阅读说明：本技术 一种管式pecvd工艺镀膜时间监测的预警装置 (Early warning device for monitoring coating time of tubular PECVD (plasma enhanced chemical vapor deposition) process ) 是由 郭丽 赵科巍 张波 张云鹏 吕爱武 于 2019-12-03 设计创作，主要内容包括：本发明涉及管式PECVD工艺镀膜领域。一种管式PECVD工艺镀膜时间监测的预警装置,包括厚度传感器、PLC控制模块、报警装置、显示器,厚度传感器安装在镀膜机内部,通过PLC控制模块设置镀膜厚度和镀膜时间。本发明提供了一种管式PECVD工艺镀膜时间的监测装置,有效的做到能实时监测DLV录入值是否在范围之内。这对工艺配方起到了警示防错作用,减少操作员因误操作而造成镀膜时间异常而使产线不合格率上升。(The invention relates to the field of tubular PECVD (plasma enhanced chemical vapor deposition) process coating. The utility model provides an early warning device of tubular PECVD technology coating film time monitoring, includes thickness sensor, PLC control module, alarm device, display, and thickness sensor installs inside the coating machine, sets up coating film thickness and coating film time through PLC control module. The invention provides a device for monitoring the film coating time of a tubular PECVD (plasma enhanced chemical vapor deposition) process, which can effectively monitor whether a DLV (digital Living Vickers) input value is within a range in real time. The method plays a role in warning and preventing mistakes for the process formula, and reduces the increase of the reject ratio of the production line caused by abnormal coating time due to misoperation of an operator.)

1. The utility model provides an early warning device of tubular PECVD technology coating film time monitoring which characterized in that: comprises a thickness sensor, a PLC control module, an alarm device and a display, wherein the thickness sensor is arranged in a film plating machine, the coating thickness and the coating time are set by the PLC control module, after coating begins, the PLC control module receives the real-time coating thickness transmitted by the thickness sensor in real time and displays the real-time coating thickness by the display, the PLC control module calculates the coating time in real time and displays the coating time by the display, when the real-time coating thickness reaches the set coating thickness and the coating time reaches the set coating time, the PLC control module sends out an alarm through the alarm device to remind the coating to be finished and automatically close the coating, if the real-time coating time reaches the set coating time, and the difference value between the real-time coating thickness and the set coating thickness reaches more than 3% of the set coating thickness, the PLC control module gives an alarm through the alarm device to remind that the coating is unexpected, and the coating is automatically closed.

2. The early warning device for monitoring the coating time of the tubular PECVD process according to claim 1, wherein the early warning device comprises: the PLC control module records the film coating thickness, the film coating time and the film coating thickness when film coating is finished at each time, and when the difference value between the historically set film coating thickness and the currently set film coating thickness is larger than one time of the set film coating thickness or the difference value between the historically set film coating time and the currently set film coating time is larger than one time of the set film coating time, the PLC control module gives an alarm through the alarm device to remind a user of film coating setting errors.

3. The early warning device for monitoring the coating time of the tubular PECVD process according to claim 1, wherein the early warning device comprises: the thickness sensor is a parallel plate capacitance sensor, and the coating thickness is calculated through the change of a capacitor caused by the change of the coating thickness in the parallel plate capacitance sensor during coating.

Technical Field

The invention relates to the field of tubular PECVD (plasma enhanced chemical vapor deposition) process coating.

Background

The deposition time of the coating film in the conventional PECVD process is executed by directly linking a change management file through DLV, and the deposition time of each process furnace tube corresponds to a DLV numerical value. This file is currently entered manually in time. However, the result recorded has no upper and lower limits, and the process has the following problems when in use: there is no DLV error reporting procedure, i.e. there is no threshold range for DLV. When the DLV file is input in error, the method comprises the following steps: the manual input value is larger than the actual value, so that the color of the whole boat process is white; the manual input value is smaller than the actual value, which causes the color of the whole boat process to be darker. A positive blue color, which does not meet the appearance requirements of the semi-finished product standard as a result, is a reject. And interaction prompt and response without early warning of the unmanned aerial vehicle interface. Thus, the detection of an anomaly does not trigger an alarm and the process is immediately terminated. Resulting in abnormal process steps continuing to produce a large number of rejects. And no subsequent related DLV abnormal process monitoring record exists. The subsequent large process history records can observe each process state in real time, and no relevant records bring great inconvenience to searching and analyzing abnormity. Meanwhile, the monitoring is carried out simply through the coating time, and coating failure can be caused once the time is recorded or the gas flow is abnormal.

Disclosure of Invention

The technical problem to be solved by the invention is as follows: the problem of coating failure caused by data entry errors and timing system errors is solved.

The technical scheme adopted by the invention is as follows: an early warning device for monitoring the coating time of a tubular PECVD process comprises a thickness sensor, a PLC control module, an alarm device and a display, wherein the thickness sensor is arranged in a coating machine, the coating thickness and the coating time are set by the PLC control module, after coating is started, the PLC control module receives the real-time coating thickness transmitted by the thickness sensor in real time and displays the real-time coating thickness by the display, the PLC control module calculates the coating time in real time and displays the coating time by the display, when the real-time coating thickness reaches the set coating thickness and the coating time reaches the set coating time, the PLC control module gives an alarm by the alarm device to remind that coating is finished, coating is automatically closed, if the real-time coating time reaches the set coating time and the difference between the real-time coating thickness and the set coating thickness reaches more than 3 percent of the set coating thickness, and the PLC control module gives an, reminding coating accidents and automatically closing the coating.

The PLC control module records the film coating thickness, the film coating time, the film coating completion time and the film coating completion thickness during each film coating.

The thickness sensor is a parallel plate capacitance sensor, and the coating thickness is calculated through the change of a capacitor caused by the change of the coating thickness in the parallel plate capacitance sensor during coating.

The invention has the beneficial effects that: the invention provides a device for monitoring the film coating time of a tubular PECVD (plasma enhanced chemical vapor deposition) process, which can effectively monitor whether a DLV (digital Living Vickers) input value is within a range in real time. The method plays a role in warning and preventing mistakes for the process formula, and reduces the increase of the reject ratio of the production line caused by abnormal coating time due to misoperation of an operator. Meanwhile, the thickness sensor is arranged, so that the coating thickness is directly monitored outside the coating time, problems in coating are found in time, and coating failure is avoided.

Detailed Description

The utility model provides an early warning device of tubular PECVD technology coating film time monitoring, including the thickness sensor, PLC control module, alarm device, a display, the thickness sensor is installed inside the coating machine, at first the operator types coating film thickness and coating film time into PLC control module through the human-computer interaction interface, PLC control module carries out the analysis aassessment to coating film thickness and coating film time of collecting from the human-computer interaction module, by the instruction of its operations such as execution logic operation, timing and arithmetic operation, and can be through digital or analog input and output signal, trigger alarm device and report to the police: when the value of the coating thickness or the coating time exceeds a set value range, triggering a buzzer and a light-emitting diode to give out sound and light alarm, displaying error information in an LCD display screen for an operator to check, sending an instruction by a PLC (programmable logic controller) control module to stop the process of the background host until the operator confirms that the next step is to continue or terminate the process operation, and then sending the instruction to the background host; when the values of the coating thickness and the coating time are within the range of the set values, the process is not affected, and the background host continues to perform the original process. When the real-time coating thickness reaches the set coating thickness and the coating time reaches the set coating time, the PLC control module gives an alarm through the alarm device to remind that the coating is completed, the coating is automatically closed, if the real-time coating time reaches the set coating time, the difference value between the real-time coating thickness and the set coating thickness reaches more than 3% of the set coating thickness, the PLC control module gives an alarm through the alarm device to remind that the coating is unexpected, and the coating is automatically closed. The PLC control module records the film coating thickness, the film coating time and the film coating thickness when film coating is finished at each time, and when the difference value between the historically set film coating thickness and the currently set film coating thickness is larger than one time of the set film coating thickness or the difference value between the historically set film coating time and the currently set film coating time is larger than one time of the set film coating time, the PLC control module gives an alarm through the alarm device to remind a user of film coating setting errors. The thickness sensor is a parallel plate capacitor, and the coating thickness is calculated through the change of the capacitor caused by the change of the coating thickness in the parallel plate capacitor during coating.