Semiconductor chip

文档序号：1157641 发布日期：2020-09-15 浏览：41次中文

阅读说明：本技术 半导体芯片 (Semiconductor chip ) 是由崔善明朴珉秀于 2019-10-18 设计创作，主要内容包括：一种半导体芯片包括第一半导体器件和第二半导体器件。第一半导体器件包括错误检测电路。第二半导体器件与第一半导体器件层叠并且经由第一穿通电极和第二穿通电极电连接到第一半导体器件。第一半导体器件和第二半导体器件被配置为根据操作模式而经由第二穿通电极来接收或输出第一数据和第二数据,并且被配置为使用错误检测电路来检测第一数据的错误和第二数据的错误。(A semiconductor chip includes a first semiconductor device and a second semiconductor device. The first semiconductor device includes an error detection circuit. The second semiconductor device is stacked with the first semiconductor device and electrically connected to the first semiconductor device via the first through electrode and the second through electrode. The first and second semiconductor devices are configured to receive or output first and second data via the second through electrode according to an operation mode, and configured to detect an error of the first data and an error of the second data using an error detection circuit.)

1. A semiconductor chip, comprising:

a first semiconductor device including an error detection circuit; and

a second semiconductor device stacked with the first semiconductor device and electrically connected with the first semiconductor device via a first through electrode and a second through electrode,

wherein the first and second semiconductor devices are configured to receive or output first and second data via the second through electrode according to an operation mode, and configured to detect an error of the first data and an error of the second data using an error detection circuit.

2. The semiconductor chip of claim 1, wherein:

the operating mode comprises one of a first write operation, a first read operation, a second write operation, and a second read operation;

performing the first write operation to store the first data output by the first semiconductor device into the second semiconductor device;

performing the first read operation to output the second data output by the second semiconductor device to an external apparatus;

performing the second write operation to store external data provided by the external device into the first semiconductor device; and

performing the second read operation to output the internal data stored in the first semiconductor device to the external device.

3. The semiconductor chip of claim 1, wherein during a first write operation:

the first semiconductor device is configured to generate first data from first external data provided by an external apparatus, and to detect an error of the first data using the error detection circuit; and

the second semiconductor device is configured to store first internal data generated from the first data.

4. The semiconductor chip of claim 1, wherein during a first read operation:

the second semiconductor device is configured to output second internal data stored in the second semiconductor device as the second data via the second through electrode; and

the first semiconductor device is configured to detect an error of the second data using the error detection circuit, and to output the second data as second external data.

5. The semiconductor chip of claim 1, wherein during a second write operation, the first semiconductor device is configured to:

generating the first data from third external data provided by an external device;

detecting an error of the first data using the error detection circuit; and

third internal data generated from the third external data is stored.

6. The semiconductor chip of claim 1, wherein during a second read operation, the first semiconductor device is configured to:

generating the first data from fourth internal data stored in the first semiconductor device;

detecting an error of the first data using the error detection circuit; and

outputting fourth external data generated from the fourth internal data to an external device.

7. The semiconductor chip of claim 1, wherein the first semiconductor device further comprises:

a control circuit configured to:

outputting the enable signal, the first and second write control signals, the first and second read control signals, and the select signal to the second semiconductor device via the first through electrode;

a first input/output (I/O) circuit configured to:

electrically connecting the second pass electrode to a first pass I/O line and a second pass I/O line; and

receiving or outputting the first data and the second data through the second through electrode; and a first path control circuit configured to:

generating the first data from first external data provided from an external device to output the first data to the first transfer I/O line based on the enable signal, the first and second write control signals, the first and second read control signals, and the select signal during a first write operation;

generating second external data from the second data loaded on the first transmission I/O line to output the second external data to the external device based on the enable signal, the first and second write control signals, the first and second read control signals, and the select signal during a first read operation;

generating the first data from third external data provided by the external device to output the first data to the first transfer I/O line and generate first internal data from the third external data, based on the enable signal, the first and second write control signals, the first and second read control signals, and the select signal, during a second write operation;

generating the first data from second internal data to output the first data to the first transfer I/O line and fourth external data from the second internal data to output the fourth external data to the external device based on the enable signal, the first and second write control signals, the first and second read control signals, and the select signal during a second read operation,

wherein the error detection circuit is configured to detect an error of the first data and an error of the second data loaded on the first transmission I/O line, generate a detection signal, and output the detection signal to the external device.

8. The semiconductor chip of claim 7, wherein the control circuit comprises:

a register configured to generate a mode enable signal, a first write mode signal, a second write mode signal, a third write mode signal, a first read mode signal, a second read mode signal, and a third read mode signal, and a reset signal, the mode enable signal including information on the operation mode; and

a control signal generation circuit configured to generate the enable signal, the first and second write control signals, the first and second read control signals, and the selection signal, one of which is selectively enabled according to a logic level combination of the mode enable signal, the first write mode signal, the second write mode signal, the third write mode signal, the first read mode signal, the second and third read mode signals, and the reset signal.

9. The semiconductor chip of claim 8, wherein the control signal generation circuit comprises:

an enable signal generation circuit configured to delay the mode enable signal to generate the enable signal;

a transfer control signal generation circuit configured to generate a transfer control signal that is enabled when the first read mode signal is input to the transfer control signal generation circuit and disabled when the first write mode signal is input to the transfer control signal generation circuit;

a write control signal generation circuit configured to generate the first write control signal and the second write control signal, one of the first write control signal and the second write control signal being selectively enabled according to a logic level combination of the enable signal, the second write mode signal, and the third write mode signal when the transfer control signal is disabled; and

a read control signal generation circuit configured to generate the first read control signal or the second read control signal, the first read control signal or the second read control signal being selectively enabled according to a logic level combination of the mode enable signal, the second read mode signal, and the third read mode signal, and configured to generate the selection signal, the selection signal being enabled when the mode enable signal is disabled and the transfer control signal is enabled.

10. The semiconductor chip of claim 7, wherein the first path control circuit comprises:

a first write path control circuit configured to:

generating the first data from the first external data to output the first data to the first transfer I/O line or generating the first data from the third external data to output the first data to the first transfer I/O line according to the enable signal and the first and second write control signals; and

inversely buffering the third external data to generate the first internal data; and

a first read path control signal configured to: inverting and buffering the second data loaded on the first transmission I/O line according to the selection signal and the first and second read control signals to output the inverted and buffered data of the second data as the second external data or output the second internal data as the fourth external data.

11. The semiconductor chip of claim 1, wherein the second semiconductor device comprises:

a second I/O circuit configured to:

electrically connecting the second pass electrode to a third transmit I/O line and a fourth transmit I/O line; and

receiving or outputting the first data and the second data through the second through electrode; and

a second path control circuit configured to:

generating third internal data from the first data input through the third transfer I/O line during a first write operation; and

outputting fourth internal data as the second data through the third transfer I/O line during a first read operation according to an enable signal, first and second write control signals, first and second read control signals, and a select signal.

12. The semiconductor chip of claim 11, wherein the second path control circuit comprises:

a second write path control circuit configured to output the first data loaded on the third transfer I/O line as the third internal data according to the enable signal and the first and second write control signals; and

a second read path control signal configured to output the fourth internal data to the third transmission I/O line to generate the second data according to the selection signal and the first and second read control signals.

13. A semiconductor chip, comprising:

a first semiconductor device including a first error detection circuit; and

a second semiconductor device including a second error detection circuit, wherein the second semiconductor device is stacked with the first semiconductor device and electrically connected with the first semiconductor device via a first through electrode and a second through electrode;

wherein the first and second semiconductor devices are configured to receive or output first and second data via the second through electrode during a first write operation and a first read operation, and configured to detect an error of the first data and an error of the second data using the first and second error detection circuits.

14. The semiconductor chip of claim 13, wherein during the first write operation:

the first semiconductor device is configured to generate first data from first external data provided by an external apparatus, and to detect an error of the first data using the first error detection circuit; and

the second semiconductor device is configured to store first internal data generated from the first data, and is configured to detect an error of the first data using the second error detection circuit.

15. The semiconductor chip of claim 13, wherein during the first read operation:

the second semiconductor device is configured to output second internal data stored in the second semiconductor device as the second data via the second through electrode, and to detect an error of the second data using the second error detection circuit; and

the first semiconductor device is configured to detect an error of the second data using the first error detection circuit, and to output the second data as second external data.

16. The semiconductor chip of claim 13, wherein during a second write operation, the first semiconductor device is configured to:

generating the first data from third external data provided by an external device;

detecting an error of the first data using the first error detection circuit; and

third internal data generated from the third external data is stored.

17. The semiconductor chip of claim 13, wherein during a second read operation, the first semiconductor device is configured to:

generating the first data from fourth internal data stored in the first semiconductor device;

detecting an error of the first data using the first error detection circuit; and

outputting fourth external data generated from the fourth internal data to an external device.

18. The semiconductor chip of claim 13, wherein said first semiconductor device further comprises:

a control circuit configured to:

generating an enable signal, first and second write control signals, first and second read control signals, and a select signal, one of the signals being selectively enabled according to the first write operation, the first read operation, the second write operation, and the second read operation; and

a first input/output (I/O) circuit configured to:

electrically connecting the second pass electrode to a first pass I/O line and a second pass I/O line; and

receiving or outputting the first data and the second data through the second through electrode; and

a first path control circuit configured to:

wherein the first error detection circuit is configured to detect an error of the first data and an error of the second data loaded on the first transmission I/O line to generate a first detection signal, and to output the first detection signal to the external device.

19. The semiconductor chip of claim 18, wherein the control circuit comprises:

20. The semiconductor chip of claim 19, wherein the control signal generation circuit comprises:

an enable signal generation circuit configured to delay the mode enable signal to generate the enable signal;

21. The semiconductor chip of claim 18, wherein the first path control circuit comprises:

a first write path control circuit configured to:

inversely buffering the third external data to generate the first internal data; and

22. The semiconductor chip of claim 13, wherein said second semiconductor device further comprises:

a second I/O circuit configured to:

electrically connecting the second pass electrode to a third transmit I/O line and a fourth transmit I/O line; and

receiving or outputting the first data and the second data through the second through electrode; and

a second path control circuit configured to:

outputting the first data to the third transmit I/O line during the first write operation; and

outputting the second data loaded on the third transfer I/O line through the second through electrode during the first read operation according to an enable signal, first and second write control signals, first and second read control signals, and a select signal input through the first through electrode,

wherein the second error detection circuit is configured to detect an error of the first data and an error of the second data loaded on the third transfer I/O line to generate a second detection signal, and to output the second detection signal to an external device.

23. The semiconductor chip of claim 22, wherein the second path control circuit comprises:

a second write path control circuit configured to output the first data loaded on the second transfer I/O line as third internal data according to the enable signal and the first and second write control signals; and

a second read path control signal configured to output fourth internal data to the third transmission I/O line to generate the second data according to the selection signal and the first and second read control signals.

Technical Field

Embodiments of the present disclosure relate to a semiconductor chip that detects an error of data received or output via a through electrode.

Background

Recently, various designs for receiving or outputting multi-bit data during each clock cycle have been used to increase the operating speed of semiconductor devices. If the data transfer speed of the semiconductor device becomes faster, the possibility of an error occurring when transferring data in the semiconductor device increases. This can cause reliability problems during data transmission.

An error code capable of detecting the occurrence of an error may be generated and transmitted together with data whenever the data is transmitted in the semiconductor device to improve the reliability of data transmission. The error codes may include cyclic redundancy check and Error Detection Codes (EDCs) capable of detecting errors and Error Correction Codes (ECCs) capable of correcting errors.

Recently, three-dimensional semiconductor chips have been developed to increase the integration density of memories. Each of the three-dimensional semiconductor chips may be implemented by vertically stacking a plurality of semiconductor devices to achieve maximum integration density over a limited area.

Each three-dimensional semiconductor chip may be implemented using a through-silicon via (TSV) technology that electrically connects all stacked semiconductor devices to each other using a TSV that vertically penetrates the semiconductor devices. Therefore, the three-dimensional semiconductor chip manufactured using the TSV can reduce a package area compared to the three-dimensional semiconductor chip manufactured using the bonding wire.

Disclosure of Invention

According to one embodiment, a semiconductor chip includes a first semiconductor device and a second semiconductor device. The first semiconductor device includes an error detection circuit. The second semiconductor device is stacked with the first semiconductor device and electrically connected with the first semiconductor device via the first through electrode and the second through electrode. The first and second semiconductor devices are configured to receive or output first and second data via the second through electrode according to an operation mode, and configured to detect an error of the first data and an error of the second data using an error detection circuit.

According to another embodiment, a semiconductor chip includes a first semiconductor device and a second semiconductor device. The first semiconductor device includes a first error detection circuit. The second semiconductor device includes a second error detection circuit. The second semiconductor device is stacked with the first semiconductor device and electrically connected with the first semiconductor device via the first through electrode and the second through electrode. The first and second semiconductor devices are configured to receive or output first and second data via the second through electrode during a first write operation and a first read operation, and configured to detect an error of the first data and an error of the second data using the first and second error detection circuits.

Drawings

Fig. 1 is a block diagram illustrating a configuration of a semiconductor chip according to one embodiment of the present disclosure.

Fig. 2 is a block diagram showing a configuration of a control circuit included in the semiconductor chip of fig. 1.

Fig. 3 is a circuit diagram showing a configuration of a control signal generation circuit included in the control circuit of fig. 2.

Fig. 4 is a graph showing logic levels of signals generated by a register and a control signal generation circuit included in the control circuit of fig. 2 according to an operation mode of the semiconductor chip of fig. 1.

Fig. 5 is a circuit diagram showing a configuration of a first path control circuit included in the semiconductor chip of fig. 1.

Fig. 6 is a circuit diagram showing a configuration of a second path control circuit included in the semiconductor chip of fig. 1.

Fig. 7 illustrates a first write operation path of a semiconductor chip according to one embodiment of the present disclosure.

Fig. 8 illustrates a first read operation path of a semiconductor chip according to one embodiment of the present disclosure.

Fig. 9 illustrates a second write operation path of a semiconductor chip according to one embodiment of the present disclosure.

Fig. 10 illustrates a second read operation path of a semiconductor chip according to one embodiment of the present disclosure.

Detailed Description

A limited number of possible embodiments of the present disclosure are described herein with reference to the figures. These described embodiments are for illustrative purposes and are not intended to limit the scope of the present disclosure.

As shown in fig. 1, a semiconductor chip 1 according to one embodiment may include a first semiconductor device 10, a first through-electrode 20, such as a through-silicon via (TSV), a second through-electrode 30, such as a through-silicon via (TSV), and a second semiconductor device 40.

The first semiconductor device 10 may include a control circuit 11, a first input/output (I/O) circuit 12, a first path control circuit 13, a first memory circuit 14, and a first error detection circuit 15.

The control circuit 11 may generate an enable signal EN, a first write control signal WT _ CON <1>, a second write control signal WT _ CON <2>, a first read control signal RD _ CON <1>, a second read control signal RD _ CON <2>, and a select signal SEL, one of which is selectively enabled according to an operation mode. The control circuit 11 may output the enable signal EN, the first write control signal WT _ CON <1>, the second write control signal WT _ CON <2>, the first read control signal RD _ CON <1>, the second read control signal RD _ CON <2>, and the selection signal SEL to the second semiconductor device 40 through the first through electrode 20. The logic levels of the enable signal EN, the first write control signal WT _ CON <1>, the second write control signal WT _ CON <2>, the first read control signal RD _ CON <1>, the second read control signal RD _ CON <2>, and the select signal SEL, one of which is selectively enabled according to the operation mode, will be described in detail with reference to fig. 4.

The operation modes may include a first write operation, a first read operation, a second write operation, and a second read operation. The first write operation may be an operation performed to store the first data D1 output from the first semiconductor device 10 into the second semiconductor device 40, and the first read operation may be an operation performed to output the second data D2 output from the second semiconductor device 40 to an external device. In addition, the second write operation may be an operation performed to store external data ED provided by an external device into the first semiconductor device 10, and the second read operation may be an operation performed to output the first internal data ID1 stored in the first semiconductor device 10 to the external device.

The first I/O circuit 12 may electrically connect the second through electrode 30 to the first transmission I/O line TIO1 and the second transmission I/O line TIO 2. The first I/O circuit 12 may output the first data D1 to the second semiconductor device 40 via the second through electrode 30. The first I/O circuit 12 may receive the second data D2 from the second semiconductor device 40.

More specifically, the first I/O circuit 12 may be implemented using a first transceiver TX11, a first receiver RX11, and a second receiver RX 12. The first transceiver TX11 may output the first data D1 loaded on the first and second transmission I/O lines TIO1 and TIO2 to the second semiconductor device 40 via the second through electrode 30. The first receiver RX11 may receive the second data D2 from the second semiconductor device 40 via the second through electrode 30 and may output the second data D2 to the first transmission I/O line TIO 1. The second receiver RX12 may receive the second data D2 from the second semiconductor device 40 via the second through electrode 30 and may output the second data D2 to the second transmission I/O line TIO 2.

Based on the enable signal EN, the first write control signal WT _ CON <1>, the second write control signal WT _ CON <2>, the first read control signal RD _ CON <1>, the second read control signal RD _ CON <2>, and the select signal SEL, the first path control circuit 13 may generate the first data D1 from the external data ED provided from an external device (not shown) during the first write operation to output the first data D1 to the first transmission I/O line TIO 1. Based on the enable signal EN, the first write control signal WT _ CON <1>, the second write control signal WT _ CON <2>, the first read control signal RD _ CON <1>, the second read control signal RD _ CON <2>, and the select signal SEL, the first path control circuit 13 may generate the external data ED from the second data D2 loaded on the first transmission I/O line TIO1 during the first read operation to output the external data ED to an external device (not shown). Based on the enable signal EN, the first write control signal WT _ CON <1>, the second write control signal WT _ CON <2>, the first read control signal RD _ CON <1>, the second read control signal RD _ CON <2>, and the select signal SEL, the first path control circuit 13 may generate the first data D1 from the external data ED provided from an external device (not shown) during the second write operation to output the first data D1 to the first transmission I/O line TIO1, and may generate the first internal data ID1 from the external data ED. Based on the enable signal EN, the first write control signal WT _ CON <1>, the second write control signal WT _ CON <2>, the first read control signal RD _ CON <1>, the second read control signal RD _ CON <2>, and the select signal SEL, the first path control circuit 13 may generate the first data D1 from the first internal data ID1 to output the first data D1 to the first transmission I/O line TIO1 during the second read operation, and may generate the external data ED from the first internal data ID1 to output the external data ED to an external device (not shown).

During the second write operation, the first memory circuit 14 may store the first internal data ID 1. During the second read operation, the first memory circuit 14 may output the first internal data ID1 stored therein.

The first error detection circuit 15 may detect errors of the first data D1 and the second data D2 loaded on the first transmission I/O line TIO1 to generate the first detection signal DET 1. The first error detection circuit 15 may output the first detection signal DET1 to an external device (not shown). During the first write operation, the first read operation, the second write operation, and the second read operation, the first error detection circuit 15 may detect errors of the first data D1 and the second data D2 to generate the first detection signal DET 1. The first error detection circuit 15 may detect errors of the first data D1 and the second data D2 through cyclic redundancy check to generate the first detection signal DET 1.

The second semiconductor device 40 may include a second I/O circuit 41, a second path control circuit 42, a second storage circuit 43, and a second error detection circuit 44.

The second I/O circuit 41 may electrically connect the second through electrode 30 to the third transmission I/O line TIO3 and the fourth transmission I/O line TIO 4. The second I/O circuit 41 may output the second data D2 to the first semiconductor device 10 via the second through electrode 30. The second I/O circuit 41 may receive the first data D1 from the first semiconductor device 10.

More specifically, the second I/O circuit 41 may be implemented using a second transceiver TX41, a third receiver RX41, and a fourth receiver RX 42. The second transceiver TX41 may output the second data D2 loaded on the third and fourth transmission I/O lines TIO3 and TIO4 to the first semiconductor device 10 via the second through electrode 30. The third receiver RX41 may receive the first data D1 from the first semiconductor device 10 via the second through electrode 30 and may output the first data D1 to the third transmission I/O line TIO 3. The fourth receiver RX42 may receive the first data D1 from the first semiconductor device 10 via the second through electrode 30 and may output the first data D1 to the fourth transmission I/O line TIO 4.

The second path control circuit 42 may receive the first data D1 through the third transmission I/O line TIO3 to generate the second internal data ID2 during the first write operation based on the enable signal EN input through the first through electrode 20, the first write control signal WT _ CON <1>, the second write control signal WT _ CON <2>, the first read control signal RD _ CON <1>, the second read control signal RD _ CON <2>, and the select signal SEL. The second path control circuit 42 may output the second internal data ID2 as the second data D2 through the third transfer I/O line TIO3 during the first read operation based on the enable signal EN input through the first through electrode 20, the first write control signal WT _ CON <1>, the second write control signal WT _ CON <2>, the first read control signal RD _ CON <1>, the second read control signal RD _ CON <2>, and the select signal SEL.

During the first write operation, the second memory circuit 43 may store the second internal data ID 2. During the first read operation, the second memory circuit 43 may output the second internal data ID2 stored therein.

The second error detection circuit 44 may detect errors of the first data D1 and the second data D2 loaded on the third transfer I/O line TIO3 to generate the second detection signal DET 2. The second error detection circuit 44 may output the second detection signal DET2 to an external device (not shown). The second error detection circuit 44 may detect errors of the first data D1 and the second data D2 during the first write operation and the first read operation to generate the second detection signal DET 2. The second error detection circuit 44 may detect errors of the first data D1 and the second data D2 through cyclic redundancy check to generate the second detection signal DET 2. Although the second error detection circuit 44 is implemented to generate the second detection signal DET2 by detecting errors of the first data D1 and the second data D2 during the first write operation and the first read operation, the second error detection circuit 44 may be implemented to be inoperative when the first error detection circuit 15 is operative. In the case where the second semiconductor device 40 independently performs the write operation and the read operation, the second error detection circuit 44 may be implemented to generate the second detection signal DET2 by detecting an error of data loaded on the third transfer I/O line TIO 3.

Meanwhile, although the first and second semiconductor devices 10 and 40 are illustrated laterally adjacent to each other in fig. 1, the first and second semiconductor devices 10 and 40 may be vertically stacked and may be electrically connected to each other via the first and second through electrodes 20 and 30. Further, although fig. 1 shows an example in which the semiconductor chip 1 includes the first semiconductor device 10 and the second semiconductor device 40, the semiconductor chip 1 may be configured to include three or more semiconductor devices that may be sequentially stacked according to different embodiments.

Referring to fig. 2, the control circuit 11 may include a register 110 and a control signal generation circuit 120.

The register 110 may generate a mode enable signal EN3DS, a first write mode signal WTPIN, a second write mode signal WTEN, a third write mode signal WT3DS, a first read mode signal RDPIN, a second read mode signal RDEN, a third read mode signal RD3DS, and a reset signal RST. The mode enable signal EN3DS may include information regarding a first write operation, a first read operation, a second write operation, and a second read operation. The register 110 may be implemented using a Mode Register Set (MRS) including a plurality of registers, thereby storing information about an operation mode of the semiconductor chip 1.

The control signal generation circuit 120 may generate an enable signal EN, a first write control signal WT _ CON <1>, a second write control signal WT _ CON <2>, a first read control signal RD _ CON <1>, a second read control signal RD _ CON <2>, and a select signal SEL, one of which is selectively enabled according to a logic level combination of the mode enable signal EN3DS, the first write mode signal WTPIN, the second write mode signal WTEN, the third write mode signal WT3DS, the first read mode signal RDPIN, the second read mode signal RDEN, the third read mode signal RD3DS, and the reset signal RST.

Referring to fig. 3, the control signal generation circuit 120 may include an enable signal generation circuit 121, a transfer control signal generation circuit 122, a write control signal generation circuit 123, and a read control signal generation circuit 124.

The enable signal generation circuit 121 may be implemented using inverters IV11 and IV12 coupled in series. The enable signal generation circuit 121 may delay the mode enable signal EN3DS to generate the enable signal EN.

The transmission control signal generation circuit 122 may be implemented using inverters IV21 and IV22, NOR gate NOR21, and NAND gates NAND21 and NAND 22. When the first read mode signal RDPIN input to the transmission control signal generation circuit 122 has a logic "high" level, the transmission control signal generation circuit 122 may generate the transmission control signal TCONB enabled to have a logic "low" level. When any one of the reset signal RST and the first write mode signal WTPIN input to the transmission control signal generation circuit 122 has a logic "high" level, the transmission control signal generation circuit 122 may generate the transmission control signal TCONB that is inhibited from having the logic "high" level.

The write control signal generation circuit 123 may be implemented using inverters IV31, IV32, IV33, IV34, and IV35, a NAND gate NAND31, and a NOR gate NOR 31. When the transmission control signal TCONB is disabled to have a logic "high" level, the write control signal generation circuit 123 may generate the first write control signal WT _ CON <1> and the second write control signal WT _ CON <2>, one of which is selectively enabled according to a logic level combination of the enable signal EN, the second write mode signal WTEN, and the third write mode signal WT3 DS.

The read control signal generation circuit 124 may be implemented using inverters IV41, IV42, IV43, IV44, IV45, IV46, AND IV47, AND gates AND41, NOR gates NOR41 AND NOR42, AND NAND gates NAND 41. The read control signal generation circuit 124 may generate the first read control signal RD _ CON <1> and the second read control signal RD _ CON <2>, one of which is selectively enabled according to a logic level combination of the mode enable signal EN3DS, the second read mode signal RDEN, and the third read mode signal RD3 DS. When the mode enable signal EN3DS is disabled to have a logic "low" level and the transmission control signal TCONB is enabled to have a logic "low" level, the read control signal generation circuit 124 may generate the selection signal SEL that is enabled to have a logic "high" level.

More specifically, the logic levels of signals generated by the register 110 and the control signal generation circuit 120 according to the operation mode are described with reference to fig. 4.

Referring to fig. 4, during the first write operation, the register 110 may generate a mode enable signal EN3DS having a logic "high" (H) level, a first write mode signal WTPIN having a logic "high" (H) level, a second write mode signal WTEN having a logic "high" (H) level, a third write mode signal WT3DS having a logic "high" (H) level, a first read mode signal RDPIN having a logic "low" (L) level, a second read mode signal RDEN having a logic "low" (L) level, a third read mode signal RD3DS having a logic "low" (L) level, and a reset signal RST transitioning from the logic "high" (H) level to the logic "low" (L) level.

During the first write operation, the control signal generation circuit 120 may receive the mode enable signal EN3DS, the first write mode signal WTPIN, the second write mode signal WTEN, the third write mode signal WT3DS, the first read mode signal RDPIN, the second read mode signal RDEN, the third read mode signal RD3DS, and the reset signal RST to generate the enable signal EN having a logic "high (H)" level, the first write control signal WT _ CON <1> having a logic "high (H)" level, the second write control signal RD _ CON <2> having a logic "high (H)" level, the first read control signal RD _ CON <1> having a logic "low (L)" level, the second read control signal RD _ CON <2> having a logic "low (L)" level, and the selection signal SEL having a logic "low (L)" level.

During the first read operation, the register 110 may generate the mode enable signal EN3DS having a logic "high (H)" level, the first write mode signal WTPIN having a logic "low (L)" level, the second write mode signal WTEN having a logic "low (L)" level, the third write mode signal WT3DS having a logic "low (L)" level, the first read mode signal RDPIN having a logic "high (H)" level, the second read mode signal RDEN having a logic "high (H)" level, the third read mode signal RD3DS having a logic "high (H)" level, and the reset signal RST transitioning from the logic "high (H)" level to the logic "low (L)" level.

During the first read operation, the control signal generation circuit 120 may receive the mode enable signal EN3DS, the first write mode signal WTPIN, the second write mode signal WTEN, the third write mode signal WT3DS, the first read mode signal RDPIN, the second read mode signal RDEN, the third read mode signal RD3DS, and the reset signal RST to generate the enable signal EN having a logic "high (H)" level, the first write control signal WT _ CON <1> having a logic "low (L)" level, the second write control signal RD _ CON <2> having a logic "low (L)" level, the first read control signal RD _ CON <1> having a logic "high (H)" level, the second read control signal RD _ CON <2> having a logic "high (H)" level, and the select signal WT having a logic "low (L)" level.

During the second write operation, the register 110 may generate the mode enable signal EN3DS having a logic "low (L)" level, the first write mode signal WTPIN having a logic "high (H)" level, the second write mode signal WTEN having a logic "high (H)" level, the third write mode signal WT3DS having a logic "low (L)" level, the first read mode signal RDPIN having a logic "low (L)" level, the second read mode signal RDEN having a logic "low (L)" level, the third read mode signal RD3DS having a logic "low (L)" level, and the reset signal RST transitioning from the logic "high (H)" level to the logic "low (L)" level.

During the second write operation, the control signal generation circuit 120 may receive the mode enable signal EN3DS, the first write mode signal WTPIN, the second write mode signal WTEN, the third write mode signal WT3DS, the first read mode signal RDPIN, the second read mode signal RDEN, the third read mode signal RD3DS, and the reset signal RST to generate the enable signal EN having a logic "low (L)" level, the first write control signal WT _ CON <1> having a logic "low (L)" level, the second write control signal RD _ CON <2> having a logic "high (H)" level, the first read control signal RD _ CON <1> having a logic "low (L)" level, the second read control signal RD _ CON <2> having a logic "low (L)" level, and the selection signal SEL having a logic "low (L)" level.

During the second read operation, the register 110 may generate the mode enable signal EN3DS having a logic "low" (L) level, the first write mode signal WTPIN having a logic "low" (L) level, the second write mode signal WTEN having a logic "low" (L) level, the third write mode signal WT3DS having a logic "low" (L) level, the first read mode signal RDPIN having a logic "high" (H) level, the second read mode signal RDEN having a logic "high" (H) level, the third read mode signal RD3DS having a logic "low" (L) level, and the reset signal RST transitioning from the logic "high (H) level to the logic" low (L) "level.

During the second read operation, the control signal generation circuit 120 may receive the mode enable signal EN3DS, the first write mode signal WTPIN, the second write mode signal WTEN, the third write mode signal WT3DS, the first read mode signal RDPIN, the second read mode signal RDEN, the third read mode signal RD3DS, and the reset signal RST to generate the enable signal EN having a logic "low (L)" level, the first write control signal WT _ CON <1> having a logic "low (L)" level, the second write control signal RD _ CON <2> having a logic "low (L)" level, the first read control signal RD _ CON <1> having a logic "low (L)" level, the second read control signal RD _ CON <2> having a logic "low (L)" level, and the selection signal SEL having a logic "high (H)" level.

Referring to fig. 5, the first path control circuit 13 may include a first write path control circuit 131 and a first read path control circuit 132.

The first write path control circuit 131 may be implemented using a first buffer IV51, a first transfer gate T51, and a second transfer gate T52.

The first buffer IV51 may be turned on when the first write control signal WT _ CON <1> has a logic "high" level and the first inverted write control signal WT _ CONB <1> has a logic "low" level. Accordingly, when the first write control signal WT _ CON <1> has a logic "high" level and the first inverted write control signal WT _ CONB <1> has a logic "low" level, the first buffer IV51 may inversely buffer the signal loaded on the second transfer I/O line TIO2 to generate the first internal data ID 1. The first transmission gate T51 may be turned on when the second write control signal WT _ CON <2> has a logic "high" level and the second inverted write control signal WT _ CONB <2> has a logic "low" level. Accordingly, when the second write control signal WT _ CON <2> has a logic "high" level and the second inverted write control signal WT _ CONB <2> has a logic "low" level, the first transfer gate T51 may generate the first data D1 from the external data ED to output the first data D1 through the first transfer I/O line TIO 1. When the enable signal EN has a logic "low" level and the inverted enable signal ENB has a logic "high" level, the second transmission gate T52 may be turned on to generate the first internal data ID1 from the external data ED. The first inverted write control signal WT _ CONB <1> may be generated by inverting a logic level of the first write control signal WT _ CON <1>, and the second inverted write control signal WT _ CONB <2> may be generated by inverting a logic level of the second write control signal WT _ CON <2 >. In addition, the inverted enable signal ENB may be generated by inverting a logic level of the enable signal EN.

The first read path control circuit 132 may be implemented using the second buffer IV52, the third transmission gate T53, the fourth transmission gate T54, and the fifth transmission gate T55.

The second buffer IV52 may be turned on when the first read control signal RD _ CON <1> has a logic "high" level and the first inverted read control signal RD _ CONB <1> has a logic "low" level. Accordingly, when the first read control signal RD _ CON <1> has a logic "high" level and the first inverted read control signal RD _ CONB <1> has a logic "low" level, the second buffer IV52 may inversely buffer the signal loaded on the first transmission I/O line TIO1 to generate the external data ED. When the second read control signal RD _ CON <2> has a logic "high" level and the second inverted read control signal RD _ CONB <2> has a logic "low" level, the third transfer gate T53 may be turned on to output the first internal data ID1 through the second transfer I/O line TIO 2. When the enable signal EN has a logic "low" level and the inverted enable signal ENB has a logic "high" level, the fourth transmission gate T54 may be turned on to generate the external data ED from the first internal data ID 1. When the selection signal SEL has a logic "high" level and the inverted selection signal SELB has a logic "low" level, the fifth transmission gate T55 may be turned on to output the first internal data ID1 through the first transmission I/O line TIO 1. The first inverted read control signal RD _ CONB <1> may be generated by inverting a logic level of the first read control signal RD _ CON <1>, and the second inverted read control signal RD _ CONB <2> may be generated by inverting a logic level of the second read control signal RD _ CON <2 >. In addition, the inverted selection signal SELB may be generated by inverting the logic level of the selection signal SEL.

Referring to fig. 6, the second path control circuit 42 may include a second write path control circuit 421 and a second read path control circuit 422.

The second write path control circuit 421 may be implemented using a third buffer IV61, a sixth transfer gate T61, and a seventh transfer gate T62.

The third buffer IV61 may be turned on when the first write control signal WT _ CON <1> has a logic "high" level and the first inverted write control signal WT _ CONB <1> has a logic "low" level. Accordingly, when the first write control signal WT _ CON <1> has a logic "high" level and the first inverted write control signal WT _ CONB <1> has a logic "low" level, the third buffer IV61 may inversely buffer the signal loaded on the third transfer I/O line TIO3 to generate the second internal data ID 2. The sixth transfer gate T61 may be turned on when the second write control signal WT _ CON <2> has a logic "high" level and the second inverted write control signal WT _ CONB <2> has a logic "low" level. When the enable signal EN has a logic "low" level and the inverted enable signal ENB has a logic "high" level, the seventh transmission gate T62 may be turned on.

The second read path control circuit 422 may be implemented using a fourth buffer IV62, an eighth transmission gate T63, a ninth transmission gate T64, and a tenth transmission gate T65.

The fourth buffer IV62 may be turned on when the first read control signal RD _ CON <1> has a logic "high" level and the first inverted read control signal RD _ CONB <1> has a logic "low" level. When the second read control signal RD _ CON <2> has a logic "high" level and the second inverted read control signal RD _ CONB <2> has a logic "low" level, the eighth transfer gate T63 may be turned on to output the second internal data ID2 through the third transfer I/O line TIO 3. When the enable signal EN has a logic "low" level and the inverted enable signal ENB has a logic "high" level, the ninth transmission gate T64 may be turned on. When the selection signal SEL has a logic "high" level and the inverted selection signal SELB has a logic "low" level, the tenth transmission gate T65 may be turned on to output the second internal data ID2 through the fourth transmission I/O line TIO 4.

An operation of generating the first data D1 through the first write operation path of the semiconductor chip 1 and an operation of detecting an error of the first data D1 are described with reference to fig. 7.

Referring to fig. 7, during the first write operation, the control circuit 11 may generate an enable signal EN having a logic "high (H)" level, a first write control signal WT _ CON <1> having a logic "high (H)" level, a second write control signal WT _ CON <2> having a logic "high (H)" level, a first read control signal RD _ CON <1> having a logic "low (L)" level, a second read control signal RD _ CON <2> having a logic "low (L)" level, and a select signal SEL having a logic "low (L)" level.

During the first write operation, the first path control circuit 13 may generate first data D1 from external data ED provided from an external device (not shown) to output the first data D1 to the first transfer I/O line TIO1 based on a second write control signal WT _ CON <2> having a logic "high (H)" level.

The first I/O circuit 12 may output the first data D1 to the second semiconductor device 40 through the second through electrode 30.

The first error detection circuit 15 may detect an error of the first data D1 loaded on the first transmission I/O line TIO1 to generate and output the first detection signal DET1 to an external device.

The second I/O circuit 41 may receive the first data D1 from the first semiconductor device 10 via the second through electrode 30 and may output the first data D1 to the third transfer I/O line TIO3 and the fourth transfer I/O line TIO 4.

The second path control circuit 42 may receive the first data D1 through the third transmission I/O line TIO3 based on the first write control signal WT _ CON <1> having a logic "high (H)" level input through the first through electrode 20 to generate the second internal data ID 2.

During the first write operation, the second memory circuit 43 may store the second internal data ID 2.

As described above, during the first write operation, the semiconductor chip 1 may detect an error of the first data D1 loaded on the first transfer I/O line TIO1 to generate and output the first detection signal DET 1.

An operation of generating the second data D2 through the first read operation path of the semiconductor chip 1 and an operation of detecting an error of the second data D2 are described with reference to fig. 8.

Referring to fig. 8, during the first read operation, the control circuit 11 may generate an enable signal EN having a logic "high (H)" level, a first write control signal WT _ CON <1> having a logic "low (L)" level, a second write control signal WT _ CON <2> having a logic "low (L)" level, a first read control signal RD _ CON <1> having a logic "high (H)" level, a second read control signal RD _ CON <2> having a logic "high (H)" level, and a select signal SEL having a logic "low (L)" level.

During the first read operation, the second storage circuit 43 may output the second internal data ID 2.

The second path control circuit 42 may output the second internal data ID2 as second data D2 through the third transfer I/O line TIO3 based on the second read control signal RD _ CON <2> having a logic "high (H)" level input through the first through electrode 20.

The second I/O circuit 41 may output the second data D2 to the first semiconductor device 10 via the second through electrode 30.

The first I/O circuit 12 may receive the second data D2 from the second semiconductor device 40 via the second through electrode 30 and may output the second data D2 to the first transfer I/O line TIO 1.

The first error detection circuit 15 may detect an error of the second data D2 loaded on the first transmission I/O line TIO1 to generate and output the first detection signal DET1 to an external device.

During the first read operation, the first path control circuit 13 may generate the external data ED from the second data D2 loaded on the first transmission I/O line TIO1 based on the first read control signal RD _ CON <1> having a logic "high (H)" level to output the external data ED to an external device.

As described above, during the first read operation, the semiconductor chip 1 may detect an error of the second data D2 loaded on the first transfer I/O line TIO1 to generate and output the first detection signal DET 1.

An operation of generating the first data D1 through the second write operation path of the semiconductor chip 1 and an operation of detecting an error of the first data D1 are described with reference to fig. 9.

Referring to fig. 9, during the second write operation, the control circuit 11 may generate an enable signal EN having a logic "low (L)" level, a first write control signal WT _ CON <1> having a logic "low (L)" level, a second write control signal WT _ CON <2> having a logic "high (H)" level, a first read control signal RD _ CON <1> having a logic "low (L)" level, a second read control signal RD _ CON <2> having a logic "low (L)" level, and a select signal SEL having a logic "low (L)" level.

During the second write operation, the first path control circuit 13 may generate the first data D1 from the external data ED provided from an external device (not shown) to output the first data D1 to the first transfer I/O line TIO1 based on the second write control signal WT _ CON <2> having a logic "high (H)" level. During the second write operation, the first path control circuit 13 may generate the first internal data ID1 from the external data ED based on the enable signal EN having a logic "low (L)" level.

During the second write operation, the first memory circuit 14 may store the first internal data ID 1.

As described above, during the second write operation, the semiconductor chip 1 may detect an error of the first data D1 loaded on the first transfer I/O line TIO1 to generate and output the first detection signal DET 1.

An operation of generating the first data D1 through the second read operation path of the semiconductor chip 1 and an operation of detecting an error of the first data D1 are described with reference to fig. 10.

Referring to fig. 10, during the second read operation, the control circuit 11 may generate an enable signal EN having a logic "low (L)" level, a first write control signal WT _ CON <1> having a logic "low (L)" level, a second write control signal WT _ CON <2> having a logic "low (L)" level, a first read control signal RD _ CON <1> having a logic "low (L)" level, a second read control signal RD _ CON <2> having a logic "low (L)" level, and a select signal SEL having a logic "high (H)" level.

During the second read operation, the first storage circuit 14 may output the first internal data ID 1.

During the second read operation, the first path control circuit 13 may generate and output the external data ED from the first internal data ID1 based on the enable signal EN having a logic "low (L)" level. During the second read operation, the first path control circuit 13 may generate the first data D1 from the first internal data ID1 based on the selection signal SEL having a logic "high (H)" level to output the first data D1 to the first transfer I/O line TIO 1.

As described above, during the second read operation, the semiconductor chip 1 may detect an error of the first data D1 loaded on the first transfer I/O line TIO1 to generate and output the first detection signal DET 1.

According to the above-described embodiments, the semiconductor chip may have improved efficiency of detecting data errors by detecting errors of data input or output using a single error detection circuit during a write operation or a read operation with respect to a plurality of semiconductor devices sequentially stacked in the semiconductor chip.

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