阅读说明：本技术 自动稳定籽晶的单晶炉定位机构、单晶炉系统及稳定方法 (Single crystal furnace positioning mechanism capable of automatically stabilizing seed crystal, single crystal furnace system and stabilizing method ) 是由 赵国伟 王林 高润飞 谷守伟 王建平 周泽 杨志 吴树飞 刘振宇 郝瑞军 刘学 于 2020-04-26 设计创作，主要内容包括：本发明提供一种自动稳定籽晶的单晶炉定位机构,包括对称设于单晶炉副室上的定位装置,且对称设置的定位装置可相对移动,用于对籽晶进行定位、稳定；其中,定位装置包括移动装置和移动驱动装置,移动装置与移动驱动装置连接,移动装置设于单晶炉副室上,且移动装置可相对于单晶炉副室移动,对籽晶稳定、定位；移动装置沿着单晶炉副室直径设置。本发明的有益效果是应用于直拉单晶过程中,能够在直拉单晶过程中对籽晶进行稳定,使得籽晶稳定这一过程实现自动进行,实现籽晶的自动稳定,降低了劳动的强度,提高了生产效率。(The invention provides a single crystal furnace positioning mechanism for automatically stabilizing seed crystals, which comprises positioning devices symmetrically arranged on an auxiliary chamber of a single crystal furnace, wherein the symmetrically arranged positioning devices can move relatively and are used for positioning and stabilizing the seed crystals; the positioning device comprises a moving device and a moving driving device, the moving device is connected with the moving driving device, the moving device is arranged on the auxiliary chamber of the single crystal furnace, and the moving device can move relative to the auxiliary chamber of the single crystal furnace to stabilize and position the seed crystal; the moving device is arranged along the diameter of the auxiliary chamber of the single crystal furnace. The invention has the beneficial effects that the invention is applied to the Czochralski single crystal pulling process, and can stabilize the seed crystal in the Czochralski single crystal pulling process, so that the seed crystal stabilizing process is automatically carried out, the automatic stabilization of the seed crystal is realized, the labor intensity is reduced, and the production efficiency is improved.)

1. The utility model provides an automatic stabilize single crystal growing furnace positioning mechanism of seed crystal which characterized in that: the positioning device is symmetrically arranged on the auxiliary chamber of the single crystal furnace, and the symmetrically arranged positioning devices can move relatively and are used for positioning and stabilizing seed crystals; wherein the content of the first and second substances,

the positioning device comprises a moving device and a moving driving device, the moving device is connected with the moving driving device, the moving device is arranged on the auxiliary chamber of the single crystal furnace, and the moving device can move relative to the auxiliary chamber of the single crystal furnace to stabilize and position the seed crystal;

the moving device is arranged along the diameter of the auxiliary chamber of the single crystal furnace.

2. A single crystal furnace positioning mechanism for automatically stabilizing seed crystals as claimed in claim 1, wherein: the moving device comprises a moving piece and a positioning piece, one end of the moving piece is connected with the positioning piece, the other end of the moving piece is connected with the moving driving device, the positioning piece is arranged in the auxiliary chamber of the single crystal furnace, and the moving piece reciprocates under the action of the moving driving device, so that the positioning piece positions and stabilizes the seed crystals.

3. A single crystal furnace positioning mechanism for automatically stabilizing seed crystals as claimed in claim 2, wherein: the setting element includes first setting element and second setting element, the one end of first setting element with the one end of second setting element all with the moving member is located the one end in the single crystal growing furnace subchamber is connected, first setting element with the second setting element all sets up with the weight of connecting on the seed crystal is tangent when carrying out the seed crystal stability.

4. A single crystal furnace positioning mechanism for automatically stabilizing seed crystals as claimed in claim 3, wherein: the first positioning piece and the second positioning piece are arranged in an intersecting mode, and the included angle is smaller than 180 degrees.

5. A single crystal furnace positioning mechanism for automatically stabilizing seed crystals as set forth in any one of claims 2 to 4, wherein: the moving member can be movably arranged on the auxiliary chamber of the single crystal furnace, and is arranged along the diameter of the auxiliary chamber of the single crystal furnace.

6. A single crystal furnace positioning mechanism for automatically stabilizing seed crystals as claimed in claim 5, wherein: the movable driving device is connected with the auxiliary chamber of the single crystal furnace and comprises a first transmission piece, a second transmission piece and a power device, the first transmission piece is connected with the moving piece, the second transmission piece is connected with the power device, and the first transmission piece is in contact fit with the second transmission piece to transmit power.

7. A single crystal furnace positioning mechanism for automatically stabilizing seed crystals as claimed in claim 6, wherein: the first transmission piece is a worm, the second transmission piece is a worm wheel, and the worm is meshed with the worm wheel.

8. The utility model provides an automatic stabilize single crystal growing furnace system of seed crystal which characterized in that: the single crystal furnace comprises a single crystal furnace positioning mechanism for automatically stabilizing seed crystals, a seed crystal lifting device and a control device, wherein the positioning mechanism is arranged at one end of a single crystal furnace auxiliary chamber connected with a single crystal furnace, the seed crystal lifting device is arranged at the top end of the single crystal furnace auxiliary chamber, the positioning mechanism and the seed crystal lifting device are electrically connected with the control device, the seed crystal lifting device lifts the seed crystals under the action of the control device, and the positioning mechanism acts under the action of the control device to position and stabilize the seed crystals.

9. A method for automatically stabilizing seed crystals, characterized by: the method is carried out in the process of whirling of the auxiliary chamber of the single crystal furnace and replacement of the air in the auxiliary chamber by protective gas and comprises the following steps,

the seed crystal descends to a first position under the action of the seed crystal lifting device;

the seed crystal continues to descend and is positioned and stabilized under the action of the positioning mechanism;

after the seed crystals are stabilized, performing stable maintenance according to the stabilization time;

and after the seed crystals are stabilized, the seed crystals rise to a second position under the action of the seed crystal lifting device, and the next procedure is carried out.

10. A method for self-stabilizing a seed crystal as claimed in claim 9, wherein: the seed crystal descends to a first position under the action of the seed crystal lifting device, and the first position is 1100-1300 mm.

11. A method for automatically stabilizing seed crystals as set forth in claim 9 or 10, wherein: the method comprises the steps that the seed crystal descends to a first position under the action of a seed crystal lifting device, the rotating speed of the seed crystal is reduced in the descending process of the seed crystal, and when the seed crystal descends to the first position, the rotating speed of the seed crystal is reduced to a first rotating speed, wherein the first rotating speed is 0 rap/h.

12. A method for self-stabilizing a seed crystal as claimed in claim 11, wherein: and after the seed crystals are stabilized, performing a stabilization maintaining step according to the stabilization time, wherein the stabilization time is 1-3 min.

13. A method for self-stabilizing a seed crystal as claimed in claim 12, wherein: after the seed crystal is stabilized, the seed crystal is lifted to a second position under the action of the seed crystal lifting device, and the second position is 1600-1800mm in the next process step.

Technical Field

The invention belongs to the technical field of Czochralski single crystals, and particularly relates to a single crystal furnace positioning mechanism, a single crystal furnace system and a stabilizing method for automatically stabilizing seed crystals.

Background

At present, the competition in the industry is increasingly violent, the automation degree of single crystal production enterprises is gradually improved, and the industry 2.0 era and the industry 3.0 and 4.0 era are gradually promoted. In the process of pulling the single crystal, the isometric process is automatically controlled, and before pulling the single crystal, the seed crystal needs to be maintained in a stable state, so that the crystal growth process of the seed crystal is ensured not to shake, and the generation of stress is avoided.

At present, the seed crystal is positioned manually, the seed crystal needs to be lowered to the visible position of the auxiliary chamber of the single crystal furnace in the process, the seed crystal is stabilized to a static state by using a tool, and then the seed crystal is manually lifted to a specified position. The process usually needs seven to ten minutes, the time waste is serious, the process is an important reason for influencing the automation process of the single crystal furnace, and due to the relation between the skill and the time and the like of partial operation, the stability and the precision of the seed crystal are difficult to ensure, so that abnormal accidents such as single crystal shaking and the like in the subsequent crystal pulling process can be caused.

Disclosure of Invention

In view of the above problems, the present invention provides a single crystal furnace positioning mechanism, a single crystal furnace system and a stabilizing method for automatically stabilizing seed crystals, which are applied to the czochralski single crystal pulling process, and can stabilize the seed crystals in the czochralski single crystal pulling process, so that the seed crystal stabilizing process is automatically performed, the automatic stabilization of the seed crystals is realized, the labor intensity is reduced, and the production efficiency is improved.

In order to solve the technical problems, the invention adopts the technical scheme that: a single crystal furnace positioning mechanism for automatically stabilizing seed crystals comprises positioning devices symmetrically arranged on an auxiliary chamber of a single crystal furnace, wherein the symmetrically arranged positioning devices can move relatively and are used for positioning and stabilizing the seed crystals; wherein the content of the first and second substances,

the positioning device comprises a moving device and a moving driving device, the moving device is connected with the moving driving device, the moving device is arranged on the auxiliary chamber of the single crystal furnace, and the moving device can move relative to the auxiliary chamber of the single crystal furnace to stabilize and position the seed crystal;

the moving device is arranged along the diameter of the auxiliary chamber of the single crystal furnace.

Specifically, the moving device comprises a moving piece and a positioning piece, one end of the moving piece is connected with the positioning piece, the other end of the moving piece is connected with the moving driving device, the positioning piece is arranged in the auxiliary chamber of the single crystal furnace, and the moving piece reciprocates under the action of the moving driving device, so that the positioning piece positions and stabilizes the seed crystals.

Furthermore, the setting element includes first setting element and second setting element, and the one end of first setting element and the one end of second setting element all are located the one end in the single crystal growing furnace subchamber with the moving member and are connected, and first setting element and second setting element all set up with the weight of connecting on the seed crystal is tangent when carrying out the seed crystal steady.

Furthermore, the first positioning piece and the second positioning piece are arranged in an intersecting manner, and the included angle is smaller than 180 degrees.

Furthermore, the moving member can be movably arranged on the auxiliary chamber of the single crystal furnace, and the moving member is arranged along the diameter of the auxiliary chamber of the single crystal furnace.

Furthermore, the mobile driving device is connected with the auxiliary chamber of the single crystal furnace, the mobile driving device comprises a first transmission piece, a second transmission piece and a power device, the first transmission piece is connected with the moving piece, the second transmission piece is connected with the power device, and the first transmission piece is in contact fit with the second transmission piece to transmit power.

Furthermore, the first transmission piece is a worm, the second transmission piece is a worm wheel, and the worm is meshed with the worm wheel.

The utility model provides an automatic stabilize single crystal growing furnace system of seed crystal, including foretell automatic single crystal growing furnace positioning mechanism of stabilizing the seed crystal, seed crystal elevating gear and controlling means, positioning mechanism locates the one end that single crystal growing furnace subchamber and single crystal growing furnace are connected, seed crystal elevating gear locates the top of single crystal growing furnace subchamber, positioning mechanism all is connected with controlling means electricity with seed crystal elevating gear, seed crystal elevating gear is under controlling means's effect, the seed crystal goes up and down, and positioning mechanism moves under controlling means's effect, fix a position, stabilize the seed crystal.

A method for automatically stabilizing seed crystal in the course of single crystal furnace secondary chamber convolution and secondary chamber air replacement by protective gas includes the following steps,

the seed crystal descends to a first position under the action of the seed crystal lifting device;

the seed crystal continues to descend and is positioned and stabilized under the action of the positioning mechanism;

after the seed crystals are stabilized, performing stable maintenance according to the stabilization time;

after the seed crystal is stabilized, the seed crystal is lifted to a second position under the action of the seed crystal lifting device, and the next procedure is carried out.

Further, the seed crystal is lowered to the first position step under the action of the seed crystal lifting device, and the first position is 1100-1300 mm.

Further, the seed crystal descends to a first position under the action of the seed crystal lifting device, the rotating speed of the seed crystal is reduced in the descending process of the seed crystal, and when the seed crystal descends to the first position, the rotating speed of the seed crystal is reduced to a first rotating speed, wherein the first rotating speed is 0 rap/h.

Further, after the seed crystal is stabilized, the stabilizing step is carried out according to the stabilizing time, and the stabilizing time is 1-3 min.

Further, after the seed crystal is stabilized, the seed crystal is lifted to a second position under the action of the seed crystal lifting device, and the second position is 1600-1800mm in the next process step.

By adopting the technical scheme, the positioning mechanism for realizing the stable automation of the seed crystal and the single crystal furnace system have simple structures and convenient use and are provided with the positioning device, the positioning device is arranged at one end of the single crystal furnace auxiliary chamber connected with the single crystal furnace, the positioning device is provided with the moving device and the moving driving device, so that the moving device can horizontally move under the action of the moving driving device, the moving device is provided with the positioning parts and the positioning devices which are oppositely arranged, the positioning parts which are oppositely arranged can move relative to the axis of the single crystal furnace auxiliary chamber under the action of moving driving the device, and a heavy hammer positioned between the two positioning parts can be stabilized; the positioning piece is provided with a first positioning piece and a second positioning piece which are arranged in an intersecting manner, when the counter weight is stable, the counter weight is arranged in a tangent manner with the counter weight, so that the counter weight is kept static under the action of the positioning device, and further, the seed crystal is kept static, the process of stabilizing the seed crystal is automatically carried out, the automatic stabilizing function of the seed crystal is realized, the labor intensity is reduced, the production efficiency is improved, the automatic rotation of the auxiliary chamber and the next welding process are in seamless connection, the problem that the automation efficiency is reduced due to the fact that manual steps are added in two-step automatic operation is avoided, and the industrial automation progress is accelerated;

adopt this positioning mechanism to carry out seed crystal autostabilization, the autostabilization process of seed crystal can be gone on at the in-process that the subchamber gyrus and subchamber air replacement are argon gas, utilizes the process time completion that the subchamber gyrus and subchamber purified, has shortened invalid man-hour, reaches the purpose that improves the output.

Drawings

FIG. 1 is a schematic structural diagram of an embodiment of the present invention;

FIG. 2 is a schematic structural view of a positioning device for stabilizing a seed crystal according to an embodiment of the present invention;

FIG. 3 is a schematic structural diagram of the positioning device of the embodiment of the present invention when it is opened

In the figure:

1. auxiliary chamber 2 of single crystal furnace, positioning device 3 and heavy hammer

4. Lifting drive device 5, steel wire rope 20 and moving drive device

21. Moving device 210, moving member 211 and positioning member

6. Seed crystal

Detailed Description

The invention is further described with reference to the following figures and specific embodiments.

Fig. 1 shows a schematic structural diagram of an embodiment of the present invention, specifically shows the structure of the embodiment, and the embodiment relates to a single crystal furnace positioning mechanism, a single crystal furnace system and a stabilizing method for automatically stabilizing seed crystals, which are used for positioning and stabilizing seed crystals in the process of pulling single crystals, so as to accurately perform seeding, perform automatic positioning and stabilizing seed crystals, realize automatic stabilization of seed crystals, reduce labor intensity and improve productivity.

A single crystal furnace positioning mechanism for automatically stabilizing seed crystals comprises positioning devices 2 symmetrically arranged on an auxiliary chamber 1 of a single crystal furnace, wherein the symmetrically arranged positioning devices 2 can move relatively and are used for positioning and stabilizing the seed crystals 6, and the symmetrically arranged positioning devices 2 act to position and stabilize the seed crystals 6, so that the subsequent seeding process can be smoothly carried out;

the positioning device 2 comprises a moving device 21 and a moving driving device 20, the moving device 21 is connected with the moving driving device 20, the moving device 21 is arranged on the auxiliary chamber 1 of the single crystal furnace, the moving device 21 can move relative to the auxiliary chamber 1 of the single crystal furnace to stabilize and position the seed crystal 6, the moving device 21 moves under the action of the moving driving device 20 and moves relative to the moving device 21, so that the moving device 21 can move on the auxiliary chamber 1 of the single crystal furnace to position and stabilize the seed crystal 6;

the moving device 21 is arranged along the diameter of the auxiliary chamber 1 of the single crystal furnace, namely, the moving device 21 is arranged in one plane of the auxiliary chamber 1 of the single crystal furnace and is arranged along the diameter in the plane, the moving device 21 is arranged perpendicular to the axis of the auxiliary chamber 1 of the single crystal furnace, so that the moving device 21 is arranged perpendicular to the axes of the seed crystal 6 and the heavy hammer 3 which are connected together, the moving device 21 performs linear reciprocating motion, and the moving device 21 which is arranged oppositely is in contact with the heavy hammer 3 to position and stabilize the heavy hammer 3, thereby being convenient for positioning and stabilizing the seed crystal 6.

Seed crystal 6 is connected with the one end of weight 3, and the other end of weight 3 is connected with seed crystal hoisting device's wire rope 5 for seed crystal 6 rises and descends under seed crystal hoisting device's effect, before seeding, stabilizes seed crystal 6 through positioner 2, shortens 6 stabilization time of seed crystal, realizes that seed crystal 6 stabilizes the automation.

This positioner 2 sets up in pairs, can be a pair of, also can be two pairs, or be many pairs, select according to the actual demand, in this embodiment, positioner 2 is preferred a pair of, and quantity is two, and two 2 symmetries of positioner set up on single crystal growing furnace subchamber 1, and two positioner 2 are located the coplanar, and simultaneously, two positioner 2 are located same straight line setting, make two positioner 2 exert the resistance to 3 both sides of counter weight, and the weight 3 atress is even, avoid weight 3 to rock, so that fix a position seed crystal 6, it is stable.

Specifically, foretell mobile device 21 includes moving member 210 and setting element 211, moving member 210 one end is connected with setting element 211, the other end and the removal drive arrangement 20 of moving member 210 are connected, make setting element 211 carry out reciprocating motion under moving member 210's effect, setting element 211 is located inside single crystal growing furnace subchamber 1, setting element 211 is used for fixing a position seed crystal 6, it is stable, moving member 210 reciprocating motion under the effect of removal drive arrangement 20, and moving member 210 carries out reciprocating linear motion, then setting element 211 carries out reciprocating linear motion, make setting element 211 fix a position seed crystal 6, it is stable.

The moving member 210 is movably arranged on the auxiliary chamber 1 of the single crystal furnace, and the moving member 210 is arranged along the diameter of the auxiliary chamber 1 of the single crystal furnace, that is, the moving member 210 is horizontally arranged on the auxiliary chamber 1 of the single crystal furnace, and the moving member 210 can move along the diameter of the auxiliary chamber 1 of the single crystal furnace, can move close to the axis of the auxiliary chamber 1 of the single crystal furnace, or move away from the axis of the auxiliary chamber 1 of the single crystal furnace, so that the moving member 210 can perform reciprocating linear motion in the auxiliary chamber 1 of the single crystal furnace, and further the positioning member 211 can perform reciprocating linear motion in the auxiliary chamber 1 of the single crystal furnace, and is in contact with or away from the heavy hammer 3, so as to position and stabilize the seed crystal 6, and avoid interference on the straightly pulled single crystal, without affecting the going on straightly pulled single crystal, and when the positioning member 211 is in contact with the heavy hammer 3, the heavy hammer 3 is prevented from shaking, and the seed crystal 6 is positioned and stabilized; when pulling the single crystal, the positioning piece 211 is far away from the heavy hammer 3 and moves to the inner wall of the auxiliary chamber 1 of the single crystal furnace, so as to avoid interference with the pulling action of the single crystal.

The moving member 210 is preferably a rod-shaped structure, and the cross-sectional shape thereof may be circular, oval, square or other shapes, which are selected according to actual requirements and are not specifically required herein. The moving member 210 is horizontally arranged on the subchamber 1 of the single crystal furnace, and one end of the moving member 210 is positioned in the subchamber 1 of the single crystal furnace.

The positioning part 211 comprises a first positioning part and a second positioning part, one end of the first positioning part and one end of the second positioning part are both connected with one end of the moving part 210 in the auxiliary chamber 1 of the single crystal furnace, and the first positioning part and the second positioning part are both tangent to the heavy hammer 3 connected to the seed crystal 6 when the seed crystal 6 is stabilized. This setting element 211 is fixedly installed at the one end that moving member 210 is located single crystal growing furnace subchamber 1, this setting element 211 includes first setting element and second setting element, the one end of first setting element and the this end fixed connection of moving member 210, the one end of second setting element and the this end fixed connection of moving member 210, make first setting element and the equal fixed mounting of second setting element at the this end of moving member 210, fix a position seed crystal 6, when stable, first setting element and second setting element all with the contact of weight 3 that links together with seed crystal 6, increase the resistance to weight 3 from two directions, and because setting element 211 symmetry sets up, quantity is two, weight 3 receives the resistance of four directions, weight 3 atress is even, make the weight 3 of rocking tend towards steadily, after final seed crystal 6 is stable, so that going on of follow-up seeding process.

First locating part and the crossing setting of second locating part, the contained angle is less than 180, that is, the straight line at first locating part place intersects the setting with the straight line at second locating part place, contained angle between the two is less than 180, select according to the diameter of weight 3, make first locating part and second locating part when contacting with weight 3, contact with the lateral wall tangent of weight 3, be convenient for exert the resistance to weight 3, stabilize weight 3, fix a position, and then stabilize seed crystal 6, fix a position.

The first positioning element and the second positioning element can be plate-shaped structures, rod-shaped structures, curved structures or other shapes, and are selected according to actual requirements, which is not specifically required.

The mobile driving device 20 is connected with the auxiliary chamber 1 of the single crystal furnace, the mobile driving device 20 comprises a first transmission piece, a second transmission piece and a power device, the first transmission piece is connected with the moving piece 210, the second transmission piece is connected with the power device, the first transmission piece is in contact fit with the second transmission piece to transmit power, and the power device acts to drive the second transmission piece to act, further drive the first transmission piece to act, and further drive the moving piece 210 to act.

The first transmission part is a worm, the second transmission part is a worm wheel, the worm is meshed with the worm through the worm wheel, power transmission is achieved, the worm is fixedly connected with the moving part 210, namely the worm is installed on the moving part 210 through a bearing and a connecting piece, the worm moves together with the moving part 210, the power device is a motor, the motor is fixedly installed on the outer wall of the single crystal furnace auxiliary chamber 1, the worm wheel is connected with the motor, the worm wheel is located in the inner wall of the single crystal furnace auxiliary chamber 1, the rotation of the motor drives the rotation of the worm wheel, and reciprocating motion of the moving part 210 is achieved through the meshing of the worm wheel and the worm. In the process of installing the motor, the worm wheel and the worm, the connection part of the auxiliary chamber 1 of the single crystal furnace and the worm wheel, the worm and the motor is sealed, and the gas in the auxiliary chamber 1 of the single crystal furnace is prevented from leaking.

The motor rotates, it rotates to drive the worm wheel, the worm wheel meshes with the worm mutually, the worm removes, it is reciprocating motion to drive moving member 210, make the axis of setting element 211 relative single crystal growing furnace subchamber 1 carry out and be close to or keep away from the motion, when seed crystal 6 removes to this position, the axis that setting element 211 is close to single crystal growing furnace subchamber 1 removes, make setting element 211 and the weight 3 contact of linking together with seed crystal 6, exert the resistance to weight 3, make weight 3 no longer rock, stabilize seed crystal 6, the location, after seed crystal 6 is stable, setting element 211 moves to the axis of keeping away from single crystal growing furnace subchamber 1, resume the normal position, so that carry out follow-up seeding process, do not produce the motion with the czochralski single crystal and interfere.

The utility model provides an automatic stabilize single crystal growing furnace system of seed crystal, including foretell automatic single crystal growing furnace positioning mechanism of stabilizing the seed crystal, seed crystal elevating gear and controlling means, positioning mechanism locates the one end that single crystal growing furnace subchamber 1 is connected with the single crystal growing furnace, seed crystal elevating gear locates the top of single crystal growing furnace subchamber 1, positioning mechanism all is connected with controlling means electricity with seed crystal elevating gear, seed crystal elevating gear is under controlling means's effect, seed crystal 6 goes up and down, and positioning mechanism moves under controlling means's effect, fix a position, stabilize seed crystal 6.

The seed crystal lifting device comprises a lifting driving device 4 and a seed crystal connecting piece, the lifting driving device 4 is fixedly installed at the top end of the auxiliary chamber 1 of the single crystal furnace, one end of the lifting driving device 4 is connected with the seed crystal connecting piece, and the other end of the seed crystal connecting piece is connected with the seed crystal 6, so that the seed crystal 6 rises or falls under the action of the lifting driving device 4. This lift drive 4 is the motor, and the seed crystal connecting piece includes wire rope 5 and weight 3, when the installation, is connected wire rope 5's one end and the main shaft of lift drive 4's motor, and wire rope 5's the other end is connected with weight 3, and weight 3 is connected with seed crystal 6, through the rotation of motor, drives wire rope 5 and reciprocates, and then makes seed crystal 6 reciprocate.

The control device is preferably a PLC controller, a preset program is arranged in the control device, the control device is electrically connected with the motor of the lifting drive device 4, the action of the motor is controlled according to the preset program, the rising and the falling of the seed crystal are further controlled, meanwhile, the motor of the power device of the positioning mechanism is electrically connected with the control device, and the control device controls the action of the motor and controls the movement of the moving part 210.

A method for automatically stabilizing seed crystal is carried out in the process of rotating a sub-chamber 1 of a single crystal furnace and replacing air in the sub-chamber with protective gas, the protective gas is inert gas, preferably argon, and the stabilizing and positioning of the seed crystal are completed by utilizing the process time of the sub-chamber rotating and the sub-chamber purifying, thereby shortening the ineffective working time and achieving the purpose of improving the yield.

The method for automatically stabilizing the seed crystal comprises the following steps,

the seed crystal 6 descends to a first position under the action of the seed crystal lifting device: mounting a seed crystal 6 on a heavy hammer 3, rotating an auxiliary chamber 1 of the single crystal furnace, performing air replacement after the auxiliary chamber rotates, and replacing air in the single crystal furnace with protective gas so as to facilitate the subsequent straight pulling of the single crystal to be smoothly performed and reduce the doping of impurities; during the process of the rotation of the sub-chamber and the replacement of the air in the sub-chamber with the protective gas, the seed crystal 6 is lowered by the lifting driving device 4 to a first position, which is 1100-1300mm, and is selected according to the actual requirement, preferably, in the embodiment, the first position is 1250 mm. Under the first position, weight 3 is in positioning mechanism's effect scope completely, avoids positioning mechanism not to act on the assigned position, influences positioning accuracy, and under positioning mechanism's effect, seed crystal 6 stabilizes, accomplishes stable work.

The seed crystal 6 descends to a first position step under the action of a seed crystal lifting device, the rotating speed of the seed crystal 6 is reduced in the descending process of the seed crystal 6, when the seed crystal 6 descends to a first position, the rotating speed of the seed crystal 6 is reduced to a first rotating speed, wherein the first rotating speed is 0rap/h, when the rotating speed of the seed crystal 6 is reduced to 0rap/h, the seed crystal 6 is positioned in the action range of a positioning mechanism, the axis of a heavy hammer 3 is coincident with the axis of a single crystal furnace auxiliary chamber 1, the heavy hammer 3 is positioned between positioning devices 2 symmetrically arranged on the heavy hammer furnace auxiliary chamber 1, the positioning mechanism acts, a positioning piece 211 exerts resistance on the heavy hammer 3 from two sides to avoid shaking of the heavy hammer 3, so that the heavy hammer 3 tends to be stable, namely, the seed crystal 6 is positioned and stabilized under the action of the positioning mechanism, the positioning device 2 acts, a control device controls the action of a motor of a power device, and a motor spindle rotates, the worm wheel that drives the second driving medium rotates, because worm wheel and worm meshing for the worm removes towards the axis direction of single crystal growing furnace subchamber 1, and the first setting element and the second setting element of setting element 211 all contact with the lateral wall of weight 3 is tangent, and first setting element and second setting element all closely laminate with the lateral wall of weight 3, make weight 3 under the effect of the setting element 211 of relative both sides, progressively tend to stably, no longer rock, guarantee the stability and precision of seed crystal 6.

After the seed crystal 6 is stabilized, the stable maintenance is carried out according to the stable time: at this time, the positioning mechanism extends to a specified position, the seed crystal 6 and the weight 3 are kept in a stable state under the mechanical action of the positioning piece 211, the positioning mechanism is kept in a static state, and the static holding is carried out according to the stable time, so that the problem that the stability precision of the seed crystal 6 is poor due to short time is avoided, wherein the stable time is 1-3min, and preferably, the stable time is 2 min.

After the seed crystal 6 is stabilized, the seed crystal 6 is lifted to a second position under the action of the seed crystal lifting device, and the next procedure is carried out, wherein the second position is 1600-1800mm, preferably, the second position is 1750mm, so that the subsequent seeding procedure can be normally carried out.

The method for automatically stabilizing the seed crystal uses an automatic program for control, realizes automatic descending, automatic positioning and automatic ascending of the seed crystal, completes the whole process in the purification process of the auxiliary chamber, saves about 10 minutes of labor hour compared with manual seed crystal stabilization, and can increase the yield by more than 20kg per month according to 30 times of single furnace per month stabilization. The realization of automatic stabilization of the seed crystal lays a solid foundation for the automation of the whole crystal pulling process. By adopting the technical scheme, the positioning mechanism for realizing the stable automation of the seed crystal and the single crystal furnace system have simple structures and convenient use and are provided with the positioning device, the positioning device is arranged at one end of the single crystal furnace auxiliary chamber connected with the single crystal furnace, the positioning device is provided with the moving device and the moving driving device, so that the moving device can horizontally move under the action of the moving driving device, the moving device is provided with the positioning parts and the positioning devices which are oppositely arranged, the positioning parts which are oppositely arranged can move relative to the axis of the single crystal furnace auxiliary chamber under the action of moving driving the device, and a heavy hammer positioned between the two positioning parts can be stabilized; the positioning piece is provided with a first positioning piece and a second positioning piece which are arranged in an intersecting manner, when the counter weight is stable, the counter weight is arranged in a tangent manner with the counter weight, so that the counter weight is kept static under the action of the positioning device, and further, the seed crystal is kept static, the process of stabilizing the seed crystal is automatically carried out, the automatic stabilizing function of the seed crystal is realized, the labor intensity is reduced, the production efficiency is improved, the automatic rotation of the auxiliary chamber and the next welding process are in seamless connection, the problem that the automation efficiency is reduced due to the fact that manual steps are added in two-step automatic operation is avoided, and the industrial automation progress is accelerated;

adopt this positioning mechanism to carry out seed crystal autostabilization, the autostabilization process of seed crystal can be gone on at the in-process that the subchamber gyrus and subchamber air replacement are argon gas, utilizes the process time completion that the subchamber gyrus and subchamber purified, has shortened invalid man-hour, reaches the purpose that improves the output.

The embodiments of the present invention have been described in detail, but the description is only for the preferred embodiments of the present invention and should not be construed as limiting the scope of the present invention. All equivalent changes and modifications made within the scope of the present invention shall fall within the scope of the present invention.