroism-based sound wave sensor.

Background

The acoustic wave sensor is a sensor for converting acoustic wave signals into other energy signals, has great penetrating power to liquid and solid, and particularly in opaque solids with sunlight, obvious reflection can be generated when the acoustic wave sensor touches impurities or interfaces to form reflection echoes, and Doppler effect can be generated when the acoustic wave sensor touches a movable object. The acoustic wave sensor is widely applied to the aspects of industry, national defense, biomedicine and the like.

In the prior art, when the acoustic wave sensor is used, the measurement sensitivity is low. Accordingly, there is a need for improvements in the art.

Disclosure of Invention

The invention aims to provide an acoustic wave sensor based on a circular dichroism spectrum, and solves the problem of low measurement sensitivity of the device.

In order to achieve the purpose, the invention provides the following technical scheme: the utility model provides an acoustic wave sensor based on circle dichroism, includes casing, laser instrument, detector, substrate and cantilever beam, the laser instrument is installed to the one end of casing, the detector is installed to the other end of casing, laser instrument and detector symmetric distribution are at the both ends of casing, be provided with the substrate in the casing, the one end that the substrate is close to the laser instrument is provided with the cantilever beam, the cantilever beam has a plurality ofly, and is a plurality of cantilever beam evenly distributed is on the substrate.

Preferably, the cantilever beam is of a Y-shaped structure.

Preferably, the cantilever beam is made of a noble metal material.

Preferably, the size of the cantilever beam is in the nanometer scale.

Preferably, the substrate is located in the middle of the housing.

Preferably, the substrate is made of glass.

Preferably, the substrate is made of flexible material.

Preferably, the cavity between the laser and the substrate is filled with an optical gain gas.

Compared with the prior art, the invention has the following beneficial effects:

according to the invention, the cantilever beam is set to be a Y-shaped tuning fork, resonance can be generated with sound waves, the micro cantilever beam is changed into a chiral structure when vibration occurs, a circular dichroism spectrum can be generated when light passes through the micro cantilever beam, and the circular dichroism spectrum is sensitive to shape change, so that the sensor has very high sensitivity.

Drawings

FIG. 1 is a schematic view of the structure of the present invention.

In the figure: 1. a housing; 2. a laser; 3. a detector; 4. a substrate; 5. a cantilever beam.

Detailed Description

The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.

Example 1

Please refer to fig. 1, a sound wave sensor based on circular dichroism comprises a shell 1, a laser 2, a detector 3, a substrate 4 and a cantilever beam 5, wherein the laser 2 is installed at one end of the shell 1, the detector 3 is installed at the other end of the shell 1, the laser 2 and the detector 3 are symmetrically distributed at two ends of the shell 1, the substrate 4 is arranged in the shell 1, one end, close to the laser 2, of the substrate 4 is provided with the cantilever beam 5, the cantilever beams 5 are multiple, the cantilever beams 5 are uniformly distributed on the substrate 4, the cantilever beam 5 is of a Y-shaped structure, the cantilever beam 5 is made of a noble metal material, the size of the cantilever beam 5 is in a nanometer level, the substrate 4 is located in the middle of the shell 1, and the.

Specifically, laser 2 sends laser irradiation on 5 arrays of cantilever beam, shine on detector 3 through substrate 4 again, when the sound wave was used in 5 arrays of cantilever beam, the sound wave can make 5 vibrations of cantilever beam, consequently 5 can produce deformation of cantilever beam, 5 asymmetric becoming of cantilever beam by the symmetry, consequently can produce the circular dichroism when light passes 5 arrays of cantilever beam, the sound wave amplitude is different, 5 vibrating range of cantilever beam are different, consequently, the circular dichroism that produces is also different, through the change that detects the circular dichroism, just can obtain the information of sound wave.

Example 2

Please refer to fig. 1, a sound wave sensor based on circular dichroism comprises a shell 1, a laser 2, a detector 3, a substrate 4 and a cantilever beam 5, wherein the laser 2 is installed at one end of the shell 1, the detector 3 is installed at the other end of the shell 1, the laser 2 and the detector 3 are symmetrically distributed at two ends of the shell 1, the substrate 4 is arranged in the shell 1, one end, close to the laser 2, of the substrate 4 is provided with the cantilever beam 5, the cantilever beams 5 are multiple, the cantilever beams 5 are uniformly distributed on the substrate 4, the cantilever beam 5 is of a Y-shaped structure, the cantilever beam 5 is made of a noble metal material, the size of the cantilever beam 5 is in a nanometer level, the substrate 4 is located in the middle of the shell 1, and the.

Specifically, laser 2 sends laser irradiation on 5 arrays of cantilever beam, shine on detector 3 through substrate 4 again, when the sound wave was used in 5 arrays of cantilever beam, the sound wave can make 5 vibrations of cantilever beam, consequently 5 can produce deformation of cantilever beam, 5 asymmetric becoming of cantilever beam by the symmetry, consequently can produce the circular dichroism when light passes 5 arrays of cantilever beam, the sound wave amplitude is different, 5 vibrating range of cantilever beam are different, consequently, the circular dichroism that produces is also different, through the change that detects the circular dichroism, just can obtain the information of sound wave.

Specially, the substrate 4 is made of a flexible material, and the flexible substrate 4 can deform under the action of sound waves on the flexible substrate 4 during detection, so that the distance between the cantilever beams 5 can change, the generated circular dichroism spectrum can be influenced by the change of the distance, and the detection sensitivity can be improved.

Example 3

Please refer to fig. 1, a sound wave sensor based on circular dichroism comprises a shell 1, a laser 2, a detector 3, a substrate 4 and a cantilever beam 5, wherein the laser 2 is installed at one end of the shell 1, the detector 3 is installed at the other end of the shell 1, the laser 2 and the detector 3 are symmetrically distributed at two ends of the shell 1, the substrate 4 is arranged in the shell 1, one end, close to the laser 2, of the substrate 4 is provided with the cantilever beam 5, the cantilever beams 5 are multiple, the cantilever beams 5 are uniformly distributed on the substrate 4, the cantilever beam 5 is of a Y-shaped structure, the cantilever beam 5 is made of a noble metal material, the size of the cantilever beam 5 is in a nanometer level, the substrate 4 is located in the middle of the shell 1, and the.

Specifically, laser 2 sends laser irradiation on 5 arrays of cantilever beam, shine on detector 3 through substrate 4 again, when the sound wave was used in 5 arrays of cantilever beam, the sound wave can make 5 vibrations of cantilever beam, consequently 5 can produce deformation of cantilever beam, 5 asymmetric becoming of cantilever beam by the symmetry, consequently can produce the circular dichroism when light passes 5 arrays of cantilever beam, the sound wave amplitude is different, 5 vibrating range of cantilever beam are different, consequently, the circular dichroism that produces is also different, through the change that detects the circular dichroism, just can obtain the information of sound wave.

Specifically, the cavity between the laser 2 and the substrate 4 is filled with an optical gain gas. The gas is a good medium for sound wave transmission, and the optical gain medium is adopted, so that the amplification effect on light can be achieved, the loss of light in the transmission process is reduced, and the detection precision is improved.

Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.

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