阅读说明：本技术 一种磁控管陶瓷金属化涂浆控制方法及其应用系统 (Magnetron ceramic metallization coating control method and application system thereof ) 是由 方豪杰 贺亦文 张晓云 曾雄 于 2020-04-25 设计创作，主要内容包括：本发明公开了一种磁控管陶瓷金属化涂浆控制方法,包括以下步骤：将陶瓷体排列成矩形方阵；刮板在丝网上做横向运动；当刮板在丝网上前进一段距离后,计算丝网上剩余的金属化浆液质量；在丝网上剩余的金属化浆液质量不能达到目标的金属层厚度范围之前,控制单元对照目标金属层厚度和剩余金属化浆液质量,对比数据库中的数据,调小刮板与丝网的角度,保证金属层厚度稳定,本发明中的磁控管陶瓷金属化涂浆控制方法可保证磁控管陶瓷金属化层厚度均匀,提高磁控管中电性连接的稳定性,同时本磁控管陶瓷金属化涂浆控制方法对应的磁控管陶瓷金属化涂浆系统设置金属化浆液数据库和刮板角度数据库,运行效率高。(The invention discloses a magnetron ceramic metallization coating control method, which comprises the following steps: arranging the ceramic bodies into a rectangular matrix; the scraper plate transversely moves on the silk screen; after the scraper plate advances for a certain distance on the silk screen, calculating the mass of the residual metalized slurry on the silk screen; before the quality of the residual metalized slurry on the screen can not reach the thickness range of the target metal layer, the control unit compares the thickness of the target metal layer with the quality of the residual metalized slurry, compares data in the database, and adjusts the angle between the scraper and the screen to ensure the stable thickness of the metal layer.)

1. A magnetron ceramic metallization coating control method is characterized by comprising the following steps:

s1: arranging ceramic bodies into a rectangular matrix, wherein the center distance of the ceramic bodies is L;

s2: according to the target thickness of the metal layer of the ceramic body, adjusting the angle of a scraper, placing the metalized slurry on a silk screen, and enabling the scraper to move transversely on the silk screen;

s3: after the scraper plate advances for L distance on the silk screen, calculating the mass of the residual metalized slurry on the silk screen;

s4: before the quality of the residual metallization slurry on the screen can not reach the target metal layer thickness range, the control unit compares the target metal layer thickness with the quality of the residual metallization slurry, compares the data in the database, and adjusts the angle between the scraper and the screen to be small to ensure the stable thickness of the metal layer;

s5: and after the angle of the scraper is adjusted, the scraper continues to linearly advance for an L distance, the mass of the residual metalized slurry on the screen is calculated, then the angle between the scraper and the screen is adjusted, and the operation is circulated in such a way, so that the metalized layer with uniform thickness is finally obtained.

2. A magnetron ceramic metallization paste system based on the magnetron ceramic metallization paste control method of claim 1, characterized by comprising:

the control unit is used for controlling the operation of the whole system;

a calculation unit: the quality of the residual metalized slurry on the silk screen is obtained by calculating the L number of the scraper plate walking and comparing the L number with the data of the metalized slurry database;

metallization slurry database: the device is used for storing the quality data of the metalized slurry in the moving process of the silk screen at different angles between the scraper and the silk screen and the thickness of the metal layer corresponding to the sintered metal layer;

a drive unit: the device is used for driving the scraper to move transversely and adjusting the angle of the scraper;

the induction unit: the device is used for sensing the current of the metal sheet under a specific angle between the scraper and the silk screen;

a comparison unit: the device is used for comparing the current value of the metal sheet in the angle of the existing scraper with the corresponding current value in the angle database;

an angle database: the device is used for storing the induction current values of the metal sheets in the scraper when the scraper and the silk screen are at different angles and positions;

an electromagnetic block: for applying a regularly varying magnetic field to the sensing foil.

3. The magnetron ceramic metallization pasting system of claim 2, wherein the metallization slurry database retrieval method comprises the steps of:

a1, attaching a template material matched with the target metal ring of the ceramic body on the silk screen;

a2 weight percent of G₁The metalized slurry is placed on the template, and the angle between the scraper and the surface of the silk screen is set to be R₁Linearly driving the scraper to move for an L distance on the silk screen;

a3 collecting and metering the residual metallization slurry with the mass G₂；

A4 weight percent of G₂Placing the metalized slurry on a template, keeping the angle between a scraper and the surface of the screen unchanged, linearly driving the scraper to travel for an L distance on the screen, collecting and metering the residual metalized slurry, wherein the mass of the residual metalized slurry is G₃；

A5 repeating the above steps to obtain a scraper and a screen surface R₁Metallization slurry quality group under angle { G₁、G₂、...、G_n}_R1After the sintering, the mixture is sintered,measuring the corresponding set of metal layer thicknesses of the ceramic end faces, { D₁、D₂、...、D_n}_R1；

A6 setting the angle of the scraper and the surface of the silk screen as R₂、R₃、...、R_nAnd repeating the steps A1-A5 to obtain the metalized slurry quality group { G ] under the corresponding angle of the scraper₁、G₂、...、G_n}_R2、{G₁、G₂、...、G_n}_R3、{G₁、G₂、...、G_n}_RnAnd { D₁、D₂、...、D_n}_R2、{D₁、D₂、...、D_n}_R3、...、{D₁、D₂、...、D_n}_Rn；

A7, recording the mass group of the metalized slurry obtained under different angles of the scraper and the surface of the screen and the thickness of the metal layer to form a metalized slurry database.

4. The magnetron ceramic metallization pasting system of claim 3, wherein said metallization slurry database retrieval method further comprises the steps of:

b5 in step A5, find the stable thickness set { D } in the metal layer thickness set, wherein the thickness difference is the target error thickness_x、D_x+1、...、D_x+mSet of stable thickness for metallization slurry quality set { G }_x、G_x+1、...、G_x+mIs a scraper R₁Liquid pressure stabilizing mass group M under angle₁；

B6 in step A6, the same manner as in B5 was used to obtain the liquid pressure stable mass group M at the corresponding angle of the blade₂、M₃、...、M_n；

B7 Stable thickness group and Stable quality group M obtained under different angles of the scraper and the surface of the silk screen₂、M₃、...、M_nAnd recording the data in a metallization slurry database.

5. The magnetron ceramic metallization pasting system of claim 4, wherein the starting point of said L distance is located at a forward section of one metal ring and the ending point of said L distance is located between a rearward end of the respective metal ring and a forward end of the next metal ring.

6. Magnetron ceramic metallization pasting system according to claim 2 or 4, wherein said angle database derived method comprises the steps of:

c1: applying a regular variable magnetic field on the device, arranging a metal sheet in the scraper, and electrically connecting the metal sheet with the current detection unit;

c2: adjusting the angle between the axis of the scraper and the silk screen at the initial position, and recording the current value of the corresponding angle of the metal sheet in the scraper;

c3: and when the scraper passes through every L distance, adjusting the angle between the axis of the scraper and the silk screen, and recording the current value of the corresponding angle of the metal sheet in the scraper.

C4: and forming a database of the angle of the scraper and the angle section of the metal sheet in the scraper.

7. The magnetron ceramic metallization pasting system of claim 5, wherein said varying magnetic field of step C1 is at least two, and two of said magnetic fields are arranged alternately in the transverse direction, and the width of said magnetic field is smaller than the minimum projection value of the metal sheet on the screen.

8. The magnetron ceramic metallization pasting system according to claim 5, characterized by further comprising a mechanical part, wherein the mechanical part comprises a screen (1), a stencil (2) provided on the screen (1), a support member below the screen (1) for supporting the ceramic body (3), and a squeegee (4) above the screen (1), wherein the squeegee (4) is internally provided with a sensing metal sheet (8), and the sensing metal sheet (8) and the squeegee (4) are parallel to the contact surface of the metallization paste;

and a driving component for driving the scraper (4) to move and change the angle is arranged at the upper end of the scraper (4).

9. The magnetron ceramic metallization coating system according to claim 7, wherein the driving assembly comprises a transverse sliding block (5), a longitudinal cylinder (6) and a rotating motor (7), the lower end of the transverse sliding block (5) is fixedly provided with the longitudinal cylinder (6), the lower end of the longitudinal cylinder (6) is fixedly connected with the rotating motor (7), and the output end of the rotating motor (7) is fixedly connected with the upper end of the scraper (4).

Technical Field

The invention relates to the technical field of ceramic metallization, in particular to a magnetron ceramic metallization coating control method and an application system thereof.

Background

A magnetron is an electric vacuum device used to generate microwave energy. Essentially a diode placed in a constant magnetic field. Under the control of the constant magnetic field and the constant electric field which are vertical to each other, electrons in the tube interact with the high-frequency electromagnetic field to convert energy obtained from the constant electric field into microwave energy, thereby achieving the purpose of generating the microwave energy.

The ceramic body in the magnetron is used for electrically connecting a fixed lead and the lead, one end of the ceramic body is provided with a metallization layer for wiring of the lead, and the thickness of the metallization layer influences the quality of the electric connection of a wiring point. The existing ceramic metallization paste coating method which is commonly used is screen printing, in the process of linear screen printing, because of the reduction of the quality of later-stage metallization liquid, less slurry can pass through a leakage hole of a screen stencil, so that the metallization layer of a ceramic body arranged behind is too thin, the requirement of a magnetron ceramic terminal on the thickness of the metallization layer cannot be met, and the connection quality of the magnetron is influenced.

Disclosure of Invention

The invention aims to solve the defects in the prior art, and provides a magnetron ceramic metallization coating control method and an application system thereof, which can ensure the uniformity of the thickness of a magnetron ceramic metallization layer.

In order to achieve the purpose, the invention adopts the following technical scheme:

a magnetron ceramic metallization coating control method comprises the following steps:

s1: arranging ceramic bodies into a rectangular matrix, wherein the center distance of the ceramic bodies is L;

s2: according to the target thickness of the metal layer of the ceramic body, adjusting the angle of a scraper, placing the metalized slurry on a silk screen, and enabling the scraper to move transversely on the silk screen;

s3: after the scraper plate advances for L distance on the silk screen, calculating the mass of the residual metalized slurry on the silk screen;

s4: before the quality of the residual metallization slurry on the screen can not reach the target metal layer thickness range, the control unit compares the target metal layer thickness with the quality of the residual metallization slurry, compares the data in the database, and adjusts the angle between the scraper and the screen to be small to ensure the stable thickness of the metal layer;

s5: and after the angle of the scraper is adjusted, the scraper continues to linearly advance for an L distance, the mass of the residual metalized slurry on the screen is calculated, then the angle between the scraper and the screen is adjusted, and the operation is circulated in such a way, so that the metalized layer with uniform thickness is finally obtained.

The method changes the pressure of the scraper on the metalized slurry on the template by adjusting the angle between the scraper and the silk screen, so that the proper pressure is kept under the condition that the residual quantity of the metalized slurry is gradually reduced, the slurry inlet quantity of the hollow part of the template is uniform, and the thickness uniformity of the sintered ceramic metal layer is kept.

Based on the magnetron ceramic metallization coating control method, the invention also provides a magnetron ceramic metallization coating system, which comprises the following steps:

the control unit is used for controlling the operation of the whole system;

a calculation unit: the quality of the residual metalized slurry on the silk screen is obtained by calculating the L number of the scraper plate walking and comparing the L number with the data of the metalized slurry database;

metallization slurry database: the device is used for storing the quality data of the metalized slurry in the moving process of the silk screen at different angles between the scraper and the silk screen and the thickness of the metal layer corresponding to the sintered metal layer;

a drive unit: the device is used for driving the scraper to move transversely and adjusting the angle of the scraper;

the induction unit: the device is used for sensing the current of the metal sheet under a specific angle between the scraper and the silk screen;

a comparison unit: the device is used for comparing the current value of the metal sheet in the angle of the existing scraper with the corresponding current value in the angle database;

an angle database: the device is used for storing the induction current values of the metal sheets in the scraper when the scraper and the silk screen are at different angles and positions;

an electromagnetic block: for applying a regularly varying magnetic field to the sensing foil.

Further, the method for obtaining the metallization slurry database comprises the following steps:

a1, attaching a template material matched with the target metal ring of the ceramic body on the silk screen;

a2 weight percent of G₁The metalized slurry is placed on the template, and the angle between the scraper and the surface of the silk screen is set to be R₁Linearly driving the scraper to move for an L distance on the silk screen;

a3 collecting and metering the residual metallization slurry with the mass G₂；

A4 weight percent of G₂Placing the metalized slurry on a template, keeping the angle between a scraper and the surface of the screen unchanged, linearly driving the scraper to travel for an L distance on the screen, collecting and metering the residual metalized slurry, wherein the mass of the residual metalized slurry is G₃；

A5 repeating the above steps to obtain a scraper and a screen surface R₁Metallization slurry quality group under angle { G₁、G₂、...、G_n}_R1After sintering, the corresponding set of metal layer thicknesses of the ceramic end faces is measured, { D₁、D₂、...、D_n}_R1；

A6 setting the angle of the scraper and the surface of the silk screen as R₂、R₃、...、R_nAnd repeating the steps A1-A5 to obtain the metalized slurry quality group { G ] under the corresponding angle of the scraper₁、G₂、...、G_n}_R2、{G₁、G₂、...、G_n}_R3、{G₁、G₂、...、G_n}_RnAnd thickness set of metal layers { D₁、D₂、...、D_n}_R2、{D₁、D₂、...、D_n}_R3、...、{D₁、D₂、...、D_n}_Rn；

A7, recording the mass group of the metalized slurry obtained under different angles of the scraper and the surface of the screen and the thickness of the metal layer to form a metalized slurry database.

In order to optimize the data of the metalized slurry database, the method for obtaining the metalized slurry database further comprises the following steps:

b5 in step A5, find the stable thickness set { D } in the metal layer thickness set, wherein the thickness difference is the target error thickness_x、D_x+1、...、D_x+mSet of stable thickness for metallization slurry quality set { G }_x、G_x+1、...、G_x+mIs a scraper R₁Liquid pressure stabilizing mass group M under angle₁；

B6 in step A6, the same manner as in B5 was used to obtain the liquid pressure stable mass group M at the corresponding angle of the blade₂、M₃、...、M_n；

B7 Stable thickness group and Stable quality group M obtained under different angles of the scraper and the surface of the silk screen₂、M₃、...、M_nAnd recording the data in a metallization slurry database.

Through the steps, the stable thickness group and the stable quality group M are stored in the metallization slurry database₂、M₃、...、M_nWhen the mass of the residual slurry on the screen is a numerical value in the stable mass group and the corresponding stable thickness group is the thickness of the target metal layer, the data in the stable mass group of the metalized slurry database can be directly referred for comparison when the screen runs for L distance behind the scraper, the angle of the scraper does not need to be adjusted, and the frequency of scraper adjustment can be reduced.

Preferably, the target error thickness in the step of B5 may be 1 μm to 5 μm.

Preferably, the starting point of the distance L is located at the front section of one metal ring, and the end point of the distance L is located between the rear end of the corresponding metal ring and the front end of the next metal ring, so that the residual slurry on the wire mesh can be conveniently collected.

In order to facilitate angle control, the magnetron ceramic metallization slurry coating system further comprises an angle database, and the method for obtaining the angle database comprises the following steps:

c1: applying a regular variable magnetic field on the device, arranging a metal sheet in the scraper, and electrically connecting the metal sheet with the current detection unit;

c2: adjusting the angle between the axis of the scraper and the silk screen at the initial position, and recording the current value of the corresponding angle of the metal sheet in the scraper;

c3: and when the scraper passes through every L distance, adjusting the angle between the axis of the scraper and the silk screen, and recording the current value of the corresponding angle of the metal sheet in the scraper.

C4: and forming an angle section database of the scraper angle and the induction metal sheet in the scraper.

Preferably, the changing magnetic field in the step C1 is a magnetic field with alternating magnetic poles, the changing magnetic field is at least two kinds of magnetic fields, the two kinds of magnetic fields are transversely and alternately arranged, and the width of the magnetic field is smaller than the minimum projection value of the metal sheet on the screen, so that the induction values of the position and the angle of the induction metal sheet inside the scraper can be accurately obtained.

The magnetron ceramic metallization slurry coating system also comprises a mechanical part, wherein the mechanical part comprises a screen, a template, a support piece and a scraper, the template is arranged on the screen, the support piece is positioned below the screen and used for supporting a ceramic body, the scraper is positioned above the screen, an induction metal sheet is arranged inside the scraper, the induction metal sheet is parallel to the contact surface of the scraper and the metallization slurry, an annular leak hole matched with a metal ring is formed in the template and used for leaking the slurry on the screen to form a metallization layer, and the center distance of the annular leak hole is L distance; and the upper end of the scraper is provided with a driving component for driving the scraper to move and change the angle.

Preferably, the driving assembly comprises a transverse sliding block, a longitudinal cylinder and a rotating motor, the lower end of the transverse sliding block is fixedly provided with the longitudinal cylinder, the lower end of the longitudinal cylinder is fixedly connected with the rotating motor, the output end of the rotating motor is fixedly connected with the upper end of the scraper, the transverse sliding block is provided with a transverse linear driver and used for driving the scraper to move transversely and horizontally, the longitudinal cylinder is used for driving the scraper to move longitudinally up and down, the rotating motor is used for driving the scraper to rotate, and the driving piece drives the scraper to move transversely and adjust the angle.

The working principle of the magnetron ceramic metallization slurry coating system is as follows: the driving assembly drives the lower end of the scraper to contact with the upper surface of the stencil, the driving assembly is located at the initial position of one side of the screen, metalized slurry is placed on the stencil and the screen, then the driving assembly drives the scraper to move transversely, when the scraper moves for an L distance, the calculating unit calculates the mass of the residual metalized slurry on the screen, data of a metalized slurry database are compared, the mass of the residual metalized slurry on the screen is obtained, meanwhile, the sensing unit senses the current of a metal sheet under a specific angle between the scraper and the screen, and the comparing unit compares the current value of the metal sheet in the angle of the existing scraper with the corresponding current value in the angle database to obtain the angle of the scraper;

according to the mass of the residual metalized slurry on the screen and the current angle of the scraper, firstly, a judging subunit in the calculating unit judges whether the mass of the residual metalized slurry is in a metalized slurry mass group M or not, and the corresponding stable thickness group is the thickness of a target metal layer, if so, the scraper continues to advance without adjusting the angle of the scraper; if not, comparing the metalized slurry database, comparing the corresponding residual metalized slurry quality for obtaining the thickness of the target metal layer, finding the angle of the scraper plate which moves for the next L distance, controlling the mechanical part by a controller of the control unit, adjusting the angle of the scraper plate, finding the current value of the induction metal sheet corresponding to the angle and the position of the scraper plate from the angle database by the comparison unit, driving the driving assembly by the driving unit, adjusting the angle of the scraper plate, enabling the current value of the induction metal sheet to be the same as that in the database, and finishing the adjustment of the angle position of the scraper plate.

The squeegee can continue to advance for a distance of L, and the above calculation is repeated so as to obtain a metalized layer with a uniform metal layer thickness.

The invention has the beneficial effects that: the magnetron ceramic metallization paste coating control method ensures that the thickness of a metallization layer at one end of the magnetron ceramic is uniform by adjusting the angle of the scraper in the ceramic body screen printing, wherein in order to reduce the adjustment of the angle of the scraper, a metallization slurry quality group is arranged in a metallization slurry database, thereby reducing the frequency of scraper adjustment in an application system and improving the operation efficiency.

In conclusion, the magnetron ceramic metallization coating control method can ensure the uniform thickness of the magnetron ceramic metallization layer and improve the stability of electrical connection in the magnetron, and meanwhile, the magnetron ceramic metallization coating system corresponding to the magnetron ceramic metallization coating control method is provided with the metallization slurry database and the scraper angle database, so that the operation efficiency is high.

Drawings

FIG. 1 is a diagram of the steps of the magnetron ceramic metallization slurry coating control method;

FIG. 2 is a diagram of the magnetron ceramic metallization coating control system;

FIG. 3 is a diagram of the steps of a method for forming a database of metallization slurries in the magnetron ceramic metallization slurry control system;

FIG. 4 is a diagram of the method steps for stable mass set formation in the metallization slurry database in the magnetron ceramic metallization slurry control system;

FIG. 5 is a diagram of the method steps taken by the angle database in the magnetron ceramic metallization pasting control system;

FIG. 6 is a schematic diagram of the structure of the mechanical part of the magnetron ceramic metallization coating slurry control system;

FIG. 7 is a schematic top view of a stencil in the mechanical portion of the magnetron ceramic metallization paste control system.

In the figure: 1. a wire mesh; 2. a template; 3. a ceramic body; 4. a squeegee; 5. a transverse slide block; 6. a longitudinal cylinder; 7. a rotating electric machine; 8. and sensing the metal sheet.

Detailed Description

The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments.