阅读说明：本技术 一种基于磁光效应的加速度传感器 (Acceleration sensor based on magneto-optical effect ) 是由 不公告发明人 于 2020-08-05 设计创作，主要内容包括：本发明提供了一种基于磁光效应的加速度传感器,磁性材料层置于基底上。凹槽设置在磁性材料层的表面,凹槽为一维周期性结构。弹性材料部设置于凹槽的底部,贵金属材料部的底部设置在凹槽内、弹性材料部的上面,贵金属材料部的顶部突出磁性材料层。应用时,入射光倾斜照射贵金属材料部,探测贵金属材料部的反射光,根据磁光效应的强度变化确定加速度探测。探测加速度时,贵金属材料部挤压弹性材料部,贵金属材料部相对于磁性材料层产生移动,增强了磁光效应,本传感器具有加速度探测灵敏度高的优点。(The invention provides an acceleration sensor based on a magneto-optical effect. The grooves are arranged on the surface of the magnetic material layer and are of one-dimensional periodic structures. The elastic material part is arranged at the bottom of the groove, the bottom of the noble metal part is arranged in the groove and above the elastic material part, and the top of the noble metal part protrudes out of the magnetic material layer. When the device is applied, incident light obliquely irradiates the noble metal material part, reflected light of the noble metal material part is detected, and acceleration detection is determined according to the intensity change of the magneto-optical effect. When the acceleration is detected, the elastic material part is extruded by the noble metal material part, the noble metal material part moves relative to the magnetic material layer, the magneto-optical effect is enhanced, and the sensor has the advantage of high acceleration detection sensitivity.)

1. Acceleration sensor based on the magneto-optical effect, characterized in that it comprises: the magnetic material layer is arranged on the substrate, the groove is formed in the surface of the magnetic material layer and is of a one-dimensional periodic structure, the elastic material portion is arranged at the bottom of the groove, the bottom of the precious metal portion is arranged in the groove and above the elastic material portion, and the top of the precious metal portion protrudes out of the magnetic material layer.

2. Acceleration sensor based on magneto-optical effect, according to claim 1, characterized in that: the groove penetrates through the magnetic material layer.

3. Acceleration sensor based on magneto-optical effect, according to claim 2, characterized in that: the cross section of the groove is rectangular.

4. Acceleration sensor based on magneto-optical effect, according to claim 3, characterized in that: further comprising a protrusion disposed on top of the noble metal material portion.

5. Acceleration sensor based on magneto-optical effect, according to claim 4, characterized in that: the width of the protruding portion is larger than the width of the noble metal material portion.

6. Acceleration sensor based on magneto-optical effect, according to any of the claims 1-5, characterized in that: the magnetic material layer is made of a magnetic medium.

7. Acceleration sensor based on magneto-optical effect, according to claim 6, characterized in that: the magnetic medium is bismuth iron garnet.

8. Acceleration sensor based on magneto-optical effect, according to claim 7, characterized in that: the material of the noble metal material part is noble metal.

9. Acceleration sensor based on magneto-optical effect, according to claim 8, characterized in that: the noble metal is gold or silver.

10. Acceleration sensor based on magneto-optical effect, according to claim 9, characterized in that: the material of the protruding part is noble metal.

Technical Field

The invention relates to the field of acceleration sensing, in particular to an acceleration sensor based on a magneto-optical effect.

Background

The acceleration sensor relates to many fields of aviation, aerospace and industry, and has important application. Traditional acceleration sensing is based on a cantilever beam and has low detection sensitivity. The exploration of an acceleration sensing technology based on a new principle has important application to the promotion of acceleration sensing.

Disclosure of Invention

To solve the above problems, the present invention provides an acceleration sensor based on the magneto-optical effect. As shown in fig. 1, the magnetic material comprises a substrate, a magnetic material layer, a groove, an elastic material part and a noble metal material part. The magnetic material layer is disposed on the substrate. The grooves are arranged on the surface of the magnetic material layer and are of one-dimensional periodic structures. The elastic material part is arranged at the bottom of the groove, the bottom of the noble metal part is arranged in the groove and above the elastic material part, and the top of the noble metal part protrudes out of the magnetic material layer.

Further, the groove penetrates the magnetic material layer.

Further, the cross-section of the groove is rectangular.

Still further, the noble metal material portion includes a protruding portion provided on a top portion thereof.

Further, the width of the protruding portion is larger than the width of the noble metal material portion.

Furthermore, the material of the magnetic material layer is a magnetic medium.

Further, the magnetic medium is bismuth iron garnet.

Further, the material of the noble metal material portion is a noble metal.

Further, the noble metal is gold or silver.

Further, the material of the protrusion is a noble metal.

The invention has the beneficial effects that: the invention provides an acceleration sensor based on a magneto-optical effect. The grooves are arranged on the surface of the magnetic material layer and are of one-dimensional periodic structures. The elastic material part is arranged at the bottom of the groove, the bottom of the noble metal part is arranged in the groove and above the elastic material part, and the top of the noble metal part protrudes out of the magnetic material layer. When the device is used, incident light obliquely irradiates the noble metal material part, reflected light of the noble metal material part is detected, magneto-optical effect intensity is determined according to the reflected light, acceleration to be detected is determined according to the magneto-optical effect intensity, and detection of the magneto-optical effect intensity is achieved. When the acceleration is detected, the elastic material part is extruded by the precious metal material part, the precious metal material part moves relative to the magnetic material layer, the relative area between the precious metal material part and the magnetic material layer is increased, the effect of the magnetic material layer on surface plasmon of the precious metal material part is enhanced, the dielectric environment around the precious metal material part is changed, the magneto-optical effect is enhanced under the two aspects of effects, the strength of the magneto-optical effect is greatly changed, and therefore the sensor has the advantage of high acceleration detection sensitivity.

The present invention will be described in further detail below with reference to the accompanying drawings.

Drawings

Fig. 1 is a schematic diagram of an acceleration sensor based on the magneto-optical effect.

Fig. 2 is a schematic diagram of yet another acceleration sensor based on the magneto-optical effect.

In the figure: 1. a substrate; 2. a magnetic material layer; 3. a groove; 4. an elastic material portion; 5. a noble metal material portion; 6. a protrusion.

Detailed Description

To further explain the technical means and effects of the present invention adopted to achieve the intended purpose, the following detailed description of the embodiments, structural features and effects of the present invention will be made with reference to the accompanying drawings and examples.