阅读说明：本技术 一种基于nv色心固态自旋的差分式加速度敏感装置 (Differential acceleration sensing device based on NV color center solid state spinning ) 是由 赵立业 季鲁敏 沈翔 刘伟铭 于 2021-05-25 设计创作，主要内容包括：一种基于NV色心固态自旋的差分式加速度敏感装置,包括对称结构,NV色心敏感模块和检测模块,对称结构包括磁源、弹性梁和对称基底,两个NV色心敏感模块分别固定在对称基底两侧突起部分垂直于z轴的表面。其工作原理为,当外界加速度作用时,对称结构中弹性梁发生形变,将加速度量转换为磁源沿x轴、y轴和z轴的三轴位移变化量,进而影响NV色心敏感模块处的磁场,使得NV色心电子自旋能级发生变化,利用检测模块的激光和微波实现NV色心自旋的极化和操纵,并通过读取NV色心释放的双路荧光信号,解算磁场信息,实现加速度的差分测量。本发明利用NV色心测磁灵敏度高的优点,通过对称结构的合理设计,实现了加速度的差分检测,提高了加速度测量精度。(A differential acceleration sensitive device based on NV color center solid spinning comprises a symmetrical structure, NV color center sensitive modules and a detection module, wherein the symmetrical structure comprises a magnetic source, an elastic beam and a symmetrical substrate, and the two NV color center sensitive modules are respectively fixed on the surfaces, perpendicular to a z axis, of protruding parts on two sides of the symmetrical substrate. The working principle of the device is that when external acceleration acts, an elastic beam in a symmetrical structure deforms, acceleration is converted into three-axis displacement variation of a magnetic source along an x axis, a y axis and a z axis, a magnetic field at an NV color center sensitive module is further influenced, the electron spinning energy level of the NV color center is changed, polarization and operation of NV color center spinning are achieved by laser and microwaves of a detection module, magnetic field information is resolved by reading a double-path fluorescence signal released by the NV color center, and differential measurement of the acceleration is achieved. The invention utilizes the advantage of high NV color center magnetic sensitivity, realizes the differential detection of the acceleration by reasonable design of a symmetrical structure, and improves the acceleration measurement precision.)

1. A difference formula acceleration sensing device based on NV color center solid state spin, its characterized in that: the device comprises a main body symmetrical structure, an NV color center sensitive module and a detection module;

the main body symmetrical structure comprises a magnetic source (1), an elastic beam (2) and a symmetrical substrate (3), wherein the magnetic source (1) is arranged at the upper end of the elastic beam (2), the bottom end of the elastic beam (2) is fixed in the middle of the bottom of the symmetrical substrate (3), so that the magnetic source is subjected to three-axis displacement change under the action of acceleration, and the elastic beam (2) and the magnetic source (1) are arranged along an array axis of the symmetrical substrate;

the NV color center sensitive modules are 2 and are respectively a NV color center sensitive module I (4 a) and a NV color center sensitive module II (4 b), the two NV color center sensitive modules are respectively fixed on protruding parts on two sides of a symmetrical substrate and are perpendicular to the surface of a z axis, when external acceleration acts, an elastic beam (2) in a symmetrical structure deforms, acceleration measurement is converted into three-axis displacement variable quantity of a magnetic source (1) along the x axis, the y axis or the z axis, a magnetic field at the NV color center sensitive module is further influenced, the NV color center electron spin energy level is changed, polarization and operation of NV color center spin are achieved by laser and microwave of the detection module, and magnetic field information is resolved by reading two-way fluorescent signals released by the NV color centers, and differential detection of three-axis acceleration is achieved;

the NV color center sensitive module comprises an optical fiber (12), a diamond NV color center (13), a reflecting film (14) and a microwave antenna (15); the optical fiber (12) is arranged above the diamond NV color center (13) and used for transmitting laser signals and fluorescence signals; the reflecting film (14) is fixed on the surface of the convex part on the two sides of the symmetrical substrate (3) which is vertical to the z axis and is used for reflecting a fluorescence signal emitted by the diamond NV color center (13) to the optical fiber (12); the diamond NV color center (13) is fixed at the central position of the upper surface of the reflecting film (14) and is used for sensing the change of a magnetic field; the microwave antenna (15) is closely adjacent to the NV color center (13) of the diamond, is fixed on the surface of the reflecting film (14) and is used for radiating microwaves;

the detection module comprises a circulator, an optical filter, a data processor (7), a photoelectric detector (8), a beam splitter (9), a laser source (10) and a microwave source (11), wherein the circulator comprises 2 optical filters (5 a) and a right circulator (5 b), the optical filters comprise 2 optical filters (6 a) and a right optical filter (6 b), the left circulator (5 a) and the right circulator (5 b) are connected with the photoelectric detector (8), the left circulator (5 a) is connected with the left optical filter (6 a), the right circulator (5 b) is connected with the right optical filter (6 b), the photoelectric detector (8) is connected with the data processor (7), the microwave source (11) is connected with a first NV color center sensitive module (4 a) and a second NV color center sensitive module (4 b), the microwave source sends out microwave signals and realizes energy level resonance by using the microwave antenna to act on the NV color center, the laser source (10) is connected with a beam splitter (9), and the beam splitter (9) is connected with the left circulator (5 a) and the right circulator (5 b);

the main body symmetrical structure converts the acceleration action quantity into displacement variation quantity of the magnetic source along an x axis, a y axis or a z axis, and fixes the NV color center sensitive module; the NV color center sensitive module converts the displacement variation of the magnetic source into fluorescence variation and is connected with the detection module; the detection module converts a magnetic field borne by the NV color center of the diamond into electric quantity and compensates environmental noise through differential processing.

2. The NV-colour-center solid-state-spin based differential acceleration sensitive device of claim 1, wherein: the symmetrical substrate (3) in the main body symmetrical structure is a concave structure symmetrical about a z axis, and the protruding parts on two sides are respectively provided with the NV color center sensitive module on the surface vertical to the z axis.

3. The NV-color-center-solid-spin-based differential acceleration sensitive device of claim 1, wherein: the diamond NV color center (13) is an NV color center ensemble, and the diamond surface in the positive direction of the z axis is processed into a solid hemispherical mirror structure through an etching technology.

4. The NV-colour-center solid-state-spin based differential acceleration sensitive device of claim 1, wherein: and a laser source of the detection module emits 532nm laser.

Technical Field

The invention relates to the field of inertial measurement, in particular to a differential acceleration sensing device based on NV color center solid spin.

Background

The inertial navigation is a completely autonomous, real-time and continuous passive navigation technology, and is widely applied to military and civil fields such as aviation, aerospace, navigation, surveying and mapping, traffic and the like.

At present, the performance of the traditional MEMS acceleration sensitive device is difficult to break through the limiting factors such as the material characteristics, the process technology and the like, and other high-precision acceleration sensitive devices or operation systems are complex, have large volumes and are difficult to miniaturize, or have high requirements on temperature, have high cost and are difficult to engineer in a short period. The diamond NV color center is a novel solid quantum system easy to realize optical control, a quantum sensing technology based on diamond NV color center spinning becomes a new direction in the field of precision measurement by the characteristics of high stability, high sensitivity and high spatial resolution at room temperature, and the diamond NV color center shaft hasThe symmetry can be used for measuring a vector magnetic field, so that the NV color center-based solid-state spin system sensitive acceleration is a feasible scheme for breaking through the technical bottleneck of the traditional acceleration sensitive device, and the magnetic suspension technology is considered to be used for realizing acceleration differential measurement, so that magnetic field interference is easy to introduce, the operation is complex, and further optimization is needed.

The characteristic of NV color center high sensitivity magnetism measurement is utilized, noise compensation of acceleration signal measurement is realized through a reasonably designed differential symmetrical structure, and the differential acceleration sensor is expected to become a new generation acceleration sensor with high precision, small volume and portability, and has considerable development prospect.

Disclosure of Invention

In order to solve the problems, the invention provides a differential acceleration sensing device based on NV color center solid spin, which realizes double-path detection and differential processing of acceleration signals through a symmetrical structure and can realize high-sensitivity measurement of acceleration information.

The invention provides a differential acceleration sensing device based on NV color center solid spin, which comprises a main body symmetrical structure, an NV color center sensing module and a detection module;

the main body symmetrical structure comprises a magnetic source, an elastic beam and a symmetrical substrate, wherein the magnetic source is arranged at the upper end of the elastic beam, the bottom end of the elastic beam is fixed in the middle of the bottom of the symmetrical substrate, so that the magnetic source generates three-axis displacement change under the action of acceleration, and the elastic beam and the magnetic source are arranged along an array axis of the symmetrical substrate;

the NV color center sensitive modules are 2 and are respectively an NV color center sensitive module I and an NV color center sensitive module II, the two NV color center sensitive modules are respectively fixed on protruding parts on two sides of a symmetrical substrate and are vertical to the surface of a z axis, when external acceleration acts, an elastic beam in a symmetrical structure deforms, acceleration measurement is converted into three-axis displacement variation of a magnetic source along the x axis, the y axis or the z axis, a magnetic field at the NV color center sensitive module is further influenced, the electronic spin energy level of the NV color center is changed, polarization and operation of NV color center spin are achieved by using laser and microwaves of a detection module, and by reading two-way fluorescent signals released by the NV color center, magnetic field information is resolved, and differential detection of three-axis acceleration is achieved;

the NV color center sensitive module comprises an optical fiber, a diamond NV color center, a reflecting film and a microwave antenna; the optical fiber is arranged above the NV color center of the corresponding diamond and is used for transmitting laser signals and fluorescence signals; the reflecting film is fixed on the surface of the convex parts on the two sides of the symmetrical substrate, which is vertical to the z axis, and is used for reflecting a fluorescent signal emitted by a diamond NV color center to the optical fiber; the diamond NV color center is fixed at the central position of the upper surface of the reflecting film and used for sensing the change of a magnetic field; the microwave antenna is close to the NV color center of the diamond, is fixed on the upper surface of the reflecting film and is used for radiating microwaves;

the detection module comprises circulators, optical filters, a data processor, photoelectric detectors, beam splitters, laser sources and microwave sources, wherein the circulators comprise 2 left circulators and right circulators respectively, the optical filters comprise 2 left optical filters and right optical filters respectively, the left circulators and the right circulators are connected with the photoelectric detectors, the left circulators are connected with the left optical filters, the right circulators are connected with the right optical filters, the photoelectric detectors are connected with the data processor, the microwave sources are connected with an NV color center sensitive module I and an NV color center sensitive module II, the microwave sources send microwave signals and act on the NV color centers of the diamonds through the microwave antennas to realize energy level resonance, the laser sources are connected with the beam splitters, and the beam splitters are connected with the left circulators and the right circulators;

the main body symmetrical structure converts the acceleration action quantity into displacement variation quantity of the magnetic source along an x axis, a y axis or a z axis, and fixes the NV color center sensitive module; the NV color center sensitive module converts the displacement variation of the magnetic source into fluorescence variation and is connected with the detection module; the detection module converts a magnetic field borne by the NV color center of the diamond into electric quantity and compensates environmental noise through differential processing.

Furthermore, in the main body symmetrical structure, the symmetrical substrate is in a concave structure symmetrical about the z axis, the protruding parts on the two sides are perpendicular to the surface of the z axis, and the NV color center sensitive modules are respectively arranged on the surfaces of the protruding parts on the two sides.

Furthermore, the NV color center of the diamond is an NV color center ensemble, the surface of the diamond along the positive direction of the z axis is processed into a solid hemispherical mirror structure by an etching technology, the NV color center of the diamond adopts the NV color center ensemble, and the surface of the diamond is a solid hemispherical mirror structure and is processed by the etching technology.

Further, the laser source of the detection module of the present invention emits 532nm laser, and 532nm laser is generally used.

As a further improvement of the present invention, in the main body symmetric structure, the symmetric substrate is a concave structure symmetric about the z-axis, and the protruding portions on both sides are perpendicular to the z-axis surface and are respectively provided with the NV color center sensitive modules; one end of the elastic beam is fixed at the bottom of the symmetrical substrate, and the other end of the elastic beam is connected with the magnetic source, so that the three-axis displacement change of the magnetic source under the acceleration action is realized; the elastic beam and the magnetic source are arranged along the array axis of the symmetrical substrate.

As a further improvement of the invention, the NV color center of the diamond is an NV color center ensemble, and the surface of the diamond along the positive direction of the z axis is processed into a solid hemispherical mirror structure by an etching technology to improve the photon collection efficiency.

As a further improvement of the invention, a laser source of the detection module emits 532nm laser, the laser is divided into two beams by a beam splitter, and the two beams respectively enter two circulators and are output to two NV color center sensitive modules to realize spin polarization on the NV color center of the diamond; the microwave source sends out a microwave signal and acts on the NV color center of the diamond through the microwave antenna to realize energy level resonance; the fluorescence signal emitted by the diamond NV color center is reflected by the reflector plate and enters the two circulators through the optical fiber, the laser is filtered by the two optical filters respectively and then reaches the photoelectric detector to realize double-path fluorescence signal detection, and the fluorescence signal is output to the data processor to realize differential denoising.

Compared with the prior art, the differential acceleration sensing device based on the NV color center solid spin has the following advantages: (1) the acceleration sensing structure utilizes the deformation of the elastic beam to convert the acceleration into the displacement change of the magnetic source along the x axis, the y axis or the z axis, thereby avoiding the magnetic field interference influence for suspending the magnetic source in the magnetic suspension design; (2) the acceleration sensing device designed by the invention is based on a diamond NV color center spin quantum system, and has smaller sensitive volume and large microminiaturization potential; (3) according to the NV color center sensitive module designed by the invention, the solid hemispherical mirror structure is designed, so that the fluorescence collection efficiency is improved, and the measurement sensitivity of the accelerometer is improved; (4) the detection module designed by the invention can compensate the environmental noise and improve the measurement precision of the accelerometer by simultaneously detecting two paths of signals and differentially processing the signals.

Drawings

Fig. 1 is a schematic diagram of an overall structure of the NV-color-center-based differential triaxial accelerometer.

The device comprises a magnetic source 1, an elastic beam 2, a symmetrical substrate 3, an NV color center sensitive module I4 a, an NV color center sensitive module II 4b, a left circulator 5a, a right circulator 5b, a left optical filter 6a, a right optical filter 6b, a data processor 7, a photoelectric detector 8, a beam splitter 9, a laser source 10 and a microwave source 11.

FIG. 2 is a schematic diagram of the NV color center sensitive module.

Wherein 12 is an optical fiber, 13 is a diamond NV color center, 14 is a reflecting film, and 15 is a microwave antenna.

Detailed Description

The invention is described in further detail below with reference to the following detailed description and accompanying drawings:

the invention provides a differential acceleration sensing device based on NV color center solid spin, which realizes double-path detection and differential processing of acceleration signals through a main body symmetrical structure and can realize high-sensitivity measurement of acceleration information.

A differential acceleration sensitive device based on NV color center solid spinning comprises a main body symmetric structure, a detection module, a NV color center sensitive module I4 a and a NV color center sensitive module II 4 b. The main body symmetrical structure comprises a magnetic source 1, an elastic beam 2 and a symmetrical substrate 3; the detection module comprises a left circulator 5a, a right circulator 5b, a left optical filter 6a, a right optical filter 6b, a data processor 7, a photoelectric detector 8, a beam splitter 9, a laser source 10 and a microwave source 11; the NV color center sensitive module comprises an optical fiber 12, a diamond NV color center 13, a reflecting film 14 and a microwave antenna 15.

The working principle of the device is that when external acceleration acts, an elastic beam in a main body symmetrical structure deforms, acceleration is converted into three-axis displacement variation of a magnetic source along an x axis, a y axis or a z axis, a magnetic field at an NV color center sensitive module is further influenced, the electron spinning energy level of the NV color center is changed, polarization and operation of NV color center spinning are achieved by laser and microwaves of a detection module, magnetic field information is resolved by reading a double-path fluorescent signal released by the NV color center, and differential detection of three-axis acceleration is achieved.

The main body symmetrical structure converts the acceleration action quantity into displacement variable quantity of the magnetic source along an x axis, a y axis or a z axis, and fixes the NV color center sensitive module; the NV color center sensitive module converts the displacement variation of the magnetic source into the fluorescence variation and is connected with the detection module; the detection module converts the fluorescence variation emitted by the NV color center of the diamond into electrical quantity, and compensates the environmental noise through differential processing.

Referring to fig. 1, the symmetric substrate in the main symmetric structure is a concave structure symmetric about the z-axis, and the protruding portions on both sides are perpendicular to the z-axis surface and respectively provided with NV color center sensitive modules; one end of the elastic beam is fixed at the bottom of the substrate, and the other end of the elastic beam is connected with the magnetic source and is used for realizing displacement change of the magnetic source under the action of acceleration; the magnetic source is a permanent magnet or an electrified coil; the elastic beam and the magnetic source are arranged along the array axis of the symmetrical substrate.

With reference to fig. 2, the NV color center sensitive module includes an optical fiber for transmitting the laser signal and the fluorescence signal; the end part of the optical fiber is processed into an optical fiber cone for enhancing the fluorescence coupling of the diamond NV color center and the optical fiber; the reflecting film is fixed on the upper surfaces of the convex parts on the two sides of the symmetrical substrate and is used for reflecting fluorescence emitted by the NV color center to the optical fiber; the diamond NV color center is fixed at the central position of the upper surface of the reflecting film and is used for sensing the change of a magnetic field; the microwave antenna is close to the NV color center of the diamond and is fixed on the upper surface of the reflecting film.

The NV color center of the diamond is an NV color center ensemble, the upper half part along the positive direction of the z axis is hemispherical, the lower half part can be cylindrical, the diameter of the cylindrical upper surface circle and the cylindrical lower surface circle is equal to that of the hemispherical lower surface circle, the lower half part can also be a cuboid, the upper surface and the lower surface of the cuboid are square, and the side length of the square is equal to that of the hemispherical lower surface circle; the upper half part of the hemispherical structure is a solid hemispherical mirror, and is processed by an etching technology to overcome total reflection in the NV color center structure of the diamond and improve the photon collection efficiency of the fluorescence emitted by the NV color center; the microwave antenna is an omega-shaped antenna and is used for radiating microwaves with proper frequency to resonate with the NV color center level of the diamond.

With reference to fig. 1, in the detection module, a laser source emits 532nm laser, the laser is divided into two beams by a beam splitter, and the two beams enter a circulator respectively and are output to an NV color center sensitive module to realize spin polarization on an NV color center of a diamond; the microwave source sends out a microwave signal and acts on the NV color center of the diamond through the microwave antenna to realize energy level resonance; fluorescence signals emitted by the NV color center of the diamond are reflected by the reflector plate and enter the two circulators through the optical fiber, are filtered by the two optical filters respectively, reach the photoelectric detector to realize fluorescence signal detection, and are output to the data processor to realize differential denoising.

When the acceleration acts, the elastic beam deforms to convert the acceleration into displacement change of the magnetic source, so that a magnetic field at the NV color center sensitive module changes; spin-polarizing the NV color center of the diamond by using 532nm laser, and controlling the NV color center of the diamond to turn over at the energy level by using resonance frequency microwave; and reading a double-path fluorescent signal released by the NV color center through the detection module, inputting the double-path fluorescent signal into the data processor for differential processing, and resolving NV color center energy level splitting information caused by magnetic field change so as to realize differential detection of acceleration.

The above description is only one of the preferred embodiments of the present invention, and is not intended to limit the present invention in any way, but any modifications or equivalent variations made in accordance with the technical spirit of the present invention are within the scope of the present invention as claimed.