阅读说明：本技术 一种基于干涉的硅光加速器传感器及加速度测量方法 (Silicon light accelerator sensor based on interference and acceleration measuring method ) 是由 刘晓海 俞童 于 2021-06-30 设计创作，主要内容包括：本申请涉及一种基于干涉的硅光加速器传感器及加速度测量方法,通过入射光纤末端的第一布拉格反射镜和扭转梁上的第二布拉格反射镜组成F-P腔,第二布拉格反射镜能够随着扭转梁的扭转其角度发生变化,F-P腔间隙发生改变,继而与第一布拉格反射镜射出的光线发生干涉。因此,若有宽带光入射,经过第一布拉格反射镜和第二布拉格反射镜后,只有特定波长的光出射,出射波长和F-P腔间隙有关。而间隙变化与受到惯性力引起的扭转梁形变有关系,进而根据波长即可知道惯性力的大小。由于使用F-P干涉的方法,传感器灵敏度较高,且具有该结构的传感器能够测量平面外惯性力。(The application relates to a silicon accelerator sensor based on interference and an acceleration measuring method, wherein an F-P cavity is formed by a first Bragg reflector at the tail end of an incident optical fiber and a second Bragg reflector on a torsion beam, the second Bragg reflector can change the angle along with the torsion of the torsion beam, the gap of the F-P cavity changes, and then the F-P cavity interferes with light rays emitted by the first Bragg reflector. Therefore, if broadband light enters, only light with specific wavelength is emitted after passing through the first Bragg reflector and the second Bragg reflector, and the emitted wavelength is related to the F-P cavity gap. The change of the gap is related to the deformation of the torsion beam caused by the inertia force, and the magnitude of the inertia force can be known according to the wavelength. Due to the adoption of the F-P interference method, the sensitivity of the sensor is high, and the sensor with the structure can measure out-of-plane inertia force.)

1. An interference-based silicon accelerator sensor, comprising:

the device comprises an incident optical fiber (1), an emergent optical fiber (2), a torsion beam (4), a mass block (10) and an anchor (3);

the two ends of the mass block (10) are connected with the anchor (3) through the torsion beam (4), and the central axis of the torsion beam (4) does not pass through the mass center of the mass block (10);

the tail end of the incident optical fiber (1) is provided with a first Bragg reflector (6), the torsion beam (4) is provided with a second Bragg reflector (7), and the emergent optical fiber (2) can receive light rays which are emitted from the incident optical fiber (1) and pass through the first Bragg reflector (6) and the second Bragg reflector (7).

2. The interference based silicon light accelerator sensor according to claim 1, characterized in that the first bragg mirror (6) and the second bragg mirror (7) are grooves.

3. The interference-based silicon accelerator sensor according to claim 2, wherein the second bragg reflector (7) is filled with SIO₂A material.

4. The interference-based silicon accelerator sensor according to claim 2, wherein the thickness of the torsion beam 4 is greater in the middle portion than the portion connected to the mass 10 and the anchor 3.

5. The interference-based silicon accelerator sensor according to claim 2, wherein an enlarged portion extending in the direction of the incident optical fiber (1) is formed in the middle of the torsion beam (4), and the second bragg mirror (7) is formed on the enlarged portion.

6. The interference-based silicon accelerator sensor according to any one of claims 1 to 5, wherein the incident optical fiber (1) forms two branches, the ends of the two branches are provided with the first Bragg reflector (6), the two torsion beams (4) are provided with the second Bragg reflector (7), and the emergent optical fiber (2) is also provided with two Bragg reflectors (6) and two torsion beams (4) corresponding to the ends of the two branches.

7. The interference-based silicon accelerator sensor according to claim 3, wherein the incident optical fiber (1) is formed into two branches by a coupler (8).

8. An acceleration measuring method, characterized in that, using the silicon light accelerator sensor based on interference of any one of claims 1 to 5, and arranging the silicon light accelerator sensor on the surface of the object to be measured, comprises the following steps:

and introducing broadband light into the incident optical fiber (1), detecting the wavelength of the light of the emergent optical fiber (2), and determining the acceleration of the object to be detected according to the wavelength.

9. An acceleration measuring method, characterized in that the silicon light accelerator sensor based on interference of claim 6 or 7 is used and is arranged on the surface of an object to be measured, comprising the following steps:

introducing broadband light into an incident optical fiber (1), and detecting the wavelengths of the light of two emergent optical fibers (2);

if one of the emergent optical fibers (2) has light output, the other emergent optical fiber has no light output;

determining the acceleration of the object to be detected according to the wavelength of the output light;

if the two outgoing optical fibers (2) have light output, determining the acceleration of the object to be measured according to the average value of the wavelengths of the two output light.

10. Acceleration measuring method according to claim 9, characterized in that both outgoing fibres (2) have a light output and the difference between the wavelengths of the two outgoing light is compared, and if the difference is outside the error range, the data of this measurement is not used.

Technical Field

The application belongs to the technical field of photonic chips, and particularly relates to a silicon accelerator sensor based on interference and an acceleration measuring method.

Background

Currently, the most successful commercially available micro-electromechanical (MEMS) accelerometers are typically capacitive, but they are limited by low sensitivity, high power consumption, temperature dependence and high cross-sensitivity, and are not immune to electromagnetic interference, and are therefore not suitable for aerospace applications such as satellites.

Optical MEMS sensors are often used in industrial processes, aerospace and military applications due to their potential for applications in hazardous environments such as immunity to electromagnetic interference and high temperatures.

A silicon photonic integrated circuit capable of making a silicon accelerator sensor is comprised of two or more photonic devices on a single substrate. At present, the measurement of out-of-plane inertia force by using a silicon optical integrated circuit is difficult to realize, and a silicon optical accelerator sensor structure capable of measuring out-of-plane inertia force based on interference is urgently needed.

Disclosure of Invention

The technical problem to be solved by the invention is as follows: in order to solve the defects in the prior art, the silicon light accelerator sensor and the acceleration measuring method based on interference are provided, and the out-of-plane inertia force can be measured.

The technical scheme adopted by the invention for solving the technical problems is as follows:

an interference-based silicon accelerator sensor comprising:

the device comprises an incident optical fiber, an emergent optical fiber, a torsion beam, a mass block and an anchor;

the two ends of the mass block are connected with the anchors through torsion beams, and the central axis of each torsion beam does not pass through the mass center of the mass block;

the tail end of the incident optical fiber is provided with a first Bragg reflector, the torsion beam is provided with a second Bragg reflector, and the emergent optical fiber can receive light rays which are emitted from the incident optical fiber and pass through the first Bragg reflector and the second Bragg reflector.

Preferably, in the silicon light accelerator sensor based on interference according to the present invention, the first bragg reflector and the second bragg reflector are grooves.

Preferably, in the silicon accelerator sensor based on interference according to the present invention, the incident optical fiber forms two branches, the ends of the two branches are both provided with the first bragg reflector, the two torsion beams are both provided with the second bragg reflector, and the two outgoing optical fibers are also respectively arranged corresponding to the first bragg reflectors at the ends of the two branches and the two torsion beams.

Preferably, the incidence optical fiber forms two branches through the coupler.

Preferably, in the silicon optical accelerator sensor based on interference of the present invention, the second bragg reflector is filled with SIO₂A material.

Preferably, in the interferometric-based silicon accelerator sensor of the present invention, the thickness of the middle portion of the torsion beam 4 is greater than the portion connected to the mass 10 and the anchor 3.

Preferably, the silicon optical accelerator sensor based on interference of the present invention has an enlarged portion formed in the middle of the torsion beam 4 and extending in the direction of the incident optical fiber 1, and the second bragg reflector is formed on the enlarged portion.

The invention also provides an acceleration measuring method, which uses the silicon light accelerator sensor based on interference and arranges the silicon light accelerator sensor on the surface of an object to be measured, and comprises the following steps:

and introducing broadband light into the incident optical fiber, detecting the wavelength of the light of the emergent optical fiber, and determining the acceleration of the object to be detected according to the wavelength.

The invention also provides an acceleration measuring method, which is used for a silicon light accelerator sensor based on interference of a junction of two measuring positions and is arranged on the surface of an object to be measured, and comprises the following steps:

introducing broadband light into the incident optical fibers, and detecting the wavelengths of the light rays of the two emergent optical fibers;

if one of the emergent optical fibers has light output, the other emergent optical fiber has no light output;

determining the acceleration of the object to be detected according to the wavelength of the output light;

if the two emergent optical fibers have light output, determining the acceleration of the object to be measured according to the average value of the wavelengths of the two output light;

according to the acceleration measuring method, the two emergent optical fibers have light output, the difference value of the wavelengths of the two output light rays is also compared, and if the difference value exceeds the error range, the measured data is not adopted.

The invention has the beneficial effects that:

according to the silicon accelerator sensor based on interference, the first Bragg reflector at the tail end of the incident optical fiber and the second Bragg reflector on the torsion beam form an F-P cavity, the second Bragg reflector can change the angle along with the torsion of the torsion beam, the gap of the F-P cavity changes, and then the F-P cavity interferes with light rays emitted by the first Bragg reflector. Therefore, if broadband light enters, only light with specific wavelength is emitted after passing through the first Bragg reflector and the second Bragg reflector, and the emitted wavelength is related to the F-P cavity gap. The change of the gap is related to the deformation of the torsion beam caused by the inertia force, and the magnitude of the inertia force can be known according to the wavelength. Due to the adoption of the F-P interference method, the sensitivity of the sensor is high, and the sensor with the structure can measure out-of-plane inertia force.

Drawings

The technical solution of the present application is further explained below with reference to the drawings and the embodiments.

FIG. 1 is a schematic diagram showing a specific structure of an interference-based silicon accelerator sensor according to embodiment 1 of the present application;

FIG. 2 is a schematic diagram showing another specific structure of an interference-based silicon accelerator sensor according to embodiment 1 of the present application;

FIG. 3 is a schematic diagram of the variation of the 1F-P cavity to measure acceleration in the embodiment of the present application;

FIG. 4 is a schematic diagram of a dual measurement configuration of an interference-based silicon accelerator sensor according to embodiment 1 of the present application;

the reference numbers in the figures are:

1 incident optical fiber;

2, an emergent optical fiber;

3, anchoring;

4, a torsion beam;

6 a first bragg mirror;

7 a second bragg mirror;

8, a coupler;

10 mass blocks.

Detailed Description

It should be noted that the embodiments and features of the embodiments in the present application may be combined with each other without conflict.

In the description of the present application, it is to be understood that the terms "center," "longitudinal," "lateral," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," and the like are used in the orientation or positional relationship indicated in the drawings for convenience in describing the present application and for simplicity in description, and are not intended to indicate or imply that the referenced devices or elements must have a particular orientation, be constructed in a particular orientation, and be operated in a particular manner, and are not to be considered limiting of the scope of the present application. Furthermore, the terms "first", "second", etc. are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first," "second," etc. may explicitly or implicitly include one or more of that feature. In the description of the invention, the meaning of "a plurality" is two or more unless otherwise specified.

In the description of the present application, it is to be noted that, unless otherwise explicitly specified or limited, the terms "mounted," "connected," and "connected" are to be construed broadly, e.g., as meaning either a fixed connection, a removable connection, or an integral connection; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meaning of the above terms in the present application can be understood by those of ordinary skill in the art through specific situations.

The technical solutions of the present application will be described in detail below with reference to the accompanying drawings in conjunction with embodiments.

Example 1

The present embodiment provides an interference-based silicon photo-accelerator sensor, as shown in fig. 1, including:

the device comprises an incident optical fiber 1, an emergent optical fiber 2, a torsion beam 4, a mass block 10 and an anchor 3;

two ends of the mass block 10 are connected with the anchor 3 through a torsion beam 4, and a central axis of the torsion beam 4 does not pass through the mass center of the mass block 10;

the tail end of the incident optical fiber 1 is provided with a first Bragg reflector 6, the torsion beam 4 is provided with a second Bragg reflector 7, and the emergent optical fiber 2 can receive light rays emitted from the incident optical fiber 1 and passing through the first Bragg reflector 6 and the second Bragg reflector 7.

The F-P cavity is composed of a first bragg reflector 6 at the end of the incident optical fiber 1 and a second bragg reflector 7 on the torsion beam 4, the second bragg reflector 7 can change its angle along with the torsion of the torsion beam 4, and the gap of the F-P cavity changes, as shown in fig. 3, and then interferes with the light emitted by the first bragg reflector 6. Therefore, if broadband light (light having a continuous wavelength) enters, only light having a specific wavelength exits after passing through the first bragg reflector 6 and the second bragg reflector 7, and the exiting wavelength is related to the F-P cavity gap. The change of the gap is related to the deformation of the torsion beam 4 caused by the inertia force, and the magnitude of the inertia force can be known according to the wavelength. Due to the adoption of the F-P interference method, the sensitivity of the sensor is high, and the sensor with the structure can measure out-of-plane inertia force.

As shown in fig. 4, the incident optical fiber 1 is provided with a coupler 8 so that the incident optical fiber 1 forms two branches, the ends of the two branches are provided with the first bragg reflectors 6, the two torsion beams 4 are provided with the second bragg reflectors 7, and the two outgoing optical fibers 2 are also provided corresponding to the first bragg reflectors 6 and the two torsion beams 4 at the ends of the two branches. Bragg reflectors are arranged on two sides of the mass block 10 to form two measuring points, so that the sensitivity can be further improved. The coupler 8 is adopted as a light path light splitting structure, and two branch light rays of the incident optical fiber 1 are ensured to be the same.

Further, the first bragg reflector 6 and the second bragg reflector 7 are grooves.

In order to reduce the influence of torsional deformation of the torsion beam 4 on the second bragg reflector 7 (change the groove pitch), the second bragg reflector may be formedThe second Bragg reflector 7 is filled with SiO₂Material, which resists deformation by the filled material.

Or the thickness of the middle portion of the torsion beam 4 is greater than the portion connected to the mass 10 and the anchor 3.

As shown in fig. 2, an expanded portion extending toward the incident optical fiber 1 is formed in the middle of the torsion beam 4, and the second bragg reflector 7 is formed on the expanded portion, so that the middle portion has a large mass, which improves the rigidity, and the second bragg reflector 7 is far away from the rotating shaft of the torsion beam 4, thereby reducing the deformation of the second bragg reflector 7, and making the wavelength and the acceleration of the object to be measured more linearly related.

Example 2

The present embodiment provides an acceleration measuring method, using the silicon light accelerator sensor based on interference of embodiment 1, and disposing the silicon light accelerator sensor on the surface of an object to be measured, including the following steps:

and introducing broadband light into the incident optical fiber 1, detecting the wavelength of the light of the emergent optical fiber 2, and determining the acceleration of the object to be detected according to the wavelength.

It should be noted that the relationship between the wavelength and the acceleration of the object to be measured needs to be obtained quantitatively in advance.

When aiming at the structure of two measurement positions, the acceleration measurement method comprises the following steps:

introducing broadband light into the incident optical fiber 1, and detecting the wavelengths of the light of the two emergent optical fibers 2;

if one of the emergent optical fibers 2 has light output, the other has no light output;

determining the acceleration of the object to be detected according to the wavelength of the output light;

if the two outgoing optical fibers 2 have light output, determining the acceleration of the object to be measured according to the average value of the wavelengths of the two outgoing light;

further, data inspection can be performed once, the two outgoing optical fibers 2 have light output, the wavelength difference of the two outgoing light is compared, and if the difference exceeds the error range, the measured data is not adopted.

In light of the foregoing description of the preferred embodiments according to the present application, it is to be understood that various changes and modifications may be made without departing from the spirit and scope of the invention. The technical scope of the present application is not limited to the contents of the specification, and must be determined according to the scope of the claims.