阅读说明：本技术 一种提高气缸运动行程的放大伸缩机构 (Amplifying telescopic mechanism for improving motion stroke of air cylinder ) 是由 贾波 牛海涛 郭光灿 马龙峰 张明亮 于 2020-04-28 设计创作，主要内容包括：一种提高气缸运动行程的放大伸缩机构,涉及硅片陶瓷盘的取料输送装置技术领域,包括上层机架、中间机架和底层机架,中间机架位于底层机架和上层机架之间,底层机架上平行设有2条直线导轨,中间机架通过底层机架上的直线导轨在底层机架上滑动；中间机架包括对称设置的两条滑轨,两条滑轨之间通过位于滑轨一端的连接板固定连接,气缸的伸出轴与连接板连接,上层机架通过其底部设置的轴承与滑轨配合实现上层机架在中间机架上的滑动。本发明有益效果：本发明以钢丝为行程放大机构,结构简单,运动行程大,解决了抛光生产过程中对载体陶瓷盘进行取料困难的问题,实现了陶瓷盘取料机构的轻便化,为其它抛光设备取料提供了有效的解决方案。(An amplifying telescopic mechanism for improving the motion stroke of an air cylinder relates to the technical field of a material taking and conveying device of a silicon wafer ceramic disc and comprises an upper layer rack, a middle rack and a bottom layer rack, wherein the middle rack is positioned between the bottom layer rack and the upper layer rack, 2 linear guide rails are arranged on the bottom layer rack in parallel, and the middle rack slides on the bottom layer rack through the linear guide rails on the bottom layer rack; the middle rack comprises two slide rails which are symmetrically arranged, the two slide rails are fixedly connected through a connecting plate positioned at one end of each slide rail, an extending shaft of the air cylinder is connected with the connecting plate, and the upper rack is matched with the slide rails through bearings arranged at the bottom of the upper rack to realize the sliding of the upper rack on the middle rack. The invention has the beneficial effects that: the ceramic disc material taking mechanism takes the steel wire as the stroke amplifying mechanism, has simple structure and large movement stroke, solves the problem of difficult material taking of the carrier ceramic disc in the polishing production process, realizes the portability of the ceramic disc material taking mechanism, and provides an effective solution for material taking of other polishing equipment.)

1. The utility model provides an improve enlarged telescopic machanism of cylinder motion stroke which characterized in that: the device comprises an upper-layer rack (1), a middle rack (4) and a bottom-layer rack (5), wherein the middle rack (4) is positioned between the bottom-layer rack (5) and the upper-layer rack (1), 2 linear guide rails (15) are arranged on the bottom-layer rack (5) in parallel, and the middle rack (4) slides on the bottom-layer rack (5) through the linear guide rails (15) on the bottom-layer rack (5); the middle rack (4) comprises two slide rails (16) which are symmetrically arranged, the two slide rails (16) are fixedly connected through a connecting plate (12) positioned at one end of each slide rail, an extension shaft of a cylinder (6) is connected with the connecting plate (12), the upper rack (1) is matched with the slide rails (16) through a bearing (8) arranged at the bottom of the upper rack to realize the sliding of the upper rack (1) on the middle rack (4), two rear vertical fixing cylinders (11) are respectively arranged at two sides of the rear end of the bottom rack (5), two front vertical fixing cylinders (14) are respectively arranged at two sides of the front end, two horizontal fixing cylinders (13) are respectively arranged at two sides of the upper rack (1), a first pulley (2) is respectively arranged at two sides of the rear end of the middle rack (4), a second pulley (7) is respectively arranged at two sides of the front end, the amplification telescopic mechanism further comprises a first steel wire (3) and a second steel wire (9), second pulley (7) is walked around in first steel wire (3) the middle, and both ends are connected with vertical fixed cylinder (11) of rear end and horizontal fixed cylinder (13) respectively, first pulley (2) is walked around in the middle of second steel wire (9), and both ends are connected with vertical fixed cylinder (14) of front end and horizontal fixed cylinder (13) respectively, and the winding of first steel wire (3) and second steel wire (9) is to opposite.

2. The amplifying telescopic mechanism for improving the motion stroke of the cylinder as claimed in claim 1, wherein: the middle frame (4) is matched with a linear slide rail (15) on the bottom layer support (5) through a bearing arranged at the bottom of the middle frame to realize sliding.

Technical Field

The invention belongs to the technical field of taking and conveying devices of silicon wafer ceramic discs, and particularly relates to an amplifying and stretching mechanism for improving the motion stroke of an air cylinder.

Background

At present, in the semiconductor industry, the alumina ceramic disc for polishing the semiconductor silicon wafer plays an important role in the processing and polishing process of the silicon wafer, the ceramic disc is stored in 12 layers in a carrier disc trolley, the distance between every two layers is about 25mm, and in order to enable the ceramic disc to be safely taken out in a narrow space, an air cylinder device is required to be adopted to stretch into the carrier disc trolley and pull out the ceramic disc. But the cylinder on the market is general comparatively single, and it is comparatively fixed to use the stroke, often chooses for use big cylinder because of the cylinder motion stroke is little, and the use of cylinder has the limitation. In order to meet the requirement of large stroke of the equipment, a large cylinder is often selected for design, and the designed equipment is large in size, heavy and space-consuming. Therefore, the device mechanism for amplifying the stroke has the advantages of reasonable design, simple and compact structure, safe and reliable performance, more than two times of device motion stroke than that of the input cylinder and very obvious application effect.

Disclosure of Invention

The technical problem to be solved by the invention is to provide an amplifying telescopic mechanism for improving the motion stroke of the air cylinder, increase the moving range of the air cylinder, solve the problem that the material taking of the ceramic carrier disc is difficult in the polishing production process at present and facilitate the safe taking of the ceramic carrier disc.

The technical scheme adopted by the invention for solving the technical problems is as follows: an amplifying telescopic mechanism for improving the motion stroke of an air cylinder comprises an upper layer rack, a middle rack and a bottom layer rack, wherein the middle rack is positioned between the bottom layer rack and the upper layer rack, 2 linear guide rails are arranged on the bottom layer rack in parallel, and the middle rack slides on the bottom layer rack through the linear guide rails on the bottom layer rack; the middle frame comprises two slide rails which are symmetrically arranged, the two slide rails are fixedly connected through a connecting plate positioned at one end of each slide rail, an extension shaft of a cylinder is connected with the connecting plate, the upper frame is matched with the slide rails through a bearing arranged at the bottom of the upper frame to realize the sliding of the upper frame on the middle frame, two sides of the rear end of the lower frame are respectively provided with a rear-end vertical fixing cylinder, two sides of the front end of the lower frame are respectively provided with a front-end vertical fixing cylinder, two sides of the upper frame are respectively provided with a horizontal fixing cylinder, two sides of the rear end of the middle frame are respectively provided with a first pulley, two sides of the front end of the middle frame are respectively provided with a second pulley, the amplification telescopic mechanism further comprises a first steel wire and a second steel wire, the second pulley is wound in the middle of the first steel wire, two ends of the first steel wire are respectively connected with the rear-end, both ends are connected with the vertical fixed cylinder in front end and the horizontal fixed cylinder respectively, and the direction of winding of first steel wire and second steel wire is opposite.

The middle frame is matched with the linear slide rail on the bottom layer support through the bearing arranged at the bottom of the middle frame to realize sliding.

The invention has the beneficial effects that: the steel wire type cylinder stroke amplification telescopic mechanism takes the steel wire as the stroke amplification mechanism, has simple structure and large movement stroke, and is suitable for a light-load telescopic platform; the problem of get the material difficulty to the carrier ceramic dish in the polishing production process is solved, the portability of ceramic dish extracting mechanism has been realized, it gets the material for other polishing equipment provides effectual solution.

Drawings

Fig. 1 is a schematic perspective view of the present invention.

The labels in the figure are: 1. the upper rack, 2, first pulley, 3, first steel wire, 4, middle rack, 5, bottom rack, 6, cylinder, 7, second pulley, 8, bearing, 9, second steel wire, 10, fender hook, 11, the vertical fixed cylinder of rear end, 12, connecting plate, 13, the horizontal fixed cylinder, 14, the vertical fixed cylinder of front end, 15, linear guide, 16, slide rail.

Detailed Description

The following description of specific embodiments (examples) of the present invention are provided in conjunction with the accompanying drawings to enable those skilled in the art to better understand the present invention.

As shown in fig. 1, the amplifying telescopic mechanism for improving the moving stroke of the cylinder comprises an upper layer frame 1, a middle frame 4 and a bottom layer frame 5, wherein the middle frame 4 is positioned between the bottom layer frame 5 and the upper layer frame 1, 2 linear guide rails 15 are arranged on the bottom layer frame 5 in parallel, and the middle frame 4 slides on the bottom layer frame 5 through the linear guide rails 15 on the bottom layer frame 5; the middle frame 4 comprises two slide rails 16 which are symmetrically arranged, the two slide rails 16 are fixedly connected through a connecting plate 12 positioned at one end of each slide rail, an extension shaft of a cylinder 6 is connected with the connecting plate 12, the upper frame 1 is matched with the slide rails 16 through a bearing 8 arranged at the bottom of the upper frame to realize the sliding of the upper frame 1 on the middle frame 4, two rear vertical fixing cylinders 11 are respectively arranged at two sides of the rear end of the lower frame 5, two front vertical fixing cylinders 14 are respectively arranged at two sides of the front end, two horizontal fixing cylinders 13 are respectively arranged at two sides of the upper frame 1, a first pulley 2 is respectively arranged at two sides of the rear end of the middle frame 4, two second pulleys 7 are respectively arranged at two sides of the front end, the amplification telescopic mechanism further comprises a first steel wire 3 and a second steel wire 9, the second pulley 7 is wound in the middle of the first steel wire 3, and two ends of the first steel wire are respectively connected with the rear vertical fixing, the middle of the second steel wire 9 winds around the first pulley 2, two ends of the second steel wire are respectively connected with the front vertical fixing cylinder 14 and the front horizontal fixing cylinder 13, and the winding directions of the first steel wire 3 and the second steel wire 9 are opposite.

The middle frame 4 is matched with the linear slide rail 15 on the bottom layer bracket 5 through a bearing arranged at the bottom of the middle frame to realize sliding.

The cylinder stroke amplifying and stretching mechanism comprises a three-layer structure, wherein the bottommost layer of the cylinder stroke amplifying and stretching mechanism is a fixed rack and a cylinder mounting end plate and is mainly used for fixing a cylinder and a static linear guide rail. The middle layer is a movable fixing frame with symmetrical structures at two sides, four pulleys are symmetrically fixed at two sides, a linear guide rail is fixed on the middle frame, and a sliding block bearing is fixed at the bottom. The uppermost layer is a sliding telescopic frame with a sliding block bearing fixed at the bottom. The extension shaft of the cylinder is connected with a connecting plate, and the connecting plate is connected with the racks on the two sides of the middle layer and drives the racks to stretch. The sliding rack on the uppermost layer moves by pulling the steel wires on the front and rear pulleys of the rack on the middle layer, and the rack on the middle layer moves while driving the rack on the uppermost layer to extend and retract through the pulleys and the steel wires.

As shown in fig. 1, the enlarged telescopic mechanism for improving the moving stroke of the cylinder comprises an upper layer frame 1, a middle frame 4, a bottom layer frame 5, a first steel wire 3, a second steel wire 9, a first pulley 2, a second pulley 7, a cylinder 6, a bearing 8, a stop hook 10, a vertical fixing cylinder 11, a connecting plate 12 and a steel wire horizontal fixing cylinder 13. The middle frame 4 is arranged on the bottom frame 5, the upper frame 1 is arranged on the middle frame 4, the first pulleys 2 are rotatably arranged at the rear ends of the two sides of the middle frame 4, and the second pulleys 7 are rotatably arranged at the front ends of the two sides of the middle frame 4; the middle of the first steel wire 3 bypasses the second pulley 7, two ends of the first steel wire are respectively connected with a rear end vertical fixed cylinder 11 on the bottom layer rack 5 and a horizontal fixed cylinder 13 on the upper layer rack 1, the middle of the second steel wire 9 bypasses the first pulley 2, two ends of the second steel wire are respectively connected with a front end vertical fixed cylinder 14 on the bottom layer rack 5 and a horizontal fixed cylinder 13 on the upper layer rack 1, and the winding directions of the first steel wire 3 and the second steel wire 9 are opposite; the piston rod of the cylinder 6 is connected with the middle frame 4 through a connecting plate 12, and the cylinder 6 can push the middle frame 4 to move in a telescopic mode. A sliding guide rail bearing assembly is arranged between the bottom layer rack 5 and the middle rack 4, and a sliding guide rail bearing assembly is also arranged between the middle rack 4 and the upper layer rack 1.

When the cylinder 6 moves forwards for a small displacement, the middle frame 4 moves forwards, and the stop hook 10 on the upper frame 1 moves forwards for a large displacement due to the pulling action of the first steel wire 3 and the second steel wire 9.

The steel wire type cylinder stroke amplification telescopic mechanism takes the steel wire as the stroke amplification mechanism, has simple structure and large movement stroke, and is suitable for a light-load telescopic platform. The problem of get the material difficulty to the carrier ceramic dish in the polishing production process is solved, the portability of ceramic dish extracting mechanism has been realized, it gets the material for other polishing equipment provides effectual solution.