Automatic frequency measuring equipment for coated quartz chip

文档序号:1453501 发布日期:2020-02-21 浏览:12次 中文

阅读说明:本技术 一种用于镀膜后的石英芯片的频率自动测量设备 (Automatic frequency measuring equipment for coated quartz chip ) 是由 李正善 李宝太 林科荣 吴明 项建辉 宋卫华 林啸 张代红 于 2019-10-23 设计创作,主要内容包括:本发明涉及一种用于镀膜后的石英芯片的频率自动测量设备,包括Y方向滑台、X方向滑台和X、Y方向手动滑台;所述的Y方向滑台用于镀膜后的产品在Y方向移动供给;所述的X方向滑台位于Y方向滑台的上方,该X方向滑台上安装有上下传动机构,所述的上下传动机构的下部安装有校正测量机构和吸嘴机构;所述的Y方向滑台一侧安装有X、Y方向手动滑台。本发明克服了镀膜后石英芯片自身振动频率易受干扰的特性,以及产品小且薄且易碎而不易准确放置的特性。通过此设备能完成产品频率的测量,而且能实现自动化,大批量生产。(The invention relates to automatic frequency measuring equipment for a coated quartz chip, which comprises a Y-direction sliding table, an X-direction sliding table and an X, Y-direction manual sliding table, wherein the Y-direction sliding table is arranged on the top of the X-direction sliding table; the Y-direction sliding table is used for moving and supplying the coated product in the Y direction; the X-direction sliding table is positioned above the Y-direction sliding table, an upper transmission mechanism and a lower transmission mechanism are arranged on the X-direction sliding table, and a correction measuring mechanism and a suction nozzle mechanism are arranged at the lower part of the upper transmission mechanism and the lower transmission mechanism; and an X, Y-direction manual sliding table is installed on one side of the Y-direction sliding table. The invention overcomes the characteristics that the self vibration frequency of the quartz chip is easy to be interfered after film coating and the characteristics that the product is small, thin, fragile and difficult to accurately place. The device can complete the measurement of product frequency and realize automatic and mass production.)

1. The utility model provides a frequency automatic measuring equipment for quartz chip after coating film which characterized in that: comprises a Y-direction sliding table (1), an X-direction sliding table (2) and an X, Y-direction manual sliding table (7);

the Y-direction sliding table (1) is used for moving and supplying the coated products in the Y direction;

the X-direction sliding table (2) is positioned above the Y-direction sliding table (1), an upper transmission mechanism and a lower transmission mechanism (4) are arranged on the X-direction sliding table (2), and a correction measuring mechanism (5) and a suction nozzle mechanism (6) are arranged at the lower part of the upper transmission mechanism and the lower transmission mechanism (4);

y direction slip table (1) one side install X, Y direction manual slip table (7), this X, Y direction manual slip table (7) upper end is provided with test base (16), test base (16) upper end be provided with two test needle (12) side by side, the test cardboard of computer is connected in this test needle (12).

2. The apparatus according to claim 1, wherein the apparatus comprises: y direction slip table (1) including transversely arranged first electric jar and install the first slip table on first electric jar, first slip table on install the tool.

3. The apparatus according to claim 1, wherein the apparatus comprises: the X-direction sliding table (2) comprises a second electric cylinder and a second sliding table, wherein the second electric cylinder is longitudinally arranged above the Y-direction sliding table (1), the second sliding table is arranged on the second electric cylinder, and an upper transmission mechanism and a lower transmission mechanism (4) are arranged on the second sliding table.

4. The apparatus according to claim 3, wherein the apparatus comprises: the upper and lower transmission mechanism (4) comprises a transmission motor (8) and a fixed seat (25), the second sliding table is provided with the fixed seat (25), the front end of the fixed seat (25) is provided with two transmission blocks (20) which can slide up and down side by side, the two transmission blocks (20) are symmetrically arranged, one ends of the two transmission blocks (20) which are opposite are transversely provided with a straight notch (19), the rear end of the fixed seat (25) is provided with the transmission motor (8), the output shaft of the transmission motor (8) is connected with a turntable (18) which is arranged at the front end of the fixed seat (25), the front end of the turntable (18) is eccentrically provided with a transmission bearing (21), the transmission bearing (21) is positioned in the two straight notches (19), the front end of one transmission block (20) is provided with a correction measuring mechanism (5), and the front end of the other transmission block (20) is provided with a suction nozzle mechanism (6), and both sides of the upper part of the fixed seat (25) are provided with a resetting and stretching mechanism which is connected with the transmission block (20) at the same side.

5. The apparatus according to claim 4, wherein the apparatus comprises: the suction nozzle mechanism (6) comprises a suction nozzle body (26) and a suction nozzle thin part (27), the upper end of the suction nozzle body (26) is connected with the corresponding transmission block (20), the lower end of the suction nozzle body (26) is provided with the suction nozzle thin part (27), one side of the lower end of the suction nozzle thin part (27) is provided with a raised step (29), and the raised step (29) is provided with a suction hole (28).

6. The apparatus according to claim 4, wherein the apparatus comprises: the correction measuring mechanism (5) comprises three correction resistors (9), wherein the three correction resistors (9) are respectively a 0 ohm resistor (22), a 50 ohm resistor (23) and an open circuit resistor (24), and the lower ends of the transmission blocks (20) are provided with the 0 ohm resistor (22), the 50 ohm resistor (23) and the open circuit resistor (24) side by side.

7. The apparatus according to claim 6, wherein the apparatus comprises: the transmission block (20) is connected with the correction resistor (9) through the suction nozzle (17).

8. The apparatus according to claim 4, wherein the apparatus comprises: the reset stretching mechanism comprises separation blades (10), connecting blocks (31) and springs (30), the separation blades (10) are installed on the two sides of the upper portion of the fixing seat (25), the connecting blocks (31) which are inverted L-shaped are installed on the outer side of each transmission block (20), and the springs (30) are installed between the connecting blocks (31) and the separation blades (10) on the same side.

9. The apparatus according to claim 1, wherein the apparatus comprises: one side of the upper end of the test base (16) is provided with a unqualified product placing box (15).

10. The apparatus according to claim 1, wherein the apparatus comprises: the test bed (16) upper end be provided with two test wire spliced poles (14) side by side, this test wire spliced pole (14) link to each other with corresponding test needle (12) through PI return circuit (13), test wire spliced pole (14) pass through the test card board of test wire connection computer.

Technical Field

The invention relates to the technical field of quartz chip frequency measuring equipment, in particular to automatic frequency measuring equipment for a coated quartz chip.

Background

Along with the fact that the size of a crystal is smaller and smaller, the precision is higher and higher, and the technological requirements for the coated quartz chip are higher and higher, so that the production requirements cannot be met more and more by the original mode of manually measuring the coated chip, the manufacturing process cannot be met by manual work due to the limitation that manual work can only carry out single test, and the automatic measurement of the frequency of the coated chip can be realized after the equipment is researched and developed so as to meet the production requirements.

Disclosure of Invention

The invention aims to solve the technical problem of providing the automatic frequency measuring equipment for the coated quartz chip, which overcomes the defects that the self vibration frequency of the coated quartz chip is easy to interfere and the product is small, thin, fragile and difficult to accurately place. The device can complete the measurement of product frequency and realize automatic and mass production.

The technical scheme adopted by the invention for solving the technical problems is as follows: the frequency automatic measuring equipment for the coated quartz chip comprises a Y-direction sliding table, an X-direction sliding table and an X, Y-direction manual sliding table;

the Y-direction sliding table is used for moving and supplying the coated product in the Y direction;

the X-direction sliding table is positioned above the Y-direction sliding table, an upper transmission mechanism and a lower transmission mechanism are arranged on the X-direction sliding table, and a correction measuring mechanism and a suction nozzle mechanism are arranged at the lower part of the upper transmission mechanism and the lower transmission mechanism;

y direction slip table one side install X, Y direction manual slip table, this X, Y direction manual slip table upper end is provided with the test base, test base upper end be provided with two test needles side by side, the test cardboard of computer is connected to this test needle.

As a supplement to the technical solution of the present invention, the Y-direction sliding table includes a first electric cylinder arranged transversely and a first sliding table mounted on the first electric cylinder, and a jig is mounted on the first sliding table.

As a supplement to the technical solution of the present invention, the X-direction sliding table includes a second electric cylinder longitudinally arranged above the Y-direction sliding table and a second sliding table mounted on the second electric cylinder, and the second sliding table is mounted with an up-and-down transmission mechanism.

As a supplement to the technical scheme of the invention, the up-down transmission mechanism comprises a transmission motor and a fixed seat, the second sliding table is provided with the fixed seat, the front end of the fixed seat is provided with two transmission blocks capable of sliding up and down side by side, the two transmission blocks are symmetrically arranged, one ends of the two transmission blocks opposite to each other are transversely provided with a straight notch, the rear end of the fixed seat is provided with the transmission motor, an output shaft of the transmission motor is connected with a turntable arranged at the front end of the fixed seat, the front end of the turntable is eccentrically provided with a transmission bearing, the transmission bearing is positioned in the two straight notches, the front end of one transmission block is provided with a correction measurement mechanism, the front end of the other transmission block is provided with a suction nozzle mechanism, two sides of the upper part of the fixed seat are respectively provided with a reset stretching mechanism, and the reset stretching mechanisms are connected with.

As a supplement to the technical scheme of the invention, the suction nozzle mechanism comprises a suction nozzle body and a suction nozzle thin part, the upper end of the suction nozzle body is connected with the corresponding transmission block, the lower end of the suction nozzle body is provided with the suction nozzle thin part, one side of the lower end of the suction nozzle thin part is provided with a raised step, and the raised step is provided with a suction hole.

As a supplement to the technical solution of the present invention, the calibration measuring mechanism includes three calibration resistors, which are an ohmic resistor, and an open-circuit resistor in sequence, and the ohmic resistor, and the open-circuit resistor are arranged at the lower end of the transmission block side by side.

As a supplement to the technical solution of the present invention, the transmission block is connected to the correction resistor through the suction nozzle.

As a supplement to the technical scheme of the invention, the reset stretching mechanism comprises blocking pieces, connecting blocks and springs, the blocking pieces are respectively arranged on two sides of the upper part of the fixed seat, the connecting block in an inverted L shape is respectively arranged on the outer side of each transmission block, and the springs are arranged between the connecting blocks and the blocking pieces on the same side.

As a supplement to the technical scheme of the invention, one side of the upper end of the test base is provided with a unqualified product placing box.

As a supplement to the technical scheme of the invention, the upper end of the test base is provided with two test line connecting columns side by side, the test line connecting columns are connected with corresponding test needles through PI loops, and the test line connecting columns are connected with a test card board of a computer through test lines.

Has the advantages that: the invention relates to automatic frequency measuring equipment for a coated quartz chip, which overcomes the defects that the self vibration frequency of the coated quartz chip is easily interfered and the product is small, thin, fragile and difficult to accurately place. The device can complete the measurement of product frequency and realize automatic and mass production.

Drawings

FIG. 1 is a schematic structural view of the present invention;

FIG. 2 is a schematic structural view of the up-down transmission mechanism according to the present invention;

FIG. 3 is a schematic structural diagram of a test base according to the present invention;

FIG. 4 is a schematic view of a partial structure of the present invention;

FIG. 5 is a schematic view of a portion of the present invention;

FIG. 6 is a schematic view of the construction of a suction nozzle mechanism according to the present invention;

fig. 7 is an enlarged view of a portion of fig. 6 of the present invention.

The figure is as follows: 1. y-direction sliding table, 2 and X-direction sliding table, 3, display, 4, up-down transmission mechanism, 5, correction measurement mechanism, 6, suction nozzle mechanism, 7 and X, Y-direction manual sliding table, 8, transmission motor, 9, correction resistor, 10, baffle, 11, knob, 12, test needle, 13, PI loop, 14, test wire connecting column, 15, unqualified product placing box, 16, test base, 17, suction nozzle, 18, rotary table, 19, I-shaped notch, 20, transmission block, 21, transmission bearing, 22 and 0 ohm resistor, 23 and 50 ohm resistor, 24, open circuit resistor, 25, fixing base, 26, suction nozzle body, 27, suction nozzle detail, 28, suction hole, 29, protruding step, 30, spring, 31, connecting block, 32 and connecting support.

Detailed Description

The invention will be further illustrated with reference to the following specific examples. It should be understood that these examples are for illustrative purposes only and are not intended to limit the scope of the present invention. Further, it should be understood that various changes or modifications of the present invention may be made by those skilled in the art after reading the teaching of the present invention, and such equivalents may fall within the scope of the present invention as defined in the appended claims.

The embodiment of the invention relates to automatic frequency measuring equipment for a coated quartz chip, which comprises a Y-direction sliding table 1, an X-direction sliding table 2 and a X, Y-direction manual sliding table 7, as shown in figures 1-7;

the Y-direction sliding table 1 is used for moving and supplying the coated products in the Y direction;

the X-direction sliding table 2 is positioned above the Y-direction sliding table 1, an upper transmission mechanism 4 and a lower transmission mechanism 4 are arranged on the X-direction sliding table 2, and a correction measuring mechanism 5 and a suction nozzle mechanism 6 are arranged at the lower part of the upper transmission mechanism 4 and the lower transmission mechanism 4;

y direction slip table 1 one side install X, Y direction manual slip table 7, this X, Y direction manual slip table 7 upper end is provided with test base 16, test base 16 upper end be provided with two test needle 12 side by side, the test cardboard of computer is connected to this test needle 12. X, Y the manual sliding table 7 is a standard component, and is commercially available, and the position of the testing base 16X, Y can be adjusted by rotating the two knobs 11 on the side of the manual sliding table, so that the position of the testing pin 12 can be finely adjusted.

And a display 3 is arranged behind the X-direction sliding table 2.

Y direction slip table 1 include the first electric jar of horizontal arrangement and install the first slip table on first electric jar, first slip table on install the tool.

The X-direction sliding table 2 comprises a second electric cylinder and a second sliding table, the second electric cylinder is longitudinally arranged above the Y-direction sliding table 1, the second sliding table is arranged on the second electric cylinder, and an upper transmission mechanism and a lower transmission mechanism 4 are arranged on the second sliding table.

The up-down transmission mechanism 4 comprises a transmission motor 8 and a fixed seat 25, the fixed seat 25 is arranged on the second sliding table, the front end of the fixed seat 25 is arranged with two transmission blocks 20 which can slide up and down side by side, the two transmission blocks 20 are symmetrically arranged, one end of the two transmission blocks 20 opposite to each other is transversely provided with a straight notch 19, the rear end of the fixed seat 25 is provided with a transmission motor 8, the output shaft of the transmission motor 8 is connected with a turntable 18 arranged at the front end of a fixed seat 25, the front end of the turntable 18 is eccentrically provided with a transmission bearing 21, the transmission bearing 21 is positioned in the two linear notches 19, the front end of one transmission block 20 is provided with a correction measuring mechanism 5, the front end of the other transmission block 20 is provided with a suction nozzle mechanism 6, and the two sides of the upper part of the fixed seat 25 are both provided with a resetting and stretching mechanism, and the resetting and stretching mechanism is connected with the transmission block 20 at the same side. The front end of the transmission block 20 is connected with the calibration measuring mechanism 5 or the suction nozzle mechanism 6 through a connecting bracket 32.

The transmission motor 8 drives the turntable 18 to rotate, so that the transmission bearing 21 eccentrically rotates, and the transmission bearing 21 presses the transmission block 20 to slide up and down. By utilizing the positive and negative rotation of the transmission motor 8, one transmission motor 8 can respectively control the suction nozzle mechanism 6 and the correction measuring mechanism 5 to independently move up and down. As shown in fig. 5 and 6, when the driving motor 8 rotates counterclockwise at the origin position, the suction nozzle mechanism 6 for sucking the chip moves downward, the calibration and measurement mechanism 5 is held stationary by the reset and stretching mechanism, and when the driving motor rotates clockwise, the calibration and measurement mechanism 5 moves downward, and the suction nozzle mechanism 6 for sucking the chip is held stationary by the reset and stretching mechanism.

The suction nozzle mechanism 6 comprises a suction nozzle body 26 and a suction nozzle thin part 27, the upper end of the suction nozzle body 26 is connected with the corresponding transmission block 20, the lower end of the suction nozzle body 26 is provided with the suction nozzle thin part 27, one side of the lower end of the suction nozzle thin part 27 is provided with a raised step 29, and the raised step 29 is provided with a suction hole 28. The raised step 29 attracts one end of a product to be tested, but a space for normal vibration of the quartz chip is reserved, so that after the quartz chip is attracted, destructive influence on the vibration characteristic of the chip is avoided, the normal vibration of the coated quartz chip is ensured, and the frequency of the coated chip can be tested. A gap is formed between the raised step 29 and the lower end surface of the suction nozzle thin part 27, and the gap is a space for the quartz chip to normally vibrate.

The correction measuring mechanism 5 comprises three correction resistors 9, the three correction resistors 9 are 0 ohm resistors 22, 50 ohm resistors 23 and open-circuit resistors 24 in sequence, and the lower ends of the transmission blocks 20 are provided with the 0 ohm resistors 22, 50 ohm resistors 23 and the open-circuit resistors 24 side by side.

Three suction nozzles 17 (shown in fig. 4) are designed on the calibration measuring mechanism 5, and 3 calibration resistors 9, namely, a 0 ohm resistor 22, a 50 ohm resistor 23 and an open resistor 24 are respectively mounted on the calibration measuring mechanism. The three fixing parts for correcting the resistor 9 are suction nozzles 17, the suction nozzle 17 for fixing the 0 ohm resistor 22 moves to the test needle 12 through the Y-direction sliding table 1, the 0 ohm resistor 22 is correspondingly connected with the test needle 12 downwards through the upper and lower transmission mechanisms 4, the test needle 12 tests the 0 ohm resistor 22, the first step of correcting the 0 ohm resistor 22 is completed by using a standard instrument correcting method of the measuring system, and the correction of the 50 ohm resistor 23 and the correction of the open-circuit resistor 24 are respectively completed by the same principle. One side of the suction nozzle 17 sucks the correction resistor 9.

The driving block 20 is connected with the correcting resistor 9 through the suction nozzle 17.

The reset stretching mechanism comprises a separation blade 10, a connecting block 31 and a spring 30, the separation blade 10 is installed on the two sides of the upper portion of the fixing seat 25, the connecting block 31 in an inverted L shape is installed on the outer side of each transmission block 20, and the spring 30 is installed between the connecting block 31 and the separation blade 10 on the same side. The inverted L-shaped connecting block 31 is fixed on the outer side of the transmission block 20, the transmission block 20 and the connecting block 31 move downwards, the spring 30 extends, the transmission block 20 moves upwards, the spring 30 returns to the original shape, and the extension and the contraction of the spring 30 have a certain buffering effect on the action of the transmission block 20.

When the transmission bearing 21 mainly acts on one side of the transmission block 2 to move downwards, the other side of the transmission block 2 is kept still by pulling the connecting block 31 by the spring 30, so that the other side of the transmission block 2 cannot fall down, and the transmission blocks 2 on the two sides are reasonably ensured not to be influenced when acting respectively.

And a unqualified product placing box 15 is arranged on one side of the upper end of the test base 16.

The upper end of the test base 16 is provided with two test wire connecting columns 14 side by side, the test wire connecting columns 14 are connected with corresponding test needles 12 through PI loops 13, and the test wire connecting columns 14 are connected with a test card board of a computer through test wires. The test card board is provided with a measurement system for measuring the frequency of the quartz chip, and the measurement system is a set of standard system and belongs to the prior art.

The product to be measured is placed on the jig, the jig is fixed on the Y-direction sliding table 1, the X-direction sliding table 2 moves to the upper side of the jig, the upper transmission mechanism 4 and the lower transmission mechanism 4 drive the suction nozzle mechanism 6 to move downwards to suck the coated quartz chip, the suction nozzle mechanism 6 moves upwards and then moves through the X-direction sliding table 2 to move the suction nozzle sucking the product to be measured to the X, Y-direction manual sliding table 7, the upper transmission mechanism 4 and the lower transmission mechanism 4 drive the suction nozzle mechanism 6 to move downwards, so that two electrode pins of the coated quartz chip are in contact with the test needle 12 on the X, Y-direction manual sliding table 7, the test needle 12 is connected with a test line through a PI loop 13 and transmits signals to a measurement board card of a computer, thereby the frequency measurement of the coated quartz chip is completed, and the unqualified chip after the measurement is completed is placed in the unqualified product placement box 15.

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