阅读说明：本技术 一种单晶炉用碳碳复合材料籽晶夹头 (Carbon-carbon composite material seed crystal chuck for single crystal furnace ) 是由 张丹 师磊辉 侯光远 于 2020-08-21 设计创作，主要内容包括：本发明公开了一种单晶炉用碳碳复合材料籽晶夹头,涉及单晶棒制备技术领域,该单晶炉用碳碳复合材料籽晶夹头,包括夹头本体和螺纹连接孔,所述螺纹连接孔开设于夹头本体的内部上方,所述夹头本体的内部下方开设有用于固定籽晶的籽晶定位孔,夹头本体与籽晶之间通过渐缩的籽晶定位孔定位相连,定位同心度高,且受力均匀,使籽晶不易折断；利用碳碳复合材料制成的夹头本体,其能够有效地防止杂质进入到熔融状态的多晶硅中,进而提高单晶硅的成晶率。(The invention discloses a carbon-carbon composite material seed chuck for a single crystal furnace, which relates to the technical field of single crystal rod preparation, and comprises a chuck body and a threaded connecting hole, wherein the threaded connecting hole is formed in the upper part inside the chuck body; the chuck body made of the carbon-carbon composite material can effectively prevent impurities from entering polycrystalline silicon in a molten state, and further improve the crystallization rate of monocrystalline silicon.)

1. A carbon-carbon composite material seed crystal chuck for a single crystal furnace is characterized in that: the chuck comprises a chuck body (2) and a threaded connecting hole (22), wherein the threaded connecting hole (22) is arranged above the inside of the chuck body (2), and a seed crystal positioning hole (23) for fixing a seed crystal is formed below the inside of the chuck body (2).

2. A carbon-carbon composite material seed chuck for a single crystal furnace as claimed in claim 1, wherein: the threaded connecting hole (22) is communicated with the seed crystal positioning hole (23), and the outer wall of the chuck body (2) is positioned between the threaded connecting hole (22) and the seed crystal positioning hole (23) and is provided with an air vent (21).

3. A carbon-carbon composite material seed chuck for a single crystal furnace as claimed in claim 2, wherein: the diameter of the threaded connecting hole (22) is larger than or equal to that of the first positioning hole (231).

4. A carbon-carbon composite material seed chuck for a single crystal furnace as claimed in claim 3, wherein: the seed crystal positioning hole (23) comprises a first positioning hole (231), a conical transition hole (232) and a second positioning hole (233), the first positioning hole (231), the conical transition hole (232) and the second positioning hole (233) are sequentially communicated from top to bottom, the central axes of the first positioning hole (231), the conical transition hole (232) and the second positioning hole (233) coincide, and the bottom of the second positioning hole (233) is flush with the bottom of the chuck body (2).

5. A carbon-carbon composite material seed chuck for a single crystal furnace as claimed in claim 4, wherein: the cross sections of the first positioning hole (231) and the second positioning hole (233) are circular, and the diameter of the first positioning hole (231) is larger than that of the second positioning hole (233).

6. A carbon-carbon composite material seed chuck for a single crystal furnace as claimed in claim 5, wherein: the diameter of the cross section of the top of the tapered transition hole (232) is consistent with that of the first positioning hole (231), and the diameter of the cross section of the bottom of the tapered transition hole (232) is consistent with that of the second positioning hole (233).

7. A carbon-carbon composite material seed chuck for a single crystal furnace as claimed in claim 6, wherein: the central axis of the seed crystal positioning hole (23) and the central axis of the threaded connecting hole (22) are coincided with the central axis of the chuck body (2).

8. A carbon-carbon composite material seed chuck for a single crystal furnace as claimed in claim 7, wherein: the lower part of the chuck body (2) is of a circular truncated cone structure, the diameter of the chuck body (2) of the circular truncated cone structure is gradually increased from bottom to top, and the chuck body (2) is made of a carbon-carbon composite material.

Technical Field

The invention belongs to the technical field of single crystal rod preparation, and particularly relates to a carbon-carbon composite material seed crystal chuck for a single crystal furnace.

Background

At present, most of single crystal silicon is manufactured by the Chondry-Lai-Bass method, also called Czochralski method, in a Czochralski single crystal furnace, a silicon single crystal (called seed crystal) with a specific crystal orientation is introduced into a crucible containing molten polycrystalline silicon to be contacted with polycrystalline silicon melt as a non-uniform crystal nucleus, then the seed crystal is rotated and slowly pulled upwards by controlling a thermal field, the silicon melt between the seed crystal and the solid-liquid interface of the silicon melt is cooled into a solid silicon single crystal due to the thermal stress generated by axial and radial temperature gradients and the surface tension of the melt, and the required target diameter of a single crystal rod can be obtained by adjusting the heating power.

However, during the process of pulling single crystal by a single crystal furnace, the seed crystal is easy to break, and during the growth of the single crystal silicon, impurities in components around the seed crystal (seed chuck) and oxides formed at high temperature are easy to fall into the polycrystalline silicon in a molten state, so that the single crystal silicon is polluted, and meanwhile, dislocation or edge breakage of a single crystal silicon rod can be caused.

Disclosure of Invention

The invention aims to provide a carbon-carbon composite material seed chuck for a single crystal furnace, which aims to solve the problems in the background technology.

The technical scheme adopted by the invention is as follows:

the carbon-carbon composite material seed chuck for the single crystal furnace comprises a chuck body and a threaded connecting hole, wherein the threaded connecting hole is formed in the upper portion inside the chuck body, and a seed crystal positioning hole used for fixing a seed crystal is formed in the lower portion inside the chuck body.

Preferably, the threaded connecting hole is communicated with the seed crystal positioning hole, and the outer wall of the chuck body is positioned between the threaded connecting hole and the seed crystal positioning hole and is provided with an air vent.

Preferably, the diameter of the threaded connection hole is greater than or equal to the diameter of the first positioning hole.

Preferably, the seed crystal positioning hole comprises a first positioning hole, a conical transition hole and a second positioning hole, the first positioning hole, the conical transition hole and the second positioning hole are sequentially communicated from top to bottom, the central axes of the first positioning hole, the conical transition hole and the second positioning hole are coincided, and the bottom of the second positioning hole is flush with the bottom of the chuck body.

Preferably, the cross sections of the first positioning hole and the second positioning hole are both circular, and the diameter of the first positioning hole is larger than that of the second positioning hole.

Preferably, the diameter of the cross section of the top of the tapered transition hole is consistent with the diameter of the first positioning hole, and the diameter of the cross section of the bottom of the tapered transition hole is consistent with the diameter of the second positioning hole.

Preferably, the central axis of the seed crystal positioning hole and the central axis of the threaded connecting hole are coincided with the central axis of the chuck body.

Preferably, the lower part of the chuck body is of a circular truncated cone structure, the diameter of the chuck body of the circular truncated cone structure is gradually increased from bottom to top, and the chuck body is made of a carbon-carbon composite material.

In summary, due to the adoption of the technical scheme, the invention has the beneficial effects that:

in the invention, the chuck body is connected with the seed crystal in a positioning way through the gradually reduced seed crystal positioning hole, the positioning concentricity is high, the stress is uniform, and the seed crystal is not easy to break;

the chuck body made of the carbon-carbon composite material can effectively prevent impurities from entering polycrystalline silicon in a molten state, so that the crystallization rate of monocrystalline silicon is improved;

the heat-insulating material has excellent heat-insulating property, higher strength and better toughness, is not easy to break, can effectively reduce the production energy consumption and prolong the service life of equipment, thereby reducing the cost of the whole production.

Drawings

FIG. 1 is a front view of the present invention;

FIG. 2 is a cross-sectional view of the chuck body in accordance with the present invention;

in the figure: 2. a chuck body; 21. air holes are formed; 22. connecting a threaded hole; 23. seed crystal positioning holes; 231. a first positioning hole; 232. a tapered transition hole; 233. and a second positioning hole.

Detailed Description

In order to make the objects, technical solutions and advantages of the present invention more apparent, the present invention is described in further detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the invention and are not intended to limit the invention.

Referring to fig. 1-2, a carbon-carbon composite material seed chuck for a single crystal furnace comprises a chuck body 2 and a threaded connection hole 22, wherein the threaded connection hole 22 is formed in the upper portion inside the chuck body 2, and a seed crystal positioning hole 23 for fixing a seed crystal is formed in the lower portion inside the chuck body 2.

Further, the threaded connection hole 22 is communicated with the seed crystal positioning hole 23, and the outer wall of the chuck body 2 is positioned between the threaded connection hole 22 and the seed crystal positioning hole 23 and is provided with an air vent 21.

Further, the diameter of the screw coupling hole 22 is greater than or equal to the diameter of the first positioning hole 231.

Further, the seed crystal positioning hole 23 includes a first positioning hole 231, a tapered transition hole 232 and a second positioning hole 233, the first positioning hole 231, the tapered transition hole 232 and the second positioning hole 233 are sequentially communicated from top to bottom, the central axes of the first positioning hole 231, the tapered transition hole 232 and the second positioning hole 233 are overlapped, and the bottom of the second positioning hole 233 is flush with the bottom of the chuck body 2.

Specifically, the cross sections of the first positioning hole 231 and the second positioning hole 233 are both circular, and the diameter of the first positioning hole 231 is larger than that of the second positioning hole 233.

Specifically, the cross-sectional diameter of the top of the tapered transition hole 232 corresponds to the diameter of the first positioning hole 231, and the cross-sectional diameter of the bottom of the tapered transition hole 232 corresponds to the diameter of the second positioning hole 233.

Specifically, the central axis of the seed crystal positioning hole 23 and the central axis of the threaded connection hole 22 coincide with the central axis of the chuck body 2.

Specifically, the lower part of the chuck body 2 is of a circular truncated cone structure, the diameter of the chuck body 2 of the circular truncated cone structure is gradually increased from bottom to top, and the chuck body 2 is made of a carbon-carbon composite material.

The chuck body 2 is connected with the seed crystal in a positioning way through the gradually reduced seed crystal positioning hole 23, the positioning concentricity is high, the stress is uniform, and the seed crystal is not easy to break;

the chuck body 2 is made of carbon-carbon composite material,

compared with a seed crystal chuck made of metal materials in the prior art, the seed crystal chuck can effectively prevent impurities from entering polycrystalline silicon in a molten state, and further improve the crystallization rate of monocrystalline silicon;

compared with a seed chuck made of graphite, the seed chuck has the advantages of excellent heat insulation performance, higher strength, better toughness, difficult breakage, effective reduction of production energy consumption and improvement of the service life of equipment.

The chuck body 2 is suspended in a single crystal furnace system for manufacturing a single crystal silicon by the czochralski method, the seed crystal determines the crystal orientation of the silicon single crystal, and the chuck body 2 bears the weight of the silicon single crystal and performs the pulling and rotating functions in the process of pulling the single crystal.